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Sputter Deposited Carbon Material based Fabry-Perot Sensor and Downhole Application
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作者 WANG Yingying LIU Xiaohui +2 位作者 CHEN Xiaoan SUN Zhihui ZHAO Qingchao 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2022年第6期1143-1149,共7页
To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we emplo... To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we employed a deposition technology with a higher particle kinetic energy,closer substrate adhesion,and denser films,to deposit the coating film on the surface of the quartz capillary glass tube to protect the sensor from corrosion.The sensitivity and accuracy of the Fabry-Perot sensor with carbon film deposition can reach 369 nm/MPa and 0.02%FS,respectively.Meanwhile,the sensor has less hysteresis error and good pressure linearity of more than 0.99999 for repeatable pressure measurement.The downhole practice monitoring data indicated that this fiber-optic sensor exhibited excellent performance and the sputter deposited carbon coating can effectively decrease hydrogen loss. 展开更多
关键词 quartz substrate Fabry-Perot sensor vacuum sputtering carbon coating material
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Effects of thickness and annealing condition on magnetic properties and thermal stabilities of Ta/Nd/NdFeB/Nd/Ta sandwiched films 被引量:1
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作者 刘文峰 张敏刚 +3 位作者 张克维 张海杰 许小红 柴跃生 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第11期526-529,共4页
Ta/Nd/NdFeB/Nd/Ta sandwiched films are deposited by magnetron sputtering on Si(100) substrates,and subsequently annealed in vacuum at different temperatures for different time.It is found that both the thickness of ... Ta/Nd/NdFeB/Nd/Ta sandwiched films are deposited by magnetron sputtering on Si(100) substrates,and subsequently annealed in vacuum at different temperatures for different time.It is found that both the thickness of NdFeB and Nd layer and the annealing condition can affect the magnetic properties of Ta/Nd/NdFeB/Nd/Ta films.Interestingly,the thickness and annealing temperature show the relevant behaviors that can affect the magnetic properties of the film.The high coercivity of 24.1 kOe(1 Oe = 79.5775 A/m) and remanence ratio(remanent magnetization/saturation magnetization)of 0.94 can be obtained in a Ta/Nd(250 nm)/NdFeB(600 nm)/Nd(250 nm)/Ta film annealed for 3 min at 1023 K.In addition,the thermal stability of the film is also linked to the thickness of NdFeB and Nd layer and the annealing temperature as well.The excellent thermal stability can be achieved in a Ta/Nd(250 nm)/NdFeB(600 nm)/Nd(250 nm)/Ta film annealed at1023 K. 展开更多
关键词 annealing NdFeB annealed coercivity magnetization magnetron sputtering vacuum subsequently magnetometer
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