According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on comer capacitor is presented and solved with the capacitance characteristic formula of nonlinea...According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on comer capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the model based on comer capacitor is more accurate than the models based on infinite parallel plate capacitor and parallel plate capacitor with edge effects.展开更多
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator w...A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 7IV,which fulfills the design requirements and matches the analytical value to within 2.1%.展开更多
基金Sponsored by the Ministerial Level Foundation(A2220060040)
文摘According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on comer capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the model based on comer capacitor is more accurate than the models based on infinite parallel plate capacitor and parallel plate capacitor with edge effects.
基金the State Key Development Program for Basic Research of China(No.2006CB30040)~~
文摘A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 7IV,which fulfills the design requirements and matches the analytical value to within 2.1%.
