Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

The effects of working pressure on the component, surface morphology, surface roughness, and deposition rate of glow discharge polymer （GDP） films by a trans-2-butene/hydrogen gas mixture were investigated based on plasma characteristics diagnosis. The composition and ion energy distributions of a multi-carbon （CaHs/H2） plasma mixture at different working pressures were diagnosed by an energy-resolved mass spectrometer （MS） during the GDP film deposition process. The Fourier transform infrared spectroscopy （FT-IR）, field emission scanning electron microscope （SEM） and white-fight interferometer （WLI） results were obtained to investigate the structure, morphology and roughness characterization of the deposited films, respectively. It was found that the degree of ionization of the C4H8/H2 plasma reduces with an increase in the working pressure. At a low working pressure, the C-H fragments exhibited small-mass and high ion energy in plasma. In this case, the film had a low CH3/CH2 ratio, and displayed a smooth surface without any holes, cracks or asperities. While the working pressure increased to 15 Pa, the largest number of large-mass fragments led to the deposition rate reaching a maximum of 2.11 #m h-1, and to hole defects on the film surface. However, continuing to increase the working pressure, the film surface became smooth again, and the interface between clusters became inconspicuous without etching pits.

Isothermal oxidation behavior of a new Re-free nickel-based single-crystal superalloy at 950℃

The isothermal oxidation behavior of a new Refree nickel-based single-crystal superalloy in air at 950 ℃ for 200 h was studied by scanning electron microscopy（SEM）with energy-dispersive spectroscopy（EDS）and X-ray diffraction（XRD）.The results indicate that oxidation kinetics obeys parabolic law approximately,and the mass gain increases rapidly during initial oxidation stage and then gradually slows down.The oxidation scales are composed of three layers：the outer layer mainly consists of NiO with a small amount of CoO;the intermediate layer is mainly composed of Cr_2O_3 with a small amount of spinel compounds such as CrTaO_4,NiCr_2O_4,CoCrAl_2O_4,CoAl_2O_4,and NiAl_2O_4;and the inner layer is composed of Al_2O_3.Inner Al_2O_3 layer suppresses the diffusion of elements between oxygen and alloy elements,slows down the alloy oxidation speed,and also suppresses the growth of the oxide scale and reduces the oxidation rate,which is agreeable with the oxidation kinetics.