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Effect of Coiling Temperature on Ti(C,N) Precipitation and Properties of Batch Annealed DC06EK Enamel Steel 被引量:3
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作者 薛飞 董福涛 +3 位作者 TIAN Yaqiang 陈连生 DU Linxiu LIU Xianghua 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2018年第3期697-702,共6页
The effects of hot-strip coiling temperature on Ti(C,N) precipitation, texture and hydrogen permeation behavior in DC06 EK enamel steel were investigated by TEM, EBSD test and electrochemical hydrogen permeation exp... The effects of hot-strip coiling temperature on Ti(C,N) precipitation, texture and hydrogen permeation behavior in DC06 EK enamel steel were investigated by TEM, EBSD test and electrochemical hydrogen permeation experiment. It was found that the Ti(C,N) particles in hot-strip coarsened with increasing coiling temperature, whereas after cold-rolling and annealing, the size difference of Ti(C,N) particles was lessened. The hot-strip coiling temperature has a significant impact on the recrystallized texture in the subsequent cold-rolled and annealed sheet. Hot-strip using high temperature(700 ℃) coiling leads to strong {111} recrystallized texture in annealed sheet, with peak intensity 9.2. On the contrary, in annealed sheets using hot-strip coiling at 650 ℃, their {111} recrystallized textures were weaker, which was also reflected in their rmvalues. Even though the hydrogen diffusion coefficient is slightly lower(7.76×10^(-5) mm^2/s) in annealed sheet using low temperature coiling(600 ℃), appropriately higher coiling temperature is more suitable for DC06 EK enamel steel combining both good drawability and fish-scale resistance. 展开更多
关键词 enamel steel coiling temperature Ti(C N) γ-fiber texture hydrogen diffusion
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Effect of Coiling Temperature on the Evolution of Texture in Ferritic Rolled Ti-IF Steel 被引量:1
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作者 Zhaodong WANG Yanhui CUO Wenying XUE Xianghua LIU Cuodong WANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第3期337-341,共5页
The effect of coiling temperatures on the evolution of texture in Ti-IF steel during ferritic hot rolling, cold rolling and annealing was studied. It was found that texture evolution at high temperature coiling is abs... The effect of coiling temperatures on the evolution of texture in Ti-IF steel during ferritic hot rolling, cold rolling and annealing was studied. It was found that texture evolution at high temperature coiling is absolutely different from that at low temperature one. The hot band texture includes a strong α-fiber as well as a weak γ-fiber after ferritic hot rolling and low temperature coiling. Both of them intensify after cold rolling and a γ-fiber with peak at {111}〈112〉 is the main texture of annealed samples. However, the main component of the hot band texture after high temperature coiling is v-fiber. After cold rolling, the intensity of γ texture reduces; α fiber (except {111}〈110〉 component) intensifies and a strong and well-proportioned γ-fiber forms in the annealed samples. 展开更多
关键词 Ti-IF steel Ferritic hot rolling coiling temperature TEXTURE
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Intelligent Control on Hot Strip Coiling Temperature 被引量:1
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作者 Heping Liu Yanlong Zhao(Information Engineering School, University of Science and Technology Bejing, Beijing 100083, China)(Handan Iron & Steel (Group) Co, Handan 056015, China) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2000年第2期147-150,共4页
A new intelligent control scheme for hot strip coiling temperature is presented. In this scheme, the prediction mode1 of finishing temperature and the presetting model of main cooling zone are establish based on BP ne... A new intelligent control scheme for hot strip coiling temperature is presented. In this scheme, the prediction mode1 of finishing temperature and the presetting model of main cooling zone are establish based on BP neural network, the feed-forward open-loop control model of main cooling zone is constructed based on T-S fuzzy neural network, a new improved structure of T-S fuzzy neural network is developed, and the feedback close-loop control model of precision cooling zone is obtained based on fuzzy control. The effectiveness of the proposed scheme has been demonstrated by computer simulation with a satisfactory result. 展开更多
关键词 coiling temperature control laminar cooling fuzzy control neural network fuzzy neural network
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The effect of cooling rate and coiling temperature on the microstructure and mechanical properties of a plain carbon steel 被引量:1
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作者 ZHANG Chen HU Xiaoping +1 位作者 LIU Gang WANG Huanrong 《Baosteel Technical Research》 CAS 2018年第1期11-16,共6页
