We demonstrate a method of fabricating through micro-holes and micro-hole arrays in silicon using femtosecond laser irradiation and selective chemical etching. The micro-hole formation mechanism is identified as the c...We demonstrate a method of fabricating through micro-holes and micro-hole arrays in silicon using femtosecond laser irradiation and selective chemical etching. The micro-hole formation mechanism is identified as the chemical reaction of the femtosecond laser-induced structure change zone and hydrofluoric acid solution. The morphologies of the through micro-holes and micro-hole arrays are characterized by using scanning electronic microscopy, The effects of the pulse number on the depth and diameter of the holes are investigated. Honeycomb arrays of through micro-holes fabricated at different laser powers and pulse numbers are demonstrated.展开更多
The most challenging goal of C1 chemistry is the control of C–C coupling to produce chemicals or fuels from C1 feedstocks,in particular syngas（H2/CO）,which can be derived from various carbon resources such as coal,...The most challenging goal of C1 chemistry is the control of C–C coupling to produce chemicals or fuels from C1 feedstocks,in particular syngas（H2/CO）,which can be derived from various carbon resources such as coal,natural gas or shale gas,and biomass.展开更多
Oxygen plasma source generated by thermal cathode filament discharge has been used to study the erosion process of polyim- ide （PI） materials in atomic oxygen （AO） environment, and their mass loss, surface morphol...Oxygen plasma source generated by thermal cathode filament discharge has been used to study the erosion process of polyim- ide （PI） materials in atomic oxygen （AO） environment, and their mass loss, surface morphology and surface chemical composi- tions have been examined by scanning electron microscope （SEM） and X-ray photoelectron spectroscopy （XPS） after exposure to incremental AO flux. The data indicate that the physical adsorption of AO at the samples＇ surface results in the increase of oxygen concentration when polyimide is exposed to AO flux. Then selective chemical reactions of groups of polyimide materials with AO yield volatile organic compounds, sample mass loss is on linear increase and carpet-like surface morphology forms. In the initial exposure to AO, the reaction occurs mainly between AO and carbon in specific location of aromatic ring, then the re- action rate of C=O groups gradually increases. After AO exposure, the oxygen concentration increases while nitrogen and carbon concentration decreases. Reaction rate of groups containing nitrogen is slower compared with carbon and oxygen.展开更多
基金Supported by the National Basic Research Program of China under Grant No 2012CB921804the National Natural Science Foundation of China under Grant Nos 11204236 and 61308006the Collaborative Innovation Center of Suzhou Nano Science and Technology
文摘We demonstrate a method of fabricating through micro-holes and micro-hole arrays in silicon using femtosecond laser irradiation and selective chemical etching. The micro-hole formation mechanism is identified as the chemical reaction of the femtosecond laser-induced structure change zone and hydrofluoric acid solution. The morphologies of the through micro-holes and micro-hole arrays are characterized by using scanning electronic microscopy, The effects of the pulse number on the depth and diameter of the holes are investigated. Honeycomb arrays of through micro-holes fabricated at different laser powers and pulse numbers are demonstrated.
文摘The most challenging goal of C1 chemistry is the control of C–C coupling to produce chemicals or fuels from C1 feedstocks,in particular syngas（H2/CO）,which can be derived from various carbon resources such as coal,natural gas or shale gas,and biomass.
基金Aerospace Science and Technology Innovation Fund (CASC0505)
文摘Oxygen plasma source generated by thermal cathode filament discharge has been used to study the erosion process of polyim- ide （PI） materials in atomic oxygen （AO） environment, and their mass loss, surface morphology and surface chemical composi- tions have been examined by scanning electron microscope （SEM） and X-ray photoelectron spectroscopy （XPS） after exposure to incremental AO flux. The data indicate that the physical adsorption of AO at the samples＇ surface results in the increase of oxygen concentration when polyimide is exposed to AO flux. Then selective chemical reactions of groups of polyimide materials with AO yield volatile organic compounds, sample mass loss is on linear increase and carpet-like surface morphology forms. In the initial exposure to AO, the reaction occurs mainly between AO and carbon in specific location of aromatic ring, then the re- action rate of C=O groups gradually increases. After AO exposure, the oxygen concentration increases while nitrogen and carbon concentration decreases. Reaction rate of groups containing nitrogen is slower compared with carbon and oxygen.
