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Recent Progress on Fabrication of Thermal Conductive Aluminum Nitride Fibers
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作者 沈卓尔 任松 +3 位作者 葛灿 赵浩阅 韩梦瑶 方剑 《Journal of Donghua University(English Edition)》 CAS 2023年第6期622-630,共9页
Among nitride fibers,aluminum nitride(AlN)fibers have been developed for various advanced applications due to their mechanical flexibility,high thermal conductivity,and excellent electrical insulation and chemical sta... Among nitride fibers,aluminum nitride(AlN)fibers have been developed for various advanced applications due to their mechanical flexibility,high thermal conductivity,and excellent electrical insulation and chemical stability.This article presents an overview on the recent progress of AlN fibers.The properties of AlN,particularly the thermal conductivity of AlN in polymer matrix composites are introduced.Afterward,two major approaches,carbothermal reduction and nitriding polycrystalline alumina fiber,for the preparation of AlN fibers are discussed.The carbothermal reduction includes electrospinning,solution blow spinning,and chemical vapor deposition.Furthermore,some perspectives on the future directions for the preparation and application of fibrous AlN are highlighted.This review is expected to provide readers with valuable guidance on the preparation of AlN fibers and inspire researchers to explore more potential applications. 展开更多
关键词 aluminum nitride fiber thermal conductivity carbothermal reduction nitriding polycrystalline alumina fiber
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Synthesis of aluminum nitride in a coke – calcium reduction bed using nitrogen in air 被引量:1
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作者 Ehsan Noorizadeh Dehkordi H.R.Samim Banihashemi +2 位作者 R.Naghizadeh H.R.Rezaie M.Goodarzi 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2015年第9期972-976,共5页
An experimental study on the heating of a mixture of aluminum and lithium hydroxide (LiOH) powders in a reductive bed under air atmosphere is reported. The formation of aluminum nitride (A1N) during this process w... An experimental study on the heating of a mixture of aluminum and lithium hydroxide (LiOH) powders in a reductive bed under air atmosphere is reported. The formation of aluminum nitride (A1N) during this process was the focus of this study. The formation of A1N was achieved using LiOH as an additive and heating the sample in a resistance furnace in a specially designed double crucible within a bed of a mixture of coke and filamentous calcium. The temperature range of the reaction was between 700℃ and 1100℃. The optimum temperature of 1100℃ and the optimum LiOH amount (Swt%) required to achieve maximum yield were determined by powder X-ray diffraction (XRD) analysis. Scanning electron microscopy (SEM) micrographs clearly indicated the transformation of grain structures from rods (700℃) to cauliflower shapes (1100℃). 展开更多
关键词 aluminum nitride synthesis NITRIDATION lithium hydroxide reaction temperature
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Morphology control of aluminum nitride(AlN)for a novel high-temperature hydrogen sensor 被引量:1
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作者 Angga Hermawan Yusuke Asakura Shu Yin 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2020年第11期1560-1567,共8页
Hydrogen is a promising renewable energy source for fossil-free transportation and electrical energy generation.However,leaking hydrogen in high-temperature production processes can cause an explosion,which endangers ... Hydrogen is a promising renewable energy source for fossil-free transportation and electrical energy generation.However,leaking hydrogen in high-temperature production processes can cause an explosion,which endangers production workers and surrounding areas.To detect leaks early,we used a sensor material based on a wide bandgap aluminum nitride(AlN)that can withstand a high-temperature environment.Three unique AlN morphologies(rod-like,nest-like,and hexagonal plate-like)were synthesized by a direct nitridation method at 1400℃usingγ-AlOOH as a precursor.The gas-sensing performance shows that a hexagonal plate-like morphology exhibited p-type sensing behavior and showed good repeatability as well as the highest response(S=58.7)toward a 750 ppm leak of H2 gas at high temperature(500°C)compared with the rod-like and nest-like morphologies.Furthermore,the hexagonal plate-like morphology showed fast response and recovery times of 40 and 82 s,respectively.The surface facet of the hexagonal morphology of AlN might be energetically favorable for gas adsorption–desorption for enhanced hydrogen detection. 展开更多
关键词 aluminum nitride controllable morphology direct nitridation γ-AlOOH hydrogen sensor
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Preparation of Nanometric Particles of Aluminum Nitride by Pyrolysis of Diethylaluminun Azide
