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Structural Evolution of SiC Films During Plasma-Assisted Chemical Vapour Deposition
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作者 丁斯晔 颜官超 +1 位作者 朱晓东 周海洋 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第2期159-162,共4页
Evolution of chemical bonding configurations for the films deposited from hexam- ethyldisiloxane (HMDSO) diluted with H2 during plasma assisted chemical vapour deposition is investigated. In the experiment a small a... Evolution of chemical bonding configurations for the films deposited from hexam- ethyldisiloxane (HMDSO) diluted with H2 during plasma assisted chemical vapour deposition is investigated. In the experiment a small amount of CH4 was added to adjust the plasma environment and modify the structure of the deposited films. The measurements of Raman spectroscopy and X-ray diffraction (XRD) revealed the production of 6H-SiC embedded in the amorphous matrix without the input of CH4. As CH4 was introduced into the deposition reaction, the transition of 6H-SiC to cubic SiC in the films took place, and also the film surfaces changed from a structure of ellipsoids to cauliflower-like shapes. With a further increase of CH4 in the flow ratio, the obtained films varied from Si-C bonding dominant to a sp^2/sp^3 carbon-rich composition. 展开更多
关键词 silicon carbide plasma assisted chemical vapour deposition STRUCTURE
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Comments on process of duplex coatings on aluminum alloys 被引量:2
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作者 Samir H.A. 钱翰城 +1 位作者 夏伯才 吴仕明 《Journal of Central South University of Technology》 EI 2004年第3期239-245,共7页
Despite the great achievements made in improvement of wear resistance properties of aluminum alloys, their applications in heavy surface load-bearing are limited. Single coating is insufficient to produce the desired ... Despite the great achievements made in improvement of wear resistance properties of aluminum alloys, their applications in heavy surface load-bearing are limited. Single coating is insufficient to produce the desired combination of surface properties. These problems can be solved through the duplex coatings. The aim of the present study is to overview the research advances on processes of duplex coatings on (aluminum) alloys combined with micro plasma oxidation process and with other modern processes such as physical vapour deposition and plasma assisted chemical vapour deposition and also to evaluate the performance of micro plasma oxidation coatings in improving the load-bearing, friction and wear resistance properties of aluminum alloys in comparison with other coatings. Wherein, a more detailed presentation of the processes and their performances and disadvantages are given as well. 展开更多
关键词 aluminum alloy duplex coating micro plasma oxidation physical vapour deposition plasma assisted chemical vapour deposition tribological property
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A perspective of microplasma oxidation (MPO) and vapor deposition coatings in surface engineering of aluminum alloys 被引量:1
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作者 AWAD Samir Hamid 《Journal of Chongqing University》 CAS 2004年第2期4-11,共8页
Over the past years, great achievements have been made in the development of coating technologies for surface improvement of aluminum alloys. Despite these achievements, the role in the market strongly depends on the ... Over the past years, great achievements have been made in the development of coating technologies for surface improvement of aluminum alloys. Despite these achievements, the role in the market strongly depends on the ability of surface coating technology under technical and economic considerations to meet the increased demands for heavy tribological applications of aluminum alloys. Microplasma oxidation (MPO) technology has recently been studied as a novel and effective means to provide thick and hard ceramic coating with improved properties such as excellent load-bearing and wear resistance properties on aluminum alloys. The present work covers the evaluation of the performances of current single and duplex coatings combining MPO, physical vapor deposition (PVD), and plasma assisted chemical vapor deposition (PACVD) coatings on aluminum alloys. It suggests that the MPO coating is a promising candidate for design engineers to apply aluminum alloys to heavy load-bearing applications. The prospective future for the research on MPO coatings is introduced as well. 展开更多
关键词 aluminum alloys microplasma oxidation (MPO) duplex coating physical vapor deposition (PVD) plasma assisted chemical vapor deposition (PACVD)
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Preparation and characterization of carbon nano-sheet powders
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作者 Yang Wubao Zhao Zhen +3 位作者 Fang Songhua Wang Yong Yang Size Lin Li 《Petroleum Science》 SCIE CAS CSCD 2008年第1期79-82,共4页
Carbon nanosheet films were deposited on A1 substrates by using plasma assisted chemical vapor deposition (PACVD) technique. And after being peeled off from A1 substrates, carbon nanosheet powders (CNSPs) were obt... Carbon nanosheet films were deposited on A1 substrates by using plasma assisted chemical vapor deposition (PACVD) technique. And after being peeled off from A1 substrates, carbon nanosheet powders (CNSPs) were obtained. In Raman spectrum of carbon film, there was a strong and broadened peak at about 1,580 cm^-1, indicating a carbon diamond-like film. Atomic force microscope image showed that the carbon diamond-like film had a grain size less than 100 nm, and its surface roughness Ra was 17.95 nm in an area of 5×5 μm^2. The CNSPs were irregular sheets with curly edges and a length of several micrometers to several hundreds of micrometers. The BET surface area of CNSPs was 6.66 m^2/g with no micro-pore present, which was confirmed by N2 adsorption-desorption characterization. In the adsorption testing, when the relative pressure p/po was higher than 0.3, the adsorption behavior did not follow the Langmuir equation. The addition of CNSPs to carbon black (catalyst support) could improve hydrodesulfurization performance of carbon supported Ni-W catalysts for diesel oil. 展开更多
关键词 Plasma assisted chemical vapor deposition carbon nanosheet powder N2 adsorption/desorption HYDRODESULFURIZATION
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