期刊文献+
共找到58篇文章
< 1 2 3 >
每页显示 20 50 100
Time-resolved Microwave Conductivity Studies on the Chemical Treatment of the Nanocrystalline Porous TiO2 Films
1
作者 YuanLIN XuRuiXIAO +3 位作者 WeiYingLI XuePingLI WeiBoWANG imgVongCHENG 《Chinese Chemical Letters》 SCIE CAS CSCD 2003年第7期734-736,共3页
Effect of Ti(iso-C3H7O)4 treatment on the photoinduced charge carrier kinetics of nanocrystalline porous TiO2 films is studied by time-resolved microwave conductivity measurements. Analysis of the transient photocond... Effect of Ti(iso-C3H7O)4 treatment on the photoinduced charge carrier kinetics of nanocrystalline porous TiO2 films is studied by time-resolved microwave conductivity measurements. Analysis of the transient photoconductivity decays indicates that Ti(iso-C3H7O)4 treatment leads to an increased concentration of photogenerated charge carriers and a fast interfacial transfer rate of holes via the surface modification of the freshly growing TiO2 nanocrystallites. 展开更多
关键词 Nanocrystalline porous tio2 films chemical treatment transient photoconductivity charge carrier kinetics time-resolved microwave conductivity.
下载PDF
Nanostructure Study of TiO2 Films Prepared by Dip Coating Process 被引量:2
2
作者 S.M.Attia, Jue WANG, Guangming WU, Jun SHEN and Jianhua MAPohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2002年第1期31-33,共3页
The microstructure properties of the sol-gel derived TiO2 films were studied by the atomic force microscopy (AFM). The films were prepared by dip coating process. The optical properties of the films were explained on ... The microstructure properties of the sol-gel derived TiO2 films were studied by the atomic force microscopy (AFM). The films were prepared by dip coating process. The optical properties of the films were explained on the basis of the microstructure of the films. 展开更多
关键词 Atomic force microscopy tio2 thin film Sol-gel process
下载PDF
Photocatalytic Property of TiO2 Films Deposited by Pulsed DC Magnetron Sputtering 被引量:1
3
作者 Wenjie ZHANG, Shenglong ZHU, Ying LI and Fuhui WANGState Key Laboratory for Corrosion and Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第1期31-34,共4页
TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film deposited for 5 h was of anatase phase with a preferred orientation along the <220> directio... TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film deposited for 5 h was of anatase phase with a preferred orientation along the <220> direction, but the films deposited for 2 and 3 h were amorphous. The transmittance and photocatalytic activity of the TiO2 films increased constantly with increasing film thickness. When the annealing temperature was lower than 700℃, only anatase grew in the TiO2 film. TiO2 phase changed from anatase to rutile when the annealing temperature was above 800℃. The photocatalytic activity decreased with increasing annealing temperature. 展开更多
关键词 tio2 film Photocatalytic activity DC magnetron sputtering Film characteristic
下载PDF
Enhanced Photoelectric Property of Mo-C Codoped TiO2 Films Deposited by RF Magnetron Cosputtering 被引量:2
4
作者 罗胜耘 YAN Bingxi 沈杰 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第2期223-228,共6页
Mo-C codoped TiO2 films were prepared by RF magnetron cosputtering. Ultraviolet-visible spectroscopy, atomic force microscopy, X-ray photoelectron spectroscopy, energy dispersive X-ray Analysis and X-Ray Diffraction w... Mo-C codoped TiO2 films were prepared by RF magnetron cosputtering. Ultraviolet-visible spectroscopy, atomic force microscopy, X-ray photoelectron spectroscopy, energy dispersive X-ray Analysis and X-Ray Diffraction were used to study the influences of codoping on energy gap, surface morphology, valence states of elements, ions content and crystal structure, respectively. The concentration of photogenerated carriers was measured by studying photocurrent density, while catalytic property was evaluated by observing degradation rate of methylene blue under visible light. A Mo-doped TiO2 film, whose content of Mo had been optimized in advance, was prepared and later used for subsequent comparisons with codoped samples. The result indicates that Mo-C codoping could curtail the energy gap and shift the absorption edge toward visible range. Under the illumination of visible light, codoped TiO2 films give rise to stronger photocurrent due to smaller band gaps. It is also found that Mo, C codoping results in a porous surface, whose area declines gradually with increasing carbon content. Carbon and Molybdenum doses were delicately optimized. Under the illumination of visible light, sample doped with 9.78at% carbon and 0.36at% Mo presents the strongest photocurrent which is about 8 times larger than undoped TiO2 films, and about 6 times larger than samples doped with Mo only. 展开更多