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作者 YE Yaping ZHOU Keyan +2 位作者 GAO Thznxian SUN Yu LU Bingling(Applied Science School, USTB, Beijing 100083, China)(School of Chemical Engineering, Dalian University of Technology) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1997年第4期43-46,共4页
Thermal stabilities of diethylaluminum azide were studied by means of theoretical analysis and expriments.The results have shown that diethylaluminum and azid be heated to vigorous refluxing under vacuum(400 Pa) at te... Thermal stabilities of diethylaluminum azide were studied by means of theoretical analysis and expriments.The results have shown that diethylaluminum and azid be heated to vigorous refluxing under vacuum(400 Pa) at temperature as high as 420℃ without incident of explosion and decomposes smoothly during 460 ~580℃ to form nanometric particles of aluminum nitride in the aerosol synthesis reactor. A new way of preparing nanometric parties of aluminum nitrideis found. 展开更多
关键词 aluminum nitride nanometric particle PREPARATION diethylaluminum azide
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Preparation of Ultra-fine Aluminum Nitride in Thermal Plasma
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作者 漆继红 罗义文 +1 位作者 印永祥 代晓雁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第4期1417-1420,共4页
Ultra-fine aluminum nitride has been synthesized by the evaporation of aluminum powder at atmospheric-pressure nitrogen plasma in a hot-wall reactor. The average size of aluminum nitride particle is 0.11 μm measured ... Ultra-fine aluminum nitride has been synthesized by the evaporation of aluminum powder at atmospheric-pressure nitrogen plasma in a hot-wall reactor. The average size of aluminum nitride particle is 0.11 μm measured by scanning electric mirror (SEM), and the purity is at least over 90% evaluated by X-Ray diffraction (XRD). The conversion of Al powder to aluminum nitride is strongly depended on the injection of NH3. Typical experimental parameters such as the feed rate of raw material, the flow rate of ammonia and the position of injecting aluminum powder into the reactor are given. 展开更多
关键词 thermal plasma ultra-fine aluminum nitride
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Synthesis of aluminum nitride nano-powder by decomposed diethylaluminum azide in aerosols
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作者 YapingYe lihuaWang WeilanQian MuTang YanbingWu 《Journal of University of Science and Technology Beijing》 CSCD 2004年第5期428-432,共5页
An aerosol process for making aluminum nitride nano-powder by decompositionof single compound diethylalumimm az-ide was described. X-ray diffraction (XRD) and transmissionelectron microscopy (TEM) were used to study c... An aerosol process for making aluminum nitride nano-powder by decompositionof single compound diethylalumimm az-ide was described. X-ray diffraction (XRD) and transmissionelectron microscopy (TEM) were used to study characters of the A1N powder. It is shown that theprocess can produce spherical A1N powder with mean particle diameters ranging from 10 to 50 nm at500-800°C. The generated amorphous A1N powder is characterized by a BET (Brunauer-Emmett-Teller)surface area of 103 m2/g and is very reactive to moisture. 展开更多
关键词 aluminum nitride aerosol reactor nanometric diethylaluminun azide
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Graphene-aluminum nitride NEMS resonant infrared detector
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作者 Zhenyun Qian Yu Hui +3 位作者 Fangze Liu Sungho Kang Swastik Kar Matteo Rinaldi 《Microsystems & Nanoengineering》 EI 2016年第1期181-187,共7页
The use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated,showing thermal detection capabilities that cou... The use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated,showing thermal detection capabilities that could potentially outperform conventional microbolometers.The scaling of the device thickness in the nanometer range and the achievement of high infrared absorption in such a subwavelength thickness,without sacrificing the electromechanical performance,are the two key challenges for the implementation of fast,high-resolution micro-/nanoelectromechanical resonant infrared detectors.In this paper,we show that by using a virtually massless,high-electrical-conductivity,and transparent graphene electrode,floating at the van der Waals separation of a few angstroms from a piezoelectric aluminum nitride nanoplate,it is possible to implement ultrathin(460 nm)piezoelectric nanomechanical resonant structures with improved electromechanical performance(450% improved frequency×quality factor)and infrared detection capabilities(4100×improved infrared absorptance)compared with metal-electrode counterparts,despite their reduced volumes.The intrinsic infrared absorption capabilities of a submicron thin graphene–aluminum nitride plate backed with a metal electrode are investigated for the first time and exploited for the first experimental demonstration of a piezoelectric nanoelectromechanical resonant thermal detector with enhanced infrared absorptance in a reduced volume.Moreover,the combination of electromagnetic and piezoelectric resonances provided by the same graphene–aluminum nitride-metal stack allows the proposed device to selectively detect short-wavelength infrared radiation(by tailoring the thickness of aluminum nitride)with unprecedented electromechanical performance and thermal capabilities.These attributes potentially lead to the development of uncooled infrared detectors suitable for the implementation of high performance,miniaturized and power-efficient multispectral infrared imaging systems. 展开更多
