Golden yellow cerium conversion film was obtained on magnesium alloys surface by immersion method and the preparation parameters were established. The influence of different process parameters on the surface morpholog...Golden yellow cerium conversion film was obtained on magnesium alloys surface by immersion method and the preparation parameters were established. The influence of different process parameters on the surface morphology and performance of the conversion film were analyzed by means of SEM and electrochemical method. Formation dynamics about cerium conversion film on magnesium alloy in solution containing cerium salt and the anti-corrosion behavior of the conversion film in 3.5% NaCl solution were studied by electrochemical method respectively. The results shows that the conversion film is more compact at room temperature when concentration of cerium sulfate is 10 g·L-1 in the solution; the open circuit potential of the magnesium sample moves up to positive direction about 100 mV, the surface of conversion film becomes even and lustrous, and the adhesion intensity of conversion film increases when adding aluminum nitrate into the solution containing cerium salt. The pH value of the solution and immersion time of the sample in the solution also affect the surface morphology and anti-corrosion property of the conversion film. After covered by rare earths conversion film, the anti-corrosion property of magnesium alloy is obviously improved. Rare earth conversion film has self-repairing capability in corrosion medium.展开更多
The friction behavior of the hot filament chemical vapor deposition(HFCVD) diamond film plays a critical role on its applications in mechanical fields and largely depends on the environment. Studies on the tribologi...The friction behavior of the hot filament chemical vapor deposition(HFCVD) diamond film plays a critical role on its applications in mechanical fields and largely depends on the environment. Studies on the tribological properties of HFCVD diamond films coated on Co-cemented tungsten carbide (WC-Co) substrates are rarely reported in available literatures, especially in the water lubricating conditions. In this paper, conventional microcrystalline diamond(MCD) and fine-grained diamond(FGD) films are deposited on WC-Co substrates and their friction properties are evaluated on a reciprocating ball-on-plate tribometer, where they are brought to slide against ball-bearing steel and copper balls in dry and water lubricating conditions. Scanning electron microscopy(SEM), atomic force microscopy(AFM), surface profilometer and Raman spectroscopy are adopted to characterize as-deposited diamond films; SEM and energy dispersive X-ray(EDX) are used to investigate the worn region on the surfaces of both counterface balls and diamond films. The research results show that the friction coefficient of HFCVD diamond films always starts with a high initial value, and then gradually transits to a relative stable state. For a given counterface and a sliding condition, the FGD film presents lower stable friction coefficients by 0.02-0.03 than MCD film. The transferred materials adhered on sliding interface are supposed to have predominate effect on the friction behaviors of HFCVD diamond films. Furthermore, the effect of water lubricating on reducing friction coefficient is significant. For a given counterpart, the stable friction coefficients of MCD or FGD films reduce by about 0.07-0.08 while sliding in the water lubricating condition, relative to in dry sliding condition. This study is beneficial for widespread applications of HFCVD diamond coated mechanical components and adopting water lubricating system, replacing ofoil lubricating, in a variety of mechanical processing fields to implement the green production process.展开更多
Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used...Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used and the avalanche of electrons is taken into account in this simulation. The average energy distribution of electrons and the space distribution of effective species such as CH3, CH+3, CH+ and H at various gas pressures are given in this paper, and optimum experimental conditions are inferred from these results.展开更多
A conversion film was obtained on zinc deposit by immersing zinc coated specimens in a mischmetal salt solution. Several factors affecting the anticorrosive efficiency of the conversion film were studied. The suitabl...A conversion film was obtained on zinc deposit by immersing zinc coated specimens in a mischmetal salt solution. Several factors affecting the anticorrosive efficiency of the conversion film were studied. The suitable technological conditions were established. The composition and the thickness of the conversion film were determined by Auger electron spectroscopy(AES).展开更多
The opticai properties of C,, chemicaiiy modified poiystyrene(C,, -PS copolymer) and the parent polystyrene (PS) films have been investigated.Addition of bulky C,, moiety, a special functional group, to the polystyren...The opticai properties of C,, chemicaiiy modified poiystyrene(C,, -PS copolymer) and the parent polystyrene (PS) films have been investigated.Addition of bulky C,, moiety, a special functional group, to the polystyrene by anovel organometallic reaction modified considerably the optical property of theparent polystyrene. The lattice periodicity of pure PS film is subject to someperturbation or distortion in varying degrees due to the covalent attachInent of bulkyC,, moiety to the polymer backbone. C,,-PS copolymer possesses a new energy ba-ndstructure with indirect forbidden band when compared with the parent PS.展开更多
