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Fabrication and Performance Investigation of Karma Alloy Thin Film Strain Gauge 被引量:1
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作者 雷鹏 张丛春 +2 位作者 庞雅文 杨伸勇 张梅菊 《Journal of Shanghai Jiaotong university(Science)》 EI 2021年第4期454-462,共9页
Karma alloy thin film strain gauges were fabricated on alumina substrates by magnetron sputtering. The electrical properties of strain gauges annealed at different temperatures were then tested. The surface morphology... Karma alloy thin film strain gauges were fabricated on alumina substrates by magnetron sputtering. The electrical properties of strain gauges annealed at different temperatures were then tested. The surface morphology and phase structure of the Karma alloy thin films were analyzed using X-ray diffraction and scanning electron microscopy. The effect of the annealing temperature on the performance of the Karma alloy thin film strain gauge was also investigated. As the annealing temperature increased, it was found that the resistivity of the thin films decreased, whereas the temperature coefficient of resistance (TCR) of the thin films increased. A Karma alloy thin film strain gauge was annealed at 200 °C, thereby obtaining a gauge factor of 1.7 and a corresponding TCR of 64.8 × 10−6 K−1. The prepared Karma alloy thin film strain gauge had a lower TCR than other strain gauges at room temperature. This result can provide a reference for the preparation and application of Karma alloy thin film strain gauges in specific scenarios. 展开更多
关键词 thin film strain gauge Karma alloy magnetron sputtering coefficient of resistance(TCR) gauge factor
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Interfacial-Strain-Induced Structural and Polarization Evolutions in Epitaxial Multiferroic BiFeO_3(001) Thin Films 被引量:1
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作者 郭海中 Ruiqiang Zhao +13 位作者 Kui-juan Jin Lin Gu Dongdong Xiao Zhenzhong Yang Xiaolong Li Le Wang Xu He Junxing Gu Qian Wan Can Wang Huibin Lu Chen Ge Meng He Guozhen Yang 《功能材料信息》 2015年第3期19-27,共9页
Varying the film thickness is a precise route to tune the interfacial strain to manipulate the properties of the multiferroic materials.Here,to explore the effects of the interfacial strain on the properties of the mu... Varying the film thickness is a precise route to tune the interfacial strain to manipulate the properties of the multiferroic materials.Here,to explore the effects of the interfacial strain on the properties of the multiferroic BiFeO_3films,we investigated thickness-dependent structural and polarization evolutions of the BiFeO_3 films.The epitaxial growth with an atomic stacking sequence of BiO/TiO_2 at the interface was confirmed by scanning transmission electron microscopy.Combining X-ray diffraction experiments and first-principles calculations,a thickness-dependent structural evolution was observed from a fully strained tetragonality to a partially relaxed one without any structural phase transition or rotated twins.The tetragonality(c/a) of the BiFeO_3 films increases as the film thickness decreases,while the polarization is in contrast with this trend,and the size effect including the depolarization field plays a crucial role in this contradiction in thinner films.These findings offer an alternative strategy to manipulate structural and polarization properties by tuning the interfacial strain in epitaxial multiferroic thin films. 展开更多
