Anti-reflective (AR) single layer of silica-titania (SiO2-TiO2) coatings were obtained from sols containing pyromellitic dianhydride (PMDA) derivatives and Ti and Si precursors on glass substrate by dip-coating method...Anti-reflective (AR) single layer of silica-titania (SiO2-TiO2) coatings were obtained from sols containing pyromellitic dianhydride (PMDA) derivatives and Ti and Si precursors on glass substrate by dip-coating method. The coatings showed very high optical quality and the transmission was improved to up to 98.5%. Furthermore, the coatings also presented good mechanical stability.展开更多
The outstanding tribological performance of transition metal dichalcogenides(TMDs)is attributed to their unique sandwich microstructure and low interlayer shear stress.This advantageous structure allows TMDs to demons...The outstanding tribological performance of transition metal dichalcogenides(TMDs)is attributed to their unique sandwich microstructure and low interlayer shear stress.This advantageous structure allows TMDs to demonstrate exceptional friction reduction properties.Furthermore,the incorporation of TMDs and amorphous carbon(a-C)in multi-layer structures shows excellent potential for further enhancing tribological and anti-oxidation properties.Amorphous carbon,known for its high ductility,chemical inertness,and excellent wear resistance,significantly contributes to the overall performance of these multi-layer coatings.To gain an in-depth understanding of the tribological mechanism and evolution of TMDs’multi-layer coatings,a dual in-situ analysis was carried out using a tribometer equipped with a 3D laser microscope and a Raman spectrometer.This innovative approach allowed for a comprehensive evolution of the tribological,topographical,and tribochemical characteristics of both single-layer WS_(2)and multi-layer WS_(2)/C coatings in real time.The findings from the dual in-situ tribotest revealed distinct failure characteristics between the single-layer WS_(2)coating and the multi-layer WS_(2)/C coating.The single-layer WS_(2)coating predominantly experienced failure due to mechanical removal,whereas a combination of mechanical removal and tribochemistry primarily influenced the failure of the multi-layer WS_(2)/C coating.The tribological evolution process of these two coatings can be classified into four stages on the basis of their tribological behavior:the running-in stage,stable friction stage,re-deposition stage,and lubrication failure stage.Each stage represents a distinct phase in the tribological behavior of the coatings and contributes to our understanding of their behavior during sliding.展开更多
Magnesium(Mg)and its alloys have become a hot research topic in various industries owing to the specific physical and chemical properties.However,high corrosion rate is considered the key lifetime-limiting.Plasma elec...Magnesium(Mg)and its alloys have become a hot research topic in various industries owing to the specific physical and chemical properties.However,high corrosion rate is considered the key lifetime-limiting.Plasma electrolytic oxidation(PEO)method is a simple strategy to deposit an oxide layer on the surface of light metals such as magnesium alloys,to control corrosion rate and promote some other properties,depending on their performances.Nevertheless,their features including their micropore size,distribution,and interconnectivity,and microcracks have not been improved to an acceptable level to support long-term performances of the magnesium-based substrates.Studies have introduced micro/nano-enabled approaches to enhance various properties of PEO coatings such as corrosion resistance,tribological properties,self-healing ability,bioactivity,biocompatibility,antibacterial properties,or catalytic performances.These strategies consist of incorporating of micro and nanoparticles into the PEO layers to produce multi-functional surfaces or the formation of multi-layered coatings to cover the defects of PEO coatings.In this perspective,the present paper aims to overview various nano/micro-enabled strategies to promote the properties of PEO coatings on magnesium alloys.The main focus is given to the functional changes that occurred in response to the incorporation of various types of nano/micro-structures into the PEO coatings on magnesium alloys.展开更多
