Numerical Simulation of Heat Transfer Process and Heat Loss Analysis in Siemens CVD Reduction Furnaces

The modified Siemens method is the dominant process for the production of polysilicon,yet it is characterised by high energy consumption.Two models of laboratory-grade Siemens reduction furnace and 12 pairs of rods industrial-grade Siemens chemical vapor deposition(CVD)reduction furnace were established,and the effects of factors such as the diameter of silicon rods,the surface temperature of silicon rods,the air inlet velocity and temperature on the heat transfer process inside the reduction furnace were investigated by numerical simulation.The results show that the convective and radiant heat losses in the furnace increased with the diameter of the silicon rods.Furthermore,the radiant heat loss of the inner and outer rings of silicon rods was inconsistent for the industrial-grade reduction furnace.As the surface temperature of the silicon rods increases,the convective heat loss in the furnace increases,while the radiative heat loss remains relatively constant.When the inlet temperature and inlet velocity increase,the convective heat loss decreases,while the radiant heat loss remains relatively constant.Furthermore,the furnace wall surface emissivity increases,resulting in a significant increase in the amount of radiant heat loss in the furnace.In practice,this can be mitigated by polishing or adding coatings to reduce the furnace wall surface emissivity.