Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-th...Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.展开更多
基金Project supported by the National Defense Technology Industry Strong,China (Grant No. JCKY2018408B006)the Information System New Items Project,China (Grant Nos. 2018XW0026 and 2019XW0010)the Information System Pre-research Project,China (Grant No. 31513060101)
文摘Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system(MEMS)single-pole double-throw(SPDT)switches are presented in this paper.The short-open-load-through(SOLT)calibration states can be completed simultaneously by using the MEMS electronic calibration,and the electronic calibrator can be reused 10^(6) times.The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz–20 GHz,the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states,respectively,and the insertion loss in through(thru)state is less than 0.27 dB.On the other hand,the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm.Our results demonstrate that the calibrator with integrated radiofrequency microelectromechanical system(RF MEMS)switches can not only provide reduced size,loss,and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency.It has great potential applications in millimeter-wave measurement and testing technologies,such as device testing,vector network analyzers,and RF probe stations.