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High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer 被引量:3
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作者 Xu ZENG Yu WU +1 位作者 Chang-lun HOU Guo-guang YANG 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2009年第4期589-594,共6页
A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experimen... A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) nd ANSYS software. 展开更多
关键词 Fiber Fabry-Perot (F-P) sensor Spectrum demodulation Micro-displacement measurement accelerometer model
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