关键词 功能材料 材料科学 材料 BFO
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Easy calibration method of vision system for in-situ measurement of strain of thin films 被引量:3
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作者 Jun-Hyub PARK Dong-Joong KANG +5 位作者 Myung-Soo SHIN Sung-Jo LIM Son-Cheol YU Kwang-Soo LEE Jong-Eun HA Sung-Hoon CHOA 《中国有色金属学会会刊:英文版》 CSCD 2009年第B09期243-249,共7页
An easy calibration method was presented for in-situ measurement of displacement in the order of nanometer during micro-tensile test for thin films by using CCD camera as a sensing device. The calibration of the sensi... An easy calibration method was presented for in-situ measurement of displacement in the order of nanometer during micro-tensile test for thin films by using CCD camera as a sensing device. The calibration of the sensing camera in the system is a central element part to measure displacement in the order of nanometer using images taken with the camera. This was accomplished by modeling the optical projection through the camera lens and relative locations between the object and camera in 3D space. A set of known 3D points on a plane where the film is located on is projected to an image plane as input data. These points, known as a calibration points, are then used to estimate the projection parameters of the camera. In the measurement system of the micro-scale by CCD camera, the calibration data acquisition and one-to-one matching steps between the image and 3D planes need precise data extraction procedures and repetitive user's operation to calibrate the measuring devices. The lack of the robust image feature extraction and easy matching prevent the practical use of these methods. A data selection method was proposed to overcome these limitations and offer an easy and convenient calibration of a vision system that has the CCD camera and the 3D reference plane with calibration marks of circular type on the surface of the plane. The method minimizes the user's intervention such as the fine tuning of illumination system and provides an efficient calibration method of the vision system for in-situ axial displacement measurement of the micro-tensile materials. 展开更多
关键词 标定方法 视觉系统 原位测试 应变 薄膜
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Strain tunability of dielectric and ferroelectric properties in epitaxial lead titanate thin films
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作者 Jie Wang~(a)) School of Aeronautics & Astronautics,Zhejiang University,Hangzhou 310027,China 《Theoretical & Applied Mechanics Letters》 CAS 2011年第1期14-17,共4页
Many distinguished properties of epitaxial ferroelectric thin films can be tunable through the misfit strain.The strain tunability of ferroelectric and dielectric properties in epitaxial lead titanate ultrathin films ... Many distinguished properties of epitaxial ferroelectric thin films can be tunable through the misfit strain.The strain tunability of ferroelectric and dielectric properties in epitaxial lead titanate ultrathin films is numerically investigated by using a phase field model,in