关键词 Mo-C codoping tio2 film magnetron sputtering photoelectric photocatalytic property
下载PDF
Preparation of TiO2 and SiC Films from Their Precursors Using Electrospraying
5
作者 时方晓 《沈阳建筑大学学报(自然科学版)》 CAS 北大核心 2010年第6期1166-1171,共6页
Titanium dioxide(TiO2) films were prepared by cone - jet mode electrospraying a titanium ethoxideprecursor solution onto a silicon substrate.The effects of spraying time,substrate temperature and aging on thesurface m... Titanium dioxide(TiO2) films were prepared by cone - jet mode electrospraying a titanium ethoxideprecursor solution onto a silicon substrate.The effects of spraying time,substrate temperature and aging on thesurface morphology of the films prepared were studied.Thin films obtained after spraying for 600 s were aged atroom temperature to form a porous TiO2 network with pores in the size range of 100 - 500 nm.Thicker filmswere prepared by spraying for 3 000 s,but these cracked on drying although it can be concluded that films pre-pared using a higher substrate temperature were denser.By this method,SiC coating was also prepared on anAl2O3 substrate using polysilane as a precursor.The result implies the potential of an industrial production ofdye sensitized solar cells by electrospraying technique. 展开更多
关键词 ELECTROSPRAYING cone-jet mode porous tio2 films SiC coating surface morphology
下载PDF
Inverted organic solar cells with solvothermal synthesized vanadium-doped TiO2 thin films as efficient electron transport layer 被引量:1
6
作者 Mehdi Ahmadi Sajjad Rashidi Dafeh +1 位作者 Samaneh Ghazanfarpour Mohammad Khanzadeh 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第9期406-410,共5页
We investigated the effects of using different thicknesses of pure and vanadium-doped thin films of TiO2 as the electron transport layer in the inverted configuration of organic photovoltaic cells based on poly(3-hex... We investigated the effects of using different thicknesses of pure and vanadium-doped thin films of TiO2 as the electron transport layer in the inverted configuration of organic photovoltaic cells based on poly(3-hexylthiophene) P3HT:[6-6] phenyl-(6) butyric acid methyl ester(PCBM). 1% vanadium-doped TiO2nanoparticles were synthesized via the solvothermal method. Crystalline structure, morphology, and optical properties of pure and vanadium-doped TiO2 thin films were studied by different techniques such as x-ray diffraction, scanning electron microscopy, transmittance electron microscopy, and UV–visible transmission spectrum. The doctor blade method which is compatible with roll-2-roll printing was used for deposition of pure and vanadium-doped TiO2 thin films with thicknesses of 30 nm and 60 nm. The final results revealed that the best thickness of TiO2 thin films for our fabricated cells was 30 nm. The cell with vanadium-doped TiO2 thin film showed slightly higher power conversion efficiency and great Jsc of 10.7 mA/cm^2 compared with its pure counterpart. In the cells using 60 nm pure and vanadium-doped TiO2 layers, the cell using the doped layer showed much higher efficiency. It is remarkable that the external quantum efficiency of vanadium-doped TiO2 thin film was better in all wavelengths. 展开更多
关键词 inverted polymer solar cells electron transport layer vanadium-doped tio2 thin films solvothermal
下载PDF
TiO2-Loaded WO3 Composite Films for Enhancement of Photocurrent Density
7
作者 王文桂 朱丽 +1 位作者 翁雨燕 董雯 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第2期112-116,共5页
