Describes a computer controlled polishing machine utilizing a small polisher with specified movement to figure optical surfces having strict dimensional requirements. The system is especially applicable in figuring as...Describes a computer controlled polishing machine utilizing a small polisher with specified movement to figure optical surfces having strict dimensional requirements. The system is especially applicable in figuring aspherical surfaces, beginning with the best fit sphere if the departure from the desired surface is not large. An interferometric measuring system is desiigned to form a closed loop control during processing.展开更多
In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors ar...In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed, and a possible solution is given. The two mirrors have been polished by means of CCOS, and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer, and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors.展开更多
The existing methods for blade polishing mainly focus on robot polishing and manual grinding.Due to the difficulty in high-precision control of the polishing force,the blade surface precision is very low in robot poli...The existing methods for blade polishing mainly focus on robot polishing and manual grinding.Due to the difficulty in high-precision control of the polishing force,the blade surface precision is very low in robot polishing,in particular,quality of the inlet and exhaust edges can not satisfy the processing requirements.Manual grinding has low efficiency,high labor intensity and unstable processing quality,moreover,the polished surface is vulnerable to burn,and the surface precision and integrity are difficult to ensure.In order to further improve the profile accuracy and surface quality,a pneumatic flexible polishing force-exerting mechanism is designed and a dual-mode switching composite adaptive control(DSCAC) strategy is proposed,which combines Bang-Bang control and model reference adaptive control based on fuzzy neural network(MRACFNN) together.By the mode decision-making mechanism,Bang-Bang control is used to track the control command signal quickly when the actual polishing force is far away from the target value,and MRACFNN is utilized in smaller error ranges to improve the system robustness and control precision.Based on the mathematical model of the force-exerting mechanism,simulation analysis is implemented on DSCAC.Simulation results show that the output polishing force can better track the given signal.Finally,the blade polishing experiments are carried out on the designed polishing equipment.Experimental results show that DSCAC can effectively mitigate the influence of gas compressibility,valve dead-time effect,valve nonlinear flow,cylinder friction,measurement noise and other interference on the control precision of polishing force,which has high control precision,strong robustness,strong anti-interference ability and other advantages compared with MRACFNN.The proposed research achieves high-precision control of the polishing force,effectively improves the blade machining precision and surface consistency,and significantly reduces the surface roughness.展开更多
With the increasing demand for high-precision optical components,bonnet polishing technology is increasingly being used in the polishing process of optical components owing to its high removal efficiency and high surf...With the increasing demand for high-precision optical components,bonnet polishing technology is increasingly being used in the polishing process of optical components owing to its high removal efficiency and high surface accuracy.However,it is expensive and difficult to implement dedicated bonnet polishing machine tools,and their processing range is limited.This research combines bonnet polishing technology with industrial robot-assisted processing technology to propose a robotic bonnet polishing control model for large-diameter axisymmetric aspherical optical components.Using the transformation relations of the spatial coordinate system,the transformation relations of the workpiece coordinate system,local coordinate system of the polishing point,and tool coordinate system of the bonnet sphere center are established to obtain the bonnet precession polishing motion model.The polishing trajectory of large-diameter axisymmetric aspherical components and the variation in the linkage angle difference were simulated by adding an efficiency-optimal control strategy to the motion model.The robot motion was simulated in Robostudio to verify the correctness of the precession motion model and control algorithm.Lastly,the robotic bonnet polishing system was successfully applied to the polishing process of the optical components.展开更多
Polishing plays an indispensable role in optical processing,especially for large-aperture optical reflective mirrors with freeform surfaces.Robotic polishing requires effective control of the contact force between the...Polishing plays an indispensable role in optical processing,especially for large-aperture optical reflective mirrors with freeform surfaces.Robotic polishing requires effective control of the contact force between the robot and the mirror during processing.In order to maintain a constant contact force during polishing,traditional polishing robots rely on closed-loop control of air cylinders,whose performances heavily rely on high-fidelity force sensing and real-time control.This paper proposes to employ a compliant constant-force mechanism in the end-effector of a polishing robot to passively maintain a constant force between the robot and the mirror,thus eliminating the requirement for force sensing and closed-loop control.The compliant constant force mechanism utilizing the second bending mode of fixed-guided compliant beams is adopted and elaborated for the passive end-effector.An end-effector providing a constant contact force of 40 N is designed and prototyped.The polishing experiment shows that the passive constant-force end-effector provides stable contact force between the robot and the mirror with fluctuation within 3.43 N,and achieves RMS(Root Mean Square)lower thanλ/10(λ=632.8 nm)of the polished surface of the largeaperture optical reflective mirror.It is concluded that the constant-force compliant mechanism provides a low-cost and reliable solution for force control in robotic polishing.展开更多
