Deposition of SiOx barrier films by O2/TMDSO RF-PECVD

This paper reports that the SiOx barrier films are deposited on polyethylene terephthalate substrate by plasmaenhanced chemical vapour deposition （PECVD） for the application of transparent barrier packaging. The variations of 02/Tetramethyldisiloxane （TMDSO） ratio and input power in radio frequency （RF） plasma are carried out to optimize barrier properties of the SiOx coated film. The properties of the coatings are characterized by Fourier transform infrared, water vapour transmission rate （WVTR）, oxygen transmission rate （OTR）, and atomic force microscopy analysers. It is found that the 02/TMDSO ratio exceeding 2：1 and the input power over 200 W yield SiOx films with low carbon contents which can be good to the barrier （WVTR and OTR） properties of the SiOx coatings. Also, the film properties not only depend on oxygen concentration of the inlet gas mixtures and input power, but also relate to the surface morphology of the coating.

Ellipsometric Study of SiOx Thin Films by Thermal Evaporation

This paper presents a study of amorphous SiOx thin films by means of Variable Angle Spectroscopic Ellipsometry (VASE) technique. Tauc Lorentz, Lorentz and Cauchy models have been used to obtain physical thickness and complex refractive index (n and k) from experimental data. In order to obtain a wide range to x stoichiometry values, the films were prepared by vacuum thermal evaporation of SiO on glass substrates, under different and controlled deposition conditions.

Quantitative measurement of local elasticity of SiO_x film by atomic force acoustic microscopy

In this paper the elastic properties of SiOx film are investigated quantitatively for local fixed point and qualitatively for overall area by atomic force acoustic microscopy （AFAM） in which the sample is vibrated at the ultrasonic frequency while the sample surface is touched and scanned with the tip contacting the sample respectively for fixed point and continuous measurements. The SiOx films on the silicon wafers are prepared by the plasma enhanced chemical vapour deposition （PECVD）, The local contact stiffness of the tip-SiOx film is calculated from the contact resonance spectrum measured with the atomic force acoustic microscopy. Using the reference approach, indentation modulus of SiOx film for fixed point is obtained. The images of cantilever amplitude are also visualized and analysed when the SiOx surface is excited at a fixed frequency. The results show that the acoustic amplitude images can reflect the elastic properties of the sample.

Deposition of SiO_x on Metal Surface with a DBD Plasma Gun at Atmospheric Pressure for Corrosion Prevention

In this study, SiOx films were deposited by a dielectric barrier discharge （DBD） plasma gun at an atmospheric pressure. The relationship of the film structures with plasma powers was investigated by Fourier transform infrared spectroscopy （FTIR）, and scanning electron microscope （SEM）. It was shown that an uniform and cross-linking structure film was formed by the DBD gun. As an application, the SiOx films were deposited on a carbon steel surface for the anti-corrosion purpose. The experiment was carried out in a 0.1 M NaCl solution. It was found that a very good anti-corrosive property was obtained, i.e., the corrosion rate was decreased c.a. 15 times in 5% NaCl solution compared to the non-SiOx coated steel, as detected by the potentiodynamic polarization measurement.