Titanium dioxide (TiO2) loaded tungsten trioxide (WO3) composite films are prepared by an E-beam vapor system. Associated with the existence of a heterojunction at the interface of TiO2 and WO3, the prepared TiO2-... Titanium dioxide (TiO2) loaded tungsten trioxide (WO3) composite films are prepared by an E-beam vapor system. Associated with the existence of a heterojunction at the interface of TiO2 and WO3, the prepared TiO2-WO3 composite film shows enhanced photocurrent density, four times than the pure WO3 film illuminated under xenon lamp, and higher incident-photon-to-current conversion e^ciency. By varying the initial TiO2 film thickness, such composite structures could be optimized to obtain the highest photocurrent density. We believe that thin TiO2 films improve the light response and increase the surface roughness of WO3 films. Furthermore, the existence of the heterojunction results in the e^cient charge carriers' separation, transfer process, and a lower recombination of electron-hole pairs, which is beneficial for the enhancement of photocurrent density. 展开更多
关键词 tio2-Loaded WO3 Composite films for Enhancement of Photocurrent Density FTO
下载PDF
Doped-TiO_2 Photocatalysts and Synthesis Methods to Prepare TiO_2 Films 被引量:1
8
作者 Ying GUI Hao DU Lishi WEN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2008年第5期675-689,共15页
TiO2 is a promising photocatalyst. However, the low photocatalytic efficiency calls for the modification of TiO2. Metal- and nonmetal-doping of TiO2 have been proved to be effective ways to enhance photocatalytic prop... TiO2 is a promising photocatalyst. However, the low photocatalytic efficiency calls for the modification of TiO2. Metal- and nonmetal-doping of TiO2 have been proved to be effective ways to enhance photocatalytic properties. This review provides a deep insight into the understanding of the metal- and nonmetal-doped TiO2 photocatalysts. This article begins with the introduction of the crystal structures of TiO2 and applications of TiO2 materials. We then reviewed the doped-TiO2 system in two categories: (1) metal-doped TiO2 photocatalysts system, and (2) nonmetal-doped TiO2 photocatalysts system. Both experimental results and theoretical analyses are elaborated in this section. In the following part, for the advantages of TiO2 thin films over particles, various preparation methods to obtain TiO2 thin films are briefly discussed. Finally, this review ends with a concise conclusion and outlook of new trends in the development of TiO2-based photocatalysts. 展开更多
关键词 tio2 films PHOTOCATALYSIS Metal-doping Nonmetal-doping DFT
下载PDF
Preparation and Enhanced Daylight-Induced Photo-Catalytic Activity of Transparent C-Doped TiO_2 Thin Films 被引量:1
9
作者 白爱英 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2010年第5期738-742,共5页
The transparent C-doped TiO2 nanostructure films were fabricated on the silicate glass substrates by sol-gel spin-coated method. The as-prepared films were characterized by X-ray diffraction (XRD), scanning electron... The transparent C-doped TiO2 nanostructure films were fabricated on the silicate glass substrates by sol-gel spin-coated method. The as-prepared films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-visible absorption spectra (UV-vis) and X-ray photoelectron spectroscopy (XPS). The photocatalytic activity was evaluated via the photocatalytic oxidation of methylene blue in aqueous under daylight irradiation at room temperature. The results show that the daylight-induced photocatalytic activities of the as-prepared films are improved by the C-doping. The calcination temperatures significantly affect the morphology, microstructure and photocatalytic activity of the as-prepared samples. At 723 K, the C-doped TiO2 films exhibit the highest photocatalytic activity due to the synergetic effects of good crystallization, appropriate oxygen vacancies and strong absorption in the near UV and visible-light region. 展开更多
关键词 C-doped tio2 films daylight-induced photocatalytic activity spin-coated
下载PDF
Preparation,structure and ferromagnetic properties of the nanocrystalline Ti_(1-x)Mn_xO_2 thin films grown by radio frequency magnetron co-sputtering 被引量:1
10
作者 丁芃 刘发民 +1 位作者 杨新安 李建奇 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第2期721-725,共5页
