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Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors 被引量:1
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作者 王文博 谷航 +4 位作者 何兴理 轩伟鹏 陈金凯 汪小知 骆季奎 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第5期563-566,共4页
Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into ... Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric (PE) ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application. 展开更多
关键词 surface acoustic wave ultraviolet sensor ZNO thermal annealing
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