关键词 aluminum nitride GRAPHENE infrared detector MEMS NEMS PIEZOELECTRIC resonant sensor
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Octave-spanning visible supercontinuum generation from an aluminum nitride single crystal pumped by a 355 nm nanosecond pulse
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作者 李春波 任席奎 +6 位作者 武红磊 郑瑞生 赵俊清 欧阳德钦 杜晨林 闫培光 阮双琛 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第4期94-98,共5页
Supercontinuum generation(SC) of more than one octave spectrum spanning covering from 400 nm to 820 nm was achieved by pumping a piece of aluminum nitride(AIN) single crystal using a nanosecond 355 nm ultraviolet ... Supercontinuum generation(SC) of more than one octave spectrum spanning covering from 400 nm to 820 nm was achieved by pumping a piece of aluminum nitride(AIN) single crystal using a nanosecond 355 nm ultraviolet laser. The AlN with a thickness of ~0.8 mm was grown by an optimized physical vapor transport technique and polished with solidification technology. Compared to previously reported ones, the achieved visible SC exhibited the broadest spectrum spanning from bulk materials pumped by a nanosecond pulse laser. The visible supercontinuum in Al N presents new opportunities for bulk material-based white light SC and may find more potential applications beyond typical applications in integrated semiconductive photoelectronic devices. 展开更多
关键词 Al SC Octave-spanning visible supercontinuum generation from an aluminum nitride single crystal pumped by a 355 nm nanosecond pulse
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Potential acute effects of suspended aluminum nitride (AlN) nanoparticles on soluble microbial products (SMP) of activated sludge
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作者 Lijie Zhou Weiqin Zhuang +3 位作者 Xin Wang Ke Yu Shufang Yang Siqing Xia 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2017年第7期284-292,共9页
The study aims to identify the potential acute effects of suspended aluminum nitride(Al N)nanoparticles(NPs) on soluble microbial products(SMP) of activated sludge.Cultured activated sludge loaded with 1,10,50,1... The study aims to identify the potential acute effects of suspended aluminum nitride(Al N)nanoparticles(NPs) on soluble microbial products(SMP) of activated sludge.Cultured activated sludge loaded with 1,10,50,100,150 and 200 mg/L of Al N NPs were carried out in this study.As results showed,Al N NPs had a highly inverse proportionality to bacterial dehydrogenase and OUR,indicating its direct toxicity to the activated sludge viability.The toxicity of Al N NPs was mainly due to the nano-scale of Al N NPs.In SMP,Al N NPs led to the decrease of polysaccharide and humic compounds,but had slight effects on protein.The decrease of tryptophan-like substances in SMP indicated the inhibition of Al N NPs on the bacterial metabolism.Additionally,Al N NPs reduced obviously the molecular weight of SMP,which might be due to the nano-scale of Al N. 展开更多
关键词 aluminum nitride nanoparticles Topic Soluble microbial products(SMP) Activated sludge Bacterial viability
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In situ fabrication and properties of Al N dispersion strengthened 2024 aluminum alloy
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作者 Wei-wei Yang Zhi-meng Guo +3 位作者 Lei-chen Guo Hui-qin Cao Ji Luo An-ping Ye 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2014年第12期1228-1232,共5页
Nanoscaled aluminum nitride (AlN) dispersion strengthened 2024 aluminum alloy was fabricated using a novel approach in which Al-Mg-Cu compacts were partially nitrided in flowing nitrogen gas. The compacts were subse... Nanoscaled aluminum nitride (AlN) dispersion strengthened 2024 aluminum alloy was fabricated using a novel approach in which Al-Mg-Cu compacts were partially nitrided in flowing nitrogen gas. The compacts were subsequently consolidated by sintering and hot extrusion. The microstructure and mechanical properties of the material were preliminarily investigated. Transmission electron microscopy and X-ray diffraction results revealed that AlN particles were generated by the nitridation of Al-Mg-Cu compacts. The material exhibited excellent mechanical properties after hot extrusion and heat treatment. The ultimate tensile and yield strengths of the extruded samples containing 8.92vol% AlN with the T6 heat treatment were 675 and 573 MPa, respectively. 展开更多
