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Dual-negative-objective Coordinated Control of Brushless Doubly Fed Induction Generator under Unbalanced Grid Voltage
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作者 Ming Cheng Zheng Cao Xiaoming Yan 《CES Transactions on Electrical Machines and Systems》 EI CSCD 2024年第3期347-355,共9页
This article proposes a dual-negative-objective coordinated control strategy for brushless doubly fed induction generator(BDFIG)based wind power generation system under unbalanced grid voltage.To alleviate the mechani... This article proposes a dual-negative-objective coordinated control strategy for brushless doubly fed induction generator(BDFIG)based wind power generation system under unbalanced grid voltage.To alleviate the mechanical stress and impaction on rotating shaft,the negative control objective(NCO)of machine side converter(MSC)is set to suppress the ripple of electromagnetic torque.While the NCO of grid side converter(GSC)is selected to suppress the oscillation of total output active power or the unbalanced degree of total output current for BDFIG generation system.In comparison with traditional single converter control scheme of the MSC or GSC,dual NCOs can be satisfied at the same time due to the enlarged freedom degree in the proposed improved coordinated control system for back-toback converters.The effectiveness of proposed control strategy is validated by simulation and experimental results on a dual-cagerotor BDFIG(DCR-BDFIG)prototype. 展开更多
关键词 Brushless doubly fed induction generator Dual-negative-objective Freedom degree unbalanced grid voltage
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An Efficient Approach for Transforming Unbalanced Transportation Problems into Balanced Problems in Order to Find Optimal Solutions
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作者 Abdur Rashid Md. Amirul Islam 《American Journal of Operations Research》 2024年第1期74-86,共13页
In operations research, the transportation problem (TP) is among the earliest and most effective applications of the linear programming problem. Unbalanced transportation problems reflect the reality of supply chain a... In operations research, the transportation problem (TP) is among the earliest and most effective applications of the linear programming problem. Unbalanced transportation problems reflect the reality of supply chain and logistics situations where the available supply of goods may not precisely match the demand at different locations. To deal with an unbalanced transportation problem (UTP), it is essential first to convert it into a balanced transportation problem (BTP) to find an initial basic feasible solution (IBFS) and hence the optimal solution. The present paper is concerned with introducing a new approach to convert an unbalanced transportation problem into a balanced one and as a consequence to obtain optimum total transportation cost. Numerical examples are provided to demonstrate the suggested method. 展开更多
关键词 unbalanced Transportation Problem (UTP) Supply DEMAND Initial Solution Optimal Solution
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Modeling and optimization of unbalanced multi-stage logistic system
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作者 徐杭 徐榕 叶庆泰 《Journal of Southeast University(English Edition)》 EI CAS 2005年第2期220-224,共5页
To decompose an unbalanced multi-stage logistic system to multipleindependent single-stage logistic systems, a new notion of parameterized interface distribution ispresented. For encoding the logistic pattern on each ... To decompose an unbalanced multi-stage logistic system to multipleindependent single-stage logistic systems, a new notion of parameterized interface distribution ispresented. For encoding the logistic pattern on each stage, the Pruefer number is used. With theimproved decoding procedure, any Pruefer number produced stochastically can be decoded to a feasiblelogistic pattern, which can match with the capacities of the nodes of the logistic system. Withthese two innovations, a new modeling method based on parameterized interface distribution and thePriifer number coding is put forward. The corresponding genetic algorithm, named as PIP-GA, can findbetter solutions and require less computational time than st-GA. Although requiring a little moreconsumption of memory, PIP-GA is still an efficient and robust method in the modeling andoptimization of unbalanced multi-stage logistic systems. 展开更多
关键词 LOGISTICS optimization genetic algorithm Priifer number spanning tree parameterized interface distribution unbalanced multi-stage logistic system
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Torsional vibration analysis of lathe spindle system with unbalanced workpiece 被引量:5
