TWO STEPS CHEMICAL-MECHANICAL POLISHING OF RIGID DISK SUBSTRATE TO GET ATOM-SCALE PLANARIZATION SURFACE

In order to get atomic smooth rigid disk substrate surface, ultra-fined alumina slurry and nanometer silica slurry are prepared, and two steps chemical-mechanical polishing （CMP） of rigid disk substrate in the two slurries are studied. The results show that, during the first step CMP in the alumina slurry, a high material removal rate is reached, and the average roughness （Ra） and the average waviness （Wa） of the polished surfaces can be decreased from previous 1.4 nm and 1.6 nm to about 0.6 nm and 0.7 nm, respectively. By using the nanometer silica slurry and optimized polishing process parameters in the second step CMP, the Ra and the Wa of the polished surfaces can be further reduced to 0.038 nm and 0.06 am, respectively. Atom force microscopy （AFM） analysis shows that the final polished surfaces are ultra-smooth without micro-defects.

Scratching by pad asperities in copper electrochemical-mechanical polishing

Low dielectric constant materials/Cu interconnects integration technology provides the direction as well as the challenges in the fabrication of integrated circuits(IC) wafers during copper electrochemical-mechanical polishing(ECMP). These challenges arise primarily from the mechanical fragility of such dielectrics, in which the undesirable scratches are prone to produce. To mitigate this problem, a new model is proposed to predict the initiation of scratching based on the mechanical properties of passive layer and copper substrate. In order to deduce the ratio of the passive layer yield strength to the substrate yield strength and the layer thickness, the limit analysis solution of surface scratch under Berkovich indenter is used to analyze the nano-scratch experimental measurements. The modulus of the passive layer can be calculated by the nano-indentation test combined with the FEM simulation. It is found that the film modulus is about 30% of the substrate modulus. Various regimes of scratching are delineated by FEM modeling and the results are verified by experimental data.

Voltage-induced material removal mechanism of copper for electrochemical-mechanical polishing applications

The current-voltage (I-V) curves, such as linear sweep voltammetry (LSV) and cyclic voltammetry (CV), were employed to evaluate the effect of electrolyte concentration on the electrochemical reaction trend. From the I-V curve, the electrochemical states of active, passive, transient and trans-passive region could be characterized. And then, the mechanism of the process of voltage-induced material removal in electrochemical mechanical polishing (ECMP) of copper was investigated. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) analyses were used to observe the surface profile. Finally, the oxidation and reduction processes of the Cu surface were monitored by the repetition of anodic and cathodic potential from cyclic voltammetry (CV) method in acid-and alkali-based electrolyte.

Electrochemical characteristic of chemical-mechanical polishing of copper with oxide passive film

Electrochemical behavior of chemical mechanical polishing of copper with oxide passive film was studied by electrochemical measurement technologies. Dependences of polarization curves and electrochemical parameters, the rate of formation or removal of passive film of copper on film modifier KClO 3 were investigated. The rules of dependences of corrosion potentials and corrosion current densities on polishing pressure and rotation rate were obtained. It is discovered that the rates of formation and removal of passive film of copper are enhanced, while the polishing pressure and rotation rate are reduced. The experiments show that the CMP processes decrease Tafel slope, increase electron transfer coefficient of anode reaction and decrease the activation energy of corrosion reaction of copper, thereby the corrosion processes are accelerated. The results indicate that CMP slurry recipe, which is composed of NaAc NaOH medium, using KClO 3 as passive film modifier and nano sized γ Al 2O 3 as abrasive, is feasible and reasonable. The technological conditions are 100 r/min, 16 kPa.

A novel approach of jet polishing for interior surface of small-grooved components using three developed setups

It is a challenge to polish the interior surface of an additively manufactured component with complex structures and groove sizes less than 1 mm.Traditional polishing methods are disabled to polish the component,meanwhile keeping the structure intact.To overcome this challenge,small-grooved components made of aluminum alloy with sizes less than 1 mm were fabricated by a custom-made printer.A novel approach to multi-phase jet(MPJ)polishing is proposed,utilizing a self-developed polisher that incorporates solid,liquid,and gas phases.In contrast,abrasive air jet(AAJ)polishing is recommended,employing a customized polisher that combines solid and gas phases.After jet polishing,surface roughness(Sa)on the interior surface of grooves decreases from pristine 8.596μm to 0.701μm and 0.336μm via AAJ polishing and MPJ polishing,respectively,and Sa reduces 92%and 96%,correspondingly.Furthermore,a formula defining the relationship between linear energy density and unit defect volume has been developed.The optimized parameters in additive manufacturing are that linear energy density varies from 0.135 J mm^(-1)to 0.22 J mm^(-1).The unit area defect volume achieved via the optimized parameters decreases to 1/12 of that achieved via non-optimized ones.Computational fluid dynamics simulation results reveal that material is removed by shear stress,and the alumina abrasives experience multiple collisions with the defects on the heat pipe groove,resulting in uniform material removal.This is in good agreement with the experimental results.The novel proposed setups,approach,and findings provide new insights into manufacturing complex-structured components,polishing the small-grooved structure,and keeping it unbroken.