关键词 dispersion strengthened alloys aluminum alloys aluminum nitride FABRICATION mechanical properties
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Salt-Assisted SHS Synthesis of Aluminium Nitride Powders for Refractory Applications
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作者 Alan Wilmański Miroslaw M.Bucko +1 位作者 Zbigniew Pedzich Jacek Szczerba 《Journal of Materials Science and Chemical Engineering》 2014年第10期26-31,共6页
Powders of aluminum nitride can be prepared by self-sustain high-temperature synthesis (SHS) between aluminum and nitrogen but its high exothermic effect causes melting and evaporation of aluminum and low efficiency o... Powders of aluminum nitride can be prepared by self-sustain high-temperature synthesis (SHS) between aluminum and nitrogen but its high exothermic effect causes melting and evaporation of aluminum and low efficiency of such reaction. A presence of inorganic salt in the starting powder mixture can decrease a heat evolved in the SHS reaction, hinders melting and coalescence of aluminum, and facilitates penetration of nitrogen into interior of a powder bed. Mixtures of alumina powders with different grain sizes and different amounts of aluminum carbonate were subjected to the SHS reaction under 0.05, 0.1 or 1 MPa nitrogen. The powders were composed of aluminum nitride, unreacted aluminum, aluminum oxynitride and in some cases corundum and aluminum oxycarbonate. The finale effects are strongly dependent on the amount of the salt, a grain size of aluminum and a nitrogen pressure. 展开更多
关键词 aluminum nitride Self-Sustain High-Temperature Synthesis Salt Assisted Synthesis Refractory Materials
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Aluminum Reduction and Nitridation of Bauxite
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作者 ZHANG Zhikuan ZHANG Dianwei +2 位作者 XU Enxia HOU Xinmei DONG Yanling 《China's Refractories》 CAS 2007年第2期22-27,共6页
The application of bauxite with low Al2O3 content has been studied in this paper and β-SiAlON has been obtained from two kinds of bauxites (Al2O3 content 68.08 mass% and 46.30 mass% respectively) by aluminum reduct... The application of bauxite with low Al2O3 content has been studied in this paper and β-SiAlON has been obtained from two kinds of bauxites (Al2O3 content 68.08 mass% and 46.30 mass% respectively) by aluminum reduction and nitridation method. The sequence of reactions has been studied using thermal analysis (TG-DTA), X-ray diffraction (XRD) analysis and scanning electron microscopy (SEM) with EDS. Compared with carbon thermal reduction and nitridation of aluminosilicates employed presently, the reaction in the system of bauxite-Al-N2 occurs at lower temperature. β-SiAlON appears as one of the main products from 1573K and exists stably in the range of the present experimental temperature. The microstructure of β-SiAlON obtained at 1773 K is short column with 5-10μm observed by SEM. 展开更多
关键词 SIALON BAUXITE Β-SIALON aluminum reduction and nitridation
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Chair-like N_(6)^(6-) in AlN_(3) with high-energy density
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作者 郭世泰 徐真真 +4 位作者 耿延雷 芮琦 杜殿臣 李建福 王晓丽 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第12期150-157,共8页
The search for stable novel polynitrogen clusters has garnered significant attention in the field of energetic materials due to their potential applications as high-energy-density materials.In this study,a chair-like ... The search for stable novel polynitrogen clusters has garnered significant attention in the field of energetic materials due to their potential applications as high-energy-density materials.In this study,a chair-like N_(6)^(6-) ring with N-N single bonds in the AlN_(3) compound is theoretically predicted through first-principles calculations in conjunction with an unbiased structure searching method.The predicted AlN_(3) phase exhibits high kinetic and thermodynamic stability,along with a high energy density of 5.04 kJ/g relative to AlN and N_(2) gas.Additionally,its detonation velocity and pressure are estimated to reach 12.93 km/s and 1009.63 kbar,respectively.These values are greater than those of TNT and HMX,positioning it as a promising candidate for high-energy-density materials in the field of explosive combustion.The analysis of electronic properties and the related chemical bonding patterns indicates that the compounds are stabilized by both Coulomb interactions and covalent bonds.More importantly,the calculated formation of enthalpy indicates that the N_(6)^(6-)anions within AlN_(3) can be synthesized by compressing AlN and N_(2) at a moderate pressure(46 GPa).These findings present a viable approach for synthesizing and stabilizing the all-nitrogen N_(6)^(6-)anions. 展开更多
关键词 high pressure aluminum nitride electronic property high-energy-density materials
