Study on the Properties of Diamond Films on Aluminum Nitride Ceramics

Diamond films were successfully synthesized on aluminum nitride(AlN) ceramic substrates by hot filament chemical vapor deposition(HFCVD) method. It is notices that the thermal conductivity of the diamond film/aluminum nitride ceramic(DF/AlN) composite has reached 2.04 W/cm·K, 73%greater than that of AlN ceramic. Compared with the measurement of scanning electron microscopy(SEM) and Raman spectroscopy, the influence of diamond films on the thermal conductivity of the composites was pointed out. The adhesion and the stresses of diamond films were also studied. The unusual stability and very good adhesion of diamond films on AlN ceramic substrates obtained are attributed to the formation of aluminum carbide.

Optical and electrical properties of room temperature preparedα-IGZO thin films using an In_(2)Ga_(2)ZnO_(7) ceramic target

In this study,a high-purity In_(2)Ga_(2)ZnO_(7) ceramic target was used to deposit indium gallium zinc oxide(IGZO)films by RF magnetron sputtering technology.The microstructure,growth state,optical and electrical properties of the IGZO films were studied.The results showed that the surface of the IGZO film was uniform and smooth at room temperature.As the substrate temperature increased,the surface roughness of the film gradually increased.From room temperature to 300℃,all the films maintained amorphous phase and good thermal stabilities.Moreover,the transmission in the visible region decreased from 91.93%to 91.08%,and the band gap slightly decreased from 3.79 to 3.76 eV.The characterization of the film via atomic force microscope(AFM)and X-ray photoelectron spectroscopy(XPS)demonstrated that the film prepared at room temperature exhibited the lowest surface roughness and the largest content of oxygen vacancies.With the rise in temperature,the non-homogeneous particle distribution,increase in the surface roughness,and reduction in the number of oxygen vacancies resulted in lower performance of theα-IGZO film.Comprehensive analysis showed that the best optical and electrical properties can be obtained by depositing IGZO films at room temperature,which indicates their potential applications in flexible substrates.

Temperature-mediated structural evolution of vapor–phase deposited cyclosiloxane polymer thin films for enhanced mechanical properties and thermal conductivity

Polymer-derived ceramic(PDC) thin films are promising wear-resistant coatings for protecting metals and carbon-carbon composites from corrosion and oxidation.However,the high pyrolysis temperature hinders the applications on substrate materials with low melting points.We report a new synthesis route for PDC coatings using initiated chemical vapor deposited poly(1,3,5-trivinyl-1,3,5-trimethylcyclotrisiloxane)(pV_3D_3) as the precurs or.We investigated the changes in siloxane moieties and the network topology,and proposed a three-stage mechanism for the thermal annealing process.The rise of the connectivity number for the structures obtained at increased annealing temperatures was found with strong correlation to the enhanced mechanical properties and thermal conductivity.Our PDC films obtained via annealing at 850℃ exhibit at least 14.6% higher hardness than prior reports for PDCs synthesized below 1100℃.Furthermore,thermal conductivity up to 1.02 W(mK)^(-1) was achieved at the annealing temperature as low as 700℃,which is on the same order of magnitude as PDCs obtained above 1100℃.Using minimum thermal conductivity models,we found that the thermal transport is dominated by diffusons in the films below the percolation of rigidity,while ultra-short mean-free path phonons contribute to the thermal conductivity of the films above the percolation threshold.The findings of this work provide new insights for the development of wear-resistant and thermally conductive PDC thin films for durable protection coatings.

