A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna arra...A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications.展开更多
为满足卫星通信中双频共口径、高集成、多波束等要求,提出了一种基于封装天线(Antenna in Package, AIP)架构的Ka频段收发共口径多波束相控阵天线。天线以双频堆叠微带单元的形式实现了收发共口径,并通过天线集成滤波器保证了收发通道...为满足卫星通信中双频共口径、高集成、多波束等要求,提出了一种基于封装天线(Antenna in Package, AIP)架构的Ka频段收发共口径多波束相控阵天线。天线以双频堆叠微带单元的形式实现了收发共口径,并通过天线集成滤波器保证了收发通道的隔离度优于44 dB。在±60°范围内,64元接收阵增益优于17.4 dB,128元发射阵增益优于20.2 dB,具有良好的波束扫描性能。为获得收发多波束一片式集成,在收发(Transmitter/Receiver, T/R)组件中使用晶圆级三维系统集成封装(Three Dimensions System in Package, 3D-SIP)并结合微凸点的制备技术,保证了系统级芯片(System-on-Chip, SOC)的高密度二次集成。高低频混压技术同样被应用于阵面、收发网络、控制供电链路的多层板集成。所提多波束的相控阵天线新架构具有高密度集成TR组件、多波束一体化、高效散热等特点,在卫星通信和数据链等方面具有广阔的应用前景。展开更多
为了适应机载射频前端小型化的需求,设计了一种基于SiP(System in Package)技术的K频段四通道天线接口单元。该单元采用二次超外差变频构架,主要由两个硅基封装的变频双通道集成SiP模块以及高低本振集成锁相环SiP模块组成。硅基变频SiP...为了适应机载射频前端小型化的需求,设计了一种基于SiP(System in Package)技术的K频段四通道天线接口单元。该单元采用二次超外差变频构架,主要由两个硅基封装的变频双通道集成SiP模块以及高低本振集成锁相环SiP模块组成。硅基变频SiP模块采用PoP(Package on Package)方式实现不同功能电路封装的上下堆叠,保证了良好的电磁兼容和输出杂散抑制。堆叠好的硅基封装通过BGA植入陶瓷封装中,实现了高可靠的气密性。基于SiP技术的四通道天线接口单元体积仅为58.2 mm×40.3 mm×11.0 mm,在保持优良电性能指标前提下,相比于传统方式设计,四通道天线接口单元在体积和质量上均大幅缩减86%以上,在机载、弹载等对设备轻小型化要求较高的平台上具有广阔的应用前景。展开更多
5G时代的到来将通信系统的工作频段推入毫米波波段,这给毫米波器件的封装带来了挑战.5G系统需要将射频、模拟、数字功能和无源器件以及其他系统组件集成在一个封装模块中,这个要求恰恰体现了异质异构集成的特征.在所有的异质异构集成解...5G时代的到来将通信系统的工作频段推入毫米波波段,这给毫米波器件的封装带来了挑战.5G系统需要将射频、模拟、数字功能和无源器件以及其他系统组件集成在一个封装模块中,这个要求恰恰体现了异质异构集成的特征.在所有的异质异构集成解决方案中,2.5D/3D系统级封装(System in Package,SiP)因其高度集成化被视为解决5G系统封装的重要突破口.文章以SiP为切入口,着重介绍了未来5G封装发展重点的2.5D/3D SiP技术以及目前备受瞩目的Chiplet技术.基于5G毫米波器件的系统级封装解决方案,探讨了适用于毫米波器件封装的基板材料以及SiP所需的先进封装技术.最后,针对5G天线模块的封装,介绍了片上天线和封装天线两种解决方案.展开更多
This work presents a novel design of Ka-band(33 GHz)filtering packaging antenna(FPA)that features broadband and great filtering response,and is based on glass packaging material and through-glass via(TGV)technologies....This work presents a novel design of Ka-band(33 GHz)filtering packaging antenna(FPA)that features broadband and great filtering response,and is based on glass packaging material and through-glass via(TGV)technologies.Compared to traditional packaging materials(printed circuit board,low temperature co-fired ceramic,Si,etc.),TGVs are more suitable for miniaturization(millimeter-wave three-dimensional(3D)packaging devices)and have superior microwave performance.Glass substrate can realize 3D high-density interconnection through bonding technology,while the coefficient of thermal expansion(CTE)matches that of silicon.Furthermore,the stacking of glass substrate enables high-density interconnections and is compatible with micro-electro-mechanical system technology.The proposed antenna radiation patch is composed of a patch antenna and a bandpass filter(BPF)whose reflection coefficients are almost complementary.The BPF unit has three pairs ofλg/4 slots(defect microstrip structure,DMS)and twoλg/2 U-shaped slots(defect ground structure,DGS).The proposed antenna achieves large bandwidth and high radiation