Perovskite solar cells have shown great potential in the field of underwater solar cells due to their excellent optoelectronic properties;however,their underwater performance and stability still hinder their practical...Perovskite solar cells have shown great potential in the field of underwater solar cells due to their excellent optoelectronic properties;however,their underwater performance and stability still hinder their practical use.In this research,a 1H,1H,2H,2H-heptadecafluorodecyl acrylate(HFDA)anti-reflection coating(ARC)was introduced as a high-transparent material for encapsulating perovskite solar modules(PSMs).Optical characterization results revealed that HFDA can effectively reduce reflection of light below 800 nm,aiding in the absorption of light within this wavelength range by underwater solar cells.Thus,a remarkable efficiency of 14.65%was achieved even at a water depth of 50 cm.And,the concentration of Pb^(2+)for HFDA-encapsulated film is significantly reduced from 186 to 16.5 ppb after being immersed in water for 347 h.Interestingly,the encapsulated PSMs still remained above 80%of their initial efficiency after continuous underwater illumination for 400 h.Furthermore,being exposed to air,the encapsulated PSMs maintained 94%of their original efficiency after 1000 h light illumination.This highly transparent ARC shows great potentials in enhancing the stability of perovskite devices,applicable not only to underwater cells but also extendable to land-based photovoltaic devices.展开更多
Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon ox...Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon oxide etch and strip,are contained.To acquire good performance,such as low leakage current and high capacitance,for further fabricating capacitors,we should firstly optimize DARC etch back.We developed some experiments,focusing on etch time and chemistry,to evalu-ate the profile of a silicon oxide mask,DARC remain and critical dimension.The result shows that etch back time should be con-trolled in the range from 50 to 60 s,based on the current equipment and condition.It will make B/T ratio higher than 70%mean-while resolve the DARC remain issue.We also found that CH_(2)F_(2) flow should be~15 sccm to avoid reversed CD trend and keep in-line CD.展开更多
Radio-frequency(RF)process products suffer from a wafer edge low yield issue,which is induced by contact opening.A failure mechanism has been proposed that is based on the characteristics of a wafer edge film stack.Th...Radio-frequency(RF)process products suffer from a wafer edge low yield issue,which is induced by contact opening.A failure mechanism has been proposed that is based on the characteristics of a wafer edge film stack.The large step height at the wafer's edge leads to worse planarization for the sparse poly-pattern region during the inter-layer dielectric(ILD)chemical mechanical polishing(CMP)process.A thicker bottom anti-reflect coating(BARC)layer was introduced for a sparse poly-pattern at the wafer edge region.The contact open issue was solved by increasing the break through(BT)time to get a large enough window.Well profile and resistance uniformity were obtained by contact etch recipe optimization.展开更多
To research the influence of oxygen flow rate on the structural and optical properties of TiO2 thin film,TiO2 films on glass were deposited by reactive magnetron sputtering.The microstructure and optical properties we...To research the influence of oxygen flow rate on the structural and optical properties of TiO2 thin film,TiO2 films on glass were deposited by reactive magnetron sputtering.The microstructure and optical properties were measured by X-ray diffractometry,AFM and UV-VIS transmittance spectroscopy,respectively.The results show that the films deposited at oxygen flow rate of 10 mL/min has the lowest roughness and the highest transmittance.The absorption angle shifts to longer wavelengths as oxygen flow rates increase from 5 to 10 mL/min,then to shorter ones as the oxygen flow rate increase from 10 to 30 mL/min.The band gap is 3.38 eV,which is nearly constant in the experiment.For the TiO2 thin films deposited at 10 mL/min of oxyge flow rate,there are nano-crystalline structures,which are suitable for anti-reflection(AR) coating in the solar cells structure system.展开更多
In this study, we propose the fabrication of monolithic crystalline silicon solar cells with Tb^(3+) and Yb^(3+)-doped silicon nitride(SiN_x) layers by low-cost screen-printing methods. The performances of c-Si solar ...In this study, we propose the fabrication of monolithic crystalline silicon solar cells with Tb^(3+) and Yb^(3+)-doped silicon nitride(SiN_x) layers by low-cost screen-printing methods. The performances of c-Si solar cells can be enhanced by rare-earth ions doped SiN_x layers via the mechanism of spectrum conversion.These SiN_x doped and codoped thin films were deposited by reactive magnetron co-sputtering and integrated as the antireflection coating layers in c-Si solar cells. The characterizations of SiN_x, SiN_x:Tb^(3+) tand SiN_x:Tb^(3+)-Yb^(3+) thin films were conducted by means of photoluminescence, Rutherford backscattering spectroscopy, Ellipsometry spectroscopy and Fourier transform infrared measurements. Their composition and refractive index was optimized to obtain good anti-reflection coating layer for c-Si solar cells.Transmission electron microscopy performs the uniform coatings on the textured emitter of c-Si solar cells. After the metallization process, we demonstrate monolithic c-Si solar cells with spectrum conversion layers, which lead to a relative increase by 1.34% in the conversion efficiency.展开更多
