The polycrystalline Si3N4/TiN ceramic nano-multilayer films have been synthesized on Si substrates by a reactive magnetron Sputtering technique, aiming at investigating the effects of modulation ratio and modulation p...The polycrystalline Si3N4/TiN ceramic nano-multilayer films have been synthesized on Si substrates by a reactive magnetron Sputtering technique, aiming at investigating the effects of modulation ratio and modulation period on the microhardness and to elucidate the hardening mechanisms of the synthesized nanomultilayer films. The results showed that the hardness of Si3N4/TiN nano-multilayers is affected not only by modulation period, but also by modulation ratio. The hardness reaches its maximum value when modulation period equa1s a critical value λ0, which is about 12 nm with a modulation ratio of 3: 1. The maximum hardness value is about 40% higher than the value calculated from the rule of mixtures. The hardness of nano-multilayer thin films was found to decrease rapidly with increasing or decreasing modulation period from the Point of λ0. The microstructures of the nano-multilayer films have been investigated using XRD and TEM. Based on experimental results, the mechanism of the superhardness in this system was proposed.展开更多
Ti/TiN multilayer film was deposited on uranium surface by arc ion plating technique to improve fretting wear behavior. The morphology, structure and element distribution of the film were measured by scanning electric...Ti/TiN multilayer film was deposited on uranium surface by arc ion plating technique to improve fretting wear behavior. The morphology, structure and element distribution of the film were measured by scanning electric microscopy（SEM）, X-ray diffractometry（XRD） and Auger electron spectroscopy（AES）. Fretting wear tests of uranium and Ti/TiN multilayer film were carried out using pin-on-disc configuration. The fretting tests of uranium and Ti/TiN multilayer film were carried out under normal load of 20 N and various displacement amplitudes ranging from 5 to 100 μm. With the increase of the displacement amplitude, the fretting changed from partial slip regime（PSR） to slip regime（SR）. The coefficient of friction（COF） increased with the increase of displacement amplitude. The results indicated that the displacement amplitude had a strong effect on fretting wear behavior of the film. The damage of the film was very slight when the displacement amplitude was below 20 μm. The observations indicated that the delamination was the main wear mechanism of Ti/TiN multilayer film in PSR. The main wear mechanism of Ti/TiN multilayer film in SR was delamination and abrasive wear.展开更多
Nanomultilayered TiN/Ni thin films with different bilayer periods(57.8-99.7 nm) and Ni single-layer thickness(3.9-19.2 nm) were prepared by alternatively sputtering Ti and Ni targets in N2 gas atmosphere.The micros tr...Nanomultilayered TiN/Ni thin films with different bilayer periods(57.8-99.7 nm) and Ni single-layer thickness(3.9-19.2 nm) were prepared by alternatively sputtering Ti and Ni targets in N2 gas atmosphere.The micros tructure,mechanical and corrosion properties of the multilayer films were investigated by X-ray diffraction(XRD),field emission scanning electron microscopy(FESEM),X-ray photoelectron spectroscopy(XPS),nanoindenter and electrochemical technologies.The multilayer films are fine with a mean grain size of ~8-9 nm independent of the bilayer period.However,the smoothness and compactness seem to decrease with the bilayer period increasing.The hardness(H) and elastic modulus(E) of the multilayer films gradually decrease as the bilayer period increases,and the multilayer film with bilayer period of 57.8 nm exhibits higher H,ratios of(H/E^*and H^3/E^*2)(E^*is effective Young’s modulus)than the monolithic TiN film and the other multilayers.The multilayer films exhibit an obvious passivation phenomenon in 10% H2SO4 solution,and the passive current and corrosion current densities decrease,whereas the corrosion potential increases when the bilayer period or Ni single-layer thickness decreases.It is found that the passivating behavior and corrosion potential of the multilayers are more sensitive to Ni single-layer thickness than the bilayer period.More corrosion pits and lamellar flaking could be found on the films with larger bilayer period or Ni single-layer thickness.展开更多
Using the MEVVA ion source, carbon ions have been implanted in TiN coatings deposited by multi-arc ion plating The Vickers microhardness of the C+ -implanted TiN films increased with the increase in the ion flux and d...Using the MEVVA ion source, carbon ions have been implanted in TiN coatings deposited by multi-arc ion plating The Vickers microhardness of the C+ -implanted TiN films increased with the increase in the ion flux and dose. X-ray diffraction (XRD) analysis showed that the TiC phases had been formed in the films. In addition, the films had the preferred growth orientations of TiN and TiC, both of which were (111) orientation after annealing at 500℃ for 30 min. Auger electron spectra analysis indicated that C+ -implanted profile was in typical Gaussian-like distribution in single films. The distribution with multipeaks of C atoms was obtained in multi-layer TiN/Ti. The possibility of the multilayer films (Ti (C, N)/TiN/Ti(C, N)/TiN and Ti(C, N)/TiC/Ti(C, N)/TiC) forming using the C-implanted TiN/Ti films is presented for the first time.展开更多
Ga2O3/ITO alternating multilayer films were deposited on quartz glass substrates by rnagnetron sputtering. The effect of the multi-period on the structural, optical and electrical properties of Ga2O3/ITO alternating m...Ga2O3/ITO alternating multilayer films were deposited on quartz glass substrates by rnagnetron sputtering. The effect of the multi-period on the structural, optical and electrical properties of Ga2O3/ITO alternating multilayer films was investigated by an X-ray diffractometer, a double beam spectrophotometer and the Hall system, respectively. A low sheet resistance of 225.5 Ω/□ and a high transmittance of more than 62.9% at a 300 nm wavelength were obtained for the two-period alternating multilayer film with a thickness of 72 nm.展开更多
文摘The polycrystalline Si3N4/TiN ceramic nano-multilayer films have been synthesized on Si substrates by a reactive magnetron Sputtering technique, aiming at investigating the effects of modulation ratio and modulation period on the microhardness and to elucidate the hardening mechanisms of the synthesized nanomultilayer films. The results showed that the hardness of Si3N4/TiN nano-multilayers is affected not only by modulation period, but also by modulation ratio. The hardness reaches its maximum value when modulation period equa1s a critical value λ0, which is about 12 nm with a modulation ratio of 3: 1. The maximum hardness value is about 40% higher than the value calculated from the rule of mixtures. The hardness of nano-multilayer thin films was found to decrease rapidly with increasing or decreasing modulation period from the Point of λ0. The microstructures of the nano-multilayer films have been investigated using XRD and TEM. Based on experimental results, the mechanism of the superhardness in this system was proposed.
