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The study of a new n/p tunnel recombination junction and its application in a-Si:H/μc-Si:H tandem solar cells 被引量:6
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作者 李贵君 侯国付 +5 位作者 韩晓艳 袁育洁 魏长春 孙建 赵颖 耿新华 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第4期1674-1678,共5页
This paper reports that a double N layer (a-Si:H/μc-Si:H) is used to substitute the single microcrystalline silicon n layer (n-μc-Si:H) in n/p tunnel recombination junction between subcells in a-Si:H/μc-Si... This paper reports that a double N layer (a-Si:H/μc-Si:H) is used to substitute the single microcrystalline silicon n layer (n-μc-Si:H) in n/p tunnel recombination junction between subcells in a-Si:H/μc-Si:H tandem solar cells. The electrical transport and optical properties of these tunnel recombination junctions are investigated by current voltage measurement and transmission measurement. The new n/p tunnel recombination junction shows a better ohmic contact. In addition, the n/p interface is exposed to the air to examine the effect of oxidation on the tunnel recombination junction performance. The open circuit voltage and FF of a-Si:H/μc-Si:H tandem solar cell are all improved and the current leakage of the subcells can be effectively prevented efficiently when the new n/p junction is implemented as tunnel recombination junction. 展开更多
关键词 double N layer tunnel recombination junction oxidation interface a-Si:H/μc-si:H tan-dem solar cell
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Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation 被引量:1
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作者 汪建强 高华 +2 位作者 张剑 孟凡英 叶庆好 《Journal of Semiconductors》 EI CAS CSCD 2012年第3期8-14,共7页
We investigate the recombination mechanism in an a-Si/c-Si interface,and analyze the key factors that influence the interface passivation quality,such as Q_s,δ_p/δ_n and D_(it).The polarity of the dielectric film ... We investigate the recombination mechanism in an a-Si/c-Si interface,and analyze the key factors that influence the interface passivation quality,such as Q_s,δ_p/δ_n and D_(it).The polarity of the dielectric film is very important to the illustration level dependent passivation quality;when nδ_n = pδ_p and the defect level E_t equal to E_i(c-Si),the defect states are the most effective recombination center,AFORS-HET simulation and analysis indicate that emitter doping and a-Si/c-Si band offset modulation are effective in depleting or accumulating one charged carrier.Interface states(D_(it)) severely deteriorate V_(oc) compared with J_(sc) for a-Si/c-Si HJ cell performance when D_(it) is over 1×10^(10) cm^(-2)·eV^(-1).For a c-Si(P)/a-Si(P~+) structure,φ_(BSF) in c-Si andφ_0 in a-Si have different performances in optimization contact resistance and c-Si(P)/a-Si(P~+) interface recombination. 展开更多
关键词 a-Si/c-si interface a-Si emitter property interface defect states
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纳米SiO_x/聚乙烯复合介质强场电导的预电应力效应研究 被引量:18
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作者 陈炯 尹毅 +2 位作者 李喆 肖登明 党智敏 《中国电机工程学报》 EI CSCD 北大核心 2006年第7期146-151,共6页
测量纳米SiOx/低密度聚乙烯(LDPE)复合介质在强场下的电导特性时,发现这种介质具有预电应力效应,即复合e)dtysgye介质经相同极性的较高直流电场(8×107V/m)预压作用2h后,直流电导比预压前的小,并随着纳米SiOx浓度的增加,这种预电应... 测量纳米SiOx/低密度聚乙烯(LDPE)复合介质在强场下的电导特性时,发现这种介质具有预电应力效应,即复合e)dtysgye介质经相同极性的较高直流电场(8×107V/m)预压作用2h后,直流电导比预压前的小,并随着纳米SiOx浓度的增加,这种预电应力效应越明显。通过透射电子显微镜(TEM)研究了纳米SiOx与LDPE之间的界面状态及纳米SiOx在LDPE中的分散形态;X射线衍射(XRD)结果表明纳米SiOx影响LDPE的结晶形态;另外运用傅立叶红外光谱(FTIR)研究了纳米SiOx与LDPE分子链间的相互作用。文章最后结合上述微观测试结果解释了纳米SiOx的添加所引起的LDPE强场下的预电应力效应。 展开更多