Using a low power microwave generator(W_(max)=100W) and a Surfatron discharge device, Plasma-polymerized copper phthalocyanine (PPCuPc) film was synthesised from monomer copper phthalocyanine(CuPc) by microwave plasma...Using a low power microwave generator(W_(max)=100W) and a Surfatron discharge device, Plasma-polymerized copper phthalocyanine (PPCuPc) film was synthesised from monomer copper phthalocyanine(CuPc) by microwave plasma chemical vaporization deposition(MPCVD) with Ar as incorporation gas. The film was characterized by FTIR and ESCA. The role of dissociation of chemical bond in the polymerization process and the influence of substrate temperature and material on deposition were investigated in some detail.展开更多
With the progress of ULSI technology, materials with low dielectric constant are required to replace SiO2 film as the interlayer to scale down the interconnection delay. Fluorinated Si oxide thin films (SiOF) are a pr...With the progress of ULSI technology, materials with low dielectric constant are required to replace SiO2 film as the interlayer to scale down the interconnection delay. Fluorinated Si oxide thin films (SiOF) are a promising material for the low dielectric constant and the process compatibility in existing technology. However, SiOF films are liable to absorb moisture when exposed to air. By treating the SiOF films with O-2 plasma, it was found that the moisture resistibility of SiOF films was remarkably improved. The mechanism of the improvement in stability of dielectric constant was investigated. The results show that: 1) F atoms dissociated from the films and the bond angle of Si-O-Si decreased. 2) The plasma treatment enhanced the strength of Si-F bonds by removing unstable =SiF2 structures in the films. Resistibility of SiOF films in moisture was improved.展开更多
The <100> textured growth of diamond film on HF eroded silicon wafer has been studied by HFCVD. The evolution of grain size and sudece morphology vs deposition time is presented and the <100> textured thic...The <100> textured growth of diamond film on HF eroded silicon wafer has been studied by HFCVD. The evolution of grain size and sudece morphology vs deposition time is presented and the <100> textured thick diamond film (80μm) with smooth surface, desirable for practical application in many fields is obtained展开更多
Deposition parameters that have great influences on hot filament chemical vapor deposition (HFCVD) diamond films growth on inner hole surfaces of WC?Co substrates mainly include the substrate temperature (t), carbon c...Deposition parameters that have great influences on hot filament chemical vapor deposition (HFCVD) diamond films growth on inner hole surfaces of WC?Co substrates mainly include the substrate temperature (t), carbon content (φ), total pressure (p) and total mass flow (F). Taguchi method was used for the experimental design in order to study the combined effects of the four parameters on the properties of as-deposited diamond films. A new figure-of-merit (FOM) was defined to assess their comprehensive performance. It is clarified thatt,φandp all have significant and complicated effects on the performance of the diamond film and the FOM, which also present some differences as compared with the previous studies on CVD diamond films growth on plane or external surfaces. Aiming to deposit HFCVD diamond films with the best comprehensive performance, the key deposition parameters were finally optimized as:t=830 °C,φ=4.5%,p=4000 Pa,F=800 mL/min.展开更多
Cerium sulfate was used as main composite in solution to prepare golden yellow chemical conversion film on magnesium alloy. The influence of solution composition on the surface morphology of golden yellow rare earth c...Cerium sulfate was used as main composite in solution to prepare golden yellow chemical conversion film on magnesium alloy. The influence of solution composition on the surface morphology of golden yellow rare earth conversion film on magnesium alloy was studied by means of SEM; potential-time curves in the formation process of rare earth conversion film and the anti-corrosion property of the conversion film were tested through ECT. The results show that, when there is no other component in the solution besides cerium sulfate, yellow film can be obtained on magnesium alloy, but there are some dusts on the film surface and the solution is not stable. The stability of cerium sulfate solution increases with adding hydrogen peroxide, while the film is thin and its color turn light. After adding combination additive containing Al 3+, smooth and compact golden yellow film was obtained on magnesium alloy. The polarization curves tested in 3.5% NaCl solution show that the anti-corrosion property of magnesium alloy is increased obviously by rare earth conversion film, and the film has self-repairing capability in the corrosion process.展开更多
In this paper,we report the effect of nitrogen on the deposition and properties of boron doped diamond films synthesized by hot filament chemical vapor deposition.The diamond films consisting of micro-grains(nano-grai...In this paper,we report the effect of nitrogen on the deposition and properties of boron doped diamond films synthesized by hot filament chemical vapor deposition.The diamond films consisting of micro-grains(nano-grains) were realized with low(high) boron source flow rate during the growth processes.The transition of micro-grains to nano-grains is speculated to be strongly(weekly) related with the boron(nitrogen) flow rate.The grain size and Raman spectral feature vary insignificantly as a function of the nitrogen introduction at a certain boron flow rate.The variation of electron field emission characteristics dependent on nitrogen is different between microcrystalline and nanocrystalline boron doped diamond samples,which are related to the combined phase composition,boron doping level and texture structure.There is an optimum nitrogen proportion to improve the field emission properties of the boron-doped films.展开更多