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作者 郭瑞 JANG Sung-Hyun CHOI Young-Hyu 《Journal of Central South University》 SCIE EI CAS 2011年第1期171-176,共6页
For the purpose of analyzing the torsional vibration caused by the gravitational unbalance torque arisen in a spindle system when it is machining heavy work piece,a 10-DOF lumped parameter model was made for the machi... For the purpose of analyzing the torsional vibration caused by the gravitational unbalance torque arisen in a spindle system when it is machining heavy work piece,a 10-DOF lumped parameter model was made for the machine tool spindle system with geared transmission.By using the elementary method and Runge-Kutta method in Matlab,the eigenvalue problem was solved and the pure torsional vibration responses were obtained and examined.The results show that the spindle system cannot operate in the desired constant rotating speed as far as the gravitational unbalance torque is engaged,so it may cause bad effect on machining accuracy.And the torsional vibration increases infinitely near the resonant frequencies,so the spindle system cannot operate normally during these spindle speed ranges. 展开更多
关键词 unbalanced work piece gravitational unbalance torque torsional vibration spindle system geared transmission
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Influence and determinative factors of ion-to-atom arrival ratio in unbalanced magnetron sputtering systems 被引量:8
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作者 Jun Zhou Zhe Wu Zhanhe Liu 《Journal of University of Science and Technology Beijing》 CSCD 2008年第6期775-781,共7页
Low pressure sputtering with a controlled ratio of ion flux to deposited atom flux at the condensing surface is one of the main directions of development of magnetron sputtering methods. Unbalanced magnetron sputterin... Low pressure sputtering with a controlled ratio of ion flux to deposited atom flux at the condensing surface is one of the main directions of development of magnetron sputtering methods. Unbalanced magnetron sputtering, by producing dense secondary plasma around the substrate, provides a high ion current density. The closed-field unbalanced magnetron sputtering system (CFUBMS) has been established as a versatile technique for high-rate deposition high-quality metal, alloy, and ceramic thin films. The'key factor in the CFUBMS system is the ability to transport high ion currents to the substrate, which can enhance the formation of full dense coatings at relatively low value homologous temperature. The investigation shows that the energy of ions incidenced at the substrate and the ratio of the flux of these ions to the flux of condensing atoms are the fundamental parameters in determining the structure and properties of films produced by ion-assisted deposition processes. Increasing ion bombardment during deposition combined with increasing mobility of the condensing atoms favors the formation of a dense microstructure and a smooth surface. 展开更多
关键词 magnetron sputtering closed-field unbalanced magnetron sputtering system (CFUBMS) ion-to-atom ratio unbalancedmagnetron sputtering
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Experimental study of suppressing the unbalanced response vibration of rotor system with a G-type integral squeeze film damper 被引量:1
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作者 Yan Wei He Lidong +2 位作者 Zhang Yufei Zhang Yipeng Jia Xingyun 《High Technology Letters》 EI CAS 2021年第1期1-9,共9页
Conventional squeeze film dampers have numerous challenges including lock up,bistable response and incoordinate precession.In order to resolve these nonlinear problems,a novel G-type integral squeeze film damper(GISFD... Conventional squeeze film dampers have numerous challenges including lock up,bistable response and incoordinate precession.In order to resolve these nonlinear problems,a novel G-type integral squeeze film damper(GISFD)is proposed in this research.The experimental test rig is provided to investigate the rotor system with an unbalanced single disk.Numerical simulation results show that the structural design of GISFD is reasonable,which can ensure its safe and stable operation.The influence of different support stiffnesses on the first-order speed of the rotor system is analyzed.Experimental results show that GISFD can effectively suppress the unbalanced response vibration of the rotor.In a certain range,it is found that the suppression effect of GISFD increases with the increase in the kinematic viscosity of the damping fluid.When the silicone oil with kinematic viscosity coefficients v=30.0 cm^(2)/s is employed,the vibration reduction of GISFD is approximately 71.51%.Furthermore,the experimental results show that with the increase of the unbalance,there is a linear relationship between the unbalance and the corresponding amplitude of the unbalanced response.It is concluded that GISFD has excellent linear damping characteristics and reduces the sensitivity of the rotor system to the unbalanced mass. 展开更多
