Many researches on critical nozzles have been performed to accurately measure the mass flow rate of gas flow,and to standardize the performance as a flow meter.Recently,much interest is being paid on the measurement o...Many researches on critical nozzles have been performed to accurately measure the mass flow rate of gas flow,and to standardize the performance as a flow meter.Recently,much interest is being paid on the measurement of very small mass flow rate in industry fields such as MEMS applications.However,the design and performance data of the critical nozzles obtained so far have been applied mainly to the critical nozzles with comparatively large diameters,and the works available on miniature critical nozzles are lacking.In the present study,a computational fluid dynamics method has been applied to investigate the influence of the diffuser angle on discharge coefficient of the miniature critical nozzles.In computations,the throat diameter of critical nozzle is varied from 0.2 mm to 5.0 mm and the diffuser angle is changed from 2 deg to 8 deg.The computational results are validated with some experimental data available.The results show that the present computational results predict appropriately the discharge coefficient of the gas flows through miniature critical nozzles.It is known that the discharge coefficient is considerably influenced by the diffuser angle,as the throat diameter of nozzle becomes small below a certain value.This implies that the miniature critical nozzles should be carefully designed.展开更多
临界流文丘里喷嘴是一种高性能的流量计量器具,常作为气体流量计量标准应用于标准装置中,而流出系数是其最重要的计量性能参数之一,通常可溯源至pVTt法气体流量标准装置,采用实流标定的方法进行量值确认,也可以采用经验公式进行计算。...临界流文丘里喷嘴是一种高性能的流量计量器具,常作为气体流量计量标准应用于标准装置中,而流出系数是其最重要的计量性能参数之一,通常可溯源至pVTt法气体流量标准装置,采用实流标定的方法进行量值确认,也可以采用经验公式进行计算。目前经验公式有两种,一种为JJG 620—2008《临界流文丘里喷嘴》中给出的经验公式,一种为ISO 9300:2022 Measurement of gas flow by means of critical flow nozzles中给出的经验公式,两种公式具有相同的雷诺数适用范围,但其考虑的流出系数影响因素不同,计算结果有一定差异。该文对两种经验公式计算流出系数的结果与pVTt基准装置实流标定的流出系数结果进行了对比,结果表明,两种半经验公式在边界层湍流区域的计算结果相一致,在层流区域和转捩区域存在较大差异。另外,测试喷嘴均在层流状态下进行实流标定,且其标定结果与两种半经验公式的计算结果存在差异,建议在实际使用时对喷嘴的流出系数进行修正。展开更多
文摘Many researches on critical nozzles have been performed to accurately measure the mass flow rate of gas flow,and to standardize the performance as a flow meter.Recently,much interest is being paid on the measurement of very small mass flow rate in industry fields such as MEMS applications.However,the design and performance data of the critical nozzles obtained so far have been applied mainly to the critical nozzles with comparatively large diameters,and the works available on miniature critical nozzles are lacking.In the present study,a computational fluid dynamics method has been applied to investigate the influence of the diffuser angle on discharge coefficient of the miniature critical nozzles.In computations,the throat diameter of critical nozzle is varied from 0.2 mm to 5.0 mm and the diffuser angle is changed from 2 deg to 8 deg.The computational results are validated with some experimental data available.The results show that the present computational results predict appropriately the discharge coefficient of the gas flows through miniature critical nozzles.It is known that the discharge coefficient is considerably influenced by the diffuser angle,as the throat diameter of nozzle becomes small below a certain value.This implies that the miniature critical nozzles should be carefully designed.
文摘临界流文丘里喷嘴是一种高性能的流量计量器具,常作为气体流量计量标准应用于标准装置中,而流出系数是其最重要的计量性能参数之一,通常可溯源至pVTt法气体流量标准装置,采用实流标定的方法进行量值确认,也可以采用经验公式进行计算。目前经验公式有两种,一种为JJG 620—2008《临界流文丘里喷嘴》中给出的经验公式,一种为ISO 9300:2022 Measurement of gas flow by means of critical flow nozzles中给出的经验公式,两种公式具有相同的雷诺数适用范围,但其考虑的流出系数影响因素不同,计算结果有一定差异。该文对两种经验公式计算流出系数的结果与pVTt基准装置实流标定的流出系数结果进行了对比,结果表明,两种半经验公式在边界层湍流区域的计算结果相一致,在层流区域和转捩区域存在较大差异。另外,测试喷嘴均在层流状态下进行实流标定,且其标定结果与两种半经验公式的计算结果存在差异,建议在实际使用时对喷嘴的流出系数进行修正。