CH3SiCl3 (MTS)-H2-Ar system has been applied to prepare SiC film with chemical vapor deposition (CVD) method in this paper. For three facets of SiC film, some significant influence on growth rate, surface roughnes...CH3SiCl3 (MTS)-H2-Ar system has been applied to prepare SiC film with chemical vapor deposition (CVD) method in this paper. For three facets of SiC film, some significant influence on growth rate, surface roughness, thickness and relative density brought by MTS consistency has been mainly discussed with kinetic monte carlo (KMC) method. The simulation results show that there is a certain scale for mol ratio of H2 to MTS (H2/MTS) with different deposition temperature. When MTS consistency increases, growth rate and surface roughness of three facets all increase, which manifests approximate linearity relationship. Thickness of three facets also increases while increasing trend of three facets thickness is different obviously. Although relative density of three facets all increases, increasing trend shows a little difference with MTS consistency increasing.展开更多
TiO_2 films were coated on the surface of diamond particles using a sol-gel method. The effects of heat treatment temperature on the morphology, phase composition and chemical bond of diamond particles coated with TiO...TiO_2 films were coated on the surface of diamond particles using a sol-gel method. The effects of heat treatment temperature on the morphology, phase composition and chemical bond of diamond particles coated with TiO2 films were investigated through SEM, TEM, X-ray diffraction analysis, Raman spectroscopy, FTIR, and XPS. The results showed that when being heat-treated at 600 ℃, the amorphous TiO_2 film transfered to the anatase film which bonded well with diamond substrate. Meanwhile, the Ti-O-C bond formed between TiO2 film and diamond substrate. When being heat-treated at 800 ℃, TiO2 film was still anatase, and partial diamond began to graphitize. The graphitizated carbon could also form the Ti-O-C bond with TiO_2 film, although TiO_2 film would tend to crack in this case.展开更多
Cadmium sulfide(Cd S) thin films have been prepared by a simple technique such as chemical bath deposition(CBD). A set of samples Cd S were deposited on glass substrates by varying the bath temperature from 55 to ...Cadmium sulfide(Cd S) thin films have been prepared by a simple technique such as chemical bath deposition(CBD). A set of samples Cd S were deposited on glass substrates by varying the bath temperature from 55 to 75 °C at fixed deposition time(25 min) in order to investigate the effect of deposition temperature on Cd S films physical properties. The determination of growth activation energy suggests that at low temperature Cd S film growth is governed by the release of Cd^(2+) ions in the solution. The structural characterization indicated that the Cd S films structure is cubic or hexagonal with preferential orientation along the direction(111) or(002), respectively. The optical characterization indicated that the films have a fairly high transparency, which varies between55% and 80% in the visible range of the optical spectrum, the refractive index varies from 1.85 to 2.5 and the optical gap value of which can reach 2.2 e V. It can be suggested that these properties make these films perfectly suitable for their use as window film in thin films based solar cells.展开更多
Carbon nanotube (CNT) arrays were fabricated on Ct-Me-N-(O) alloys with content of Ct in the range of 6-40 at.% by chemical vapour deposition. The Ct was a catalytic metal from the group of the following elements...Carbon nanotube (CNT) arrays were fabricated on Ct-Me-N-(O) alloys with content of Ct in the range of 6-40 at.% by chemical vapour deposition. The Ct was a catalytic metal from the group of the following elements: Ni, Co, Fe, Pd, while Me was a transition metal from the group of IV-VII of the periodic table (where Me=Ti, V, Cr, Zr, Nb, Mo, Ta, W, Re). Carbon nanotubes were found to grow efficiently on the alloy surface with its composition containing Ti, V, Cr, Zr, Hf, Nb or Ta. The growth of CNTs was not observed when the alloy contained W or Re. Additions of oxygen and nitrogen in the alloy facilitated the formation of oxynitrides and catalyst extrusion on the alloy surface. Replacement of the metals in alloy composition affected the diameter of the resulting CNTs. The obtained results showed that the alloy films of varying thickness (10-500 nm) may be used for the CNTs growth. The resulting CNT material was highly homogenous and its synthesis reproducible.展开更多
Atomically thin MoS2 films have attracted significant attention due to excellent electrical and optical properties.The development of device applications demands the production of large-area thin film which is still a...Atomically thin MoS2 films have attracted significant attention due to excellent electrical and optical properties.The development of device applications demands the production of large-area thin film which is still an obstacle.In this work we developed a facile method to directly grow large-area MoS2 thin film on Si O2 substrate via ambient pressure chemical vapor deposition method. The characterizations by spectroscopy and electron microscopy reveal that the as-grown MoS2 film is mainly bilayer and trilayer with high quality. Back-gate field-effect transistor based on such MoS2 thin film shows carrier mobility up to 3.4 cm2V-1s-1 and on/off ratio of 105. The large-area atomically thin MoS2 prepared in this work has the potential for wide optoelectronic and photonic device applications.展开更多