Preparation and Characterization of Nanotitanium Dioxide Coating Film Doped with Fe^(3+) Ions on Porous Ceramic

The nanotitanium dioxide （TiO2） photocatalytic and porous ceramic filtering technique is one of the advanced methods to effectively treat organic wastewater. The TiO2 sol doped with Fe^3＋ ions was prepared by sol-gel processing. The influences of the process conditions of coating nanophotocatalytic material- Fe^3＋-TiO2 film on the surface of porous ceramic filter by dipping-lift method on the performance of porous ceramic filter were studied. The porous ceramic filters have two functions at the same time, filtration and photocatalytic degradation. The results of this study showed that the pH and viscosity of the sol, amount of Fe^3＋ ions doped as well as the coating times greatly affect the quality of coating film, the performance parameters and the photocatalytic activity of the porous ceramic filter. When the pH of the sol is 3-4, the viscosity is about 6 mPa.S, the amount of doped Fe^3＋ ions is about 2.0 g/L, the porous ceramic filter has been shown to have the best filtering performance and photocatalytic activity. In this condition, the porosity of porous ceramic is about 42.5%, the pore diameter is 8-10μm. The degradation of methyl-orange is 74.76% under lighting for 120 rain.

The Effect of Plasma Surface Treatment on a Porous Green Ceramic Film with Polymeric Binder Materials

To reduce time and energy during thermal binder removal in the ceramic process, plasma surface treatment was applied before the lamination process.The adhesion strength in the lamination films was enhanced by oxidative plasma treatment of the porous green ceramic film with polymeric binding materials.The oxygen plasma characteristics were investigated through experimental parameters and weight loss analysis.The experimental results revealed the need for parameter analysis,including gas material,process time,flow rate,and discharge power,and supported a mechanism consisting of competing ablation and deposition processes.The weight loss analysis was conducted for cyclic plasma treatment rather than continuous plasma treatment for the purpose of improving the film’s permeability by suppressing deposition of the ablated species.The cyclic plasma treatment improved the permeability compared to the continuous plasma treatment.

Wet flashover voltage improvement of the ceramics with dielectric barrier discharge

Surface modification techniques with plasma are widely investigated to improve the surface insulation capability of polymers under dry conditions,while the relationship between treatment method,surface physical and chemical properties,and wet flashover voltage is still unclear for inorganic ceramics.In this work,the surface insulation properties of ceramics under wet conditions are improved using nanosecond-pulsed dielectric barrier discharge with polydimethylsiloxane(PDMS)as the precursor.The relationships between PDMS concentration and the water contact angle,dry and wet flashover voltages are obtained to acquire the optimal concentration.The surface charge dissipation test and surface physio-chemical property measurement with SEM,AFM,XPS are carried out to further explore the mechanism of surface insulation enhancement.The results show that film deposition with micron thickness and superhydrophobicity occurs at the PDMS concentration of 1.5%.The dry flashover voltage is increased by 14.6%due to the induction of deep traps,while the wet flashover voltage is increased by 66.7%.The gap between dry-wet flashover voltage is decreased by 62.3%compared with the untreated one due to the self-cleaning effect.

Anomalous magnetic properties of an iron film system deposited on fracture surfaces of α-Al_2O_3 ceramics

An iron film percolation system is fabricated by vapour-phase deposition on fracture surfaces of α-Al2O3 ceramics. The zero-field-cooled （ZFC） and field-cooled （FC） magnetization measurement reveals that the magnetic phase of the film samples evolve from a high-temperature ferromagnetic state to a low-temperature spin-glass-like state, which is also demonstrated by the temperature-dependent ac susceptibility of the iron films. The temperature dependence of the exchange bias field He of the iron film exhibits a minimum peak around the temperature T=5 K, which is independent of the magnitude of the cooling field Hcf. However, for T 〉 10K, （1） He is always negative when Hcf=2kOe and （2） for Hcf= 20 kOe （1Oe≈80 A/m）, He changes from negative to positive values as T increases. Our experimental results show that the anomalous hysteresis properties mainly result from the oxide surfaces of the films with spin-glass-like phase.