Silicon nanowires (SiNWs) are a one-dimensional semiconductor, which shows promising applications indistinct areas such as photocatalysis, lithium-ion batteries, gas sensors, medical diagnostics, drug delivery,and sol...Silicon nanowires (SiNWs) are a one-dimensional semiconductor, which shows promising applications indistinct areas such as photocatalysis, lithium-ion batteries, gas sensors, medical diagnostics, drug delivery,and solar cell. From an implementation point of view, SiNWs are fabricated using either a topdownor bottom-up approach, and SiNWs are both optically and electronically active. SiNWs enhancesthe efficiency of the solar cell due to better electronic, optical, and physical properties that can becontrolled by tuning the physical dimensions of SiNWs. The SiNWs shows an inherent capability to beutilized in radial or coaxial p-n junction solar cells, to stipulate orthogonal photon absorption, antireflection,and enhanced carrier collection. This paper reviews property-control of SiNWs, theirvarious types of incorporation in a solar cell, and the reasons behind enhanced efficiency.展开更多
The pulse thermography(PT) technique was applied to the detection of the delamination of a multi-layered coating system composed of mullite/Si onto a reaction-bonded Si C substrate. The potential evaluation was carrie...The pulse thermography(PT) technique was applied to the detection of the delamination of a multi-layered coating system composed of mullite/Si onto a reaction-bonded Si C substrate. The potential evaluation was carried out in order to detect internal delamination in multi-layered material system. Moreover, the observation of the cross sections and 3D views obtained by X-ray computed tomography(CT) indicated that the delamination occurred at the interface between the top coat and the bond coat layers. The changes in the temperature distribution obtained by PT indicated the existence of a delamination area in the top coat layer of the mullite. In particular, the lower temperature region corresponded to the delamination area. The experimental results confirmed that the PT technique is effective with respect to the internal delamination of multi-layered coating system.展开更多
Porous silicon (PS) layers were formed on textured crystalline silicon by electrochemical etching in HF- based electrolyte. Optical and electrical properties of the TMAH textured surfaces with PS formation are studi...Porous silicon (PS) layers were formed on textured crystalline silicon by electrochemical etching in HF- based electrolyte. Optical and electrical properties of the TMAH textured surfaces with PS formation are studied. Moreover, the influences of the initial structures and the anodizing time on the optical and electrical properties of the surfaces after PS formation are investigated. The results show that the TMAH textured surfaces with PS formation present a dramatic decrease in reflectance. The longer the anodizing time is, the lower the reflectance. Moreover, an initial surface with bigger pyramids achieved lower reflectance in a short wavelength range. A minimum reflectance of 3.86% at 460 nm is achieved for a short anodizing time of 2 min. Furthermore, the reflectance spectrum of the sample, which was etched in 3 vol.% TMAH for 25 min and then anodized for 20 min, is extremely flat and lies between 3.67% and 6.15% in the wavelength range from 400 to 1040 nm. In addition, for a short anodizing time, a slight increase in the effective carrier lifetime is observed. Our results indicate that PS layers formed on a TMAH textured surface for a short anodization treatment can be used as both broadband antireflection coatings and passivation layers for the application in solar cells.展开更多
基金The authors gratefully acknowledge the financial support of the Brazilian research funding agency CNPq and the Coordination for the Improvement of Higher Education Personnel(CAPES)
文摘Anti-reflective (AR) single layer of silica-titania (SiO2-TiO2) coatings were obtained from sols containing pyromellitic dianhydride (PMDA) derivatives and Ti and Si precursors on glass substrate by dip-coating method. The coatings showed very high optical quality and the transmission was improved to up to 98.5%. Furthermore, the coatings also presented good mechanical stability.