The effects of cooling rate and coiling temperature on microstructure and mechanical properties of a plain carbon steel were investigated by combining metallography and tensile experiments. The results indicate that f... The effects of cooling rate and coiling temperature on microstructure and mechanical properties of a plain carbon steel were investigated by combining metallography and tensile experiments. The results indicate that ferrite grain size is refined and bainite transformation occurs to ensure high strength and elongation, as the cooling rate is quick enough. Yield strength and tensite strength improve with the decreased finish cooling temperature, but the elongation decreases too significantly to meet the requirements. Thus, the cooling rate must be quick enough, and the appropriate coiling temperature should be carefully selected to obtain refined ferrite and a small amount of bainite to improve the strength while the plasticity is also ensured. Under this condition, the Mn element concentration can be reduced to save cost or produce higher strength steel with same chemical composition. 展开更多
关键词 plain carbon steel cooling rate coiling temperature
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Application research on feedback control based on Dahlin algorithm for coiling temperature of hot strip
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作者 WU Jianfeng WANG Xiaobo LIU Ye 《Baosteel Technical Research》 CAS 2012年第4期38-40,共3页
To improve the precision of the coiling temperature and the performance of the feedback control system with long pure time delay on hot strip mills, we analyzed the design process of the Dahlin algorithm in detail. Th... To improve the precision of the coiling temperature and the performance of the feedback control system with long pure time delay on hot strip mills, we analyzed the design process of the Dahlin algorithm in detail. The coiling temperature curves controlled by the PID algorithm and Dahlin algorithm were simulated and compared, which showed that the control precision with the Dahlin algorithm was higher than that with the PID algorithm. That was further verified by the production practice. 展开更多
关键词 Dahlin algorithm coiling temperature feedback control
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Effects of Coiling Temperature and Cooling Condition on Transformation Behavior of Tertiary Oxide Scale 被引量:3
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作者 Guang-ming CAO Teng-zhi WU +3 位作者 Rong XU Zhi-feng LI Fu-xiang WANG Zhen-yu LIU 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2015年第10期892-896,共5页
The influences of coiling temperature and cooling condition on structural transformation of the hot-rolled tertiary oxide scale formed under continuous cooling conditions were studied by thermal gravimetric analyzer. ... The influences of coiling temperature and cooling condition on structural transformation of the hot-rolled tertiary oxide scale formed under continuous cooling conditions were studied by thermal gravimetric analyzer. The fourth oxide scale formed under different conditions were classified and plotted. Because the oxide scale structure transformation is diffusion-controlled and the transformation law is similar to "C" curve, the eutectoid transformation nose temperature is 450 ℃. Under condition of low temperature and high cooling rate, ion diffusion behavior is restricted so that the eutectoid reaction is suppressed, resulting in that the fourth oxide scale is mainly made up of pre-eutectoid Fe304 and FeO without eu- tectoid products. From scale structure transition diagram, the eutectoid reaction process was affected by coiling temperature and cooling rate, leading to various scale structures. 展开更多
关键词 oxide scale eutectoid transformation continuous cooling coiling temperature cooling rate
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Microstructure, property and deformation and fracture behavior of 800 MPa complex phase steel with different coiling temperatures 被引量:2
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作者 Jian-zhong Xue Zheng-zhi Zhao +5 位作者 Di Tang Hui Li Hao-hong Wu Wei-liang Xiong Liang Liang Yao Huang 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2021年第3期346-359,共14页
The microstructure characteristics and properties(especially hole expansion property)of 800 MPa hot-rolled complex phase steel with different coiling temperatures were studied.The microstructure consisted of polygonal... The microstructure characteristics and properties(especially hole expansion property)of 800 MPa hot-rolled complex phase steel with different coiling temperatures were studied.The microstructure consisted of polygonal ferrite and precipitates when the steel was coiled at 550℃,and when the steel was coiled between 460–520℃,the microstructure was composed of granular bainite and martensite and austenite(M/A)islands.The morphology of the crack was analyzed by scanning electron microscopy,and the in situ scanning electron microscope tensile test was used to find out the fracture mechanism and deformation behavior of the steel with different coiling temperatures.When the steel was coiled at 550℃,the cracks initiated at the ferrite grain boundary and propagated through the grains or along the grain boundaries.When the steel was coiled at 520℃,the cracks first initiated at the junction of ferrite and M/A island and then propagated through the grains.The steel coiled at 520℃ has quite good mechanical properties and relatively high hole expansion ratio. 展开更多
