In order to effectively and quickly clean the surface of semiconductor silicon wafers, the fluid flow is one of the significant issues. For a batch-type silicon wafer wet cleaning bath, a slim water injection nozzle c...In order to effectively and quickly clean the surface of semiconductor silicon wafers, the fluid flow is one of the significant issues. For a batch-type silicon wafer wet cleaning bath, a slim water injection nozzle consisting of a dual tube was studied, based on theoretical calculations and experiments. A thin inner tube was placed at the optimum position in the water injection nozzle. Such a simple design could make the water injection direction normal and the water velocity profile symmetrical along the nozzle. The water flow in the wet cleaning bath was observed using a blue-colored ink tracer. When the nozzle developed in this study was placed at the bottom of the bath, a fast and symmetrical upward water stream was formed between and around the wafers.展开更多
Fugitive dust is one of the well known problems in agriculture and it affects both humans and machine producing quality. Dust problems can seriously cause harmful diseases to workers and ruin expensive equipments. In ...Fugitive dust is one of the well known problems in agriculture and it affects both humans and machine producing quality. Dust problems can seriously cause harmful diseases to workers and ruin expensive equipments. In this study, a dust formation generated in open environment by vehicles was analyzed on unpaved roads. Formed dust was measured by calculating total forces on the PM10 （airborne particles smaller than 10 mm） of dust particles, such as air velocity, gravity forces and air turbulence generated by the moving vehicle. The water fogger nozzle discharge was measured to determine the approximate droplets quantity in the air. The foggers were used to suppress the generated dust in an open environment via installing a proposed automatic suppression system which opens automatically when vehicles pass under the system. The relationship between water droplet speed and ability of collecting fugitive dust showed that high air temperature above 40oC and wind speed above 10 m s-1 have negative effects on the system’s ability of collecting dust due to evaporation of small radius droplets and/or drifting water droplets away from the effective area. The overall system efficiency was found to be 85% and the proposed dust suppression system was found to be a satisfying solution for reducing fugitive dust hazards.展开更多
In this paper, the effects of polymer additives and nozzle shape on the proper- ties of high pressure water jet discharging into the air are investigated by theory and experiments. Criteria of judging the jet quality ...In this paper, the effects of polymer additives and nozzle shape on the proper- ties of high pressure water jet discharging into the air are investigated by theory and experiments. Criteria of judging the jet quality are put forward. And, a method that can be used in analysing the fluid flow within the nozzle is developed. Then, the calculated results are compared with the experiments that we carried out; it is shown that the degree of agreement between the two is good. At last, the mechanism to improve on the jet quality with polymer additives is discussed.展开更多
文摘In order to effectively and quickly clean the surface of semiconductor silicon wafers, the fluid flow is one of the significant issues. For a batch-type silicon wafer wet cleaning bath, a slim water injection nozzle consisting of a dual tube was studied, based on theoretical calculations and experiments. A thin inner tube was placed at the optimum position in the water injection nozzle. Such a simple design could make the water injection direction normal and the water velocity profile symmetrical along the nozzle. The water flow in the wet cleaning bath was observed using a blue-colored ink tracer. When the nozzle developed in this study was placed at the bottom of the bath, a fast and symmetrical upward water stream was formed between and around the wafers.
基金funded by the Special Program on the S&T of China for the Pollution Control and Treatment of Water Bodies(2008ZX07421-001)the Foundamental Research Funds for the Central Universities, China
文摘Fugitive dust is one of the well known problems in agriculture and it affects both humans and machine producing quality. Dust problems can seriously cause harmful diseases to workers and ruin expensive equipments. In this study, a dust formation generated in open environment by vehicles was analyzed on unpaved roads. Formed dust was measured by calculating total forces on the PM10 （airborne particles smaller than 10 mm） of dust particles, such as air velocity, gravity forces and air turbulence generated by the moving vehicle. The water fogger nozzle discharge was measured to determine the approximate droplets quantity in the air. The foggers were used to suppress the generated dust in an open environment via installing a proposed automatic suppression system which opens automatically when vehicles pass under the system. The relationship between water droplet speed and ability of collecting fugitive dust showed that high air temperature above 40oC and wind speed above 10 m s-1 have negative effects on the system’s ability of collecting dust due to evaporation of small radius droplets and/or drifting water droplets away from the effective area. The overall system efficiency was found to be 85% and the proposed dust suppression system was found to be a satisfying solution for reducing fugitive dust hazards.
文摘In this paper, the effects of polymer additives and nozzle shape on the proper- ties of high pressure water jet discharging into the air are investigated by theory and experiments. Criteria of judging the jet quality are put forward. And, a method that can be used in analysing the fluid flow within the nozzle is developed. Then, the calculated results are compared with the experiments that we carried out; it is shown that the degree of agreement between the two is good. At last, the mechanism to improve on the jet quality with polymer additives is discussed.
