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原子层淀积Al_2O_3薄膜的热稳定性研究 被引量:16
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作者 卢红亮 徐敏 +2 位作者 丁士进 任杰 张卫 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2006年第5期1217-1222,共6页
以Al(CH3)3和H2O为反应源,在270℃下用原子层淀积(ALD)技术在Si衬底上生长了Al2O3薄膜.采用X射线衍射(XRD)、X射线光电子能谱(XPS)、原子力显微镜(AFM)和傅立叶变换红外光谱(FTIR)等分析手段对Al2O3薄膜的热稳定性进行了研究.结果表... 以Al(CH3)3和H2O为反应源,在270℃下用原子层淀积(ALD)技术在Si衬底上生长了Al2O3薄膜.采用X射线衍射(XRD)、X射线光电子能谱(XPS)、原子力显微镜(AFM)和傅立叶变换红外光谱(FTIR)等分析手段对Al2O3薄膜的热稳定性进行了研究.结果表明刚淀积的薄膜中含有少量Al-OH基团,高温退火后,Al-OH基团几乎消失,这归因于Al-OH基团之间发生反应而脱水.退火后的薄膜中O和Al元素的相对比例(1.52)比退火前的(1.57)更接近化学计量比的Al2O3.FTIR分析表明,在刚淀积的Al2O3中有少量的-CH3存在,-CH3含量会随热处理温度的升高而减少.此外,在高温快速热退火后,Al2O3薄膜的表面平均粗糙度(RMS)明显改善,900℃热退火后其RMS达到1.15nm. 展开更多
关键词 AL2O3薄膜 原子层淀积(ALD) X射线光电子能谱(xps)
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Surface Analysis of ZIRLO Alloy Implanted with Carbon
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作者 彭德全 白新德 +2 位作者 潘峰 孙辉 陈宝山 《Journal of Rare Earths》 SCIE EI CAS CSCD 2005年第S1期373-377,共5页
ZIRLO alloy specimens were implanted with carbon ions with fluence range from 1×10 16 to 1×10 18ions·cm -2, using a MEVVA source at an extraction voltage of 40 kV at maximum temperature of 380 ℃. The s... ZIRLO alloy specimens were implanted with carbon ions with fluence range from 1×10 16 to 1×10 18ions·cm -2, using a MEVVA source at an extraction voltage of 40 kV at maximum temperature of 380 ℃. The surfaces of the implanted samples were then analyzed and the TRIM 96 computer code was used to simulate the depth distribution of carbon. The valences of elements in the implanted surface of ZIRLO alloy were analyzed by X-ray photoemission spectroscopy (XPS); and then the depth distributions of the elements on the surface of the samples were obtained by Auger electron spectroscopy (AES). Scanning electron microscopy (SEM) was used to examine the micro-morphology of implanted samples. Glancing angle X-ray diffraction (GAXRD) at 0.30 incident angles was employed to examine the phase transformations of implanted samples. It shows that the as-received ZIRLO alloy is mainly composed of hexagonal alpha zirconium, as for implanted samples, there appeared hexagonal zirconia (H-ZrO_ 0.35) and sigma zirconium carbide (δ-Zr_3C_2), and the δ-Zr_3C_2 increased when increasing the fluence. When the fluence reached 1×10 18 ions·cm -2, the concentration of δ-Zr_3C_2 is the maximum in all the samples. The micro-morphology of implanted samples are similar, there are many pits with diameters ranging from 1 to 3 μm on the implanted surfaces. 展开更多
关键词 ZIRLO alloy carbon ion implantation x-ray photoemission spectroscopy (xps) auger electron spectroscopy (AES) glancing angle x-ray diffraction (GAXRD)
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Effect of copper ions implantation on the corrosion behavior of ZIRLO alloy in 1 mol/L H_2SO_4
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作者 Dequan Peng Xinde Bai Baoshan Chen 《Journal of University of Science and Technology Beijing》 CSCD 2006年第2期158-163,共6页
In order to study the effect of copper ion implantation on the aqueous corrosion behavior of ZIRLO alloy, specimens were implanted with copper ions with fluences ranging from 1×10^16 to 1×10^ ions/cm^2, usin... In order to study the effect of copper ion implantation on the aqueous corrosion behavior of ZIRLO alloy, specimens were implanted with copper ions with fluences ranging from 1×10^16 to 1×10^ ions/cm^2, using a metal vapor vacuum arc source (MEVVA) at an extraction voltage of 40 kV, The valence states and depth distributions of elements in the surface layer of the samples were analyzed by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES), respectively. Glancing angle X-ray diffraction (GAXRD) was employed to examine the phase transformation due to the copper ion implantation. The potcntiodynamic polarization technique was used to evaluate the aqueous corrosion resistance of implanted ZIRLO alloy in a 1 mol/L H2SO4 solution. It was found that a significant improvement was achieved in the aqueous corrosion resistance of ZIRLO alloy implanted with copper ions when the fluence is 5×10^16 ions/cm^2. When the fluence is 1×10^16 or 1×10^17 ions/cm^2, the corrosion resistance of implanted sanaples was bad. Finally, the mechanism of the corrosion behavior of copper-implanted ZIRLO alloy was discussed. 展开更多
关键词 ZIRLO alloy corrosion resistance copper ion implantation x-ray photoemission spectroscopy (xps Auger electron spectroscopy (AES)
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Irradiation damage simulation of Zircaloy-4 using argon ions bombardment
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作者 Dequan Peng Xinde Bai Feng Pan 《Journal of University of Science and Technology Beijing》 CSCD 2008年第3期285-289,共5页