关键词 Complex phase steel coiling temperature Strength In situ tensile test Hole expansion ratio CRACK
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Influence of coiling temperature on microstructure and mechanical properties of a hot-rolled high-strength steel microalloyed with Ti,Mo and V 被引量:2
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作者 Zhi-xiang Fu Geng-wei Yang +4 位作者 Ru-yang Han Yao-wen Xu Xin-ping Mao Si-qian Bao Gang Zhao 《Journal of Iron and Steel Research International》 SCIE EI CSCD 2022年第3期484-493,共10页
Influence of coiling temperature(CT)on the microstructure and mechanical properties of a hot-rolled high-strength steel microalloyed with Ti,Mo and V was elucidated.The precipitation behavior of nano-sized particles w... Influence of coiling temperature(CT)on the microstructure and mechanical properties of a hot-rolled high-strength steel microalloyed with Ti,Mo and V was elucidated.The precipitation behavior of nano-sized particles was investigated by theoretical calculation and quantitative analysis.And the results revealed that V-enriched(Ti,Mo,V)C precipitated in the ferrite matrix.As the CT decreased,the site fractions of Ti in(Ti,Mo,V)C changed little,the site fractions of Mo increased,and the site fractions of V decreased accordingly.Moreover,the low CT could refine the microstructure and precipitated particles but suppress the precipitation of(Ti,Mo,V)C particles simultaneously,leading to the volume fraction of(Ti,Mo,V)C significantly decreasing,consequently causing an increment of grain refinement strengthening and a reduction in precipitation hardening.When the CT was 600℃,the steel characterized by fine polygonal ferrite,a small amount of bainite and nano-sized(Ti,Mo,V)C precipitates exhibited the optimum mechanical properties with the ultimate tensile strength of 870 MPa,yield strength of 807 MPa and elongation to fracture of 17%. 展开更多
关键词 Ti-Mo-V complex microalloying coiling temperature PRECIPITATION Strengthening mechanism Microstructure
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Effects of Coiling Temperature on Strength,Yield Ratio and Precipitation Behaviors of Hot Rolled High Strength Microalloyed Steel for Cold Forming 被引量:1
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作者 XU Jian-qiu,JIA Yue-cai,LI Hua-long 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2011年第S1期572-575,共4页
Various hot rolling schedules were applied to a Nb,V,Ti contained HSLA steel.Coiling temperature had crucial effects on not only yield strength,but also yield ratio and precipitation behavior.600Mpa yield strength is ... Various hot rolling schedules were applied to a Nb,V,Ti contained HSLA steel.Coiling temperature had crucial effects on not only yield strength,but also yield ratio and precipitation behavior.600Mpa yield strength is achieved when coiled at 450℃,which is 100Mpa higher than those coiled at 570℃.However,the low coiling temperature had adverse effect to increase yield ratio,which increased from 0.78 to 0.88 as coiling temperature dropped from 570℃ to 450℃.High resolution SEM analysis shows that sizes of Nb,V,Ti precipitates are affected by coiling temperature.Coarse (Nb,Ti)(C,N) precipitates up to 5μm are observed at higher coiling temperature and to decrease tensile strength,where high coiling temperature corresponds to low cooling rate.With strong cooling and coiling capacity of Shasteel’s 1450mm width hot rolling mill,these results indicate that strength and formability of the steel can be balanced when coiling temperature has been optimized.Alloying and microalloying costs can be reduced by efficiently utilizing the capacity of rolling mill.Alumina inclusions are found to act as nucleus for Nb,V,Ti precipitates,contributing to coarsening of precipitates. 展开更多
关键词 coiling temperature STRENGTH yield ratio PRECIPITATES INCLUSIONS
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Effects of final rolling temperature and coiling temperature on precipitates and microstructure of high-strength low-alloy pipeline steel 被引量:1
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作者 Ya-dong Wang Zheng-hua Tang +2 位作者 Su-fen Xiao Charles WSiyasiya Tao Wei 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2022年第8期1236-1244,共9页