关键词 电工 预电应力效应 界面 纳米复合材料 强场电导 低密度聚乙烯 纳米SiQx
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a-Si/μc-Si叠层电池中间层材料SiOx:H制备研究 被引量:2
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作者 岳强 张晓丹 +7 位作者 张鹤 郑新霞 魏长春 孙建 张建军 耿新华 熊绍珍 赵颖 《光电子.激光》 EI CAS CSCD 北大核心 2010年第2期231-234,共4页
为提高a-Si/μc-Si叠层太阳电池的效率,采用射频等离子体增强化学气相沉积(RF-PECVD)技术,制备了系列n型掺磷硅氧(SiOx:H)薄膜作为中间层,研究了CO2/Si H4气体流量比、沉积功率和PH3掺杂浓度等工艺参数对材料光电特性的影响,获得了折射... 为提高a-Si/μc-Si叠层太阳电池的效率,采用射频等离子体增强化学气相沉积(RF-PECVD)技术,制备了系列n型掺磷硅氧(SiOx:H)薄膜作为中间层,研究了CO2/Si H4气体流量比、沉积功率和PH3掺杂浓度等工艺参数对材料光电特性的影响,获得了折射率、电导率和禁带宽度能够在较大范围内调控的SiOx:H薄膜。 展开更多
关键词 a-Si/μc-si叠层太阳电池 中间反射层 siox:H薄膜
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利用ICPCVD方法在GaN上沉积氧化硅薄膜的特性
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作者 刘秀娟 张燕 李向阳 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2015年第1期23-28,共6页
使用感应耦合等离子体化学气相沉积(Inductively coupled plasma chemical vapor deposition,ICPCVD)方法在GaN上沉积SiOx薄膜,生长参数中采用不同RF功率,研究RF功率对薄膜物理性能和电学性能的影响.结果发现,随着RF功率增大,薄膜应力增... 使用感应耦合等离子体化学气相沉积(Inductively coupled plasma chemical vapor deposition,ICPCVD)方法在GaN上沉积SiOx薄膜,生长参数中采用不同RF功率,研究RF功率对薄膜物理性能和电学性能的影响.结果发现,随着RF功率增大,薄膜应力增大,表面粗糙度减小,薄膜致密度增大.选择最优的RF功率参数,制作了SiOx/nGaN金属-绝缘体-半导体(metal-insulator-semiconductor,MIS)器件,结果得到薄膜漏电流密度在外加偏压为90V时小于1×10-7A/cm2,SiOx/n-GaN界面态密度为2.4×1010eV-1cm-2.表明利用ICPCVD低温沉积的SiOx-GaN界面态密度低,薄膜绝缘性能良好. 展开更多
关键词 ICP-CVD siox 薄膜应力 表面粗糙度 界面态密度
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Improved performance of microcrystalline silicon solar cell with graded-band-gap silicon oxide buffer layer
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作者 史振亮 季云 +5 位作者 于威 杨彦斌 丛日东 陈英娟 李晓苇 傅广生 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第7期44-47,共4页
Microcrystalline silicon(μc-Si:H) solar cell with graded band gap microcrystalline silicon oxide(μc-SiOx:H) buffer layer is prepared by plasma enhanced chemical vapor deposition and exhibits improved performan... Microcrystalline silicon(μc-Si:H) solar cell with graded band gap microcrystalline silicon oxide(μc-SiOx:H) buffer layer is prepared by plasma enhanced chemical vapor deposition and exhibits improved performance compared with the cell without it. The buffer layer moderates the band gap mismatch by reducing the barrier of the p/i interface, which promotes the nucleation of the i-layer and effectively eliminates the incubation layer, and then enhances the collection efficiency of the cell in the short wavelength region of the spectrum. The p/i interface defect density also decreases from 2.2 × 10^12cm^-2to 5.0 × 10^11cm^-2. This graded buffer layer allows to simplify the deposition process for the μc-Si:H solar cell application. 展开更多
关键词 graded siox buffer layer p/i interface solar cells
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Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiO_x/Si system
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作者 高明 杜汇伟 +3 位作者 杨洁 赵磊 徐静 马忠权 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第4期261-269,共9页