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Low-Temperature Synthesis of Nano-AlN Based on Solid Nitrogen Source by Plasma-Assisted Ball Milling
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作者 Zhuoli Yang Xianbin Hou Leyang Dai 《Journal of Renewable Materials》 SCIE EI 2023年第6期2941-2951,共11页
Plasma-assisted ball milling was carried out on the Al+C3H6N6 system and Al+C_(4)H_(4)N_(4) system,respectively.The phase structure,functional groups and synthesis mechanism were analyzed by XRD and FT-IR,and the diff... Plasma-assisted ball milling was carried out on the Al+C3H6N6 system and Al+C_(4)H_(4)N_(4) system,respectively.The phase structure,functional groups and synthesis mechanism were analyzed by XRD and FT-IR,and the differences in the synthesis process of nano-AlN with different solid nitrogen sources were discussed.The results show that C3H6N6 has a stable triazine ring structure,and its chemical bond is firm and difficult to break,so AlN cannot be synthesized directly by solid-solid reaction at room temperature.However,there are a large number of nitrile groups(-CN)and amino groups(-NH_(2))in C_(4)H_(4)N_(4) molecules.Under the combined action of plasma bombardment and mechanical energy activation,C_(4)H_(4)N_(4) molecules undergo polycondensation and deamination,so that the ball milling tank is filled with a large number of active nitrogen-containing groups such as N=,≡N,etc.These groups and ball milling activated Al can synthesize nano-AlN at room temperature,with a conversion rate of 92%.SEM,DSC/TG analysis showed that the powder obtained by ball milling was formed by soft agglomeration of many fine primary particles about 50–80 nm.The surface morphology of the powder was loose and porous,and it had strong activity.After annealing at 800℃,the conversion rate of the Al+C_(4)H_(4)N_(4) system reached 99%. 展开更多
关键词 Plasma-assisted ball milling solid nitrogen source melamine(C_(3)H_(6)N_(6)) aluminum nitride(AlN) low-temperature synthesis
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Characteristics of inclusions in high-Al steel during electroslag remelting process 被引量:6
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作者 Cheng-bin Shi Xi-chun Chen Han-jie Guo 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2012年第4期295-302,共8页
The characteristics of inclusions in high-A1 steel refmed by electroslag remelting (ESR) were investigated by image analysis, scanning electron microscopy (SEM), and energy-dispersive spectrometry (EDS). The res... The characteristics of inclusions in high-A1 steel refmed by electroslag remelting (ESR) were investigated by image analysis, scanning electron microscopy (SEM), and energy-dispersive spectrometry (EDS). The results show that the size of almost all the inclusions observed in ESR ingots is less than 5 μm. Inclusions smaller than 3 μm take nearly 75% of the total inclusions observed in each ingot. Inclu- sions observed in ESR ingots are pure AIN as dominating precipitates and some fine spherical Al2O3 inclusions with a size of 1 μm or less. It is also found that protective gas operation and slag deoxidation treatment during ESR process have significant effects on the number of inclusions smaller than 2μm but little effects on that of inclusions larger than 2 μm. Thermodynamic calculations show that AIN inclusions are unable to precipitate in the liquid metal pool under the present experimental conditions, while the precipitation of AlN inclusions could take place at the solidifying front due to the microsegregation orAl and N in liquid steel during solidification. 展开更多
关键词 electroslag remelting aluminum nitride INCLUSIONS THERMODYNAMICS
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Thermal conductivity behavior of SPS consolidated AlN/Al composites for thermal management applications 被引量:5
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作者 DUN Bo JIA Xian +1 位作者 JIA Chengchang CHU Ke 《Rare Metals》 SCIE EI CAS CSCD 2011年第2期189-194,共6页
A1N/A1 composites are a potentially new kind of thermal management material for electronic packaging and heat sink applications. The spark plasma sintering (SPS) technique was used for the first time to prepare the ... A1N/A1 composites are a potentially new kind of thermal management material for electronic packaging and heat sink applications. The spark plasma sintering (SPS) technique was used for the first time to prepare the A1N/A1 composites, and attention was focused on the effects of sintefing parameters on the relative density, microstructure and, in particular, thermal conductivity behavior of the composites. The results showed that the relative density and thermal conductivity of the composites increased with increasing sintering temperature and pressure. The composites sintered at 1550℃ for 5 min under 70 MPa showed the maximum relative density and thermal conductivity, corresponding to 99% and 97.5 W.m-1.K-1, respectively. However, the thermal conductivity of present A1N/A1 composites is still far below the theoretical value. Possible reasons for this deviation were discussed. 展开更多