A novel TiO2(5)/TiO2(buffer)/Ti(4)/Ag(3)/Ti(2)/TiO2(1) multi-layer film coating with corning glass is designed and fabricated by a dc magnetron sputtering method as a renovation of the well-known TiO2/Ti/A...A novel TiO2(5)/TiO2(buffer)/Ti(4)/Ag(3)/Ti(2)/TiO2(1) multi-layer film coating with corning glass is designed and fabricated by a dc magnetron sputtering method as a renovation of the well-known TiO2/Ti/Ag/Ti/TiO2 system in order to obtain a heat mirror system with photocatalytic properties due to sufficient thickness of the Ti02 layer. The outer TiO2 layer is fabricated in two steps, possibly claimed as two layers TiO2(5) and TiO2(buuer), among which TiO2(buffer) the 70-nm-thick layer deposited in poor oxygen effectively minimizes the oxidation toward its neighbor Ti(4) layer. The optimal total thickness of the TiO2(5) and TiO(buffer) di-layer is found to be 300nm to yield a highly photo-catalytic property of the film without affecting the optical properties considerably. This multi-layer film can transmit light of above 75-85% in the visible spectrum (380 ≤ λ≤ 760 nm) and reflect radiation of above 90% in the infrared spectrum ( λ≥760 nm). Such multi-layer coatings are strongly recommended not only as promising transparent heat mirrors but also as photo-catalytic films for architectural window coatings.展开更多
ZnSO4-Zn(CH3COO)2, Zn(NO3)2-Zn(CH3COO)2, ZnSO4-Zn(NO3)2, ZnSO4, Zn(NO3)2 or Zn(CH3COO)2 have been used as zinc sources to prepare ZnS thin films by chemical bath deposition and co-deposition methods. Zn(...ZnSO4-Zn(CH3COO)2, Zn(NO3)2-Zn(CH3COO)2, ZnSO4-Zn(NO3)2, ZnSO4, Zn(NO3)2 or Zn(CH3COO)2 have been used as zinc sources to prepare ZnS thin films by chemical bath deposition and co-deposition methods. Zn(NO3)2 or/and Zn(CH3COO)2 is/are favorable for cluster by cluster deposition process while ZnSO4 favors ion by ion deposition process regardless of concentration ratios of ZnSO4. However, Zn(NO3)2 affects the nucleation density of ZnS nuclei on the substrate. ZnS thin films deposited from ZnSO4-Zn(CH3COO)2 are not only more homogeneous and compact, but also have higher growth rate and adhesion on to the glass substrate. The cubic ZnS films are obtained after only single deposition. The average transmission of films from S6, S7, S8, S9 and S1 for 2 and 2.5 h is greater than 85% in visible region. Compared with the film from S6 (112 nm), the film from S7 is not only thicker (125 nm), but also more transparent. The band gaps of the films deposited from S6,S7, S8, S9 and S1 for 2 and 2.5 h range from 3.88 to 3.98 eV. The effects of anions from different zinc salts are discussed in detail.展开更多
Thin films of CdS have been prepared by chemical spray pyrolysis by spraying precursor solution directly onto soda lime glass(SLG) substrates. Influence of substrate temperature on structural, optical, morphological...Thin films of CdS have been prepared by chemical spray pyrolysis by spraying precursor solution directly onto soda lime glass(SLG) substrates. Influence of substrate temperature on structural, optical, morphological and electrical properties have been investigated by using various techniques such as low angle X-ray diffraction(XRD), Raman spectroscopy, X-ray photoelectron spectroscopy(XPS), field emission scanning electron microscopy(FESEM), atomic force microscopy(AFM), transmission electron microscopy(TEM), UV–visible spectroscopy photoluminescence(PL) spectroscopy etc. Formation of CdS has been confirmed by low angle XRD,Raman spectroscopy and XPS analysis. XRD pattern showed that CdS films are polycrystalline, have hexagonal structure and prefer orientation of crystallites shifts from(101) to(002) with increase in substrate temperature.Raman spectroscopy revealed that exciton-phonon coupling depends on substrate temperature and hence on crystallite size. Optical band gap increased from 2.43 to 2.99 eV when substrate temperature increased from 325 to 475 ℃. Transmittance of the film also showed an increasing trend from 52% to 80% with increase in substrate temperature. Such high band gap and transmittance values of CdS films prepared at 475℃ make it a useful window material in CdS/CdTe and CdS/Cu_2S heterojunction solar cells.展开更多
We studied different long-chain ammonium ions intercalated zirconium phosphate α-ZrP, methylamine intercalated ZrP(MAZrP), tetramethylammonium hydroxide intercalated ZrP(TMAH-ZrP), dodecyltrimethylammonium bromide in...We studied different long-chain ammonium ions intercalated zirconium phosphate α-ZrP, methylamine intercalated ZrP(MAZrP), tetramethylammonium hydroxide intercalated ZrP(TMAH-ZrP), dodecyltrimethylammonium bromide intercalated ZrP(DTAB-ZrP), and stearyl trimethyl ammonium bromide intercalated ZrP(STAB-ZrP) as grease co-additives in combination with isobutylene sulfide(SIB). The grease with co-additives displayed excellent extreme-pressure and anti-wear performance.Moreover, the combination of the longest chain ammonium ion intercalated zirconium phosphate, STAB-ZrP/SIB, had the best tribological properties. In comparison to α-ZrP, the advantage of STAB-ZrP was that it did not form a large area of the dense physical film like α-ZrP on the worn surface, but rather gave the SIB a chance to contact with the fresh metal surface to generate a chemical film. Therefore, the sub-micron physical film and nanoscale chemical film always exist side by side on the contact surface during the friction process. This intercalated α-ZrP/SIB additive has great potential for use in harsh operating conditions.展开更多
