Spatial light modulation for femtosecond laser manufacturing:Current developments and challenges

Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various applications.It enables multidimensional and dynamic modulation of the laser beam,which significantly improves the processing efficiency,accuracy,and flexibility,and presents wider prospects over traditional mechanical technologies for machining three-dimensional,hard,brittle,or transparent materials.In this review,we introduce:(1)The role of spatial light modulation technology in the development of femtosecond laser manufacturing;(2)the structured light generated by spatial light modulation and its generation methods;and(3)representative applications of spatial-light-modulated femtosecond laser manufacturing,including aberration correction,parallel processing,focal field engineering,and polarization control.Finally,we summarize the present challenges in the field and possible future research.

A high-contrast imaging coronagraph for segmented-mirror large aperture telescopes using a spatial light modulator

The primary mirrors of current and future large telescopes always employ a segmented mirror configuration.The small but non-negligible gaps between neighboring segments cause additional diffraction,which restricts the performance of high-contrast coronagraph.To solve this problem,we propose a coronagraph system based on a single liquid crystal spatial light modulator(SLM).This spatial light modulator is used for amplitude apodization,and its feasibility and potential performance are demonstrated using a laboratory setup using the stochastic parallel gradient descent(SPGD)algorithm to control the spatial light modulator,which is based on point spread function(PSF)sensing and evaluation and optimized for maximum contrast in the discovery working area as a merit function.The system delivers a contrast in the order of 10−6,and shows excellent potential to be used in current and future large aperture telescopes,both on the ground and in space.

Ultra-broadband spatial light modulation with dual-resonance coupled epsilon-near-zero materials

It has been found that the dielectric constants of transparent conductive oxides(TCOs)can be adjusted in an extremely large range by tuning the carrier density.Due to the remarkable light confinement property of the epsilon-near-zero(ENZ)effect of TCOs,it has attracted extensive interests of light modulation.However,the operation wavelength bandwidth is usually limited by optical resonance that is applied to enhance the light-TCOs interaction.In this work,a dual-resonance light coupling scheme is proposed to expand the modulation depth-bandwidth product with almost one order-of-magnitude improvement.In a metallic subwavelength grating structure with deep trenches backed by a ground plane,the ENZ mode can be coupled to both magnetic resonance and Fabry-Perot resonance respectively by tuning the bias.Decent light modulation can be obtained in a large operation wavelength band covering two resonances by optimizing the dual-resonance configuration.Such a reconfigurable efficient broadband modulation is important for robust communication link and possesses remarkable capacity for wavelength division multiplexing.

A review of liquid crystal spatial light modulators:devices and applications

Spatial light modulators,as dynamic flat-panel optical devices,have witnessed rapid development over the past two decades,concomitant with the advancements in micro-and opto-electronic integration technology.In particular,liquid-crystal spatial light modulator(LC-SLM)technologies have been regarded as versatile tools for generating arbitrary optical fields and tailoring all degrees of freedom beyond just phase and amplitude.These devices have gained significant interest in the nascent field of structured light in space and time,facilitated by their ease of use and real-time light manipulation,fueling both fundamental research and practical applications.Here we provide an overview of the key working principles of LC-SLMs and review the significant progress made to date in their deployment for various applications,covering topics as diverse as beam shaping and steering,holography,optical trapping and tweezers,measurement,wavefront coding,optical vortex,and quantum optics.Finally,we conclude with an outlook on the potential opportunities and technical challenges in this rapidly developing field.

Diffractive characteristics of the liquid crystal spatial light modulator

The liquid crystal spatial light modulator （LC SLM） is very suitable for wavefront correction and optical testing and can produce a wavefront with large phase change and high accuracy. The LC SLM is composed of thousands of pixels and the pixel size and shape have effects on the diffractive characteristics of the LC SLM. This paper investigates the pixel effect on the phase of the wavefront with the scalar diffractive theory. The results show that the maximum optical path difference modulation is 41μm to produce the paraboloid wavefront with the peak to valley accuracy better than λ/10. Effects of the mismatch between the pixel and the period, and black matrix on the diffraction efficiency of the LC SLM are also analysed with the Fresnel phase lens model. The ability of the LC SLM is discussed for optical testing and wavefront correction based on the calculated results. It shows that the LC SLM can be used as a wavefront corrector and a compensator.