efficiency,which may be related to the stacking of glass substrate and TGV feed.In addition,the introduction of four radiation nulls can effectively improve the suppression level in the stopband.To demonstrate the performance of the proposed design,a 33-GHz broadband filtering antenna is optimized,debugged,and measured.The antenna could achieve|S11|<-10 dB in 29.4‒36.4 GHz,and yield an impedance matching bandwidth up to 21.2%,with the stopband suppression level at higher than 16.5 dB.The measurement results of the proposed antenna are a realized gain of~6.5 dBi and radiation efficiency of~89%.展开更多
We present an antenna-in-package system integrated with a meander line antenna based on low temperature co-fired ceramic(LTCC) technology. The proposed system employs a meander line patch antenna, a packaging layer, a...We present an antenna-in-package system integrated with a meander line antenna based on low temperature co-fired ceramic(LTCC) technology. The proposed system employs a meander line patch antenna, a packaging layer, and a laminated multi-chip module(MCM) for integration of integrated circuit(IC) bare chips.A microstrip feed line is used to reduce the interaction between patch and package. To decrease electromagnetic coupling, a via hole structure is designed and analyzed. The meander line antenna achieved a bandwidth of 220 MHz with the center frequency at 2.4 GHz, a maximum gain of 2.2 d B, and a radiation efficiency about 90% over its operational frequency. The whole system, with a small size of 20.2 mm×6.1 mm×2.6 mm, can be easily realized by a standard LTCC process. This antenna-in-package system integrated with a meander line antenna was fabricated and the experimental results agreed with simulations well.展开更多
文摘A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications.
文摘为满足卫星通信中双频共口径、高集成、多波束等要求,提出了一种基于封装天线(Antenna in Package, AIP)架构的Ka频段收发共口径多波束相控阵天线。天线以双频堆叠微带单元的形式实现了收发共口径,并通过天线集成滤波器保证了收发通道的隔离度优于44 dB。在±60°范围内,64元接收阵增益优于17.4 dB,128元发射阵增益优于20.2 dB,具有良好的波束扫描性能。为获得收发多波束一片式集成,在收发(Transmitter/Receiver, T/R)组件中使用晶圆级三维系统集成封装(Three Dimensions System in Package, 3D-SIP)并结合微凸点的制备技术,保证了系统级芯片(System-on-Chip, SOC)的高密度二次集成。高低频混压技术同样被应用于阵面、收发网络、控制供电链路的多层板集成。所提多波束的相控阵天线新架构具有高密度集成TR组件、多波束一体化、高效散热等特点,在卫星通信和数据链等方面具有广阔的应用前景。
文摘为了适应机载射频前端小型化的需求,设计了一种基于SiP(System in Package)技术的K频段四通道天线接口单元。该单元采用二次超外差变频构架,主要由两个硅基封装的变频双通道集成SiP模块以及高低本振集成锁相环SiP模块组成。硅基变频SiP模块采用PoP(Package on Package)方式实现不同功能电路封装的上下堆叠,保证了良好的电磁兼容和输出杂散抑制。堆叠好的硅基封装通过BGA植入陶瓷封装中,实现了高可靠的气密性。基于SiP技术的四通道天线接口单元体积仅为58.2 mm×40.3 mm×11.0 mm,在保持优良电性能指标前提下,相比于传统方式设计,四通道天线接口单元在体积和质量上均大幅缩减86%以上,在机载、弹载等对设备轻小型化要求较高的平台上具有广阔的应用前景。
文摘5G时代的到来将通信系统的工作频段推入毫米波波段,这给毫米波器件的封装带来了挑战.5G系统需要将射频、模拟、数字功能和无源器件以及其他系统组件集成在一个封装模块中,这个要求恰恰体现了异质异构集成的特征.在所有的异质异构集成解决方案中,2.5D/3D系统级封装(System in Package,SiP)因其高度集成化被视为解决5G系统封装的重要突破口.文章以SiP为切入口,着重介绍了未来5G封装发展重点的2.5D/3D SiP技术以及目前备受瞩目的Chiplet技术.基于5G毫米波器件的系统级封装解决方案,探讨了适用于毫米波器件封装的基板材料以及SiP所需的先进封装技术.最后,针对5G天线模块的封装,介绍了片上天线和封装天线两种解决方案.