The strength-to-weight ratio is an important property of high-strength low-alloy(HSLA)steel in pipeline,whose precipitation strengthening can be improved.The final rolling temperature(FRT)and coiling temperature(CT)ar... The strength-to-weight ratio is an important property of high-strength low-alloy(HSLA)steel in pipeline,whose precipitation strengthening can be improved.The final rolling temperature(FRT)and coiling temperature(CT)are the key process parameters in the control of precipitates and microstructure.Continuous cooling rate was fixed at 10℃/s,and the effects of deformation and coiling temperatures on precipitates and microstructure of Ti-Nb microalloyed HSLA steel were investigated through thermo-mechanical controlled processing on Gleeble 3500.The microstructure is mainly acicular ferrite with high density dislocation and several microns scale.The size and volume fraction of the precipitates were studied under transmission electron microscopy.The results showed that the diameter of the precipitates was in the range between 4 and 240 nm.The optimized combination of parameters is FRT of 820℃and CT of 550℃,and the volume fraction of precipitates obtained under this process is 0.59%. 展开更多
关键词 PRECIPITATE Thermo-mechanical controlled processing Final rolling temperature coiling temperature High-strength low-alloy steel (Ti Nb)C
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Transient multi-physics behavior of an insert high temperature superconducting no-insulation coil in hybrid superconducting magnets with inductive coupling 被引量:1
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作者 Xiang KANG Yujin TONG +1 位作者 Wei WU Xingzhe WANG 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI CSCD 2023年第2期255-272,共18页
A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet dur... A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet during the charging and discharging processes.The coupled problem is resolved by means of the finite element method(FEM)for the magneto-thermo-elastic behaviors and the Runge-Kutta method for the transient responses of the electrical circuits of the hybrid superconducting magnet system.The results reveal that the transient multi-physics responses of the insert NI coil primarily depend on the charging/discharging procedure of the hybrid magnet.Moreover,a reverse azimuthal current and a compressive hoop stress are induced in the insert NI coil during the charging process,while a forward azimuthal current and a tensile hoop stress are observed during the discharging process.The induced voltages in the insert NI coil can drive the currents flowing across the radial turns where the contact resistance exists.Therefore,it brings forth significant Joule heat,causing a temperature rise and a uniform distribution of this heat in the coil turns.Accordingly,a thermally/mechanically unstable or quenching event may be encountered when a high operating current is flowing in the insert NI coil.It is numerically predicted that a quick charging will induce a compressive hoop stress which may bring a risk of buckling instability in the coil,while a discharging will not.The simulations provide an insight of hybrid superconducting magnets under transient start-up or shutdown phases which are inevitably encountered in practical applications. 展开更多
关键词 hybrid superconducting magnet high temperature superconducting(HTS)no-insulation(NI)coil inductive coupling multi-physics field thermal stability
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Simulation of Rolling Billet in Oval Pass by Explicit Dynamics Elastic-Plastic FEM 被引量:12
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作者 LIJian-chao CUIJian-zhong +1 位作者 MAYong-lin WANGBao-feng 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2004年第2期30-33,共4页
Considering the strip speed during controlled laminar cooling on Baosteel 1580 hot strip mill in China, the influence of strip speed fluctuation on coiling temperature control for the tail and “neck” of the strip wa... Considering the strip speed during controlled laminar cooling on Baosteel 1580 hot strip mill in China, the influence of strip speed fluctuation on coiling temperature control for the tail and “neck” of the strip was analyzed. The optimization strategies were put forward and proved effective in operation. 展开更多
关键词 hot strip laminar cooling speed control coiling temperature
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Mathematic modeling on flexible cooling system in hot strip mill 被引量:4
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作者 彭良贵 刘相华 +1 位作者 赵宪明 吴迪 《Journal of Central South University》 SCIE EI CAS 2014年第1期43-49,共7页
A novel cooling system combining ultra fast cooling rigs with laminar cooling devices was investigated.Based on the different cooling mechanisms,a serial of mathematic models were established to describe the relations... A novel cooling system combining ultra fast cooling rigs with laminar cooling devices was investigated.Based on the different cooling mechanisms,a serial of mathematic models were established to describe the relationship between water flow and spraying pressure and the relationship between water spraying heat flux and layout of nozzles installed on the top and bottom cooling headers.Model parameters were validated by measured data.Heat transfer models including air convection model,heat radiation model and water cooling capacity model were detailedly introduced.In addition,effects on cooling capacity by water temperature and different valve patterns were also presented.Finally,the comparison results from UFC used or not have been provided with respect to temperature evolution and mechanical properties of Q235B steel grade with thickness of 7.8 mm.Since online application of the sophisticated CTC process control system based on these models,run-out table cooling control system has been running stably and reliably to produce resource-saving,low-cost steels with smaller grain size. 展开更多
