The two-dimensional models for symmetrical double-material double-gate （DM-DG） strained Si （s-Si） metal-oxide semiconductor field effect transistors （MOSFETs） are presented. The surface potential and the surface...The two-dimensional models for symmetrical double-material double-gate （DM-DG） strained Si （s-Si） metal-oxide semiconductor field effect transistors （MOSFETs） are presented. The surface potential and the surface electric field ex- pressions have been obtained by solving Poisson＇s equation. The models of threshold voltage and subthreshold current are obtained based on the surface potential expression. The surface potential and the surface electric field are compared with those of single-material double-gate （SM-DG） MOSFETs. The effects of different device parameters on the threshold voltage and the subthreshold current are demonstrated. The analytical models give deep insight into the device parameters design. The analytical results obtained from the proposed models show good matching with the simulation results using DESSIS.展开更多
以屏蔽栅沟槽(SGT)MOSFET为研究对象,研究了重离子诱发的单粒子微剂量效应的现象及物理机理。对不同偏置电压下的30 V SGT MOSFET进行重离子辐照试验,分析了重离子轰击后器件转移特性曲线的变化趋势,揭示单粒子微剂量效应的退化规律。...以屏蔽栅沟槽(SGT)MOSFET为研究对象,研究了重离子诱发的单粒子微剂量效应的现象及物理机理。对不同偏置电压下的30 V SGT MOSFET进行重离子辐照试验,分析了重离子轰击后器件转移特性曲线的变化趋势,揭示单粒子微剂量效应的退化规律。研究发现重离子入射会引起器件的亚阈值电流增大,导致阈值电压负向漂移,且负栅压下器件的亚阈值电压负向漂移更严重。试验结果结合TCAD仿真进一步揭示在栅氧化层侧墙处Si/SiO_(2)界面的带正电的氧化物陷阱电荷是导致器件阈值电压和亚阈值电压等参数退化的主要原因。研究结果可为SGT MOSFET单粒子微剂量效应评估和建模提供指导。展开更多
With the need to improvement of speed of operation and the demand of low power MOSFET size scales down, in this paper, a 50 nm gate length n-type doped channel MOS (NMOS) is simulated using ATLAS packages of Silv...With the need to improvement of speed of operation and the demand of low power MOSFET size scales down, in this paper, a 50 nm gate length n-type doped channel MOS (NMOS) is simulated using ATLAS packages of Silvaco TCAD Tool so as to observe various electrical parameters at this gate length. The parameters under investigation are the threshold voltage, subthreshold slope, on-state current, leakage current and drain induced barrier lowering (DIBL) by varying channel doping concentration, drain and source doping concentration and gate oxide thickness.展开更多
A dual material gate silicon-on-insulator MOSFET with asymmetrical halo is presented to improve short channel effect and carrier transport efficiency for the first time. The front gate consists of two metal gates with...A dual material gate silicon-on-insulator MOSFET with asymmetrical halo is presented to improve short channel effect and carrier transport efficiency for the first time. The front gate consists of two metal gates with different work functions by making them contacting laterally, and the channel is more heavily doped near the source than in the rest. Using a three-region polynomial potential distribution and a universal boundary condition, a two-dimensional analytical model for the fully depleted silicon-on-insulator MOSFET is developed based on the explicit solution of two-dimensional Poisson’s equation. The model includes the calculation of potential distribution along the channel and subthreshold current. The performance improvement of the novel silicon-on-insulator MOSFET is examined and compared with the traditional silicon-on-insulator MOSFET using the analytical model and two-dimensional device simulator MEDICI. It is found that the novel silicon-on-insulator MOSFET could not only suppress short channel effect, but also increase carrier transport efficiency noticeably. The derived analytical model agrees well with MEDICI.展开更多
An analytical model for the subthreshold current of a strained-Si metal-oxide-semiconductor field-effect transistor (MOSFET) is developed by solving the two-dimensional (2D) Poisson equation and the conventional drift...An analytical model for the subthreshold current of a strained-Si metal-oxide-semiconductor field-effect transistor (MOSFET) is developed by solving the two-dimensional (2D) Poisson equation and the conventional drift-diffusion theory. Model verification is carried out using the 2D device simulator ISE. Good agreement is obtained between the model's calculations and the simulated results. By analyzing the model, the dependence of current on the strained-Si layer strain, doping concentration, source/drain junction depths and substrate voltage is studied. This subthreshold current model provides valuable information for strained-Si MOSFET design.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61376099,11235008,and 61205003)
文摘The two-dimensional models for symmetrical double-material double-gate （DM-DG） strained Si （s-Si） metal-oxide semiconductor field effect transistors （MOSFETs） are presented. The surface potential and the surface electric field ex- pressions have been obtained by solving Poisson＇s equation. The models of threshold voltage and subthreshold current are obtained based on the surface potential expression. The surface potential and the surface electric field are compared with those of single-material double-gate （SM-DG） MOSFETs. The effects of different device parameters on the threshold voltage and the subthreshold current are demonstrated. The analytical models give deep insight into the device parameters design. The analytical results obtained from the proposed models show good matching with the simulation results using DESSIS.