基金the fund of LICP Cooperation Foundation for Young Scholars(GrantNo.HZJJ22-03)the financial support provided by China National Natural Science Foundation(Grant No.52075521)+2 种基金the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB0470102)Natural Science Foundation of Shandong Province(Grant No.022HWYQ-096)LICP International Cooperative Scholarship,and the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(Grant No.2020R1A2C2004714).
文摘The outstanding tribological performance of transition metal dichalcogenides(TMDs)is attributed to their unique sandwich microstructure and low interlayer shear stress.This advantageous structure allows TMDs to demonstrate exceptional friction reduction properties.Furthermore,the incorporation of TMDs and amorphous carbon(a-C)in multi-layer structures shows excellent potential for further enhancing tribological and anti-oxidation properties.Amorphous carbon,known for its high ductility,chemical inertness,and excellent wear resistance,significantly contributes to the overall performance of these multi-layer coatings.To gain an in-depth understanding of the tribological mechanism and evolution of TMDs’multi-layer coatings,a dual in-situ analysis was carried out using a tribometer equipped with a 3D laser microscope and a Raman spectrometer.This innovative approach allowed for a comprehensive evolution of the tribological,topographical,and tribochemical characteristics of both single-layer WS_(2)and multi-layer WS_(2)/C coatings in real time.The findings from the dual in-situ tribotest revealed distinct failure characteristics between the single-layer WS_(2)coating and the multi-layer WS_(2)/C coating.The single-layer WS_(2)coating predominantly experienced failure due to mechanical removal,whereas a combination of mechanical removal and tribochemistry primarily influenced the failure of the multi-layer WS_(2)/C coating.The tribological evolution process of these two coatings can be classified into four stages on the basis of their tribological behavior:the running-in stage,stable friction stage,re-deposition stage,and lubrication failure stage.Each stage represents a distinct phase in the tribological behavior of the coatings and contributes to our understanding of their behavior during sliding.
文摘Magnesium(Mg)and its alloys have become a hot research topic in various industries owing to the specific physical and chemical properties.However,high corrosion rate is considered the key lifetime-limiting.Plasma electrolytic oxidation(PEO)method is a simple strategy to deposit an oxide layer on the surface of light metals such as magnesium alloys,to control corrosion rate and promote some other properties,depending on their performances.Nevertheless,their features including their micropore size,distribution,and interconnectivity,and microcracks have not been improved to an acceptable level to support long-term performances of the magnesium-based substrates.Studies have introduced micro/nano-enabled approaches to enhance various properties of PEO coatings such as corrosion resistance,tribological properties,self-healing ability,bioactivity,biocompatibility,antibacterial properties,or catalytic performances.These strategies consist of incorporating of micro and nanoparticles into the PEO layers to produce multi-functional surfaces or the formation of multi-layered coatings to cover the defects of PEO coatings.In this perspective,the present paper aims to overview various nano/micro-enabled strategies to promote the properties of PEO coatings on magnesium alloys.The main focus is given to the functional changes that occurred in response to the incorporation of various types of nano/micro-structures into the PEO coatings on magnesium alloys.