基金supported by the Fundamental Research Funds for the Central Universities,China(No.ZYGX2019Z003)。
文摘This work presents a novel design of Ka-band(33 GHz)filtering packaging antenna(FPA)that features broadband and great filtering response,and is based on glass packaging material and through-glass via(TGV)technologies.Compared to traditional packaging materials(printed circuit board,low temperature co-fired ceramic,Si,etc.),TGVs are more suitable for miniaturization(millimeter-wave three-dimensional(3D)packaging devices)and have superior microwave performance.Glass substrate can realize 3D high-density interconnection through bonding technology,while the coefficient of thermal expansion(CTE)matches that of silicon.Furthermore,the stacking of glass substrate enables high-density interconnections and is compatible with micro-electro-mechanical system technology.The proposed antenna radiation patch is composed of a patch antenna and a bandpass filter(BPF)whose reflection coefficients are almost complementary.The BPF unit has three pairs ofλg/4 slots(defect microstrip structure,DMS)and twoλg/2 U-shaped slots(defect ground structure,DGS).The proposed antenna achieves large bandwidth and high radiation efficiency,which may be related to the stacking of glass substrate and TGV feed.In addition,the introduction of four radiation nulls can effectively improve the suppression level in the stopband.To demonstrate the performance of the proposed design,a 33-GHz broadband filtering antenna is optimized,debugged,and measured.The antenna could achieve|S11|<-10 dB in 29.4‒36.4 GHz,and yield an impedance matching bandwidth up to 21.2%,with the stopband suppression level at higher than 16.5 dB.The measurement results of the proposed antenna are a realized gain of~6.5 dBi and radiation efficiency of~89%.
基金supported by the National Natural Science Foundation of China(Nos.61574106 and 61334003)the National Defense Pre-research Foundation of China(No.9140A23060115DZ01062)the Key Science and Technology Special Pro ject of Shaanxi Province,China(No.2015KTCQ01-5)
文摘We present an antenna-in-package system integrated with a meander line antenna based on low temperature co-fired ceramic(LTCC) technology. The proposed system employs a meander line patch antenna, a packaging layer, and a laminated multi-chip module(MCM) for integration of integrated circuit(IC) bare chips.A microstrip feed line is used to reduce the interaction between patch and package. To decrease electromagnetic coupling, a via hole structure is designed and analyzed. The meander line antenna achieved a bandwidth of 220 MHz with the center frequency at 2.4 GHz, a maximum gain of 2.2 d B, and a radiation efficiency about 90% over its operational frequency. The whole system, with a small size of 20.2 mm×6.1 mm×2.6 mm, can be easily realized by a standard LTCC process. This antenna-in-package system integrated with a meander line antenna was fabricated and the experimental results agreed with simulations well.