This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron cosputtering. X-ray diffraction measurements indicate that the samples are easy to form the futile structure, and the ... This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron cosputtering. X-ray diffraction measurements indicate that the samples are easy to form the futile structure, and the sizes of the crystal grains grow big and big as the Mn concentration increases. X-ray photoemlssion spectroscopy measurements and high resolution transmission electron microscope photographs confirm that the manganese ions have been effectively doped into the TiO2 crystal when the Mn concentration is lower than 21%. The magnetic property measurements show that the Ti1-xMnxO2 (x = 0.21) films are ferromagnetic at room temperature, and the saturation magnetization, coercivity, and saturation field are 16.0 emu/cm^3, 167.5 × 80 A/m and 3740 × 80 A/m at room temperature, respectively. The room-temperature ferromagnetism of the films can be attributed to the new futile Ti1-xMnxO2 structure formed by the substitution of Mn^4+ for Ti^4+ into the TiO2 crystal .lattice, and could be explained by O vacancy (Vo)-enhanced ferromagnetism model. 展开更多
关键词 RF magnetron sputtering Mn-doped tio2 films room-temperature ferromagnetic properties
下载PDF
Influence of Annealing Temperature on the Properties of TiO_2 Films Annealed by ex situ and in situ TEM
11
作者 彭堂超 XIAO Xiangheng +4 位作者 REN Feng XU Jinxia ZHOU Xiaodong MEI Fei 蒋昌忠 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2012年第6期1014-1019,共6页
TiO2 thin films were deposited on quartz substrates by DC reactive magnetron sputtering of a pure Ti target in Ar/O2 plasma at room temperature. The TiO2 films were annealed at different temperatures ranging from 300 ... TiO2 thin films were deposited on quartz substrates by DC reactive magnetron sputtering of a pure Ti target in Ar/O2 plasma at room temperature. The TiO2 films were annealed at different temperatures ranging from 300 to 800 ℃ in a tube furnace under flowing oxygen gas for half an hour each. The effect of annealing temperatures on the structure, optical properties, and morphologies were presented and discussed by using X-ray diffraction, optical absorption spectrura, and atomic force microscope. The films show the presence of diffraction peaks from the (101), (004), (200) and (105) lattice planes of the anatase TiO2 lattice. The direct band gap of the annealed films decreases with the increase of annealing temperature. While, the roughness of the films increases with the increases of annealing temperature, and some significant roughness changes of the TiO2 film surfaces were observed after the annealing temperature reached 800 ℃. Moreover, the influences of annealing on the microstructures of the TiO2 film were investigated also by in situ observation in transmission electron microscope. 展开更多
关键词 tio2 films DC reactive magnetron sputtering ANATASE in situ TEM ANNEALING
下载PDF
Atomic Force Microscopy Studies on the Chemical Treatment of Nanocrystalline Porous TiO_2 Films
12
作者 Yuan LIN Feng Zhi JIANG +3 位作者 Jing Bo ZHANG Yan Lin SONG Lei JIANG Xu Rui XIAO 《Chinese Chemical Letters》 SCIE CAS CSCD 2002年第5期484-486,共3页
AFM has been utilized to study the surface topography and the local conductivity of nanocrystalline TiO2 films. Improving the local conductivity by Ti(iso-C3H7O)4 treatment is characterized by quantitative analysis o... AFM has been utilized to study the surface topography and the local conductivity of nanocrystalline TiO2 films. Improving the local conductivity by Ti(iso-C3H7O)4 treatment is characterized by quantitative analysis of the simultaneous current image. The mechanism of Ti(iso C3H7O)4 treatment is discussed. 展开更多
关键词 Nanocrystalline tio2 films chemical treatments AFM topography local conductivity.
下载PDF
Effects of Substrate Temperature on Properties of Transparent Conductive Ta-Doped TiO_2 Films Deposited by Radio-Frequency Magnetron Sputtering
13
作者 刘洋 彭茜 +1 位作者 周仲品 杨光 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第4期113-117,共5页
Ta-doped titanium dioxide films are deposited on fused quartz substrates using the rf magnetron sputtering technique at different substrate temperatures. After post-annealing at 550℃ in a vacuum, all the films are cr... Ta-doped titanium dioxide films are deposited on fused quartz substrates using the rf magnetron sputtering technique at different substrate temperatures. After post-annealing at 550℃ in a vacuum, all the films are crystallized into the polycrystalline anatase TiO2 structure. The effects of substrate temperature from room temperature up to 350℃ on the structure, morphology, and photoelectric properties of Ta-doped titanium dioxide films are analyzed. The average transmittance in the visible region(400-800 nm) of all films is more than 73%.The resistivity decreases firstly and then increases moderately with the increasing substrate temperature. The polycrystalline film deposited at 150℃ exhibits a lowest resistivity of 7.7 × 10^-4Ω·cm with the highest carrier density of 1.1×10^21 cm^-3 and the Hall mobility of 7.4 cm^2·V^-1s^-1. 展开更多