关键词 G-type integral squeeze film damper(GISFD) unbalanced response vibration suppression rotor system dynamic characteristic
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The Effects of Mutual Coupling and Transformer Connection Type on Frequency Response of Unbalanced Three Phase Electrical Distribution System
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作者 Omer Gul Adnan Kaypmaz 《Energy and Power Engineering》 2010年第4期238-247,共10页
In this paper, a novel harmonic modeling technique by utilizing the concept of multi-terminal components is presented and applied to frequency scan analysis in multiphase distribution system. The proposed modeling tec... In this paper, a novel harmonic modeling technique by utilizing the concept of multi-terminal components is presented and applied to frequency scan analysis in multiphase distribution system. The proposed modeling technique is based on gathering the same phase busses and elements as a separate group (phase grouping technique, PGT) and uses multi-terminal components to model three-phase distribution system. Using multi- terminal component and PGT, distribution system elements, particularly, lines and transformers can effectively be modeled even in harmonic domain. The proposed modeling technique is applied to a test system for frequency scan analysis in order to show the frequency response of the test system in single and three-phase conditions. Consequently, the effects of mutual coupling and transformer connection types on three-phase frequency scan responses are analyzed for symmetrical and asymmetrical line configurations. 展开更多
关键词 HARMONIC RESONANCE unbalanced Distribution system Frequency SCAN
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Unbalanced Load Simulation of Electronic Power Transformer in Distribution System
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作者 Wang Dan Mao Chengxiong +3 位作者 Lu Jiming Fan Shu Cao Jiewei Wang Ben(Translated) 《Electricity》 2006年第1期38-43,共6页
A control scheme of electronic power transformer (EPT) in a three-phase four-wire distribution system, which included an input section, an isolating section and an output section, was researched under unbalanced loads... A control scheme of electronic power transformer (EPT) in a three-phase four-wire distribution system, which included an input section, an isolating section and an output section, was researched under unbalanced loads. The simple and appropriate control scheme was developed through analyzing the system requirements of the primary side and the load requirements of the secondary side. In the input section, a dual-loop control in synchronous rotating d-q coordinates was introduced, and in the output section, a dual-loop control based on instantaneous output voltage was used. Load characteristics of EPT were investigated by using Matlab/Simulink software. Simulation results showed that, with the proposed control scheme, the EPT has good performances and the sinusoidal input current and constant output voltage can be realized under both balanced and unbalanced loads. 展开更多
关键词 electronic power transformer distribution system unbalanced load
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Stability mechanism and control of the pumpable supports in longwall recovery room
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作者 Dong Zhang Jianbiao Bai +8 位作者 Zhijun Tian Zizheng Zhang Yonghong Guo Rui Wang Ying Xu Hao Fu Shuai Yan Min Deng Shuaigang Liu 《International Journal of Mining Science and Technology》 SCIE EI CAS CSCD 2024年第7期957-974,共18页
The load-bearing performance(LBP)of pumpable supports(PPS)is crucial for the stability of longwall pre-driven recovery room(PRR)surrounding rock.However,the unbalanced bearing coefficient(UBC)of the PPS(undertaking un... The load-bearing performance(LBP)of pumpable supports(PPS)is crucial for the stability of longwall pre-driven recovery room(PRR)surrounding rock.However,the unbalanced bearing coefficient(UBC)of the PPS(undertaking unequal load along the mining direction)has not been investigated.A mechanical model of the PRR was established,considering the main roof cantilever beam structure,to derive an assessment formula for the load,the failure criteria,and the UBC of the PPS.Subsequently,the generation mechanisms,and influencing factors of the UBC were revealed.Global sensitivity analysis shows that the main roof hanging length(l_(2))and the spacing between the PPS(r)significantly impact the UBC.A novel design of the PPS and the coupling control technology were proposed and applied to reduce the UBC of the PPS in the adjacent longwall PRR.Monitor results showed no failure of the PPS at the test site,with the UBC(ζ)reduced to 1.1 consistent with the design value(1.15)basically,fully utilizing the collaborative LBP of the PPS.Finally,the maximum roof-to-floor convergence of the PRR was 234 mm,effectively controlling the stability of the surrounding rock of the PRR and ensuring the mining equipment recovery. 展开更多