文摘以屏蔽栅沟槽(SGT)MOSFET为研究对象,研究了重离子诱发的单粒子微剂量效应的现象及物理机理。对不同偏置电压下的30 V SGT MOSFET进行重离子辐照试验,分析了重离子轰击后器件转移特性曲线的变化趋势,揭示单粒子微剂量效应的退化规律。研究发现重离子入射会引起器件的亚阈值电流增大,导致阈值电压负向漂移,且负栅压下器件的亚阈值电压负向漂移更严重。试验结果结合TCAD仿真进一步揭示在栅氧化层侧墙处Si/SiO_(2)界面的带正电的氧化物陷阱电荷是导致器件阈值电压和亚阈值电压等参数退化的主要原因。研究结果可为SGT MOSFET单粒子微剂量效应评估和建模提供指导。
文摘With the need to improvement of speed of operation and the demand of low power MOSFET size scales down, in this paper, a 50 nm gate length n-type doped channel MOS (NMOS) is simulated using ATLAS packages of Silvaco TCAD Tool so as to observe various electrical parameters at this gate length. The parameters under investigation are the threshold voltage, subthreshold slope, on-state current, leakage current and drain induced barrier lowering (DIBL) by varying channel doping concentration, drain and source doping concentration and gate oxide thickness.
基金Supported by the National Natural Science Foundation of China(No.60576066,No.60644007)the Natural Science Foundation of Anhui Province(No.2006kj012a).
基金Project 60472003 supported by National Natural Science Foundation of China and 2005CB321701 by the State Key Development Program for BasicResearch of China
文摘A dual material gate silicon-on-insulator MOSFET with asymmetrical halo is presented to improve short channel effect and carrier transport efficiency for the first time. The front gate consists of two metal gates with different work functions by making them contacting laterally, and the channel is more heavily doped near the source than in the rest. Using a three-region polynomial potential distribution and a universal boundary condition, a two-dimensional analytical model for the fully depleted silicon-on-insulator MOSFET is developed based on the explicit solution of two-dimensional Poisson’s equation. The model includes the calculation of potential distribution along the channel and subthreshold current. The performance improvement of the novel silicon-on-insulator MOSFET is examined and compared with the traditional silicon-on-insulator MOSFET using the analytical model and two-dimensional device simulator MEDICI. It is found that the novel silicon-on-insulator MOSFET could not only suppress short channel effect, but also increase carrier transport efficiency noticeably. The derived analytical model agrees well with MEDICI.
基金supported by the National Ministries and Commissions (Grant Nos.51308040203 and 6139801)the Fundamental Research Funds for the Central Universities (Grant Nos.72105499 and 72104089)the Natural Science Basic Research Plan in Shaanxi Province of China (Grant No.2010JQ8008)
文摘An analytical model for the subthreshold current of a strained-Si metal-oxide-semiconductor field-effect transistor (MOSFET) is developed by solving the two-dimensional (2D) Poisson equation and the conventional drift-diffusion theory. Model verification is carried out using the 2D device simulator ISE. Good agreement is obtained between the model's calculations and the simulated results. By analyzing the model, the dependence of current on the strained-Si layer strain, doping concentration, source/drain junction depths and substrate voltage is studied. This subthreshold current model provides valuable information for strained-Si MOSFET design.