Interfacial Bonding Strength of TiN Film Coated on Si_3N_4 Ceramic Substrate

The fraction of TiN/Si3N4 in the cross section was observed with scanning electric microscope （SEM）, and residual stresses of TiN coated on the surface of Si3N4 ceramic were measured with X-ray diffraction （XRD）.The hardness of TiN film was measured, and bonding strength of TiN film coated on Si3N4 substrate was measured by scratching method. The formed mechanism of residual stress and the failure mechanism of the bonding interface in the film were analyzed, and the adhesion mechanism of TiN film was investigated preliminarily. The results show that residual stresses of TiN film are all behaved as compressive stress, and TiN film is represented smoothly with brittle fracture, which is closely bonded with Si3N4 substrate. TiN film has high hardness and bonding strength of about 500 MPa, which could satisfy usage requests of the surface of cutting Si3N4 ceramic.

Preparation and photo-catalytic activity of TiO_2-coated medical stone-based porous ceramics

Medical stone-based porous ceramics as a carrier were prepared by ultra-fine grinding and low-temperature sintering method. Nano-TiO~ thin films were loaded on the carrier by chemical liquid deposition method using titanium tetrachloride as a precursor. The micro-morphology and microstructure of the synthesized samples were characterized using X-ray diffraction, scanning electron microscopy with energy dispersive spectrometry, and mercury injection method. The photo-catalytic activity of the TiO2 thin films was investigated by degrading formaldehyde. The main crystalline phase in the TiO2 thin films calcined at 550~C is anatase with the average particle size about 10 nm. The specific surface area of the carrier-coated nano-TiO2 increases from 3.68 to 5.32 m2/g. The formaldehyde removal rate of the TiO2/medical stone-based porous ceramics irradiated under an ultraviolet lamp for 120 min reaches 85.6%.

Effects of precursor solution concentration on the properties and morphology of YBCO films deposited by TFA-MOD method

Epitaxial YBCO films were deposited on （100） LaAlO3 single-crystal substrates by metalorganic deposition of metal trifluoroacetate precursors with different concentrations. All the YBCO films have Tc around 91 K and Jc excess 2 MA/cm^2 at 77 K in zero field. XRD θ-2θscans show all the films have c-axis normal orientation. The FWHM （full width at half-maximum intensity） values of X-ray ω-scans of （005） reflection are 0.379°, 0.283°, and 0.543° for the YBCO thin films deposited with precursor solution concentrations of 1.52, 1.0, and 0.75 mol/L, respectively. With the concentration of the precursors decreasing, the thickness of the films decreases linearly. SEM micrographs show that porosities in the films become bigger with the precursor solution concentration decreasing. The big porosities in the film with the lowest concentration precursor deteriorate the superconducting property and make it have a wider superconducting transition and a lower Jc.

Preparation and Characterization of Nano-ZnFe_2O_4/TiO_2 Films

The nano-ZnFe2O4/TiO2 films possess the functions of desulfurization and degradation for organic pollutants. The sols of ZnFe2O4/TiO2 were prepared by sol-gel method and coated on glass and porous ceramic by vertical coating and dipping-lift processes, respectively, and the samples were obtained after drying and sintering. The composition, appearance, absorption spectrum of the films, and the influence of the film on porous ceramic performances were analyzed using SEM, AFM, UVVis spectrometer, and mercury porosimeter, respectively, to determine the operation parameters of the multifunction porous ceramic elements for gas-purification.

Extended Anode Effect for Tube Inner Coating of Non-Conductive Ceramics by Pulsed Coaxial Magnetron Plasma

For uniform tube inner coating of non-conductive thin films, the double-ended coaxial magnetron pulsed plasma (DCMPP) method was investigated. In this study, coating of TiN and TiO2 was performed. It was clearly shown that the extended anode effect was strongly influenced by the electric resistance of the coated thin films on the inner surface of an insulator tube. Additionally, high frequency (100 kHz) was better for relatively high plasma density. On the other hand, in the case of titanium oxide deposition, negative ion productions drastically decrease the deposition rate and the shifting velocity of plasma main position for coated TiO2 films.