which the surface effect of polarization is taken into account.The response of polarization to the applied electric field in the thickness direction is examined with different misfit strains at room temperature.It is found that a compressive misfit strain increases the coercive field and the remanent polarization while a tensile misfit strain decreases both of them.The nonlinear dielectric constants of the thin films with tensile misfit strains are much larger than those of the thin films without misfit strains,which are attributed to the existence of the a/c/a/c multiple domains in the thin films under tensile misfit strains. 展开更多
关键词 misfit strain ferroelectric thin film dielectric constant phase field model domain structures
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Thickness Dependence of Dielectric Characteristics of SrTiO<sub>3</sub>Thin Films on MgAl<sub>2</sub>O<sub>4</sub>Substrates 被引量:1
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作者 Ryuhei Kinjo Iwao Kawayama +1 位作者 Hironaru Murakami Masayoshi Tonouchi 《Advances in Materials Physics and Chemistry》 2013年第1期58-61,共4页
SrTiO3 (STO) thin films of different thicknesses were deposited on MgAl2O4 (MAO) substrates to investigate the in-plane strain effect on the soft-mode frequency of the STO films. X-ray reciprocal space mapping (X-RSM)... SrTiO3 (STO) thin films of different thicknesses were deposited on MgAl2O4 (MAO) substrates to investigate the in-plane strain effect on the soft-mode frequency of the STO films. X-ray reciprocal space mapping (X-RSM) results indicate that there was no relaxation of the in-plane lattice strain of the STO films on MAO. Shifts in the soft-mode frequencies with a decrease in the film thickness were observed using terahertz time-domain spectroscopy (THz-TDS). However, despite the larger lattice mismatch between STO and MAO than that between STO and DyScO3 (DSO), the shifts in the soft-mode frequencies of the STO films on MAO were smaller than those on DSO. The results indicate that the soft-mode frequencies of the STO films on MAO are affected by the c-axis (out-of-plane) lengths. 展开更多
关键词 STRONTIUM TITANATE Ferroelectric Soft Mode thin film strain Effect
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Crystallization and Morphology of Gold Thin Films on Unpolished Si(100) Substrates after Furnace and Flame Annealing
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作者 Luis De Los Santos V Angel Bustamante D. +4 位作者 Lizbet Leon F. Thanos Mitrelias Adrian Ionescu JustinianoQuispe M. Crispin H. W. Barnes 《材料科学与工程(中英文版)》 2010年第1期1-10,共10页
关键词 退火工艺 薄膜形貌 热处理炉 硅衬底 黄金 火焰 结晶 糙米
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用于特殊环境的薄膜应变计的制备与表征
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作者 张丛春 康志鹏 +1 位作者 雷鹏 闫博 《传感技术学报》 CAS CSCD 北大核心 2024年第4期589-596,共8页
使用磁控溅射制备了卡玛合金薄膜应变计,研究了退火温度对薄膜微观结构的影响,测试了薄膜的电学性能以及压阻响应特性,并进行了环境实验。结果表明,随着退火温度升高,薄膜的电阻率逐渐下降,电阻温度系数则逐渐升高,在室温下有最小的电... 使用磁控溅射制备了卡玛合金薄膜应变计,研究了退火温度对薄膜微观结构的影响,测试了薄膜的电学性能以及压阻响应特性,并进行了环境实验。结果表明,随着退火温度升高,薄膜的电阻率逐渐下降,电阻温度系数则逐渐升高,在室温下有最小的电阻温度系数(TCR),约为59.9×10^(-6)/℃,经过200℃退火处理的薄膜应变计的应变灵敏度系数(GF)为2.2,TCR为64.4×10^(-6)/℃。经历温湿循环、盐雾、霉菌试验后,薄膜的压阻特性变化不大,能耐受海洋特殊环境。 展开更多
关键词 磁控溅射 薄膜应变计 电阻温度系数 应变因子 环境实验
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空间飞行器用薄膜温度/应变传感技术研究 被引量:1