关键词 metallic matrix composites aluminum nitride spark plasma sintering DENSITY thermal conductivity
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Dielectric properties of spark plasma sintered AlN/SiC composite ceramics 被引量:4
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作者 Peng Gao Cheng-chang Jia +3 位作者 Wen-bin Cao Cong-cong Wang Dong Liang Guo-liang Xu 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2014年第6期589-594,共6页
In this study, we have investigated how the dielectric loss tangent and permittivity of AlN ceramics are affected by factors such as powder mixing methods, milling time, sintering temperature, and the addition of a se... In this study, we have investigated how the dielectric loss tangent and permittivity of AlN ceramics are affected by factors such as powder mixing methods, milling time, sintering temperature, and the addition of a second conductive phase. All ceramic samples were pre-pared by spark plasma sintering (SPS) under a pressure of 30 MPa. AlN composite ceramics sintered with 30wt%-40wt%SiC at 1600℃ for 5 min exhibited the best dielectric loss tangent, which is greater than 0.3. In addition to AlN and β-SiC, the samples also contained 2H-SiC and Fe5Si3, as detected by X-ray difraction (XRD). The relative densities of the sintered ceramics were higher than 93%. Experimental results indicate that nano-SiC has a strong capability of absorbing electromagnetic waves. The dielectric constant and dielectric loss of AlN-SiC ce-ramics with the same content of SiC decreased as the frequency of electromagnetic waves increased from 1 kHz to 1 MHz. 展开更多
关键词 ceramic materials composite materials aluminum nitride silicon carbide spark plasma sintering dielectric losses
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High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering 被引量:4
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作者 Chengzhang Han Da Chen +4 位作者 Yaozhong Zhang Dong Xu Yijian Liu Eric Siu-Wai Kong Yafei Zhang 《Nano-Micro Letters》 SCIE EI CAS 2012年第1期40-44,共5页
Columnar nanocrystalline aluminum nitride(cnc-AlN) thin films with(002) orientation and uniform texture have been deposited successfully on large silicon wafers by RF reactive magnetron sputtering.At the optimum sputt... Columnar nanocrystalline aluminum nitride(cnc-AlN) thin films with(002) orientation and uniform texture have been deposited successfully on large silicon wafers by RF reactive magnetron sputtering.At the optimum sputtering parameters, the deposited cnc-AlN thin films show a c-axis preferred orientation with a crystallite size of about 28 nm and surface roughness(RMS) of about 1.29 nm. The cnc-AlN thin films were well transparent with an optical band gap about 4.8 e V, and the residual compressive stress and the defect density in the film have been revealed by Ramon spectroscopy. Moreover, piezoelectric performances of the cnc-AlN thin films executed effectively in a film bulk acoustic resonator structure. 展开更多
关键词 Columnar film aluminum nitride Piezoelectric effect RF sputtering Optical property
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Fabrication of AlN-TiC/Al composites by gas injection processing 被引量:3
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作者 YU Huashun CHEN Hongmei MA Rendian MIN Guanghui 《Rare Metals》 SCIE EI CAS CSCD 2006年第6期659-664,共6页
The fabrication of AlN-TiC/Al composites by carbon- and nitrogen-containing gas injection into Al-Mg-Ti melts was studied. It was shown that AlN and TiC particles could be formed by the in situ reaction of mixture gas... The fabrication of AlN-TiC/Al composites by carbon- and nitrogen-containing gas injection into Al-Mg-Ti melts was studied. It was shown that AlN and TiC particles could be formed by the in situ reaction of mixture gas (N2 + C2H2 + NH3) with Al-Mg-Ti melts. The condition for the formation of AlN was that the treatment temperature must be higher than 1373 K, and the amounts of AlN and TiC increased with the increase of the treatment temperature and the gas injection time It was considered that AlN was formed by the direct reaction of Al with nitrogen-containing gas at the interface of the gas bubble and the melt. However, the mechanism of TiC formation is a combination mechanism of solution-precipitation and solid-liquid reaction. 展开更多
关键词 in situ composites gas injection aluminum nitride titanium carbide
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Resonance-mode effect on piezoelectric microcantilever performance in air,with a focus on the torsional modes 被引量:1
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作者 邱华诚 Dara Feili +1 位作者 吴学忠 Helmut Seidel 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第2期481-485,共5页
A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes... A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results. 展开更多
关键词 MICROCANTILEVER aluminum nitride torsional mode quality factor
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