A Langmuir probe plasma diagnostic system was developed to measure the plasma parameters in a PECVD vacuum coating machine. The plasma was a capacitively coupled plasma （CCP） driven by a radio-frequency （RF） power...A Langmuir probe plasma diagnostic system was developed to measure the plasma parameters in a PECVD vacuum coating machine. The plasma was a capacitively coupled plasma （CCP） driven by a radio-frequency （RF） power supply. To avoid the disturbance of radio-frequency field on the Langmuir probe measurement, a passive compensation method was applied. This method allowed the ＇dc＇ component to be passed and measured in the probe circuit. It was found that the electron temperature in the range from 2.7 eV to 6.4 eV decreased with the increase in RF power. The measured plasma density ranged from 8×10^16 m^-3 to 0.85×10^15 m^-3 and increased with the increase in RF power.展开更多
High precision control of substrate tension is the premise and guarantee for producing high-quality products in roll-to-roll precision coating machine.However,the complex relationships in tension system make the probl...High precision control of substrate tension is the premise and guarantee for producing high-quality products in roll-to-roll precision coating machine.However,the complex relationships in tension system make the problems of decoupling control difficult to be solved,which has limited the improvement of tension control accuracy for the coating machine.Therefore,an ADRC parameters self-tuning decoupling strategy based on RBF neural network is proposed to improve the control accuracy of tension system in this paper.Firstly,a global coupling nonlinear model of the tension system is established according to the composition of the coating machine,and the global coupling model is linearized based on the first-order Taylor formula.Secondly,according to the linear model of the tension system,a parameters self-tuning decoupling algorithm of the tension system is proposed by integrating feedforward control,ADRC and RBF.Finally,the simulation results show that the proposed tension control strategy has good decoupling control performance and effectively improves the tension control accuracy for the coating machine.展开更多
基金the Enterprise Postdoctoral Research Fund of Liaoning Province(BSH:2004921032)National Natural Science Foundation of China(No.60774093)
文摘A Langmuir probe plasma diagnostic system was developed to measure the plasma parameters in a PECVD vacuum coating machine. The plasma was a capacitively coupled plasma （CCP） driven by a radio-frequency （RF） power supply. To avoid the disturbance of radio-frequency field on the Langmuir probe measurement, a passive compensation method was applied. This method allowed the ＇dc＇ component to be passed and measured in the probe circuit. It was found that the electron temperature in the range from 2.7 eV to 6.4 eV decreased with the increase in RF power. The measured plasma density ranged from 8×10^16 m^-3 to 0.85×10^15 m^-3 and increased with the increase in RF power.
基金supported by the National Key Research and Development Program of China(Grant No.2019YFB1707200)the Key Research and Development Program of Shaanxi Province(Grant No.2020ZDLGY14-06)the Technology Innovation Leading Program of Shaanxi Province(Grant No.2020QFY03-03).
文摘High precision control of substrate tension is the premise and guarantee for producing high-quality products in roll-to-roll precision coating machine.However,the complex relationships in tension system make the problems of decoupling control difficult to be solved,which has limited the improvement of tension control accuracy for the coating machine.Therefore,an ADRC parameters self-tuning decoupling strategy based on RBF neural network is proposed to improve the control accuracy of tension system in this paper.Firstly,a global coupling nonlinear model of the tension system is established according to the composition of the coating machine,and the global coupling model is linearized based on the first-order Taylor formula.Secondly,according to the linear model of the tension system,a parameters self-tuning decoupling algorithm of the tension system is proposed by integrating feedforward control,ADRC and RBF.Finally,the simulation results show that the proposed tension control strategy has good decoupling control performance and effectively improves the tension control accuracy for the coating machine.