Novel Batch Polishing Method of Ceramic Cutting Inserts for Reducing Tool Wear

Ceramic cutting inserts are a type of cutting tool commonly used in high-speed metal cutting applications.However,the wear of these inserts caused by friction between the workpiece and cutting inserts limits their overall effectiveness.In order to improve the tool life and reduce wear,this study introduces an emerging method called magnetic field-assisted batch polishing(MABP)for simultaneously polishing multiple ceramic cutting inserts.Several polishing experiments were conducted under different conditions,and the wear characteristics were clarified by cutting S136H steel.The results showed that after 15 min of polishing,the surface roughness at the flank face,edge,and nose of the inserts was reduced to below 2.5 nm,6.25 nm,and 45.8 nm,respectively.Furthermore,the nose radii of the inserts did not change significantly,and there were no significant changes in the weight percentage of elements before and after polishing.Additionally,the tool life of the batch polished inserts was found to be up to 1.75 times longer than that of unpolished inserts.These findings suggest that the MABP method is an effective way to mass polish ceramic cutting inserts,resulting in significantly reduced tool wear.Furthermore,this novel method offers new possibilities for polishing other tools.

Technological advancements in millet dehulling and polishing process: An insight into pretreatment methods, machineries and impact on nutritional quality

Millets are widely recognized for their nutritional significance;however, the methods employed for their processing are currently lacking. This article primarily focuses on the advanced technologies and progressions in millet dehulling and polishing. These technologies operate based on the fundamental principles of compression-shearing, abrasion-friction, and centrifugal-impact forces. Processing of millets can be challenging because of the physical characteristics and tight attachment of hull and bran to the endosperm. However, several dehullers have been designed to solve this problem for different kinds of millets. In addition, the nutritional and anti-nutritional characteristics undergo alterations due to both dehulling and polishing processes. These alterations are thoroughly examined and discussed in this article. Specifically, anti-nutrients such as tannins and phytate are predominantly found in the outer pericarp of the grain and experience a reduction after undergoing dehulling and polishing. The nutritional properties are also subjected to a reduction;however, this reduction can be mitigated by subjecting the grains to certain pretreatments before dehulling and polishing. These treatments serve to enhance dehulling efficiency and nutrient digestibility while simultaneously reducing the presence of anti-nutrients. Novel thermal and non-thermal methodologies such as microwave, hydrothermal, high-pressure processing, and ohmic heating can be employed for processing millets, thereby diminishing the loss of nutrients. Additional research can be carried out to investigate their impact on the dehulling and polishing of millets.

Energy beam-based direct and assisted polishing techniques for diamond:A review

Diamond is a highly valuable material with diverse industrial applications,particularly in the fields of semiconductor,optics,and high-power electronics.However,its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond.To address these challenges,several polishing methods have been developed for both single crystal diamond(SCD)and polycrystalline diamond(PCD),including mechanical,chemical,laser,and ion beam processing methods.In this review,the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted.Specifically,various energy beam-based direct and assisted polishing technologies,such as laser polishing,ion beam polishing,plasma-assisted polishing,and laser-assisted polishing,are summarized.The current research progress,material removal mechanism,and infuencing factors of each polishing technology are analyzed.Although some of these methods can achieve high material removal rates or reduce surface roughness,no single method can meet all the requirements.Finally,the future development prospects and application directions of different polishing technologies are presented.

Material removal rate in chemical-mechanical polishing of wafers based on particle trajectories

Distribution forms of abrasives in the chemical mechanical polishing（CMP） process are analyzed based on experimental results.Then the relationships between the wafer,the abrasive and the polishing pad are analyzed based on kinematics and contact mechanics.According to the track length of abrasives on the wafer surface,the relationships between the material removal rate and the polishing velocity are obtained.The analysis results are in accord with the experimental results.The conclusion provides a theoretical guide for further understanding the material removal mechanism of wafers in CMP.