3D fluorescence emission difference microscopy based on spatial light modulator

We report three-dimensional fluorescence emission difference(3D-FED)microscopy using a spatial light modulator(SLM).Zero phase,0–2
vortex phase and binary 0-pi phase are loaded on the SLM to generate the corresponding solid,doughnut and z-axis hollow excitation spot,respectively.Our technique achieves super-resolved image by subtracting three di®erently acquired images with proper subtractive factors.Detailed theoretical analysis and simulation tests are proceeded to testify the performance of 3D-FED.Also,the improvement of lateral and axial resolution is demonstrated by imaging 100 nm°uorescent beads.The experiment yields lateral resolution of 140 nm and axial resolution of approximate 380 nm.

Fast generation of controllable equal-intensity four beams based on isosceles triangle multilevel phase grating realized by liquid crystal spatial light modulator

Liquid crystal spatial light modulator （LCSLM） realizing equal-intensity multiple beams often has some features, i.e., phase valley between two adjacent pixels, flybaek region when phase decreases immediately from 2~r to 0, and inevitable backplane curvature, which are different from those of most conventional diffractive optical elements （DOEs）, such as static DOEs. For optimal intensity uniformity, equal-intensity multi-beam generation must be considered for these artifacts. We present a tunable-grating method in which the intensity uniformity can be improved by considering the LCSLM artifacts. For instance, tuning phase modulation depth of the grating, called isosceles triangle multilevel phase grating （ITMPG）, can be used not only to improve the intensity uniformity, but also to fast steer four beams with narrow beamwidths, determined by the same effective aperture of ITMPG. Improved intensity uniformity and high relative diffraction efficiency are demonstrated through experiments with phase-only LCSLM.

Experimental implementation of phase triplicator gratings in a spatial light modulator

In this work,we compare different methods for implementing a triplicator,a phase grating that generates three equiintense diffraction orders.The design with optimal efficiency features a continuous phase profile,which cannot be easily reproduced,and is typically affected by quantization.We compare its performance with binary and sinusoidal phase profiles.We also analyze the effect of quantizing the phase levels.Finally,a random approach is adopted to eliminate the additional harmonic orders.In all cases,a liquid-crystal-on-silicon spatial light modulator is employed to experimentally verify and compare the different approaches.

Steering light into logic patterns with two-dimensional cascaded multimode waveguide

Steering light into logic patterns with two-dimensional cascaded multimode waveguide is demonstrated. By employing the imaging properties of 2D multimode interference （MMI） and partial phase modulation method, the design ideas and the implementing methods of the 2^（2×2） bits type spatial logic steering are discussed; therefore the structure of logical pattern is proposed. Numerical simulation is carried out to verify the design in detail by using the beam propagation method. It is expected to realize logic coders by using the integrated optical methods and exploit their potential applications in the field of optical logic.

Generation of Mathieu beams using angular pupil modulation

By using an amplitude-type spatial light modulator to load angular spectrum of Mathieu function distribution along a narrow annular pupils, the Durnin’s experimental setup is extended to generate various types of Mathieu beams. As a special type of Mathieu beams, Bessel beams are also generated using this optical setup. Furthermore, the optical morphology of the Mathieu beams family are also presented and analyzed.

Speckle noise reduction in digital holography with spatial light modulator and nonlocal means algorithm

An integrated method based on optical and digital image processing is presented to suppress speckle in digital holography. A spatial light modulator is adopted to introduce random phases to the illuminating beam. Multiple holograms are reconstructed and superimposed, and the intensity is averaged to smooth the noise. The adaptive algorithm based on the nonlocal means is designed to further suppress the speckle. The presented method is compared with other methods reduction is improved, and the proposed method is effective The experimental results show that speckle and feasible.

Lensless Vanderlugt optical correlator using two phase-only spatial light modulators(Invited Paper)

A lensless Vanderlugt optical correlator using two phase-only spatial light modulators （SLMs） is proposed. The SLMs are used for displaying input and filter patterns respectively. The SLMs are also used as programmable lenses in order to realize the lensless construction. This lensless system is simple and its alignment adjustment is easy. The performance of the SLMs as programmable lenses is also described.

Matter-wave interference in an axial triple-well optical dipole trap

This paper proposes a scheme of axial triple-well optical dipole trap by employing a simple optical system composed of a circular cosine grating and a lens. Three optical wells separated averagely by -37 μm were created when illuminating by a YAG laser with power 1 mW. These wells with average trapping depth -0.5 μK and volume -74 μm^3 are suitable to trap and manipulate an atomic Bose-Einstein condensation （BEC）. Due to a controllable grating implemented by a spatial light modulator, an evolution between a triple-well trap and a single-well one is achievable by adjusting the height of potential barrier between adjacent wells. Based on this novel triple-well potentials, the loading and splitting of BEC, as well as the interference between three freely expanding BECs, are also numerically stimulated within the framework of mean-field treatment. By fitting three cosine functions with three Gaussian envelopes to interference fringe, the information of relative phases among three condensates is extracted.