关键词 Pre-driven recovery room Pumpable supports unbalanced bearing coefficient Hydraulic fracture Stability analysis Surrounding rock control
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Analyzing the Wind-Dominant Electricity Market under Coexistence of Regulated and Deregulated Power Trading
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作者 Yirui Li Dongliang Xiao +2 位作者 Haoyong Chen Weijun Cai Josue Campos do Prado 《Energy Engineering》 EI 2024年第8期2093-2127,共35页
Currently,both regulated and deregulated power trading exist in China’s power system,which has caused imbalanced funds in the electricity market.In this paper,a simulation analysis of the electricity market with wind... Currently,both regulated and deregulated power trading exist in China’s power system,which has caused imbalanced funds in the electricity market.In this paper,a simulation analysis of the electricity market with wind energy resources is conducted,and the calculation methods of unbalanced funds are investigated systematically.In detail,the calculation formulas of unbalanced funds are illustrated based on their definition,and a two-track electricity market clearing model is established.Firstly,the concept of the dual-track system is explained,and the specific calculation formulas of various types of unbalanced funds are provided.Next,considering the renewable energy consumption,the market clearing model based on DC power flow is constructed and solved;by combining fitting methods of mid-and long-term curves,the unbalanced funds are calculated based on clearing results and formulas. 展开更多
关键词 Dual-track system electricity market renewable energy unbalanced funds
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A Survey of Unbalanced Flow Diagnostics and Their Application 被引量:23
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作者 Fuqing Zhang Steven E. Koch Christopher A. Davis and Michael L. Kaplan 《Advances in Atmospheric Sciences》 SCIE CAS CSCD 2000年第2期165-183,共19页
This paper presents an extensive survey of the most commonly used tools for diagnosing unbalanced flow in the atmosphere, namely the Lagrangian Rossby number, Psi vector, divergence equation, nonlinear balance equatio... This paper presents an extensive survey of the most commonly used tools for diagnosing unbalanced flow in the atmosphere, namely the Lagrangian Rossby number, Psi vector, divergence equation, nonlinear balance equation, generalized omega-equation, and departure from fields obtained by potential vorticity (PV) inversion. The basic thoery, assumptions as well as implementation and limitations for each of the tools are all discussed. These tools are applied to high—resolution mesoscale model data to assess the role of unbalanced dynamics in the generation of a mesoscale gravity wave event over the East Coast of the United States. Comparison of these tools in this case study shows that these various methods agree to a large extent with each other though they differ in details. Key words Unbalanced flow - Geostrophic adjustment - Gravity waves - Nonlinear balance equation - Potential vorticity inversion - Omega equations - Rossby number This research was conducted under support from NSF grant ATM-9700626 of the United States. The numerical computations described herein were performed on the Cray T90 at the North Carolina Supercomputing Center and the Cray supercomputer at the NCAR Scientific Computing Division, which also provided the initialization fields for the MM5. Thanks are extended to Mark Stoelinga at University of Washington for the RIP post-processing package. 展开更多
关键词 unbalanced flow Geostrophic adjustment Gravity waves Nonlinear balance equation Potential vorticity inversion Omega equations Rossby number
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Enhanced control of DFIG-used back-to-back PWM VSC under unbalanced grid voltage conditions 被引量:20
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作者 HU Jia-bing HE Yi-kang NIAN Heng 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2007年第8期1330-1339,共10页