关键词 TA Effects of Substrate Temperature on Properties of Transparent Conductive Ta-Doped tio2 films Deposited by Radio-Frequency Magnetron Sputtering TIO
下载PDF
Influences of working pressure on properties for TiO_2 films deposited by DC pulse magnetron sputtering 被引量:11
14
作者 ZHANG Can DING Wanyu +2 位作者 WANG Hualin CHAI Weiping JU Dongying 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2009年第6期741-744,共4页
TiO2 films were deposited at room temperature by DC pulse magnetron sputtering system.The crystalline structures,morphological features and photocatalytic activity of TiO2 films were systematically investigated by X-r... TiO2 films were deposited at room temperature by DC pulse magnetron sputtering system.The crystalline structures,morphological features and photocatalytic activity of TiO2 films were systematically investigated by X-ray diffraction(XRD),atomic force microscopy(AFM) and ultraviolet spectrophotometer,respectively.The results indicated that working pressure was the key deposition parameter in?uencing the TiO2 film phase composition at room temperature,which directly affected its photocatalytic activity.With increasing working pressure,the target self-bias decreases monotonously.Therefore,low temperature TiO2 phase(anatase) could be deposited with high working pressure.The anatase TiO2 films deposited with 1.4 Pa working pressure displayed the highest photocatalytic activity by the decomposition of Methyl Orange solution,which the degradation rate reached the maximum(35%) after irradiation by ultraviolet light for 1 h. 展开更多
关键词 tio2 film ANATASE UV induced photocatalysis DC pulse magnetron sputtering
下载PDF
Properties of TiO_2 Thin Films Prepared by Magnetron Sputtering 被引量:7
15
作者 WenjieZHANG YingLI 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2002年第2期101-107,共7页
关键词 tio2 thin film magnetron sputtering deposition process composite film.
下载PDF
Low-temperature Preparation of Photocatalytic TiO_2 Thin Films on Polymer Substrates by Direct Deposition from Anatase Sol 被引量:3
16
作者 Van HU Chunwei YUAN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第2期239-244,共6页
Anatase TiO2 sol was synthesized under mild conditions (75℃ and ambient pressure) by hydrolysis of titaniumn-butoxide in abundant acidic aqueous solution and subsequent reflux to enhance crystallization. At room te... Anatase TiO2 sol was synthesized under mild conditions (75℃ and ambient pressure) by hydrolysis of titaniumn-butoxide in abundant acidic aqueous solution and subsequent reflux to enhance crystallization. At room temperature and in ambient atmosphere, crystalline TiO2 thin films were deposited on polymethylmethacrylate (PMMA), SiO2-coated PMMA and SiO2-coated silicone rubber substrates from the as-prepared TiO2 sol by a dip-coating process. SiO2 layers prior to TiO2 thin films on polymer substrates could not only protect the substrates from the photocatalytic decomposition of the TiO2 thin films but also enhance the adhesion of the TiO2 thin films to the substrates. Field-emission type scanning electron microscope (FE-SEM) investigations revealed that the average particle sizes of the nanoparticles composing the TiO2 thin films were about 35-47 nm. The TiO2 thin films exhibited high photocatalytic activities in the degradation of reactive brilliant red dye X-3B in aqueous solution under aerated conditions. The preparation process of photocatalytic TiO2 thin films on the polymer substrates was quite simple and a low temperature route. 展开更多
关键词 Low temperature Anatase nanoparticle tio2 film Thermosensitive substrate Photocatalytic activity
下载PDF
Formation of TiO2 Modified Film on Carbon Steel 被引量:2
17
作者 LaizhouSONG ShizheSONG ZhimingGAO 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第5期599-601,共3页
