ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with (1120) texture. Love wave and Ra...ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with (1120) texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the (1120) ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.展开更多
Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the developm...Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the development of novel chemical interface based on two-dimensional(2D)sensing materials for SAW sensors for the rapid and sensitive detection of NH_(3)gas at room temperature(RT)still remains challenging.Herein,we report a highly selective RT NH_(3)gas sensor based on sulfur-doped graphitic carbon nitride quantum dots(S@g-C_(3)N_(4)QD)coated langasite(LGS)SAW sensor with enhanced sensitivity and recovery rate under ultraviolet(UV)illumination.Fascinatingly,the sensitivity of the S@g-C_(3)N_(4)QD/LGS SAW sensor to NH_(3)(500 ppb)at RT is dramatically enhanced by~4.5-fold with a low detection limit(~85 ppb),high selectivity,excellent reproducibility,fast response/recovery time(70 s/79 s)under UV activation(365 nm)as compared to dark condition.Additionally,the proposed sensor exhibited augmented NH_(3)detection capability across the broad range of relative humidity(20%–80%).Such remarkable gas sensing performances of the as-prepared sensor to NH_(3)are attributed to the high surface area,enhanced functional groups,sulfur defects,UV photogenerated charge carriers,facile charge transfer in the S@g-C_(3)N_(4)QD sensing layer,which further helps to improve the gas molecules adsorption that causes the increase in conductivity,resulting in larger frequency responses.The gas sensing mechanism of S@g-C_(3)N_(4)QD/LGS SAW sensor is ascribed to the enhanced electroacoustic effect,which is supported by the correlation of resistive type and COMSOL Multiphysics simulation studies.We envisage that the present work paves a promising strategy to develop the next generation 2D g-C_(3)N_(4)based high responsive RT SAW gas sensors.展开更多
based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave(SAW)temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transduc...based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave(SAW)temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transducer and eight reflectors on YZ LiNbO3 substrate.Was fabricated as the sensor element,in which,three reflectors were used for temperature sensing,and the other five were for the ID Tag using phase encoding.Single phase unidirectional transducers(SPUDTs)and shorted grating were used to structure the sAW device,leading to excellent signal to noise ratio(SNR).The performance of the SAW device was simulated by the coupling of modes(COM)prior to fabrication.Using the network analyzer,the response in time domain of the fabricated 434 MHz SAW sensor was characterized,the measured S11 agrees well with the simulated one,sharp reflection peaks,high signal/noise,and low spurious noise between the reflection peaks were observed.Using the radar system based on FSCW as the reader unit.the developed SAW temperature sensors were evaluated wirelessly.Excellent1 inearity and good resolution of士1℃ were observed.展开更多
基金Supported by the National Natural Science Foundation of China under Grant Nos 11174142,11304160 and 11404147the National Basic Research Program of China under Grant No 2012CB921504+2 种基金the PAPD Projectthe Natural Science Foundation of Jiangsu Higher Education Institutions of China under Grant No 13KJB140008the Foundation of Nanjing University of Posts and Telecommunications under Grant No NY213018
文摘ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with (1120) texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the (1120) ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.
基金the National Research Foundation of Korea(NRF)grant funded by the Korea government(MSIT)(No.2020R1A2C2013385)Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education(No.NRF-2020R1A6A1A03047771)Korea Institute of Planning and Evaluation for Technology in Food,Agriculture and Forestry(IPET),Korea Smart Farm Research and Development Foundation(KosFarm)through Smart Farm Innovation Technology Development Program,funded by Ministry of Agriculture,Food,and Rural Affairs(MAFRA)and Ministry of Science and ICT(MSIT),Rural Development Administration(RDA)(No.421029-4).
文摘Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the development of novel chemical interface based on two-dimensional(2D)sensing materials for SAW sensors for the rapid and sensitive detection of NH_(3)gas at room temperature(RT)still remains challenging.Herein,we report a highly selective RT NH_(3)gas sensor based on sulfur-doped graphitic carbon nitride quantum dots(S@g-C_(3)N_(4)QD)coated langasite(LGS)SAW sensor with enhanced sensitivity and recovery rate under ultraviolet(UV)illumination.Fascinatingly,the sensitivity of the S@g-C_(3)N_(4)QD/LGS SAW sensor to NH_(3)(500 ppb)at RT is dramatically enhanced by~4.5-fold with a low detection limit(~85 ppb),high selectivity,excellent reproducibility,fast response/recovery time(70 s/79 s)under UV activation(365 nm)as compared to dark condition.Additionally,the proposed sensor exhibited augmented NH_(3)detection capability across the broad range of relative humidity(20%–80%).Such remarkable gas sensing performances of the as-prepared sensor to NH_(3)are attributed to the high surface area,enhanced functional groups,sulfur defects,UV photogenerated charge carriers,facile charge transfer in the S@g-C_(3)N_(4)QD sensing layer,which further helps to improve the gas molecules adsorption that causes the increase in conductivity,resulting in larger frequency responses.The gas sensing mechanism of S@g-C_(3)N_(4)QD/LGS SAW sensor is ascribed to the enhanced electroacoustic effect,which is supported by the correlation of resistive type and COMSOL Multiphysics simulation studies.We envisage that the present work paves a promising strategy to develop the next generation 2D g-C_(3)N_(4)based high responsive RT SAW gas sensors.
基金supported by the National Nature Science Foundation of China(11074268,10834010)
文摘based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave(SAW)temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transducer and eight reflectors on YZ LiNbO3 substrate.Was fabricated as the sensor element,in which,three reflectors were used for temperature sensing,and the other five were for the ID Tag using phase encoding.Single phase unidirectional transducers(SPUDTs)and shorted grating were used to structure the sAW device,leading to excellent signal to noise ratio(SNR).The performance of the SAW device was simulated by the coupling of modes(COM)prior to fabrication.Using the network analyzer,the response in time domain of the fabricated 434 MHz SAW sensor was characterized,the measured S11 agrees well with the simulated one,sharp reflection peaks,high signal/noise,and low spurious noise between the reflection peaks were observed.Using the radar system based on FSCW as the reader unit.the developed SAW temperature sensors were evaluated wirelessly.Excellent1 inearity and good resolution of士1℃ were observed.