This paper presents a unified positive-and negative-sequence dual-dq dynamic model of wind-turbine driven doubly-fed induction generator(DFIG) under unbalanced grid voltage conditions. Strategies for enhanced control ... This paper presents a unified positive-and negative-sequence dual-dq dynamic model of wind-turbine driven doubly-fed induction generator(DFIG) under unbalanced grid voltage conditions. Strategies for enhanced control and operation of a DFIG-used back-to-back(BTB) PWM voltage source converter(VSC) are proposed. The modified control design for the grid-side converter in the stationary αβ frames diminishes the amplitude of DC-link voltage ripples of twice the grid frequency,and the two proposed control targets for the rotor-side converter are alternatively achieved,which,as a result,improve the fault-ride through(FRT) capability of the DFIG based wind power generation systems during unbalanced network supply. A complete unbalanced control scheme with both grid-and rotor-side converters included is designed. Finally,simulation was carried out on a 1.5 MW wind-turbine driven DFIG system and the validity of the developed unified model and the feasibility of the proposed control strategies are all confirmed by the simulated results. 展开更多
关键词 unbalanced grid voltage Doubly-fed induction generator (DFIG) Back-to-back (BTB) Fault-ride through (FRT) Voltage source converter (VSC)
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LINEAR PROVABLE SECURITY FOR A CLASS OF UNBALANCED FEISTEL NETWORK 被引量:3
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作者 Wang Nianping Jin Chenhui Yu Zhaoping 《Applied Mathematics(A Journal of Chinese Universities)》 SCIE CSCD 2005年第4期401-406,共6页
A structure iterated by the unbalanced Feistel networks is introduced. It is showed that this structure is provable resistant against linear attack. The main result of this paper is that the upper bound of r-round (r... A structure iterated by the unbalanced Feistel networks is introduced. It is showed that this structure is provable resistant against linear attack. The main result of this paper is that the upper bound of r-round (r≥2m) linear hull probabilities are bounded by q^2 when around function F is bijective and the maximal linear hull probabilities of round function F is q. Application of this structure to block cipher designs brings out the provable security against linear attack with the upper bounds of probabilities. 展开更多
关键词 unbalanced Feistel networks provable security against linear attack linear hull probabilities upper bound.
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Dynamic modeling and direct power control of wind turbine driven DFIG under unbalanced network voltage conditions 被引量:2
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作者 Jia-bing HU Yi-kang HE Lie XU 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2008年第12期1731-1740,共10页
This paper proposes an analysis and a direct power control (DPC) design of a wind turbine driven doubly-fed induction generator (DFIG) under unbalanced network voltage conditions. A DFIG model described in the positiv... This paper proposes an analysis and a direct power control (DPC) design of a wind turbine driven doubly-fed induction generator (DFIG) under unbalanced network voltage conditions. A DFIG model described in the positive and negative synchronous reference frames is presented. Variations of the stator output active and reactive powers are fully deduced in the presence of negative sequence supply voltage and rotor flux. An enhanced DPC scheme is proposed to eliminate stator active power oscillation during network unbalance. The proposed control scheme removes rotor current regulators and the decomposition processing of positive and negative sequence rotor currents. Simulation results using PSCAD/EMTDC are presented on a 2-MW DFIG wind power generation system to validate the feasibility of the proposed control scheme under balanced and unbalanced network conditions. 展开更多
关键词 Doubly-fed induction generator (DFIG) Wind turbine Direct power control (DPC) Stator voltage oriented (SVO) unbalanced network
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A Nonlinear Control Strategy for Vienna Rectifier Under Unbalanced Input Voltage 被引量:1
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作者 REN Xiaoyong CHEN Yu +2 位作者 TONG Dan ZHANG Zhiliang CHEN Qianhong 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2019年第5期703-714,共12页