a-Si/c-Si heterojunction solar cells on SiSiC ceramic substrates

Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollution. In this paper, latest progress on poly-crystalline silicon solar cells on ceramic substrates achieved by our group was reported. Rapid thermal chemical vapor deposition (RTCVD) was used to deposited poly-crystalline silicon thin films, and the grains of as-grown film were enlarged by Zone-melting Recrystallization (ZMR). As a great change in cell′s structure, traditional diffused pn homojunction was replaced by a-Si/c-Si heterojunction, which lead is to distinct improvement in cell′s efficiency. A conversion efficiency of 3.42% has been achieved on 1 cm2 a-Si/c-Si heterojunction solar cell (Isc=16.93 mA, Voc=310.9 mV, FF=0.6493, AM=1.5 G, 24 ℃), while the cell with diffused homojunction only got an efficiency of 0.6%. It indicates that a-Si emitter formed at low temperature might be more suitable for thin film cell on ceramics.

Effects of precursor solution concentration on dielectric properties of (Pb,La)(Zr,Ti)O_3 antiferroelectric thick films by sol-gel processing

Pb0.97La0.02Zr0.95Ti0.05O3(PLZT)antiferroelectric thick films derived from different precursor solution concentrations are prepared on platinized silicon substrates by sol-gel processing.The films present polycrystalline perovskite structure with a(100)preferred orientation by X-ray diffraction(XRD)analysis.The antiferroelectricity of the films is confirmed by the double hysteresis behaviors of polarization and double-bufferfly response of dielectric constant under the applied electrical field.Antiferroelectric properties and dielectric constant are improved while the polarization characteristic values are reduced with the increase of precursor solution concentration.The films at higher precursor solution concentration exhibit excellent dielectric properties.

环保型陶化膜的研究进展及其在镁合金上的应用

陶化膜作为替代磷化的预处理工艺,操作简单,无需加热,能耗低,成膜时间短,不排放有害物质和残渣,解决了磷化膜的成本和环保问题。目前陶化膜已经在钢铁、铝合金等基材上实现了工业化应用,但在镁合金表面的研究还比较少。本文结合国内外陶化膜的研究进展,总结了陶化膜的发展历史,成膜机制,陶化膜的溶液组成及工艺参数的影响(包括成膜剂、成膜液中的添加剂、成膜液的pH、成膜时间、成膜温度、成膜液的搅拌、基体材料的影响),同时介绍了镁合金表面陶化膜的研究现状,并对未来镁合金陶化膜的研究重点进行了总结和展望。为了尽早实现陶化膜在镁合金部件的批量应用,膜层的均匀性、致密性、与漆膜的结合力等方面尚需深入研究,成膜液的维护,操作规范的制定,废水处理等这些问题尚待解决。

纳米Cr_(2)O_(3)对铝合金微弧氧化膜组织和性能的影响

在恒流模式下对7050铝合金开展微弧氧化试验。用SEM、EDS、XRD、膜层测厚仪、维氏硬度计、电化学工作站和磨损试验机等研究了不同纳米Cr_(2)O_(3)含量对7050铝合金微弧氧化陶瓷膜组织和性能的影响。结果表明:添加纳米Cr_(2)O_(3)能减小陶瓷膜孔径,提升致密度,优化陶瓷膜结构;当纳米Cr_(2)O_(3)由1 g/L增至5 g/L时,陶瓷膜的厚度、硬度均先增后减;与未添加相比,添加纳米Cr_(2)O_(3)的陶瓷膜的耐蚀性和耐磨性均明显提升;陶瓷膜主要由γ-Al_(2)O_(3)相和少量的α-Al_(2)O_(3)相、莫来石相、Cr_(2)O_(3)相构成;总体来看,当纳米Cr_(2)O_(3)为3 g/L时,陶瓷膜的性能最优,厚度、显微硬度、自腐蚀电流和磨耗比分别为30.98μm、1273HV0.1、5.162×10^(-8)A/cm^(2)、0.0913%。

