We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles o...We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°,70°, and 79° with optical quality factors of 2.4 × 10~7, 8.1 × 10~6, 5.9 × 10~6, and 7.4 × 10~6, respectively, from ～80 μm diameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 10~6 with a wedge angle of 74°.展开更多
基金supported by the National Basic Research Program of China (Nos. 2012CB921804 and 2011CBA00205)the National Natural Science Foundation of China (Nos. 61435007 and 11321063)
文摘We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°,70°, and 79° with optical quality factors of 2.4 × 10~7, 8.1 × 10~6, 5.9 × 10~6, and 7.4 × 10~6, respectively, from ～80 μm diameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 10~6 with a wedge angle of 74°.