The Vienna rectifier with unbalanced input voltage and load transient is analyzed.A nonlinear control strategy for Vienna rectifier under unbalanced input is proposed.From the view of positive and negative sequence co... The Vienna rectifier with unbalanced input voltage and load transient is analyzed.A nonlinear control strategy for Vienna rectifier under unbalanced input is proposed.From the view of positive and negative sequence components,the proposed nonlinear control strategy suppresses the twice frequency ripple and guarantees the dynamic response characteristic at the same time.Thanks to the proposed nonlinear control strategy,the DC bus capacitor can be reduced a lot since the voltage ripple and drop can be suppressed.A 10 kW Vienna rectifier is built to verify the proposed control strategy.After applying the proposed nonlinear control strategy,the voltage ripple is only7 V and decreases over 75%over the traditional PI control when the unbalanced degree is 20%.The voltage drop can be reduced about 80%than former control strategy which is helpful to reduce the DC bus capacitor and achieve higher power density.The volume of the capacitor can be reduced by 83.3%with the new control method. 展开更多
关键词 VIENNA RECTIFIER radars unbalanced INPUT voltage NONLINEAR control strategy DC BUS CAPACITANCE
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The Effect of Unbalanced Coefficient of Magnetron on the Structure and Properties of CN_x Coatings 被引量:1
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作者 文晓斌 李显 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2011年第2期274-280,共7页
The effect of unbalanced coefficient of magnetron (UCM) on the structure and tribological properties of CrNx hard coatings was studied.The CrNx coatings were deposited on both Si wafer and hardened tool steel substr... The effect of unbalanced coefficient of magnetron (UCM) on the structure and tribological properties of CrNx hard coatings was studied.The CrNx coatings were deposited on both Si wafer and hardened tool steel substrates using a closed-field unbalanced magnetron sputtering ion plating technique in a gas mixture of Ar+N2 under different unbalanced magnetron conditions.The coatings were characterized by means of XRD,XPS,SEM,microhardness tester and pin-on-disc tribometer to study respectively their structure,chemical bonding state,microstructure,hardness and tribological properties.The experimental results show that the UCM has a profound effect on the structure,hardness and tribological properties of the CrNx coatings.With increasing the values of UCM,the dominant phases in the deposited coatings evolved from Cr+Cr2N to Cr2N+CrN,the microstructure became denser and the hardness increased;in addition,reduced coefficient of friction and improved wear resistance of CrNx coatings were also observed under a larger UCM. 展开更多
关键词 magnetron sputtering unbalanced coefficient CrNx coating structure properties
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Gyroscope Fault Diagnosis Using Fuzzy SVM to Unbalanced Samples 被引量:1
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作者 罗秋凤 张锐 +1 位作者 李勇 杨忠清 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2015年第1期16-21,共6页
A novel fuzzy support vector machine based on unbalanced samples(FSVM-US)is proposed to solve the high false positive rate problem since the gyroscope output is susceptible to unmanned aerial vehicle(UAV)airborne elec... A novel fuzzy support vector machine based on unbalanced samples(FSVM-US)is proposed to solve the high false positive rate problem since the gyroscope output is susceptible to unmanned aerial vehicle(UAV)airborne electromagnetic environment and the gyroscope abnormal signal sample is rather rare.Firstly,the standard deviation of samples projection to normal vector for SVM classifier hyper plane is analyzed.The imbalance feature expression reflecting the hyper plane shift for the number imbalance between samples and the dispersion imbalance within samples is derived.At the same time,the denoising factor is designed as the exponential decay function based on the Euclidean distance between each sample and the class center.Secondly,the imbalance feature expression and denoising factor are configured into the membership function.Each sample has its own weight denoted the importance to the classifier.Finally,the classification simulation experiments on the gyroscope fault diagnosis system are conducted and FSVM-US is compared with the standard SVM,FSVM,and the four typical class imbalance learning(CIL)methods.The results show that FSVM-US classifier accuracy is 12% higher than that of the standard SVM.Generally,FSVM-US is superior to the four CIL methods in total performance.Moreover,the FSVMUS noise tolerance is also 17% higher than that of the standard SVM. 展开更多
关键词 fault diagnosis GYROSCOPE fuzzy support vector machine(FSVM) unbalanced samples membership function
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Energy-balanced clustering protocol for data gathering in wireless sensor networks with unbalanced traffic load 被引量:1
