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A Novel Approach for Micro-electro-mechanical System(MEMS) Vacuum Packaging
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作者 WANG Cheng-gang GAN Zhi-yin WANG Xue-fang LIN Dong LIU Sheng ZHANG Hong-hai 《International Journal of Plant Engineering and Management》 2008年第3期148-153,共6页
MEMS vacuum packaging is now the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process cannot meet the requirement of the ultra low le... MEMS vacuum packaging is now the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process cannot meet the requirement of the ultra low leak. But the process cannot be improved with the existing technology. We propose a novel approach for MEMS vacuum packaging which can remarkably lower the leak rate. This paper analyzed the vacuum maintaining time of the vacuum packaging and compared the current design and new packaging method. 展开更多
关键词 vacuum packaging leak rate vacuum maintenance
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Vacuum Packaging Sensor Based on Time-Resolved Phosphorescence Spectroscopy
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作者 Esmaeil HEYDARI Fatemeh YARI Hossein ZARE-BEHTASH 《Photonic Sensors》 SCIE EI CSCD 2024年第1期1-12,共12页
Intelligent food packaging with the multisensory analysis is promising as the next generation technology of food packaging.The oxygen content in food packaging is one of the crucial parameters affecting the food quali... Intelligent food packaging with the multisensory analysis is promising as the next generation technology of food packaging.The oxygen content in food packaging is one of the crucial parameters affecting the food quality and shelf life.Caviar is among the most nutritious and costly food sources.Here,a photonic oxygen-sensing system,based on the time-resolved phosphorescence spectroscopy of a platinum complex,is developed for non-contact,non-intrusive,and real-time vacuum packaging quality control,and implemented for caviar packaging.The sensor is embedded in protective polyethylene layers and excited with a short-pulsed light emitting diode(LED)source.Integration of a blue pulsed light source,a fast and amplified silicon photodiode controlled by the Spartan-6 field programmable gate array(FPGA),and a long lifetime platinum complex results in a photonics-based oxygen sensor with a fast response and high sensitivity to the vacum packaging damage,which is suitable for caviar.It is revealed that applying the polyethylene layers protects the caviar from the platinum complex,leaching while not interfering with the sensor functionality.Characterizing the photonic system based on its sensitivity,repeatability,stability,and long-term operation demonstrates its capability for this application. 展开更多
关键词 CAVIAR photoluminescence lifetime oxygen sensor platinum porphyrin complex vacuum packaging
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