The damage on the atomic bonding and electronic state in a SiO_x(1.4-2.3 nm)/c-Si(150 μm) interface has been investigated.This occurred in the process of depositing indium tin oxide(ITO) film onto the silicon s... The damage on the atomic bonding and electronic state in a SiO_x(1.4-2.3 nm)/c-Si(150 μm) interface has been investigated.This occurred in the process of depositing indium tin oxide(ITO) film onto the silicon substrate by magnetron sputtering.We observe that this damage is caused by energetic particles produced in the plasma(atoms,ions,and UV light).The passivation quality and the variation on interface states of the SiO_x/c-Si system were mainly studied by using effective minority carrier lifetime(τ_(eff)) measurement as a potential evaluation.The results showed that the samples' τ_(eff)was reduced by more than 90%after ITO formation,declined from 107 μs to 5 μs.Following vacuum annealing at 200 ℃,the τ_(eff) can be restored to 30 μs.The components of Si to O bonding states at the SiO_x/c-Si interface were analyzed by x-ray photoelectron spectroscopy(XPS) coupled with depth profiling.The amorphous phase of the SiO_x layer and the "atomistic interleaving structure" at the SiO_x/c-Si interface was observed by a transmission electron microscope(TEM).The chemical configuration of the Si-O fraction within the intermediate region is the main reason for inducing the variation of Si dangling bonds(or interface states) and effective minority carrier lifetime.After an appropriate annealing,the reduction of the Si dangling bonds between SiO_x and near the c-Si surface is helpful to improve the passivation effect. 展开更多
关键词 sputtered damage SiO_x/c-si interface effective minority carrier lifetime XPS
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Performance improvement of c-Si solar cell by a combination of SiNx/SiOx passivation and double P-diffusion gettering treatment
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作者 Xiaoyu Chen Youwen Zhao +5 位作者 Zhiyuan Dong Guiying Shen Yongbiao Bai Jingming Liu Hui Xie Jiangbian He 《Journal of Semiconductors》 EI CAS CSCD 2017年第11期60-65,共6页
SiNx/SiOx passivation and double side P-diffusion gettering treatment have been used for the fabrication of c-Si solar cells. The solar cells fabricated have high open circuit voltage and short circuit current after t... SiNx/SiOx passivation and double side P-diffusion gettering treatment have been used for the fabrication of c-Si solar cells. The solar cells fabricated have high open circuit voltage and short circuit current after the double P-diffusion treatment. In addition to better surface passivation effect, SiNx/SiOx layer has lower reflectivity in long wavelength range than conventional SiNx film. As a consequence, such solar cells exhibit higher conversion efficiency and better internal quantum efficiency, compared with conventional c-Si solar cells. 展开更多
关键词 c-si solar cell double diffusion SiNx/siox passivation
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磁控溅射工艺引起硅表面超薄钝化层电子结构变化 被引量:2
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作者 高明 杜汇伟 +3 位作者 杨洁 陈姝敏 徐静 马忠权 《科学通报》 EI CAS CSCD 北大核心 2015年第19期1841-1848,共8页
通过真空热退火、有效少子寿命(πeff)的测量(利用微波光电导衰减μ-PCD法)和表面-界面光电子能谱分析(X-ray Photoemission Spectroscopy,XPS)等方法,研究了磁控溅射沉积ITO(Indium Tin Oxide)薄膜过程中,等离子体中载能粒子... 通过真空热退火、有效少子寿命(πeff)的测量(利用微波光电导衰减μ-PCD法)和表面-界面光电子能谱分析(X-ray Photoemission Spectroscopy,XPS)等方法,研究了磁控溅射沉积ITO(Indium Tin Oxide)薄膜过程中,等离子体中载能粒子束(原子/离子和紫外辉光)对超薄Si Ox(1.5~2.0 nm)/c-Si(150μm)样品界面区的原子成键和电子态的损伤问题,并就ITO薄膜的硅表面电子态有效钝化功能进行了研究.结果表明,溅射沉积ITO薄膜材料后该样品的πeff衰减了90%以上,从105μs减少到5μs.但是,适当退火条件可以恢复少子寿命到30μs,表明Si Ox/c-Si之间界面态的降低有助于改善氧化层的钝化效果.ITO薄膜和c-Si之间Si Ox薄层的形成和它的结构随退火温度的变化,是导致界面态、少子寿命变化的主要原因,且得到了XPS深度剖析分析的确认. 展开更多
关键词 溅射损伤 siox/c-si界面 μ-PCD 有效少子寿命 真空退火 XPS
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