A new technique for preparing TiO2 modified film on carbon steel was accomplished by electroless plating and sol-gel composite process. The artificial neural network was applied to optimize the preparing condition of ... A new technique for preparing TiO2 modified film on carbon steel was accomplished by electroless plating and sol-gel composite process. The artificial neural network was applied to optimize the preparing condition of TiO2 modified film. The optimized condition for forming TiO2 modified film on carbon steel was that NiP plating for 50 min, dip-coating times as 4, heat treatment time for 2 h, and the molar ratio of complexing agent and Ti(OC4HZ9)4 kept 1.5:1. The results showed that TiO2 modified film have good corrosion resistance. The result conformed that it is feasible to design the preparing conditions of TiO2 modified film by artificial neural network. 展开更多
关键词 Electroless plating Sol-gel composite process Artificial neural network tio2 modified film Corrosion resistance
下载PDF
STUDY ON PHOTOCATALYTIC MECHANISM OF SOL-GEL-DERIVED Pb-DOPED TiO_2 THIN FILMS 被引量:2
18
作者 YU Jiaguo ZHAO Qingnan ZHAO Xiujian Wuhan University of Technology 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 1999年第4期1-8,共8页
Pb-doped TiO2 photocatalytic thin films were prepared on a soda-lime glass substrate via sol-gel method using TiO2 sol solution containing lead and characterized by X-ray photoelectron spectroscopy (XPS). The results ... Pb-doped TiO2 photocatalytic thin films were prepared on a soda-lime glass substrate via sol-gel method using TiO2 sol solution containing lead and characterized by X-ray photoelectron spectroscopy (XPS). The results showed that besides oxides of Ti(IV) there is a certain amount of oxides of To(?) and Ti(?) and Pb exists in the forms of PbTiO3 and PbO. The photocatalytic activity of the Pb-doped TiO2 films was evaluated by the photocatalytic decolorization of aqueous methyl orange and photocatalytic mechanism mas also analyzed. 展开更多
关键词 sol-gel method Pb-doped tio2 thin films XPS photocatalytK mechanism
下载PDF
PREPARATION OF TiO_2 THIN FILMS BY MOCVD METHOD 被引量:2
19
作者 Tong Jun, Zhang Tong, Zhang Liang-ying, Yao Xi Electronic Materials Research Laboratory, Xi’an Jiaotong University. Xa’an, Shaanxi, 710049, China 《真空科学与技术学报》 EI CAS CSCD 1992年第Z1期215-218,共4页
Preparation of TiO<sub>2</sub> thin films by MOCVD method is presented in this paper. A MOCVD system has been designed and built. A wide range of processing conditions are investigated to deposit TiO<su... Preparation of TiO<sub>2</sub> thin films by MOCVD method is presented in this paper. A MOCVD system has been designed and built. A wide range of processing conditions are investigated to deposit TiO<sub>2</sub> films on Si wafers starting from metal-organic precursor tetrabutyl titanate. Activation energy of the film formation (E) is obtained to be 23.6 kJ/mol. Structure of films is pure anatase when deposit temperatures are low, rutile forms at 700℃. The films also exhibit preferred crystallographic orientations which strongly depend on deposit conditions. Refractive index increases with increasing of film thickness and decreasing of deposit temperature. 展开更多
关键词 MOCVD RATE PREPARATION OF tio2 THIN films BY MOCVD METHOD TIO
下载PDF
Tuning Effect of N_2 on Atmospheric-Pressure Cold Plasma CVD of TiO_2 Photocatalytic Films 被引量:2
20
作者 底兰波 李小松 +3 位作者 赵天亮 常大磊 刘倩倩 朱爱民 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第1期64-69,共6页
To deposit TiO2 films through plasma CVD, the partial pressure ratio of O2 to TIC14 should be greater than the stoichiometric ratio (PO2/PTiCl4 〉 1). However, this may lead to the formation of powder instead of fil... To deposit TiO2 films through plasma CVD, the partial pressure ratio of O2 to TIC14 should be greater than the stoichiometric ratio (PO2/PTiCl4 〉 1). However, this may lead to the formation of powder instead of film on the substrate when using volume dielectric barrier discharge (volume-DBD) at atmospheric pressure. In this study, by adding N2 into the working gas Ar, TiO2 photocatalytic films were successfully fabricated in the presence of excess O2 (PO2/PTiC14 = 2.6) by using a wire-to-plate atmospheric-pressure volume-DBD. The tuning effect of N2 on the deposition of TiO2 film was studied in detail. The results showed that by increasing the N2 content, the deposition rate and particle size of the TiO2 film were reduced, and its photocatalytic activity was enhanced. The tuning mechanism of N2 is further discussed. 展开更多
关键词 plasma CVD tio2 photocatalytic films atmospheric-pressure cold plasma dielectric barrier discharge (DBD) optical emission spectra (OES)
下载PDF
上一页 1 2 3 下一页 到第
使用帮助 返回顶部