基金Project supported by the Science and Technology Foundation of Sci. & Tec. Office of Qinhuangdao City (200507)
文摘Golden yellow cerium conversion film was obtained on magnesium alloys surface by immersion method and the preparation parameters were established. The influence of different process parameters on the surface morphology and performance of the conversion film were analyzed by means of SEM and electrochemical method. Formation dynamics about cerium conversion film on magnesium alloy in solution containing cerium salt and the anti-corrosion behavior of the conversion film in 3.5% NaCl solution were studied by electrochemical method respectively. The results shows that the conversion film is more compact at room temperature when concentration of cerium sulfate is 10 g·L-1 in the solution; the open circuit potential of the magnesium sample moves up to positive direction about 100 mV, the surface of conversion film becomes even and lustrous, and the adhesion intensity of conversion film increases when adding aluminum nitrate into the solution containing cerium salt. The pH value of the solution and immersion time of the sample in the solution also affect the surface morphology and anti-corrosion property of the conversion film. After covered by rare earths conversion film, the anti-corrosion property of magnesium alloy is obviously improved. Rare earth conversion film has self-repairing capability in corrosion medium.
基金supported by National Natural Science Foundation of China (Grant No. 50575135)Program for New Century Excellent Talents of Ministry of Education of China (Grant No. NCET-06-0399)Tribology Science Fund of the State Key Laboratory of Tribology, China
文摘The friction behavior of the hot filament chemical vapor deposition(HFCVD) diamond film plays a critical role on its applications in mechanical fields and largely depends on the environment. Studies on the tribological properties of HFCVD diamond films coated on Co-cemented tungsten carbide (WC-Co) substrates are rarely reported in available literatures, especially in the water lubricating conditions. In this paper, conventional microcrystalline diamond(MCD) and fine-grained diamond(FGD) films are deposited on WC-Co substrates and their friction properties are evaluated on a reciprocating ball-on-plate tribometer, where they are brought to slide against ball-bearing steel and copper balls in dry and water lubricating conditions. Scanning electron microscopy(SEM), atomic force microscopy(AFM), surface profilometer and Raman spectroscopy are adopted to characterize as-deposited diamond films; SEM and energy dispersive X-ray(EDX) are used to investigate the worn region on the surfaces of both counterface balls and diamond films. The research results show that the friction coefficient of HFCVD diamond films always starts with a high initial value, and then gradually transits to a relative stable state. For a given counterface and a sliding condition, the FGD film presents lower stable friction coefficients by 0.02-0.03 than MCD film. The transferred materials adhered on sliding interface are supposed to have predominate effect on the friction behaviors of HFCVD diamond films. Furthermore, the effect of water lubricating on reducing friction coefficient is significant. For a given counterpart, the stable friction coefficients of MCD or FGD films reduce by about 0.07-0.08 while sliding in the water lubricating condition, relative to in dry sliding condition. This study is beneficial for widespread applications of HFCVD diamond coated mechanical components and adopting water lubricating system, replacing ofoil lubricating, in a variety of mechanical processing fields to implement the green production process.
基金This work was supported by Doctor Foundation of Hebei Education Committee Hebei Natural Science Foundation(599091 ) of China
文摘Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used and the avalanche of electrons is taken into account in this simulation. The average energy distribution of electrons and the space distribution of effective species such as CH3, CH+3, CH+ and H at various gas pressures are given in this paper, and optimum experimental conditions are inferred from these results.
文摘A conversion film was obtained on zinc deposit by immersing zinc coated specimens in a mischmetal salt solution. Several factors affecting the anticorrosive efficiency of the conversion film were studied. The suitable technological conditions were established. The composition and the thickness of the conversion film were determined by Auger electron spectroscopy(AES).
文摘The opticai properties of C,, chemicaiiy modified poiystyrene(C,, -PS copolymer) and the parent polystyrene (PS) films have been investigated.Addition of bulky C,, moiety, a special functional group, to the polystyrene by anovel organometallic reaction modified considerably the optical property of theparent polystyrene. The lattice periodicity of pure PS film is subject to someperturbation or distortion in varying degrees due to the covalent attachInent of bulkyC,, moiety to the polymer backbone. C,,-PS copolymer possesses a new energy ba-ndstructure with indirect forbidden band when compared with the parent PS.