Controllable optical multi-well trap and its optical lattices using compounded cosine patterns

This paper proposes a flexible scheme to form various optical multi-well traps for cold atoms or molecules by using a simple optical system composed of an compounded amplitude cosine-only grating and a single lens illuminated by a plane light wave or a Gaussian beam. Dynamic manipulation and evolution of multi-well trap can be easily implemented by controlling the modulation frequency of the cosine patterns. It also discusses how to expand this multi-well trap to two-dimensional lattices with single- or multi-well trap by using an orthogonally or non-orthogonally modulated grating, as well as using incoherent multi-beam illumination, and these results show that all the symmetric structures of two-dimensional Bravais lattices can be obtained facilely by using proposed scheme.

Generating large topological charge Laguerre–Gaussian beam based on 4K phase-only spatial light modulator

The resolution of the spatial light modulator(SLM)screen and the encoding algorithm of the computer-generated hologram are the primary limiting factors in the generation of large topological charge vortex beams.This paper attempts to solve these problems by improving both the hardware and the algorithm.Theoretically,to overcome the limitations of beam waist radius,the amplitude profile function of large topological charge Laguerre–Gaussian(LG)beam is properly improved.Then,an experimental system employing a 4K phase-only SLM is set up,and the LG beams with topological charge up to 1200 are successfully generated.Furthermore,we discuss the effect of different beam waist radii on the generation of LG beams.Additionally,the function of the LG beam is further improved to generate an LG beam with a topological charge as high as1400.Our results set a new benchmark for generating large topological charge vortex beams,which can be widely used in precise measurement,sensing,and communication.

A universal programmable driving circuit for spatial light modulators

A universal programmable multi-quantum-well（MQW） spatial light modulator（SLM） driving circuit is developed.With a twice scanning, it can generate programmable signals to drive a non-linear MQW SLM by using a software preprocessing unit.By adjusting the switching network of the driving circuit, this circuit can reduce the switching noise and improve the output precision.The chip test results show that the driving voltage can swing from 0 to VDD, and its resolution could be close to 256 with a pixel area of only 65 × 65 μm2.

RECENT PROGRESS IN MULTIFOCAL MULTIPHOTON MICROSCOPY

Multifocal multiphoton microscopy(MMM)has recently become an important tool in biomedicine for performing three-dimensional fastfluorescence imaging.Using various beamsplitting techniques,MMM splits the near-infrared laser beam into multiple beamlets and produces a multifocal array on the sample for parallel multiphoton excitation and then recordsfluorescence signal from all foci simultaneously with an area array detector,which significantly improves the imaging speed of multiphoton microscopy and allows for high efficiency in use of the excitation light.In this paper,we discuss the features of several MMM setups using different beamsplitting devices,including a Nipkow spinning disk,a microlens array,a set of beamsplitting mirrors,or a diffractive optical element(DOE).In particular,we present our recent work on the development of an MMM using a spatial light modulator(SLM).

Fast time-division color electroholography using a multiple-graphics processing unit cluster system with a single spatial light modulator

We demonstrate fast time-division color etectroholography using a multiple-graphics-processing-unit （GPU） cluster system with a spatial light modulator and a controller to switch the color of the reconstructing light. The controller comprises a universal serial bus module to drive the liquid crystal optical shutters. By using the controller, the computer-generated hologram （CGH） display node of the multiple-GPU cluster system synchronizes the display of the CGH with the color switching of the reconstructing light. Fast time-division color electroholography at 20 fps is realized for a three-dimensional object comprising 21,000 points per color when 13 GPUs are used in a multiple-GPU cluster system.

Two-Dimensional GaAs/AlGaAs Multiple Quantum Well Spatial Light Modulators

Multiple quantum well spatial light modulators with 128×128 array in 38μm pitch are fabricated using two pproaches, one with an attachment of an optical substrate and another one without. These two fabrication processes are described and compared.

High contrast ratio,high uniformity multiple quantum well spatial light modulators

Our latest research results on GaAs-A1GaAs multiple quantum well spatial light modulators are presented. The thickness uniformity of the epitaxial layers across the 3-inch wafer grown by our molecular beam epitaxy is better than 0.1% and the variation of cavity resonance wavelength within the wafer is only 0.9 nm. A contrast ratio （CR） of 102 by varying bias voltage from 0 to 6.7 V is achieved after fine tuning the cavity by etching an adjust layer. Both theoretical and experimental results demonstrate that incorporating an adjust layer is an effective tuning method for obtaining high CR.