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作者 奎晓燕 王建新 张士庚 《Journal of Central South University》 SCIE EI CAS 2012年第11期3180-3187,共8页
Energy-efficient data gathering in multi-hop wireless sensor networks was studied,considering that different node produces different amounts of data in realistic environments.A novel dominating set based clustering pr... Energy-efficient data gathering in multi-hop wireless sensor networks was studied,considering that different node produces different amounts of data in realistic environments.A novel dominating set based clustering protocol (DSCP) was proposed to solve the data gathering problem in this scenario.In DSCP,a node evaluates the potential lifetime of the network (from its local point of view) assuming that it acts as the cluster head,and claims to be a tentative cluster head if it maximizes the potential lifetime.When evaluating the potential lifetime of the network,a node considers not only its remaining energy,but also other factors including its traffic load,the number of its neighbors,and the traffic loads of its neighbors.A tentative cluster head becomes a final cluster head with a probability inversely proportional to the number of tentative cluster heads that cover its neighbors.The protocol can terminate in O(n/lg n) steps,and its total message complexity is O(n2/lg n).Simulation results show that DSCP can effectively prolong the lifetime of the network in multi-hop networks with unbalanced traffic load.Compared with EECT,the network lifetime is prolonged by 56.6% in average. 展开更多
关键词 ENERGY-BALANCE CLUSTERING data gathering wireless sensor networks unbalanced traffic load
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Fabrication of Diamond-like Carbon Films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputtering 被引量:1
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作者 ZHANG Yi-chen SUN Shao-ni +2 位作者 ZHOU Yi MA Sheng-ge BA De-chun 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2006年第B12期119-125,共7页
Diamond-like carbon (DLC) films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the... Diamond-like carbon (DLC) films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the Hall discharging current and the argon/nitrogen ratio on the DLC film's performance were studied. The experimental results show that the film's surface roughness, the hardness and the Young's modulus increase firstly and then decrease with the bias voltage incrementally increases. Also when the substrate temperature rises, the surface roughness of the film varies slightly, but its hardness and Young's modulus firstly increase followed by a sharp decrease when the temperature surpassing 120 ℃. With the Hall discharging current incrementally rising, the hardness and Young's modulus of the film decrease and the surface roughness of the film on 316L stainless steel firstly decreased and then remains constant. 展开更多
关键词 fluid machinery and engineering diamond-like carbon films middle frequency unbalanced magnetron sputtering hall ion source
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Cu Films Deposited by Unbalanced Magnetron Sputtering Enhanced by ICP and External Magnetic Field Confinement 被引量:1
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作者 齐雪莲 任春生 +1 位作者 马腾才 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第3期319-322,共4页
Metallic copper(Cu) films were deposited on a Si (100) substrate by unbalanced magnetron sputtering enhanced by radio-frequency plasma and external magnetic field confinement. The morphology and structure of the f... Metallic copper(Cu) films were deposited on a Si (100) substrate by unbalanced magnetron sputtering enhanced by radio-frequency plasma and external magnetic field confinement. The morphology and structure of the films were examined by scanning electron microscopy (SEM), atomic force microscope (AFM) and X-ray diffraction (XRD). The surface average roughness of the deposited Cu films was characterized by AFM data and resistivity was measured by a four-point probe. The results show that the Cu films deposited with radio-frequency discharge enhanced ionization and external magnetic field confinement have a smooth surface, low surface roughness and low resistivity. The reasons may be that the radio-frequency discharge and external magnetic field enhance the plasma density, which further improves the ion bombardment effect under the same bias voltage conditions. Ion bombardment can obviously influence the growth features and characteristics of the deposited Cu films. 展开更多
关键词 unbalanced magnetron sputtering RADIO-FREQUENCY magnetic field Cu film
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