基金Projects(U1530136,51375407) supported by the National Natural Science Foundation of ChinaProject(2017TD0017) supported by the Young Scientific Innovation Team of Science and Technology of Sichuan Province,China
文摘Ti/TiN multilayer film was deposited on uranium surface by arc ion plating technique to improve fretting wear behavior. The morphology, structure and element distribution of the film were measured by scanning electric microscopy（SEM）, X-ray diffractometry（XRD） and Auger electron spectroscopy（AES）. Fretting wear tests of uranium and Ti/TiN multilayer film were carried out using pin-on-disc configuration. The fretting tests of uranium and Ti/TiN multilayer film were carried out under normal load of 20 N and various displacement amplitudes ranging from 5 to 100 μm. With the increase of the displacement amplitude, the fretting changed from partial slip regime（PSR） to slip regime（SR）. The coefficient of friction（COF） increased with the increase of displacement amplitude. The results indicated that the displacement amplitude had a strong effect on fretting wear behavior of the film. The damage of the film was very slight when the displacement amplitude was below 20 μm. The observations indicated that the delamination was the main wear mechanism of Ti/TiN multilayer film in PSR. The main wear mechanism of Ti/TiN multilayer film in SR was delamination and abrasive wear.
基金financially supported by the National Natural Science Foundation of China (No.51171118)
文摘Nanomultilayered TiN/Ni thin films with different bilayer periods(57.8-99.7 nm) and Ni single-layer thickness(3.9-19.2 nm) were prepared by alternatively sputtering Ti and Ni targets in N2 gas atmosphere.The micros tructure,mechanical and corrosion properties of the multilayer films were investigated by X-ray diffraction(XRD),field emission scanning electron microscopy(FESEM),X-ray photoelectron spectroscopy(XPS),nanoindenter and electrochemical technologies.The multilayer films are fine with a mean grain size of ~8-9 nm independent of the bilayer period.However,the smoothness and compactness seem to decrease with the bilayer period increasing.The hardness(H) and elastic modulus(E) of the multilayer films gradually decrease as the bilayer period increases,and the multilayer film with bilayer period of 57.8 nm exhibits higher H,ratios of(H/E^*and H^3/E^*2)(E^*is effective Young’s modulus)than the monolithic TiN film and the other multilayers.The multilayer films exhibit an obvious passivation phenomenon in 10% H2SO4 solution,and the passive current and corrosion current densities decrease,whereas the corrosion potential increases when the bilayer period or Ni single-layer thickness decreases.It is found that the passivating behavior and corrosion potential of the multilayers are more sensitive to Ni single-layer thickness than the bilayer period.More corrosion pits and lamellar flaking could be found on the films with larger bilayer period or Ni single-layer thickness.
基金Project supported by the National Natural Science Foundation of China and the "863" Hi-Tech Program of China.
文摘Using the MEVVA ion source, carbon ions have been implanted in TiN coatings deposited by multi-arc ion plating The Vickers microhardness of the C+ -implanted TiN films increased with the increase in the ion flux and dose. X-ray diffraction (XRD) analysis showed that the TiC phases had been formed in the films. In addition, the films had the preferred growth orientations of TiN and TiC, both of which were (111) orientation after annealing at 500℃ for 30 min. Auger electron spectra analysis indicated that C+ -implanted profile was in typical Gaussian-like distribution in single films. The distribution with multipeaks of C atoms was obtained in multi-layer TiN/Ti. The possibility of the multilayer films (Ti (C, N)/TiN/Ti(C, N)/TiN and Ti(C, N)/TiC/Ti(C, N)/TiC) forming using the C-implanted TiN/Ti films is presented for the first time.
基金supported by the National Natural Science Foundation of China(No.10974077)the National Science Foundation of Shandong Province,China(No.2009ZRB01702)the Shandong Province Higher Educational Science and Technology Program,China(No.J10LA08)
文摘Ga2O3/ITO alternating multilayer films were deposited on quartz glass substrates by rnagnetron sputtering. The effect of the multi-period on the structural, optical and electrical properties of Ga2O3/ITO alternating multilayer films was investigated by an X-ray diffractometer, a double beam spectrophotometer and the Hall system, respectively. A low sheet resistance of 225.5 Ω/□ and a high transmittance of more than 62.9% at a 300 nm wavelength were obtained for the two-period alternating multilayer film with a thickness of 72 nm.