文摘Using a low power microwave generator(W_(max)=100W) and a Surfatron discharge device, Plasma-polymerized copper phthalocyanine (PPCuPc) film was synthesised from monomer copper phthalocyanine(CuPc) by microwave plasma chemical vaporization deposition(MPCVD) with Ar as incorporation gas. The film was characterized by FTIR and ESCA. The role of dissociation of chemical bond in the polymerization process and the influence of substrate temperature and material on deposition were investigated in some detail.
基金The work was supported by the National Natural Science Foundation of China(No.69776026)the Foundation for University Key Teacher by the Ministry of Education.
文摘With the progress of ULSI technology, materials with low dielectric constant are required to replace SiO2 film as the interlayer to scale down the interconnection delay. Fluorinated Si oxide thin films (SiOF) are a promising material for the low dielectric constant and the process compatibility in existing technology. However, SiOF films are liable to absorb moisture when exposed to air. By treating the SiOF films with O-2 plasma, it was found that the moisture resistibility of SiOF films was remarkably improved. The mechanism of the improvement in stability of dielectric constant was investigated. The results show that: 1) F atoms dissociated from the films and the bond angle of Si-O-Si decreased. 2) The plasma treatment enhanced the strength of Si-F bonds by removing unstable =SiF2 structures in the films. Resistibility of SiOF films in moisture was improved.
文摘The <100> textured growth of diamond film on HF eroded silicon wafer has been studied by HFCVD. The evolution of grain size and sudece morphology vs deposition time is presented and the <100> textured thick diamond film (80μm) with smooth surface, desirable for practical application in many fields is obtained
基金Projects(51275302,51005154)supported by the National Natural Science Foundation of China
文摘Deposition parameters that have great influences on hot filament chemical vapor deposition (HFCVD) diamond films growth on inner hole surfaces of WC?Co substrates mainly include the substrate temperature (t), carbon content (φ), total pressure (p) and total mass flow (F). Taguchi method was used for the experimental design in order to study the combined effects of the four parameters on the properties of as-deposited diamond films. A new figure-of-merit (FOM) was defined to assess their comprehensive performance. It is clarified thatt,φandp all have significant and complicated effects on the performance of the diamond film and the FOM, which also present some differences as compared with the previous studies on CVD diamond films growth on plane or external surfaces. Aiming to deposit HFCVD diamond films with the best comprehensive performance, the key deposition parameters were finally optimized as:t=830 °C,φ=4.5%,p=4000 Pa,F=800 mL/min.
文摘Cerium sulfate was used as main composite in solution to prepare golden yellow chemical conversion film on magnesium alloy. The influence of solution composition on the surface morphology of golden yellow rare earth conversion film on magnesium alloy was studied by means of SEM; potential-time curves in the formation process of rare earth conversion film and the anti-corrosion property of the conversion film were tested through ECT. The results show that, when there is no other component in the solution besides cerium sulfate, yellow film can be obtained on magnesium alloy, but there are some dusts on the film surface and the solution is not stable. The stability of cerium sulfate solution increases with adding hydrogen peroxide, while the film is thin and its color turn light. After adding combination additive containing Al 3+, smooth and compact golden yellow film was obtained on magnesium alloy. The polarization curves tested in 3.5% NaCl solution show that the anti-corrosion property of magnesium alloy is increased obviously by rare earth conversion film, and the film has self-repairing capability in the corrosion process.
基金financially supported by The Program for New Century Excellent Talents in University (NCET)the National Natural Science Foundation of China (NSFC) under Grant No.50772041
文摘In this paper,we report the effect of nitrogen on the deposition and properties of boron doped diamond films synthesized by hot filament chemical vapor deposition.The diamond films consisting of micro-grains(nano-grains) were realized with low(high) boron source flow rate during the growth processes.The transition of micro-grains to nano-grains is speculated to be strongly(weekly) related with the boron(nitrogen) flow rate.The grain size and Raman spectral feature vary insignificantly as a function of the nitrogen introduction at a certain boron flow rate.The variation of electron field emission characteristics dependent on nitrogen is different between microcrystalline and nanocrystalline boron doped diamond samples,which are related to the combined phase composition,boron doping level and texture structure.There is an optimum nitrogen proportion to improve the field emission properties of the boron-doped films.
基金National Natural Science Foundation of China(No.50871086)the Research Fund of State Key Laboratory of Solidification Processing (NPU), China(No.KP200906)the President Research Foundation of Xi'an Technological University(No.XAGDXJJ1008)
文摘CH3SiCl3 (MTS)-H2-Ar system has been applied to prepare SiC film with chemical vapor deposition (CVD) method in this paper. For three facets of SiC film, some significant influence on growth rate, surface roughness, thickness and relative density brought by MTS consistency has been mainly discussed with kinetic monte carlo (KMC) method. The simulation results show that there is a certain scale for mol ratio of H2 to MTS (H2/MTS) with different deposition temperature. When MTS consistency increases, growth rate and surface roughness of three facets all increase, which manifests approximate linearity relationship. Thickness of three facets also increases while increasing trend of three facets thickness is different obviously. Although relative density of three facets all increases, increasing trend shows a little difference with MTS consistency increasing.