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作者 马东锋 熊玉卿 +2 位作者 何延春 张凯峰 曹生珠 《真空与低温》 2024年第1期10-22,共13页
随着功能薄膜制备方法及微细加工技术的日益成熟,基于各类薄膜敏感元件的薄膜传感技术蓬勃发展。薄膜传感器件尺寸小、集成度高、灵敏度高,在深空探测、空间飞行器结构健康监测、载人航天等领域展现出广阔的应用前景。针对空间飞行器的... 随着功能薄膜制备方法及微细加工技术的日益成熟,基于各类薄膜敏感元件的薄膜传感技术蓬勃发展。薄膜传感器件尺寸小、集成度高、灵敏度高,在深空探测、空间飞行器结构健康监测、载人航天等领域展现出广阔的应用前景。针对空间飞行器的各类传感需求,对低温/高温温度传感、热流传感、高温应变传感、柔性大应变传感、柔性智能蒙皮等应用中薄膜传感材料和器件的关键技术及国内外研究现状进行了综述,并对薄膜传感技术的未来发展进行了展望。 展开更多
关键词 薄膜传感器 温度传感 应变传感 智能蒙皮
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BaTiO_(3)纳米单晶薄膜在外加电场作用下畴结构演化的相场研究
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作者 李昊晴 苏煜 《人工晶体学报》 CAS 北大核心 2024年第7期1136-1149,共14页
铁电薄膜的工作电场加载频率及基底失配应变可影响微观畴结构形态和材料宏观铁电性能。本文利用相场模拟方法分别研究了在-0.1%、-0.7%的失配应变下,0.1~100 kHz频率范围内BaTiO_(3)纳米单晶薄膜的铁电性能变化规律。研究发现,随着外加... 铁电薄膜的工作电场加载频率及基底失配应变可影响微观畴结构形态和材料宏观铁电性能。本文利用相场模拟方法分别研究了在-0.1%、-0.7%的失配应变下,0.1~100 kHz频率范围内BaTiO_(3)纳米单晶薄膜的铁电性能变化规律。研究发现,随着外加电场频率的增大,薄膜电滞回线由四方形向椭圆形转变,标准蝶形曲线向腰果形曲线发生改变。在50 kHz以下的低频段,矫顽场随频率增加而快速升高,但剩余极化强度变化幅度不大;而在50 kHz以上的高频段,矫顽场随频率增加略有升高,剩余极化强度则呈下降趋势。在低频段下铁电性能的频率依赖性受失配应变的影响较大,而在高频段下则对失配应变不敏感。同时发现,压缩失配应变可导致剩余极化及矫顽场显著升高,而拉伸应变的效果相反。分析表明,BaTiO_(3)纳米单晶薄膜铁电性能的频率依赖性源自内部微结构演化速度与外电场施加速率的相互竞争。本研究可为铁电功能薄膜材料的实验设计提供理论基础,为其在高频电子器件中的应用提供有力支撑。 展开更多
关键词 铁电薄膜 相场方法 钛酸钡纳米单晶薄膜 金兹堡-朗道方程 频率效应 失配应变
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A strain-isolation design for stretchable electronics 被引量:4
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作者 Jian Wu Ming Li +6 位作者 Wei-Qiu Chen Dae-Hyeong Kim Yun-Soung Kim Yong-Gang Huang Keh-Chih Hwang Zhan Kang John A.Rogers 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2010年第6期881-888,共8页
Stretchable electronics represents a direction of recent development in next-generation semiconductor devices.Such systems have the potential to offer the performance of conventional wafer-based technologies,but they ... Stretchable electronics represents a direction of recent development in next-generation semiconductor devices.Such systems have the potential to offer the performance of conventional wafer-based technologies,but they can be stretched like a rubber band,twisted like a rope, bent over a pencil,and folded like a piece of paper.Isolating the active devices from strains associated with such deformations is an important aspect of design.One strategy involves the shielding of the electronics from deformation of the substrate through insertion of a compliant adhesive layer. This paper establishes a simple,analytical model and validates the results by the finite element method.The results show that a relatively thick,compliant adhesive is effective to reduce the strain in the electronics,as is a relatively short film. 展开更多
关键词 strain isolation thin film SUBSTRATE ADHESIVE Stretchable electronics
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InSb/InAsSb Strained Layer Superlattice Grown by MBE
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作者 谢国柱 高新江 《半导体光电》 CAS CSCD 北大核心 1992年第4期363-366,共4页
叙述了采用国产 MBE 装置,在 GaAs 或 InSb 衬底上生长 InSb,InAsSb薄膜材料一些基础研究工作。采用二步生长法在 GaAs 衬底上生长优质 InSb 薄膜,厚度4.8μm,其室温迁移率达到4.3×10~4cm^2V·s,载流子浓度为2.4×10^(18)c... 叙述了采用国产 MBE 装置,在 GaAs 或 InSb 衬底上生长 InSb,InAsSb薄膜材料一些基础研究工作。采用二步生长法在 GaAs 衬底上生长优质 InSb 薄膜,厚度4.8μm,其室温迁移率达到4.3×10~4cm^2V·s,载流子浓度为2.4×10^(18)cm^(-3),77K 时载流子浓度为7.49×10^(15)cm^(-3);并在生长各种类型 InAsSb 超晶格材料的基础上,首次生长了 InAs_(0·05)Sb_(0·95)/InSb 应变层超晶格结构材料,其周期厚度为21nm,InSb 应变层与 InSb 层之间的共格度为0.65,本文还将叙述制作 InAsSb 长波红外探测器的具体工艺及其一些想法。 展开更多