Chemical-mechanically polishing large area free-standing CVD diamond films

Chemical mechanical polishing is used to polish large area free-standing CVD diamond films with diameters of 66 mm.The influence of polishing plates(iron plate,asphalt plate and soft cushion)and oxidizing agents(K_2S_2O_8 and K_2FeO_4)on polishing results are investigated.Profilometer(tip radius 5μm),optical microscope and Raman spectroscopy are used to evaluate the polishing effects of the CVD diamond films.Results show that the material removal rate of iron plate is the highest,while the surface polished by soft cushion is the most uniform with roughness of 2nm.It is also found that the most effective oxidizing agent is K_2FeO_4.In conclusion,the optimum polishing conditions are soft cushion and K_2FeO_4.

An Uncertainty Analysis of Downward Pressure Applied to the Wafer Based on a Flexible Airbag by a Double Side Polishing Machine

The process of wafer polishing is known to be highly demanding,and even small deviations in the processing parameters can have a significant impact on the quality of the wafers obtained.During the process of wafer polishing,maintaining a constant pressure value applied by the polishing head is essential to achieve the desired flatness of the wafer.The accuracy of the downward pressure output by the polishing head is a crucial factor in producing flat wafers.In this paper,the uncertainty component of downward pressure is calculated and its measurement uncertainty is evaluated,and a method for calculating downward pressure uncertainty traceable to international basic unit is established.Therefore,the reliability of double side polishing machine has been significantly improved.

Pingyao Hand-Polished Lacquerware

PINGYAO hand-polished lacquerware has been widely considered as one of the four most famed lacquerware types in China.It originated more than 2,000 years ago in what is called Pingyao County today,in Jinzhong City,central China’s Shanxi Province.Its fame is due to the exquisite and unique skill of polishing lacquered coating with bare hands during the manufacturing process.This quaint and durable lacquerware boasts both aesthetic and practical values,and is characterized by its distinguished appearance and glossy sheen.It comes in the forms of jewelry boxes,utensils and stationery,screens and furniture.

Effects Optimization of Bio-Polishing Industrial Process Parameters

The purpose of this study is to select an appropriate commercial neutral cellulase enzyme for denim garments bio-polishing to achieve specific industrial goals. A full factorial experimental design was used to evaluate the effect of factors considered in the optimization of the bio-polishing process (fabric ID: x1, treatment time: x2, treatment temperature: x3, enzyme concentration: x4, storage time: x5, inactivation step: x6 and enzyme type: x7). Experiments were conducted using laboratory washing machine. Subjective evaluation was performed at a pilot and at an industrial scale. Tear, tensile strength and subjective evaluation concerning hand feel, fabric color, indigo dye pocket back staining and fuzziness extent were evaluated. Results showed that x6 and x7 had significant effects on the fabric tear and tensile strength loss. In the optimization, the great dependence between observed and predicted tear strength and tensile strength loss, the correlation coefficient of the models (R2 > 0.85) and the important value of F-ratio proved the validity of the models. Results showed that denim leg panels treated with the enzyme Lava-Cell NSZ presented a minimum loss of tear and tensile strength. A low-temperature and time enzymatic bio-polishing process was developed at industrial scale.

MORPHOLOGY CONTROL OF ULTRAFINE CeO_2 AND ITS POLISHING EFFICACY

Homogenous precipitation and subsequent calcination has been used tosynthesize ultrafine ceria from cerium nitrate and urea solution. The ceria calcined from theprecursor inherit the size and morphology of it. The size and morphology of the precursor areclosely related to the preparation process. The morphology, size and distribution of the precursorcould be tailored by changing the reaction condition and the ageing time. Monodispersed 200 nm sizedspherical particles is prepared by this method. The powder is used in the chemical-mechanicalpolishing of Si wafer. The average surface roughness of the polished Si wafer is 0.171 nm measuredby AFM.

An Improved Angle Polishing Method for Measuring Subsurface Damage in Silicon Wafers

We present an improved angle polishing method in which the end of the cover slice near the glue layer is beveled into a thin,defect-free wedge,the straight edge of which is used as the datum for measuring the depth of subsurface damage. The bevel angle can be calculated from the interference fringes formed in the wedge. The minimum depth of the subsurface damage that can be measured by this method is a few hundred nanometers. Our results show that the method is straightforward, accurate, and convenient.

