In this article, the results obtained from a study on multilayer diamond-like carbon and boron nitride (DLC/BN) films are reported. The microstructure, atomic concentration, hardness and friction coefficient of the fi...In this article, the results obtained from a study on multilayer diamond-like carbon and boron nitride (DLC/BN) films are reported. The microstructure, atomic concentration, hardness and friction coefficient of the films were characterized using transmission electron microscopy, auger electron microscopy, nano-indentation measurements and ball-on-disk friction testing. The effects of bilayer thickness and substrate bias on film growth were investigated. All multilayer films showed alternate DLC and BN layers, except the 2- and 4-nm bilayer of multilayer DLC/BN films deposited without substrate bias. Although the layers were very thin, each layer was distinguishable. This was confirmed by the use of TEM imaging and AES measurements. The hardness values of all the multilayer films were lower than those measured for the monolayer DLC and BN films. However, the hardness can be altered with a change in the bilayer thickness. Furthermore, in the case of the films deposited with substrate bias, multilayer DLC/BN films showed an improvement in wear resistance compared to monolayer DLC and BN films. Thus, the deposition of multilayer DLC/BN films can be considered to be beneficial in prolonging the service life of the surface.展开更多
在一台УВНИПА 1型双激发源等离子弧薄膜沉积装置上制取TiN Ti DLC、及其含有软金属Cu或PTFE覆盖膜的多层复合涂层。摩擦磨损试验在一台球 盘滑动磨损试验机上进行。结果表明,以TiN和DLC膜为主体的多层复合涂层具有较高的摩擦学特...在一台УВНИПА 1型双激发源等离子弧薄膜沉积装置上制取TiN Ti DLC、及其含有软金属Cu或PTFE覆盖膜的多层复合涂层。摩擦磨损试验在一台球 盘滑动磨损试验机上进行。结果表明,以TiN和DLC膜为主体的多层复合涂层具有较高的摩擦学特性,过渡金属钛层、软金属和聚四氟乙烯覆盖层可以降低摩擦系数33%～50%,对磨擦表面磨损减少90%。展开更多
文摘In this article, the results obtained from a study on multilayer diamond-like carbon and boron nitride (DLC/BN) films are reported. The microstructure, atomic concentration, hardness and friction coefficient of the films were characterized using transmission electron microscopy, auger electron microscopy, nano-indentation measurements and ball-on-disk friction testing. The effects of bilayer thickness and substrate bias on film growth were investigated. All multilayer films showed alternate DLC and BN layers, except the 2- and 4-nm bilayer of multilayer DLC/BN films deposited without substrate bias. Although the layers were very thin, each layer was distinguishable. This was confirmed by the use of TEM imaging and AES measurements. The hardness values of all the multilayer films were lower than those measured for the monolayer DLC and BN films. However, the hardness can be altered with a change in the bilayer thickness. Furthermore, in the case of the films deposited with substrate bias, multilayer DLC/BN films showed an improvement in wear resistance compared to monolayer DLC and BN films. Thus, the deposition of multilayer DLC/BN films can be considered to be beneficial in prolonging the service life of the surface.
文摘在一台УВНИПА 1型双激发源等离子弧薄膜沉积装置上制取TiN Ti DLC、及其含有软金属Cu或PTFE覆盖膜的多层复合涂层。摩擦磨损试验在一台球 盘滑动磨损试验机上进行。结果表明,以TiN和DLC膜为主体的多层复合涂层具有较高的摩擦学特性,过渡金属钛层、软金属和聚四氟乙烯覆盖层可以降低摩擦系数33%～50%,对磨擦表面磨损减少90%。