AlN陶瓷衬底金刚石薄膜残余应力分析与调控

为系统研究金刚石薄膜残余应力的产生与分布,寻求缓解残余应力的方式,本文首先采用有限元软件ANSYS Workbench对降温过程中金刚石薄膜热应力进行模拟分析,并研究薄膜厚度对热应力的影响,然后利用微波等离子体化学气相沉积法(MPCVD),在氮化铝(AlN)陶瓷衬底上沉积不同厚度的金刚石薄膜,并改变薄膜降温时长和进行退火处理,最后通过SEM、Raman光谱进行表征分析。模拟显示,降温结束后热应力分布并不规律,最大主应力为拉应力,最小主应力为压应力,随着薄膜厚度的增加,最大主应力呈上升趋势,当薄膜厚度为200μm时,最大主应力极大值为373 MPa,接近金刚石薄膜通常断裂强度范围(400~700 MPa),最小主应力和剪切应力随着薄膜厚度的增加呈下降趋势。通过Raman光谱表征得到:金刚石薄膜表面均为残余压应力,随着薄膜厚度和降温时长的增加,残余应力有所下降;经600℃氢气气氛原位退火处理后,薄膜应力畸变有所缓解,金刚石相拉曼峰强度有所提高。

陶瓷基复合材料编织结构参数对气膜冷却效果影响研究

针对陶瓷基复合材料(CMC材料)在航空发动机高温部件中应用时的冷却需求,考虑到CMC材料内部非均质非均匀结构和热物性特征与均质金属材料的巨大差异,探究了CMC材料编织结构几何参数对气膜综合冷却效果的影响,研究中以三维五向编织CMC材料为例,建立了反映材料内部细观编织结构的平板气膜全尺寸计算模型,从细观纱线尺度引入各组分热物性参数,计算分析了不同编织角度和纤维束截面尺寸等几何特征参数对气膜综合冷效的影响规律。研究结果表明,纤维束由于导热系数相对较高成为平板内部的主要热量传输通道,编织角发生变化时纤维束方向也随之改变,进而影响材料内部热量传输通道及整体各向异性等效导热系数。本文计算工况下,在气膜孔下游0~10D (D为气膜孔直径)区域,编织角度为40°时气膜综合冷效相对较高;在远离气膜孔区域,气膜板的冷却效果随着编织角度的增大而减弱。纤维束截面尺寸的改变对气膜综合冷效的影响较小,但是随着纤维束截面尺寸的增加,平板内部温度更加均匀。

高温共烧陶瓷精细线条批量印刷工艺

当前,丝网印刷厚膜工艺已成为高温共烧陶瓷(HTCC)生瓷生产中的关键工艺,高密度陶瓷封装外壳的典型埋层布线线宽/线间距要求已达到45μm/45μm,为满足精细线条批量印刷要求,主要从原材料、网版和印刷工艺参数等方面分析了影响精细丝网印刷质量的因素。通过选用窄线径丝网规范(<15μm)的精密印刷网版,并调节浆料黏度至合适范围,同时优化印刷工艺参数,将印刷速度调整到250~300mm/s,减少了孔隙、断路、扩散等线条缺陷,印刷出状态优异的45μm线宽精细线条,从而实现45μm/45μm线宽/线间距的批量印刷,满足了高密度陶瓷封装外壳工艺要求。

SiC纳米线/多孔SiC复合陶瓷膜的制备及其孔径特征

以葡萄糖和硅溶胶混合溶液为前驱体,采用碳热还原法在多孔SiC陶瓷表面生长SiC纳米线膜层,制备纳米复合陶瓷膜。使用X射线衍射、光学显微镜、扫描电镜、孔径分析仪等对样品的物相、形貌和孔径特征进行了分析。结果表明,在1450℃反应6 h,微米孔径SiC的表面生长出了分布比较均匀的SiC纳米线膜层,纳米复合陶瓷膜具有窄分布的亚微米孔径。