关键词 超晶格 INSB薄膜 红外探测器
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切削力在线测量系统刀柄结构设计 被引量:1
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作者 刘丽娟 武文革 +2 位作者 赵永娟 黄晓斌 成云平 《组合机床与自动化加工技术》 北大核心 2023年第8期150-152,159,共4页
在刀柄上直接嵌入或沉积薄膜传感器是实现在线测量切削力的有效方法之一,研究了螺钉紧固与法兰结构刀具系统,建立了10种刀杆截面图谱;螺钉紧固结构截面采用阶梯赛车道方案,在相同条件下,该结构输出电压是初始结构的2倍;法兰结构截面采... 在刀柄上直接嵌入或沉积薄膜传感器是实现在线测量切削力的有效方法之一,研究了螺钉紧固与法兰结构刀具系统,建立了10种刀杆截面图谱;螺钉紧固结构截面采用阶梯赛车道方案,在相同条件下,该结构输出电压是初始结构的2倍;法兰结构截面采用四面凸台方案,建立了刀具模型各分段长度与初始惯性矩的关系;利用ABAQUS对这两种结构进行了有限元仿真,螺钉紧固结构刀杆截面处应力是初始刀杆的两倍,法兰结构的应变分布关于形变中性层对称,结果表明两种结构均可提高测力系统输出特性。 展开更多
关键词 薄膜应变传感器 结构设计 切削力测量 有限元分析
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Effects of Internal Relaxation under Inplane Strain on the Structural,Electronic and Optical Properties of Perovskite BaZrO3
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作者 秦国强 PENG Xiaojun +4 位作者 ZHANG Guanglei WU Hongya WANG Caihui YU Gang FU Hua 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第2期397-402,共6页
We present the specific ab-initio calculations that detail the variations of perovskite BaZrO3 caused by in-plane strain. Specifically, the internal relaxation, which was not captured in the widely used biaxial strain... We present the specific ab-initio calculations that detail the variations of perovskite BaZrO3 caused by in-plane strain. Specifically, the internal relaxation, which was not captured in the widely used biaxial strain model, was included in a complementary manner to lattice relaxation. Density functional theory as well as a hybrid functional method based on a plane wave basis set was employed to calculate the lattice structure, elastic constants, electronic properties and optical properties of perovskite BaZrO3. The lattice parameter c exhibited a clear linear dependence on the imposed in-plane strain, but the Poisson's ratio caused by internal relaxation was smaller than the elastic deformation, indicating an "inelastic" or "plastic" relaxation manner caused by the introduction of internal relaxation. As a result, the related electronic and optical properties of perovskite BaZrO3 were also strongly affected by the in-plane strain, which revealed an effective way to adjust the properties of perovskite BaZrO3 via internal relaxation. 展开更多
关键词 thin films internal relaxation in-plane strain perovskite electronic band structure computer simulations optical properties
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Analyses of Sensor Films on a Carbon Fibre
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作者 Bernhard Wielage Hans Heinrich Gatzen +2 位作者 Thomas Maeider Daisy Nestler Alexander Belski 《材料科学与工程(中英文版)》 2010年第9期20-27,共8页
关键词 薄膜沉积技术 应变传感器 碳纤维 等离子体增强化学气相沉积 纤维分析 纤维复合材料 嵌入式结构 物理效应
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西牛支渠土工布计算分析
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作者 黄健 《辽宁省交通高等专科学校学报》 2023年第1期9-14,共6页
本文采用ABAQUS提供的薄膜单元M3D4R (三维四节点缩减积分薄膜单元)来模拟土工布,土体、混凝土预制桩、梁采用三维八节点缩减积分实体单元(C3D8R)进行划分,土工布采用M3D4R进行划分,并在混凝土预制桩与土体、土工布与土体之间等设置接... 本文采用ABAQUS提供的薄膜单元M3D4R (三维四节点缩减积分薄膜单元)来模拟土工布,土体、混凝土预制桩、梁采用三维八节点缩减积分实体单元(C3D8R)进行划分,土工布采用M3D4R进行划分,并在混凝土预制桩与土体、土工布与土体之间等设置接触。整个计算模拟过程为:初始地应力平衡→预制混凝土桩、中粗砂、土工布的施工与铺设→蓄水至常水位114m。分析出西牛支渠混凝土预制桩与中粗砂之间土工布在完建与运行期的受力情况,在完建期和蓄水期土工布应力应变均小于土工布容许应力,满足强度和稳定性要求,较好地反映了土工布自身的基本力学特性。 展开更多