STUDIES ON POLYURETHANE FOAM POLISHING TOOL

This paper deals with Polyurethane Foam Polishing Tool (PFPT), which has three dimensional softness and are adapted to polishing sophisticated curved surfaces. The manufacturing technology, the equilibrium theory of matter and energy have been discussed and the PFPT is produced successfully at our laboratory. After investigating their properties, the effective factors to the behavior of the PFPT are studied. The microcosmic construction of the PFPT have been observed by sweep electron microscope(SEM) and the polishing mechanism studied. A great deal of experiments have been carried out to optimize the manufacturing parameters.

Linearity of Removal in the Proeess of Optical Element Polishing

In the light of some assumptions that are very close to the practical working conditions,a very complicated polishing process of optical element can be simplified as a linear and shift invariant system that is relatd only to the speed,pres- sure and time of processing.In polishing,the removed material can be represented and entreated by the convolution of the removal function of polishing head and the dwell function.The properties of removal function are presented.The assumptions and methods given by the author have been shown to be correct and applicable by experiments using a ring lap to polish the optical surfac.

A Computer-Controlled Polishing Machine

Describes a computer controlled polishing machine utilizing a small polisher with specified movement to figure optical surfces having strict dimensional requirements. The system is especially applicable in figuring aspherical surfaces, beginning with the best fit sphere if the departure from the desired surface is not large. An interferometric measuring system is desiigned to form a closed loop control during processing.

Composite Adaptive Control of Belt Polishing Force for Aero-engine Blade

The existing methods for blade polishing mainly focus on robot polishing and manual grinding.Due to the difficulty in high-precision control of the polishing force,the blade surface precision is very low in robot polishing,in particular,quality of the inlet and exhaust edges can not satisfy the processing requirements.Manual grinding has low efficiency,high labor intensity and unstable processing quality,moreover,the polished surface is vulnerable to burn,and the surface precision and integrity are difficult to ensure.In order to further improve the profile accuracy and surface quality,a pneumatic flexible polishing force-exerting mechanism is designed and a dual-mode switching composite adaptive control(DSCAC) strategy is proposed,which combines Bang-Bang control and model reference adaptive control based on fuzzy neural network(MRACFNN) together.By the mode decision-making mechanism,Bang-Bang control is used to track the control command signal quickly when the actual polishing force is far away from the target value,and MRACFNN is utilized in smaller error ranges to improve the system robustness and control precision.Based on the mathematical model of the force-exerting mechanism,simulation analysis is implemented on DSCAC.Simulation results show that the output polishing force can better track the given signal.Finally,the blade polishing experiments are carried out on the designed polishing equipment.Experimental results show that DSCAC can effectively mitigate the influence of gas compressibility,valve dead-time effect,valve nonlinear flow,cylinder friction,measurement noise and other interference on the control precision of polishing force,which has high control precision,strong robustness,strong anti-interference ability and other advantages compared with MRACFNN.The proposed research achieves high-precision control of the polishing force,effectively improves the blade machining precision and surface consistency,and significantly reduces the surface roughness.

Chemical Mechanical Polishing of Glass Substrate with α-Alumina-g-Polystyrene Sulfonic Acid Composite Abrasive

Abrasive is the one of key influencing factors during chemical mechanical polishing（CMP） process. Currently, α-Alumina （α-Al2O3） particle, as a kind of abrasive, has been widely used in CMP slurries, but their high hardness and poor dispersion stability often lead to more surface defects. After being polished with composite particles, the surface defects of work pieces decrease obviously. So the composite particles as abrasives in slurry have been paid more attention. In order to reduce defect caused by pure α-Al2O3 abrasive, α-alumina-g-polystyrene sulfonic acid （α-Al2O3-g-PSS） composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy（FTIR）, X-ray photoelectron spectroscopy（XPS）, time-of-flight secondary ion mass spectroscopy（TOF-SIMS）, and scanning electron microscopy（SEM）, respectively. The results show that polystyrene sulfonic acid grafts onto α-Al2O3, and has well dispersibility. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrate were investigated with a SPEEDFAM-16B-4M CMP machine. Atomic force microscopy（AFM） images indicate that the average roughness of the polished glass substrate surface can be decreased from 0.835 nm for pure α-Al2O3 abrasive to 0.583 nm for prepared α-Al2O3-g-PSS core-shell abrasive. The research provides a new and effect way to improve the surface qualities during CMP.