To simulate irradiation damage, argon ion was implanted in the Zircaloy-4 with the fluence ranging from 1 × 10^16 to 1 × 10^17 cm^-2, using accelerating implanter at an extraction voltage of 190 kV and liqui... To simulate irradiation damage, argon ion was implanted in the Zircaloy-4 with the fluence ranging from 1 × 10^16 to 1 × 10^17 cm^-2, using accelerating implanter at an extraction voltage of 190 kV and liquid nitrogen temperature. Then the influence of argon ion implantation on the aqueous corrosion behavior of Zircaloy-4 was studied. The valence states of elements in the surface layer of the samples were analyzed using X-ray photoelectron spectroscopy (XPS). Transmission electron microscopy (TEM) was used to examine the microstructure of the argon-implanted samples. The potentiodynamic polarization technique was employed to evaluate the aqueous corrosion resistance of implanted Zircaloy-4 in 1 mol/L HzSO4 solution. It is found that there appear bubbles on the surface of the samples when the argon fluence is 1 × 10^16 cm^-2. The microstructure of argon-implanted samples changes from amorphous to partial amorphous, then to polycrystalline, and again to amorphous. The corrosion resistance of implanted samples linearly declines with the increase of fluence approximately, which is attributed to the linear increase of the irradiation damage. 展开更多
关键词 ZIRCALOY-4 corrosion resistance argon ion implantation x-ray photoemission spectroscopy (xps transmission electron microscopy (TEM)
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There is life after coking for Ir nanocatalyst superlattices
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作者 Antonio J.Martínez-Galera Haojie Guo +3 位作者 Mariano D.Jiménez-Sánchez Stefano Franchi Kevin C.Prince José M.Gómez-Rodríguez 《Nano Research》 SCIE EI CSCD 2022年第8期6969-6976,共8页
Achieving superior performance of nanoparticle systems is one of the biggest challenges in catalysis.Two major phenomena,occurring during the reactions,hinder the development of the full potential of nanoparticle cata... Achieving superior performance of nanoparticle systems is one of the biggest challenges in catalysis.Two major phenomena,occurring during the reactions,hinder the development of the full potential of nanoparticle catalysts:sintering and contamination with carbon containing species,sometimes called coking.Here,we demonstrate that Ir nanocrystals,arranged into periodic networks on hexagonal boron nitride(h-BN)supports,can be restored without sintering after contamination by persistent carbon.This restoration yields the complete removal of carbon from the nanocrystals,which keep their crystalline structure,allowing operation without degradation.These findings,together with the possibility of fine tuning the nanocrystals size,confer this nanoparticle system a great potential as a testbed to extract key information about catalysis-mediated oxidation reactions.For the case of the CO oxidation by O2,reaction of interest in environmental science and green energy production,the existence of chemical processes not observed before in other nanoparticle systems is demonstrated. 展开更多
关键词 CATALYSIS COKE nanoparticles scanning tunneling microscopy(STM) x-ray photoemission spectroscopy(xps)
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THE CRYSTAL STRUCTURE, ELECTRONIC STRUCTURE AND SUPERCONDUCTIVITY OF Bi_2Sr_2Ca_(1-x)Y_xCu_2O_(8+y)
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作者 陈祖耀 朱英杰 +4 位作者 刘先明 王楠林 张其瑞 杨丽 钱逸泰 《Science China Mathematics》 SCIE 1992年第7期853-860,共8页
The effect of Y substitution for Ca on the crystal structure and electronic states of Bi<sub>2</sub>Sr<sub>2</sub>CaCu<sub>2</sub>O<sub>8+y</sub> was studied. It is foun... The effect of Y substitution for Ca on the crystal structure and electronic states of Bi<sub>2</sub>Sr<sub>2</sub>CaCu<sub>2</sub>O<sub>8+y</sub> was studied. It is found that the modulation period of the incommensurate superlattice along b axis decreases from 4.7b to about 4.0b gradually, which implies the change of the extra oxygen atoms residing within double Bi-O layers. Two kinds of modulation structures with periods of 4b and 8b exist in the same compound as Ca is completely substituted by Y. XPS was employed to study the change in the electronic structure. The results suggest that the variation of superconductivity is not caused by the slight change in crystal structure, but rather by the hole filling in O2p orbitals in CuO<sub>2</sub> layers. For this substituted system, it is still the case where one hole in Cu3d orbital (3d<sup>9</sup>) is corresponding to the strong correlation antiferromaguetic insulator, and an extra hole in O2p orbital in CuO<sub>2</sub> layer (3d<sup>9</sup>L) to the superconductor. 展开更多
关键词 high temperature superconductor Bi2Sr2Ca1-xYxCu2O(8+y) modulation structure conductor-insulator transition x-ray photoemission spectroscopy (xps).
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