关键词 土工布 薄膜单元 有限元分析 变形 应力应变
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科学研究成果融入无机化学实验教学——[(CH_(3))_(3)NCH_(2)Br]_(2)-ZnBr_(4)的合成及铁弹畴
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作者 高继兴 《广东化工》 CAS 2023年第15期240-242,共3页
根据本课题组科研成果设计了一个通过有机小分子与无机盐在酸性条件下组装,获得具有自发应变的有机-无机杂化金属卤化物,[TMBM]_(2)-ZnBr_(4)(TMBM=(CH_(3))_(3)NCH_(2)Br),的化学实验。通过制备薄膜材料,在偏光显微镜下观察铁弹畴与温... 根据本课题组科研成果设计了一个通过有机小分子与无机盐在酸性条件下组装,获得具有自发应变的有机-无机杂化金属卤化物,[TMBM]_(2)-ZnBr_(4)(TMBM=(CH_(3))_(3)NCH_(2)Br),的化学实验。通过制备薄膜材料,在偏光显微镜下观察铁弹畴与温度的关系。本实验可以锻炼学生对化学实验基本操作的运用,掌握仪器设备的使用,增强自主学习和团队合作能力,激发学习兴趣和热情,开拓科学研究视野,丰富学科知识,提升学科素养。 展开更多
关键词 有机-无机杂化金属卤化物 自发应变 薄膜材料 铁弹畴 实验教学 科学研究
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基于有限元模拟薄膜热流计热应变分析
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作者 王雪松 魏艳龙 +3 位作者 褚惟诚 梁海坚 郭晋秦 李志玲 《电子测试》 2023年第2期67-71,共5页
实现高超声速飞行器表面气动热的精准监测,对于飞行器表面热防护材料的优化具有重要意义。针对超高声速飞行器表面原位集成薄膜热流计的结构可靠性问题,采用有限元模拟的方法建立薄膜热流计的多物理场仿真模型,分析了热流计基底上表面... 实现高超声速飞行器表面气动热的精准监测,对于飞行器表面热防护材料的优化具有重要意义。针对超高声速飞行器表面原位集成薄膜热流计的结构可靠性问题,采用有限元模拟的方法建立薄膜热流计的多物理场仿真模型,分析了热流计基底上表面和热阻层下表面的热应变,分别对比不同基底厚度和热阻层厚度下的应变结果。最后,总结了热流计表面的体积应变和等效偏应变的变化趋势,为热流计的设计和优化提供了指导性依据。 展开更多
关键词 薄膜热流计 有限元 热应变 体积应变 等效偏应变
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NiCr高温薄膜电阻应变计制备及耐高温性能研究 被引量:10
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作者 崔云先 张子超 +2 位作者 丁万昱 胡晓勇 张启翔 《仪器仪表学报》 EI CAS CSCD 北大核心 2016年第7期1548-1555,共8页
针对高温环境下应力应变测试的技术难题,提出了一种以NiCr薄膜为敏感材料的高温薄膜应变计的制备方法,并对薄膜应变计敏感层的耐高温性能进行研究。研究发现,NiCr薄膜在高温下微观结构、成分发生明显转变,电学性能急剧下降。对添加SiN_x... 针对高温环境下应力应变测试的技术难题,提出了一种以NiCr薄膜为敏感材料的高温薄膜应变计的制备方法,并对薄膜应变计敏感层的耐高温性能进行研究。研究发现,NiCr薄膜在高温下微观结构、成分发生明显转变,电学性能急剧下降。对添加SiN_xO_y和ITO薄膜后的NiCr薄膜分别进行高温测试发现,NiCr薄膜结构、性能没有明显改变,表明SiN_xO_y和ITO薄膜保护下的NiCr薄膜高温下性能稳定。所制的高温薄膜应变计在50~350℃内电阻温度系数为(80~787)×10-6/K,常温下应变灵敏系数为1.19,机械滞后为5.02,高温下的应变测试性能有待进一步研究。 展开更多
关键词 NiCr高温薄膜电阻应变计 耐高温性能 光刻工艺 电阻温度系数
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碳纳米管薄膜传感器及其应变传感特性 被引量:4
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作者 聂鹏 张大国 +2 位作者 陈彦海 卢少微 韩娇 《北京航空航天大学学报》 EI CAS CSCD 北大核心 2016年第4期677-684,共8页
碳纳米管薄膜可作为应变传感器用于结构损伤的健康监测。采用机械搅拌、超声处理和高速离心等分散工艺将多壁碳纳米管单分散后,通过真空吸滤法制备碳纳米管薄膜。对碳纳米管薄膜传感器进行了深入的研究,设计了一种高灵敏度的碳纳管薄膜... 碳纳米管薄膜可作为应变传感器用于结构损伤的健康监测。采用机械搅拌、超声处理和高速离心等分散工艺将多壁碳纳米管单分散后,通过真空吸滤法制备碳纳米管薄膜。对碳纳米管薄膜传感器进行了深入的研究,设计了一种高灵敏度的碳纳管薄膜应变传感器,与结构基体一体成型。弯曲应变传感实验表明碳纳米管薄膜传感器在不同的应变范围、不同的循环次数、不同的温度范围等条件下都具有良好的应变传感特性。结果表明碳纳米管薄膜传感器灵敏度较高,灵敏度系数为188.31(0~22 500με),且具有较好的应变传感可逆性和可重复性。 展开更多
关键词 真空吸滤 碳纳米管薄膜 传感器 应变传感 监测结构损伤
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FeCoSiB单层和FeCoSiB/Cu/FeCoSiB多层磁弹性膜应力阻抗性能研究 被引量:9
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作者 杨国宁 张万里 +2 位作者 彭斌 蒋洪川 张永强 《磁性材料及器件》 CAS CSCD 2004年第6期22-24,共3页
用磁控溅射法在玻璃基片上制备了FeCoSiB单层膜和FeCoSiB/Cu/FeCoSiB多层膜,并进行磁场退火热处理以消除残余应力和形成磁场织构。薄膜的磁性能采用振动样品磁强计(VSM)进行测试,采用HP4275A 型阻抗分析仪在200kHz^10MHz频率范围内测试... 用磁控溅射法在玻璃基片上制备了FeCoSiB单层膜和FeCoSiB/Cu/FeCoSiB多层膜,并进行磁场退火热处理以消除残余应力和形成磁场织构。薄膜的磁性能采用振动样品磁强计(VSM)进行测试,采用HP4275A 型阻抗分析仪在200kHz^10MHz频率范围内测试了薄膜的应力阻抗(SI)效应。结果表明,磁场退火热处理可形成感生磁各向异性以及提高薄膜的SI效应,在10MHz测试频率下,FeCoSiB薄膜的ΔZ/Z可达1.5%,而FeCoSiB/Cu/FeCoSiB的可达8%。随着测试频率下降到1MHz时,薄膜的SI效应显著下降。 展开更多
关键词 FeCoSiB薄膜 磁弹性 应力阻抗
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