A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro...A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro-optical modulator etc.is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity,and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device.The principles of the MOEMS are discussed in the paper,and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.展开更多
The finite-difference-time-domain （FDTD） method is applied to simulate the twodimensional propagation of electromagnetic TM （S-polarization） mode in atmospheric plasma and in metal layer for strong electron-neutra...The finite-difference-time-domain （FDTD） method is applied to simulate the twodimensional propagation of electromagnetic TM （S-polarization） mode in atmospheric plasma and in metal layer for strong electron-neutral collisions. Dependence of the wave attenuation on both plasma parameters and incident wave angle are obtained. It is indicated that for a given electron density profile the attenuation depends strongly on the incident angle, the wave frequency, the width of plasma layer, and the collision frequency between electrons and neutrals.展开更多
基金Sponsored by Postgraduate Science and Technology Innovation Fund of BIT(Rank A)
文摘A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro-optical modulator etc.is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity,and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device.The principles of the MOEMS are discussed in the paper,and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.
基金supported by National Natural Science Foundation of China(No. 90405004)
文摘The finite-difference-time-domain （FDTD） method is applied to simulate the twodimensional propagation of electromagnetic TM （S-polarization） mode in atmospheric plasma and in metal layer for strong electron-neutral collisions. Dependence of the wave attenuation on both plasma parameters and incident wave angle are obtained. It is indicated that for a given electron density profile the attenuation depends strongly on the incident angle, the wave frequency, the width of plasma layer, and the collision frequency between electrons and neutrals.