关键词 mathematic model ultra fast cooling laminar flow cooling variable frequency control coiling temperature control
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Element Tracking Strategies for Hot Strip Laminar Cooling Control 被引量:3
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作者 HANBin ZHANGZhong-ping +1 位作者 LIUXiang-hua WANGGuo-dong 《Journal of Iron and Steel Research International》 SCIE CAS CSCD 2005年第3期18-21,27,共5页
Feedforward control is the core to control function in the cooling process of hot strip. One of the most important tasks in feedforward control is to determine the arrival time of the strip at various locations on the... Feedforward control is the core to control function in the cooling process of hot strip. One of the most important tasks in feedforward control is to determine the arrival time of the strip at various locations on the runout table for effective control. Based on the principles of element tracking and tracking strategies for variable rolling speed and constant rolling speed, a simple diagonal tracking method for an existing hot strip mill was proposed and tested. The test results show that the proposed strategies are effective for improving tracking control. 展开更多
关键词 laminar cooling hot strip element tracking coiling temperature control
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Research on Retained Austenite for Advanced Aluminum-containing Hot-rolled TRIP Steel 被引量:2
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作者 Yu CHEN Guoyi TANG +2 位作者 Fangyu CHEN Pinghe LI Sunbing ZHOU 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第6期813-816,共4页
A new type of hot-rolled transformation induced plasticity (TRIP) steel with 2.3%AI was developed to replace conventional Si-bearing TRIP steel to improve surface quality of the steel sheet. The relationship between... A new type of hot-rolled transformation induced plasticity (TRIP) steel with 2.3%AI was developed to replace conventional Si-bearing TRIP steel to improve surface quality of the steel sheet. The relationship between retained austenite volume fraction and hot-rolling processing was researched by Gleeble-2000 thermo-dynamic test for the Al-bearing steel. The experimental result showed that aluminum played an important role on retaining austenite and the volume fraction increased from 4.4% to 7.5% as coiling temperature increased from 350℃ to 450℃, while coiling temperature had a stronger effect on retaining austenite than finishing rolling temoerature. 展开更多
关键词 ALUMINUM Retained austenlte (RA) coiling temperature (CT) HOT-ROLLING
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Effect of Cooling History on Yield Ratio of Fine-grain Ferrite/Pearlite Steel 被引量:1
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作者 Fuxian ZHU Xin LI +3 位作者 Yanchun LIU Xianghua LIU Guangfu SHE Zhongping ZHANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第6期791-794,共4页
Effect of different cooling history on yield ratio of HP295 steel for welded gas cylinder was studied and the result implied that both fine microstructure and good mechanical properties can be attained by using two-st... Effect of different cooling history on yield ratio of HP295 steel for welded gas cylinder was studied and the result implied that both fine microstructure and good mechanical properties can be attained by using two-stage cooling and controlling the coiling temperature. The yield ratio of HP295 steel sheet was reduced to less than 0.8 by twostage cooling process. The pass percent of yield ratio was enhanced from less than 90% to 100%. The mechanical properties satisfied the criteria of GB6653-1994. 展开更多
关键词 HP295 steel sheet Yield ratio Two-stage cooling coiling temperature
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Cooling hot rolling steel strip using combined tactics 被引量:1
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作者 Li Peng Qing Li Zhou Zhou 《Journal of University of Science and Technology Beijing》 CSCD 2008年第3期362-365,共4页
The coiling temperature control of a typical steel strip mill was investigated. Due to the high speed of a strip and complex circumstance, it is very hard to set up a cooling model with high accuracy. A simplified dyn... The coiling temperature control of a typical steel strip mill was investigated. Due to the high speed of a strip and complex circumstance, it is very hard to set up a cooling model with high accuracy. A simplified dynamic model was proposed, based on which a cooling control scheme with combined feedforward, feedback and adaptive algorithms was developed. Meanwhile, the genetic algorithms were used for the optimization of model parameters. Simulations with a model validated using actual plant data were conducted, and the results have confirmed the effectiveness of the proposed control methods. At last, a simulation system for coiling temperature control was developed. It can be used for new product trials and newcomer training. 展开更多