基金Funded by National Natural Science Foundation of China(No.51375157)Shanghai Aerospace Eighth Research Institute SAST Foundation(No.2015044)+1 种基金the Central University Basic Scientific Research Business Expenses,State Key Laboratory of Silicate Materials for Architectures Program(No.SYSJJ2015-09)the Hunan Province Key Laboratory of Environmental Photocatalysis Application Technology Program(No.CCSU-KF-1504)
文摘TiO_2 films were coated on the surface of diamond particles using a sol-gel method. The effects of heat treatment temperature on the morphology, phase composition and chemical bond of diamond particles coated with TiO2 films were investigated through SEM, TEM, X-ray diffraction analysis, Raman spectroscopy, FTIR, and XPS. The results showed that when being heat-treated at 600 ℃, the amorphous TiO_2 film transfered to the anatase film which bonded well with diamond substrate. Meanwhile, the Ti-O-C bond formed between TiO2 film and diamond substrate. When being heat-treated at 800 ℃, TiO2 film was still anatase, and partial diamond began to graphitize. The graphitizated carbon could also form the Ti-O-C bond with TiO_2 film, although TiO_2 film would tend to crack in this case.
文摘Cadmium sulfide(Cd S) thin films have been prepared by a simple technique such as chemical bath deposition(CBD). A set of samples Cd S were deposited on glass substrates by varying the bath temperature from 55 to 75 °C at fixed deposition time(25 min) in order to investigate the effect of deposition temperature on Cd S films physical properties. The determination of growth activation energy suggests that at low temperature Cd S film growth is governed by the release of Cd^(2+) ions in the solution. The structural characterization indicated that the Cd S films structure is cubic or hexagonal with preferential orientation along the direction(111) or(002), respectively. The optical characterization indicated that the films have a fairly high transparency, which varies between55% and 80% in the visible range of the optical spectrum, the refractive index varies from 1.85 to 2.5 and the optical gap value of which can reach 2.2 e V. It can be suggested that these properties make these films perfectly suitable for their use as window film in thin films based solar cells.
基金financially supported by the Russian Science Foundation(No.16-19-10625)
文摘Carbon nanotube (CNT) arrays were fabricated on Ct-Me-N-(O) alloys with content of Ct in the range of 6-40 at.% by chemical vapour deposition. The Ct was a catalytic metal from the group of the following elements: Ni, Co, Fe, Pd, while Me was a transition metal from the group of IV-VII of the periodic table (where Me=Ti, V, Cr, Zr, Nb, Mo, Ta, W, Re). Carbon nanotubes were found to grow efficiently on the alloy surface with its composition containing Ti, V, Cr, Zr, Hf, Nb or Ta. The growth of CNTs was not observed when the alloy contained W or Re. Additions of oxygen and nitrogen in the alloy facilitated the formation of oxynitrides and catalyst extrusion on the alloy surface. Replacement of the metals in alloy composition affected the diameter of the resulting CNTs. The obtained results showed that the alloy films of varying thickness (10-500 nm) may be used for the CNTs growth. The resulting CNT material was highly homogenous and its synthesis reproducible.
基金the National High Technology Research and Development Program of China (863 Program) (Grant No.2013AA031903)the Youth 973 Program (Grant No.2015CB932700)+7 种基金the National Natural Science Foundation of China (Grant Nos.91433107, 51222208, and 51290273)the Doctoral Fund of Ministry of Education of China (Grant No.20123201120026)ARC DP (DP140101501)ARC DECRA (DE120101569)Victoria DSI top-up grantthe Natural Science Foundation of Jiangsu Province (No.BK20130328)China Postdoctoral Science Foundation (No. 2014M551654)Jiangsu Province Postdoctoral Science Foundation (No.1301020A)
文摘Atomically thin MoS2 films have attracted significant attention due to excellent electrical and optical properties.The development of device applications demands the production of large-area thin film which is still an obstacle.In this work we developed a facile method to directly grow large-area MoS2 thin film on Si O2 substrate via ambient pressure chemical vapor deposition method. The characterizations by spectroscopy and electron microscopy reveal that the as-grown MoS2 film is mainly bilayer and trilayer with high quality. Back-gate field-effect transistor based on such MoS2 thin film shows carrier mobility up to 3.4 cm2V-1s-1 and on/off ratio of 105. The large-area atomically thin MoS2 prepared in this work has the potential for wide optoelectronic and photonic device applications.