基金supported by the National Natural Science Foundation of China(Nos.62104028 and 62174021)the Creative Research Groups of the National Natural Science Foundation of Sichuan Province(No.2023NSFSC1973)+2 种基金the Natural Science Foundation of Sichuan Province(No.2022NSFSC0899)the Guang Dong Basic and Applied Basic Research Foundation(No.2023A1515110067)the China Postdoctoral Science Foundation(No.2021M700689).
文摘Perovskite solar cells have shown great potential in the field of underwater solar cells due to their excellent optoelectronic properties;however,their underwater performance and stability still hinder their practical use.In this research,a 1H,1H,2H,2H-heptadecafluorodecyl acrylate(HFDA)anti-reflection coating(ARC)was introduced as a high-transparent material for encapsulating perovskite solar modules(PSMs).Optical characterization results revealed that HFDA can effectively reduce reflection of light below 800 nm,aiding in the absorption of light within this wavelength range by underwater solar cells.Thus,a remarkable efficiency of 14.65%was achieved even at a water depth of 50 cm.And,the concentration of Pb^(2+)for HFDA-encapsulated film is significantly reduced from 186 to 16.5 ppb after being immersed in water for 347 h.Interestingly,the encapsulated PSMs still remained above 80%of their initial efficiency after continuous underwater illumination for 400 h.Furthermore,being exposed to air,the encapsulated PSMs maintained 94%of their original efficiency after 1000 h light illumination.This highly transparent ARC shows great potentials in enhancing the stability of perovskite devices,applicable not only to underwater cells but also extendable to land-based photovoltaic devices.
文摘Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon oxide etch and strip,are contained.To acquire good performance,such as low leakage current and high capacitance,for further fabricating capacitors,we should firstly optimize DARC etch back.We developed some experiments,focusing on etch time and chemistry,to evalu-ate the profile of a silicon oxide mask,DARC remain and critical dimension.The result shows that etch back time should be con-trolled in the range from 50 to 60 s,based on the current equipment and condition.It will make B/T ratio higher than 70%mean-while resolve the DARC remain issue.We also found that CH_(2)F_(2) flow should be~15 sccm to avoid reversed CD trend and keep in-line CD.
基金supported by Shanghai Rising-Star Program (B type) (No. 18QB1401900)
文摘Radio-frequency(RF)process products suffer from a wafer edge low yield issue,which is induced by contact opening.A failure mechanism has been proposed that is based on the characteristics of a wafer edge film stack.The large step height at the wafer's edge leads to worse planarization for the sparse poly-pattern region during the inter-layer dielectric(ILD)chemical mechanical polishing(CMP)process.A thicker bottom anti-reflect coating(BARC)layer was introduced for a sparse poly-pattern at the wafer edge region.The contact open issue was solved by increasing the break through(BT)time to get a large enough window.Well profile and resistance uniformity were obtained by contact etch recipe optimization.
基金Project(08FJ1002) supported by the Hunan Province Key Project of Science and Technology,China
文摘To research the influence of oxygen flow rate on the structural and optical properties of TiO2 thin film,TiO2 films on glass were deposited by reactive magnetron sputtering.The microstructure and optical properties were measured by X-ray diffractometry,AFM and UV-VIS transmittance spectroscopy,respectively.The results show that the films deposited at oxygen flow rate of 10 mL/min has the lowest roughness and the highest transmittance.The absorption angle shifts to longer wavelengths as oxygen flow rates increase from 5 to 10 mL/min,then to shorter ones as the oxygen flow rate increase from 10 to 30 mL/min.The band gap is 3.38 eV,which is nearly constant in the experiment.For the TiO2 thin films deposited at 10 mL/min of oxyge flow rate,there are nano-crystalline structures,which are suitable for anti-reflection(AR) coating in the solar cells structure system.
