We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system ...We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system （MEMS） process. The metal interconnection of the device is fabricated by a 0.5 μm standard CMOS process on 8-inch silicon wafer. Then, a SiO2-Si low-temperature fusion bonding is developed to bond the CMOS wafer and the MEMS wafer, with the electrical connection realized by the tungsten through silicon via process. Wafer- level A1Ge euteetic bonding is adopted to package the Pirani gauge in a non-hermetic cavity to protect the gauge from being damaged or contaminated in the dicing and assembling process, and to make it suitable for actual applications. To increase the accuracy of the test and restrain negative influence of temperature drift, the Wheatstone bridge structure is introduced. The test results show that before capping, the gauge has an average sensitivity of 1.04 × 104 K.W-1Torr-1 in dynamic range of 0.01 20 Torr. After capping, the sensitivity of the gauge does not decrease but increases to 1.12 × 104 K.W-1 Torr-1.展开更多
As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-g...As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-grade spinning rotor vacuum gauge is developed,and its performance is evaluated.It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems.This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system,a high-speed rotary stepper drive system,a rotational angular velocity determination system,a lateral damping system,and a transducer in detail.The change in residual drag is less than 0.49%after 50 minutes of start-up.There is good consistency and linearity in the range of 9.1727×10^(−5)Pa to 1.2081 Pa.展开更多
基金Supported by the National High Technology Research and Development Program of China under Grant No 2015AA042602
文摘We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system （MEMS） process. The metal interconnection of the device is fabricated by a 0.5 μm standard CMOS process on 8-inch silicon wafer. Then, a SiO2-Si low-temperature fusion bonding is developed to bond the CMOS wafer and the MEMS wafer, with the electrical connection realized by the tungsten through silicon via process. Wafer- level A1Ge euteetic bonding is adopted to package the Pirani gauge in a non-hermetic cavity to protect the gauge from being damaged or contaminated in the dicing and assembling process, and to make it suitable for actual applications. To increase the accuracy of the test and restrain negative influence of temperature drift, the Wheatstone bridge structure is introduced. The test results show that before capping, the gauge has an average sensitivity of 1.04 × 104 K.W-1Torr-1 in dynamic range of 0.01 20 Torr. After capping, the sensitivity of the gauge does not decrease but increases to 1.12 × 104 K.W-1 Torr-1.
文摘As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-grade spinning rotor vacuum gauge is developed,and its performance is evaluated.It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems.This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system,a high-speed rotary stepper drive system,a rotational angular velocity determination system,a lateral damping system,and a transducer in detail.The change in residual drag is less than 0.49%after 50 minutes of start-up.There is good consistency and linearity in the range of 9.1727×10^(−5)Pa to 1.2081 Pa.