文摘A novel TiO2(5)/TiO2(buffer)/Ti(4)/Ag(3)/Ti(2)/TiO2(1) multi-layer film coating with corning glass is designed and fabricated by a dc magnetron sputtering method as a renovation of the well-known TiO2/Ti/Ag/Ti/TiO2 system in order to obtain a heat mirror system with photocatalytic properties due to sufficient thickness of the Ti02 layer. The outer TiO2 layer is fabricated in two steps, possibly claimed as two layers TiO2(5) and TiO2(buuer), among which TiO2(buffer) the 70-nm-thick layer deposited in poor oxygen effectively minimizes the oxidation toward its neighbor Ti(4) layer. The optimal total thickness of the TiO2(5) and TiO(buffer) di-layer is found to be 300nm to yield a highly photo-catalytic property of the film without affecting the optical properties considerably. This multi-layer film can transmit light of above 75-85% in the visible spectrum (380 ≤ λ≤ 760 nm) and reflect radiation of above 90% in the infrared spectrum ( λ≥760 nm). Such multi-layer coatings are strongly recommended not only as promising transparent heat mirrors but also as photo-catalytic films for architectural window coatings.
基金the financial support of the National Natural Science Foundation of China (No. 50963003)the Natural Science Foundation of Jiangxi Province (No. 2010GZC0044)+1 种基金the Foundation of Jiangxi Educational Commission (No. GJJ14558)the Project of Jiangxi Youth Scientist (No. 20122BCB23031)
文摘ZnSO4-Zn(CH3COO)2, Zn(NO3)2-Zn(CH3COO)2, ZnSO4-Zn(NO3)2, ZnSO4, Zn(NO3)2 or Zn(CH3COO)2 have been used as zinc sources to prepare ZnS thin films by chemical bath deposition and co-deposition methods. Zn(NO3)2 or/and Zn(CH3COO)2 is/are favorable for cluster by cluster deposition process while ZnSO4 favors ion by ion deposition process regardless of concentration ratios of ZnSO4. However, Zn(NO3)2 affects the nucleation density of ZnS nuclei on the substrate. ZnS thin films deposited from ZnSO4-Zn(CH3COO)2 are not only more homogeneous and compact, but also have higher growth rate and adhesion on to the glass substrate. The cubic ZnS films are obtained after only single deposition. The average transmission of films from S6, S7, S8, S9 and S1 for 2 and 2.5 h is greater than 85% in visible region. Compared with the film from S6 (112 nm), the film from S7 is not only thicker (125 nm), but also more transparent. The band gaps of the films deposited from S6,S7, S8, S9 and S1 for 2 and 2.5 h range from 3.88 to 3.98 eV. The effects of anions from different zinc salts are discussed in detail.
基金Project supported by the Department of Science and Technology(DST)Ministry of New and Renewable Energy(MNRE)Government of India,New Delhi
文摘Thin films of CdS have been prepared by chemical spray pyrolysis by spraying precursor solution directly onto soda lime glass(SLG) substrates. Influence of substrate temperature on structural, optical, morphological and electrical properties have been investigated by using various techniques such as low angle X-ray diffraction(XRD), Raman spectroscopy, X-ray photoelectron spectroscopy(XPS), field emission scanning electron microscopy(FESEM), atomic force microscopy(AFM), transmission electron microscopy(TEM), UV–visible spectroscopy photoluminescence(PL) spectroscopy etc. Formation of CdS has been confirmed by low angle XRD,Raman spectroscopy and XPS analysis. XRD pattern showed that CdS films are polycrystalline, have hexagonal structure and prefer orientation of crystallites shifts from(101) to(002) with increase in substrate temperature.Raman spectroscopy revealed that exciton-phonon coupling depends on substrate temperature and hence on crystallite size. Optical band gap increased from 2.43 to 2.99 eV when substrate temperature increased from 325 to 475 ℃. Transmittance of the film also showed an increasing trend from 52% to 80% with increase in substrate temperature. Such high band gap and transmittance values of CdS films prepared at 475℃ make it a useful window material in CdS/CdTe and CdS/Cu_2S heterojunction solar cells.
基金supported by the National Natural Science Foundation of China(Grant Nos. 21978186 and U21A20315)the Fund for Shanxi “1331” Project and the Pingdingshan University's Ph.D. Research Startup Fund Project(Grant No. PXY-BSQD-2023009)。
文摘We studied different long-chain ammonium ions intercalated zirconium phosphate α-ZrP, methylamine intercalated ZrP(MAZrP), tetramethylammonium hydroxide intercalated ZrP(TMAH-ZrP), dodecyltrimethylammonium bromide intercalated ZrP(DTAB-ZrP), and stearyl trimethyl ammonium bromide intercalated ZrP(STAB-ZrP) as grease co-additives in combination with isobutylene sulfide(SIB). The grease with co-additives displayed excellent extreme-pressure and anti-wear performance.Moreover, the combination of the longest chain ammonium ion intercalated zirconium phosphate, STAB-ZrP/SIB, had the best tribological properties. In comparison to α-ZrP, the advantage of STAB-ZrP was that it did not form a large area of the dense physical film like α-ZrP on the worn surface, but rather gave the SIB a chance to contact with the fresh metal surface to generate a chemical film. Therefore, the sub-micron physical film and nanoscale chemical film always exist side by side on the contact surface during the friction process. This intercalated α-ZrP/SIB additive has great potential for use in harsh operating conditions.