InGaAsP semiconductor ETR microlasers with side length of 5 and 10 um are fabricated by ICP etching. The peaks in photoluminenscent spectra corresponding to longitudinal modes are observed with the interval consisting...InGaAsP semiconductor ETR microlasers with side length of 5 and 10 um are fabricated by ICP etching. The peaks in photoluminenscent spectra corresponding to longitudinal modes are observed with the interval consisting with the theoretical formulae.展开更多
文摘InGaAsP semiconductor ETR microlasers with side length of 5 and 10 um are fabricated by ICP etching. The peaks in photoluminenscent spectra corresponding to longitudinal modes are observed with the interval consisting with the theoretical formulae.