基金Project supported by Ministry of Science and Technology,Taiwan(MOST 105-2911-I-259-501)the French Agence Nationale de Recherche through the GENESE Project(ANR-13-BSS09-0020-01)the French Ministry of Research through the ORCHID Project(33572XF)
文摘In this study, we propose the fabrication of monolithic crystalline silicon solar cells with Tb^(3+) and Yb^(3+)-doped silicon nitride(SiN_x) layers by low-cost screen-printing methods. The performances of c-Si solar cells can be enhanced by rare-earth ions doped SiN_x layers via the mechanism of spectrum conversion.These SiN_x doped and codoped thin films were deposited by reactive magnetron co-sputtering and integrated as the antireflection coating layers in c-Si solar cells. The characterizations of SiN_x, SiN_x:Tb^(3+) tand SiN_x:Tb^(3+)-Yb^(3+) thin films were conducted by means of photoluminescence, Rutherford backscattering spectroscopy, Ellipsometry spectroscopy and Fourier transform infrared measurements. Their composition and refractive index was optimized to obtain good anti-reflection coating layer for c-Si solar cells.Transmission electron microscopy performs the uniform coatings on the textured emitter of c-Si solar cells. After the metallization process, we demonstrate monolithic c-Si solar cells with spectrum conversion layers, which lead to a relative increase by 1.34% in the conversion efficiency.
基金Authors would like to thank Ms.Nisha Singh,former master's student at NIT Rourkela,for her assistance in the review.
文摘Silicon nanowires (SiNWs) are a one-dimensional semiconductor, which shows promising applications indistinct areas such as photocatalysis, lithium-ion batteries, gas sensors, medical diagnostics, drug delivery,and solar cell. From an implementation point of view, SiNWs are fabricated using either a topdownor bottom-up approach, and SiNWs are both optically and electronically active. SiNWs enhancesthe efficiency of the solar cell due to better electronic, optical, and physical properties that can becontrolled by tuning the physical dimensions of SiNWs. The SiNWs shows an inherent capability to beutilized in radial or coaxial p-n junction solar cells, to stipulate orthogonal photon absorption, antireflection,and enhanced carrier collection. This paper reviews property-control of SiNWs, theirvarious types of incorporation in a solar cell, and the reasons behind enhanced efficiency.
文摘The pulse thermography(PT) technique was applied to the detection of the delamination of a multi-layered coating system composed of mullite/Si onto a reaction-bonded Si C substrate. The potential evaluation was carried out in order to detect internal delamination in multi-layered material system. Moreover, the observation of the cross sections and 3D views obtained by X-ray computed tomography(CT) indicated that the delamination occurred at the interface between the top coat and the bond coat layers. The changes in the temperature distribution obtained by PT indicated the existence of a delamination area in the top coat layer of the mullite. In particular, the lower temperature region corresponded to the delamination area. The experimental results confirmed that the PT technique is effective with respect to the internal delamination of multi-layered coating system.
基金Project supported by the Knowledge Innovation Program of the Chinese Academy of Sciences(No.KGCX2-YW-382).
文摘Porous silicon (PS) layers were formed on textured crystalline silicon by electrochemical etching in HF- based electrolyte. Optical and electrical properties of the TMAH textured surfaces with PS formation are studied. Moreover, the influences of the initial structures and the anodizing time on the optical and electrical properties of the surfaces after PS formation are investigated. The results show that the TMAH textured surfaces with PS formation present a dramatic decrease in reflectance. The longer the anodizing time is, the lower the reflectance. Moreover, an initial surface with bigger pyramids achieved lower reflectance in a short wavelength range. A minimum reflectance of 3.86% at 460 nm is achieved for a short anodizing time of 2 min. Furthermore, the reflectance spectrum of the sample, which was etched in 3 vol.% TMAH for 25 min and then anodized for 20 min, is extremely flat and lies between 3.67% and 6.15% in the wavelength range from 400 to 1040 nm. In addition, for a short anodizing time, a slight increase in the effective carrier lifetime is observed. Our results indicate that PS layers formed on a TMAH textured surface for a short anodization treatment can be used as both broadband antireflection coatings and passivation layers for the application in solar cells.