关键词 coiling temperature temperature control FEEDFORWARD FEEDBACK adaptive algorithm simulation
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Mathematical model for cooling process and its self-learning applied in hot rolling mill
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作者 刘伟嵬 李海军 +1 位作者 王昭东 王国栋 《Journal of Shanghai University(English Edition)》 CAS 2011年第6期548-552,共5页
Control precision of coiling temperature is one of the key factors affecting the profile shape and surface quality during the cooling process of hot rolled steel strip.For this reason,the core of temperature control p... Control precision of coiling temperature is one of the key factors affecting the profile shape and surface quality during the cooling process of hot rolled steel strip.For this reason,the core of temperature control precision is to establish an effective cooling mathematical model with self-learning function.Starting from this point,a cooling mathematical model with nonlinear structural characteristics is established in this paper for the cooling process of hot rolled steel strip.By the analysis of self-learning ability,key parameters of the mathematical model could be constantly corrected so as to improve temperature control precision and adaptive capability of the model.The site actual application results proved the stable performance and high control precision of the proposed mathematical model,which would lay a solid foundation to improve the steel product qualities. 展开更多
关键词 cooling process MODEL coiling temperature SELF-LEARNING hot rolled steel strip
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Study on co-cracking performance of different hydrocarbon mixture in a steam pyrolysis furnace 被引量:9
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作者 Benfeng Yuan Jinlong Li +1 位作者 Wenli Du Feng Qian 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2016年第9期1252-1262,共11页
Co-cracking is a process where the mixtures of different hydrocarbon feedstocks are cracked in a steam pyrolysis furnace, and widely adopted in chemical industries. In this work, the simulations of the co-cracking of ... Co-cracking is a process where the mixtures of different hydrocarbon feedstocks are cracked in a steam pyrolysis furnace, and widely adopted in chemical industries. In this work, the simulations of the co-cracking of ethane and propane, and LPG and naphtha mixtures have been conducted, and the software packages of COILSIM1 D and Sim CO are used to account for the cracking process in a tube reactor. The effects of the mixing ratio, coil outlet temperature, and pressure on cracking performance have been discussed in detail. The co-cracking of ethane and propane mixture leads to a lower profitability than the cracking of single ethane or single propane. For naphtha, cracking with LPG leads to a higher profitability than single cracking of naphtha, and more LPG can produce a higher profitability. 展开更多
关键词 Co-cracking Mixing ratio Coil outlet temperature(COT) Coil outlet pressure(COP) Pyrolysis furnace
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The effect of discharge conditions of ICP etching reactor on plasma parameters
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作者 Yijia Lu Yaosong Chen Yiran An LTCS, College of Engineering, Peking University,100871 Beijing, China 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2009年第6期769-776,共8页
This study investigated the inductively coupled plasma etching reactor and RF coils developed by North Microelectronic Corporation. Full three dimensional simulations were made at different discharge conditions. The s... This study investigated the inductively coupled plasma etching reactor and RF coils developed by North Microelectronic Corporation. Full three dimensional simulations were made at different discharge conditions. The simulations examined and compared the distribution and non-uniformity of several plasma parameters at a fixed position upon the wafer at different pressures and coil currents. These parameters included electron density, electron temperature and power deposition. The results demonstrate that the electron density, power deposition and uniformity increase with either higher pressure or stronger coil currents, while the electron temperature decreases at this condition. Coil number increase can reduce the non-uniformity of parameters in the spatial distribution. The linear relationship between power deposition and electron density does not always exist. The comparison between simulation results and experiment results is also presented in the paper. 展开更多
关键词 Inductively coupled plasma. Electron densityElectron temperature ~ Power deposition - RF coils
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