Copper （Cu）-doped ZrO2 （CZO） films with different Cu content （0 at.%- 8.07 at.%） are successfully deposited on Si （100） substrates by direct current （DC） and radio frequency （RF） magnetron co-sputtering. T...Copper （Cu）-doped ZrO2 （CZO） films with different Cu content （0 at.%- 8.07 at.%） are successfully deposited on Si （100） substrates by direct current （DC） and radio frequency （RF） magnetron co-sputtering. The influences of Cu content on structural, morphological, optical and electrical properties of CZO films are discussed in detail. The CZO films exhibit ZrO2 monocline （1^-11） preferred orientation, which indicates that Cu atoms are doped in ZrO2 host lattice. The crystallite size estimated form x-ray diffraction （XRD） increases by Cu doping, which accords with the result observed from the scanning electron microscope （SEM）. The electrical resistivity decreases from 2.63 Ω·cm to 1.48 Ω·cm with Cu doping content increasing, which indicates that the conductivity of CZO film is improved. However, the visible light transmittances decrease slightly by Cu doping and the optical band gap values decrease from 4.64 eV to 4.48 eV for CZO fihns.展开更多
ZrO2 films on NaCl(100) substrate produced by oxygen ion bombardment and argon ion sputtering of Zr are analysed using TEM, XRD and XPS. The result of TEM shows that only cubic phase exists for the ZrO2 film produced ...ZrO2 films on NaCl(100) substrate produced by oxygen ion bombardment and argon ion sputtering of Zr are analysed using TEM, XRD and XPS. The result of TEM shows that only cubic phase exists for the ZrO2 film produced by oxygen ion bombardment with 30μA/cm2 and 200eV, while the XRD result shows that there seems to exhibit a small quanitity of monoclinic phase apart from cubic one under the production condition of oxygen ion of 25μA/cm2, 100eV.展开更多
High oriented TiO_2-ZrO_2 composite thin films on Si (100) and glass sheet were suc- cessfully prepared by sol-gel process followed by dip-coating the ethanol solution of zirconium oxychloride and titanium tetrachlori...High oriented TiO_2-ZrO_2 composite thin films on Si (100) and glass sheet were suc- cessfully prepared by sol-gel process followed by dip-coating the ethanol solution of zirconium oxychloride and titanium tetrachloride. The sol-gel process, microstructure, morphology and tri- bological properties of TiO_2 -ZrO_2 films were investigated using TGA, DSC, XPS, XRD, AFM and dynamic-static tribometer. The results show that the TiO_2-ZrO_2films are dense, homogeneous and at a complete tetragonal phase with an excellent antiwear and friction reduction performance. Un- der 0.5N applied load, the friction coefficient is 0.14-0.20 and the antiwear life is more than 5000 sliding cycles for both TiO_2-ZrO_2/ AISI 52100 steel and TiO_2-ZrO_2/ Si_3N_4. SEM observation sug- gests that wear mechanism of TiO_2 -ZrO_2 composite film under low load was fatigue wear, and under high load was adhesive wear. The TiO_2 -ZrO_2 films show potential applications as coatings for antiwear and friction reduction under the harsh condition.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.51272224 and 11164031)
文摘Copper （Cu）-doped ZrO2 （CZO） films with different Cu content （0 at.%- 8.07 at.%） are successfully deposited on Si （100） substrates by direct current （DC） and radio frequency （RF） magnetron co-sputtering. The influences of Cu content on structural, morphological, optical and electrical properties of CZO films are discussed in detail. The CZO films exhibit ZrO2 monocline （1^-11） preferred orientation, which indicates that Cu atoms are doped in ZrO2 host lattice. The crystallite size estimated form x-ray diffraction （XRD） increases by Cu doping, which accords with the result observed from the scanning electron microscope （SEM）. The electrical resistivity decreases from 2.63 Ω·cm to 1.48 Ω·cm with Cu doping content increasing, which indicates that the conductivity of CZO film is improved. However, the visible light transmittances decrease slightly by Cu doping and the optical band gap values decrease from 4.64 eV to 4.48 eV for CZO fihns.
文摘ZrO2 films on NaCl(100) substrate produced by oxygen ion bombardment and argon ion sputtering of Zr are analysed using TEM, XRD and XPS. The result of TEM shows that only cubic phase exists for the ZrO2 film produced by oxygen ion bombardment with 30μA/cm2 and 200eV, while the XRD result shows that there seems to exhibit a small quanitity of monoclinic phase apart from cubic one under the production condition of oxygen ion of 25μA/cm2, 100eV.
基金National Natural Science Foundation of China(51106052)Program for New Century Excellent Talents in University(NCET-10-0374)Fundamental Research Funds for the Central Universities(11QG25)
文摘High oriented TiO_2-ZrO_2 composite thin films on Si (100) and glass sheet were suc- cessfully prepared by sol-gel process followed by dip-coating the ethanol solution of zirconium oxychloride and titanium tetrachloride. The sol-gel process, microstructure, morphology and tri- bological properties of TiO_2 -ZrO_2 films were investigated using TGA, DSC, XPS, XRD, AFM and dynamic-static tribometer. The results show that the TiO_2-ZrO_2films are dense, homogeneous and at a complete tetragonal phase with an excellent antiwear and friction reduction performance. Un- der 0.5N applied load, the friction coefficient is 0.14-0.20 and the antiwear life is more than 5000 sliding cycles for both TiO_2-ZrO_2/ AISI 52100 steel and TiO_2-ZrO_2/ Si_3N_4. SEM observation sug- gests that wear mechanism of TiO_2 -ZrO_2 composite film under low load was fatigue wear, and under high load was adhesive wear. The TiO_2 -ZrO_2 films show potential applications as coatings for antiwear and friction reduction under the harsh condition.
