Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering

Titanium-based nitride coatings on cutting tools,press molds and dies can be used to prolong their life cycle because of their superior corrosion and oxidation resistance.TiAlN/ZrN and TiCrN/ZrN multilayer coatings were prepared by RF magnetron sputtering,and their microstructural evolution and corrosion resistance during heat treatment were investigated.The TiAlN/ZrN and TiCrN/ZrN multilayer coatings are degraded by heating up to 600 ℃ with the formation of oxides particles on the surface.During the heat treatment,the TiCrN/ZrN and TiAlN/ZrN multilayer coatings show the lowest corrosion current density and the highest polarization resistance at temperature range of 400-500 ℃.Consequently,the TiAlN/ZrN and TiCrN/ZrN multilayer coatings show good corrosion resistance at temperature range of 400-500 ℃ during heating.

离子束流和基底温度对ZrN/TiAlN纳米多层膜性能的影响

本文利用高真空离子束辅助沉积系统(IBAD),在室温下制备了ZrN、TiAlN和一系列ZrN/TiAlN纳米多层膜,利用XRD、纳米力学测试系统和多功能材料表面性能实验仪,分析了束流和基底温度对薄膜的微结构和机械性能的影响。结果表明:大部分多层膜的纳米硬度与弹性模量值都高于两种个体材料硬度的平均值,当辅助束流为5mA时,多层膜硬度达到30.6GPa。基底温度的升高,会显著降低薄膜的残余应力,但对薄膜的硬度,摩擦系数没有明显影响。

离子轰击能量对ZrN/TiAlN纳米多层膜性能的影响

使用超高真空离子束辅助沉积系统(IBAD)制备一系列具有纳米调制周期的ZrN/TiAlN多层膜,研究了离子辅助轰击对薄膜性能的影响.结果表明:离子辅助轰击使大部分ZrN/TiAlN多层膜的纳米硬度和弹性模量值高于两种个体材料硬度的平均值;离子的轰击和薄膜表面原子与轰击离子之间的动量传输提高了薄膜的致密度;当轰击能量为200 eV时,多层膜的硬度最高(30.6 GPa),弹性模量、表面粗糙度和摩擦系数等也明显改善.