This paper proposes a scanner–stage synchronized approach emphasizing a novel control structure for the laser polishing of Inconel 718 components manufactured by selective laser melting in order to address increasing...This paper proposes a scanner–stage synchronized approach emphasizing a novel control structure for the laser polishing of Inconel 718 components manufactured by selective laser melting in order to address increasing demands for high surface quality in metal additive manufacturing.The proposed synchronized control system is composed of a motion decomposition module and an error synthesis module.The experimental results show that stitching errors can be avoided thanks to continuous motion during laser processing.Moreover,in comparison with the existing step-scan method,the processing efficiency of the proposed method is improved by 38.22%and the surface quality of the laser-polished area is significantly enhanced due to a more homogeneous distribution of the laser energy during the material phase change.The proposed synchronized system paves the way for high-speed,high-precision,and large-area laser material processing without stitching errors.展开更多
磁流变抛光是一种去除效率稳定、无亚表面损伤的超精密加工工艺,然而,在抛光过程中,磁流变液的水分损失会改变抛光工具的特性,从而影响去除函数的稳定性。现有的水分控制策略受到磁流变液循环系统大时延、时变扰动的影响,导致水分含量...磁流变抛光是一种去除效率稳定、无亚表面损伤的超精密加工工艺,然而,在抛光过程中,磁流变液的水分损失会改变抛光工具的特性,从而影响去除函数的稳定性。现有的水分控制策略受到磁流变液循环系统大时延、时变扰动的影响,导致水分含量存在周期性波动,使去除函数发生周期时变,进而影响加工质量与精度。本研究建立了磁流变液循环系统的传递函数模型,开展了系统特性分析,并据此设计了基于全格式动态线性化的无模型自适应控制算法,该算法能够实现非线性系统的参数自适应控制,有效抑制因时变扰动和时延引起的水分波动,为抛光过程中水分含量的稳定控制提供了一种简单有效、适用性强的控制策略。实验结果显示,采用FFDL-MFAC控制算法时,磁流变液水分波动的峰谷值(Peak-valley Value,PV)仅为0.06%,相较于使用PID减少了40%,误差绝对值的积分(Integral value of Absolute Er‐ror,IAE)减少了58.1%。有效提升了抛光过程中磁流变液水分含量的稳定性。展开更多
文摘Describes a computer controlled polishing machine utilizing a small polisher with specified movement to figure optical surfces having strict dimensional requirements. The system is especially applicable in figuring aspherical surfaces, beginning with the best fit sphere if the departure from the desired surface is not large. An interferometric measuring system is desiigned to form a closed loop control during processing.
文摘In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed, and a possible solution is given. The two mirrors have been polished by means of CCOS, and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer, and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors.
基金supported by National Natural Science Foundation of China(Grant No.51005184)National Science and Technology Major Project of Ministry of Science and Technology of China(Grant No.2009ZX04014-053)
文摘The existing methods for blade polishing mainly focus on robot polishing and manual grinding.Due to the difficulty in high-precision control of the polishing force,the blade surface precision is very low in robot polishing,in particular,quality of the inlet and exhaust edges can not satisfy the processing requirements.Manual grinding has low efficiency,high labor intensity and unstable processing quality,moreover,the polished surface is vulnerable to burn,and the surface precision and integrity are difficult to ensure.In order to further improve the profile accuracy and surface quality,a pneumatic flexible polishing force-exerting mechanism is designed and a dual-mode switching composite adaptive control(DSCAC) strategy is proposed,which combines Bang-Bang control and model reference adaptive control based on fuzzy neural network(MRACFNN) together.By the mode decision-making mechanism,Bang-Bang control is used to track the control command signal quickly when the actual polishing force is far away from the target value,and MRACFNN is utilized in smaller error ranges to improve the system robustness and control precision.Based on the mathematical model of the force-exerting mechanism,simulation analysis is implemented on DSCAC.Simulation results show that the output polishing force can better track the given signal.Finally,the blade polishing experiments are carried out on the designed polishing equipment.Experimental results show that DSCAC can effectively mitigate the influence of gas compressibility,valve dead-time effect,valve nonlinear flow,cylinder friction,measurement noise and other interference on the control precision of polishing force,which has high control precision,strong robustness,strong anti-interference ability and other advantages compared with MRACFNN.The proposed research achieves high-precision control of the polishing force,effectively improves the blade machining precision and surface consistency,and significantly reduces the surface roughness.
基金Science and Technology Projects of Shenzhen(Grant No.JCYJ20180306172924636).
文摘With the increasing demand for high-precision optical components,bonnet polishing technology is increasingly being used in the polishing process of optical components owing to its high removal efficiency and high surface accuracy.However,it is expensive and difficult to implement dedicated bonnet polishing machine tools,and their processing range is limited.This research combines bonnet polishing technology with industrial robot-assisted processing technology to propose a robotic bonnet polishing control model for large-diameter axisymmetric aspherical optical components.Using the transformation relations of the spatial coordinate system,the transformation relations of the workpiece coordinate system,local coordinate system of the polishing point,and tool coordinate system of the bonnet sphere center are established to obtain the bonnet precession polishing motion model.The polishing trajectory of large-diameter axisymmetric aspherical components and the variation in the linkage angle difference were simulated by adding an efficiency-optimal control strategy to the motion model.The robot motion was simulated in Robostudio to verify the correctness of the precession motion model and control algorithm.Lastly,the robotic bonnet polishing system was successfully applied to the polishing process of the optical components.
基金National Natural Science Foundation of China(Grant No.U1913213)West Light Foundation of the Chinese Academy of Sciences(Grant No.XAB2016A10)Shanxi Provincial Key Research and Development Projects of China(Grant No.2018ZDXM-GY-105).
文摘Polishing plays an indispensable role in optical processing,especially for large-aperture optical reflective mirrors with freeform surfaces.Robotic polishing requires effective control of the contact force between the robot and the mirror during processing.In order to maintain a constant contact force during polishing,traditional polishing robots rely on closed-loop control of air cylinders,whose performances heavily rely on high-fidelity force sensing and real-time control.This paper proposes to employ a compliant constant-force mechanism in the end-effector of a polishing robot to passively maintain a constant force between the robot and the mirror,thus eliminating the requirement for force sensing and closed-loop control.The compliant constant force mechanism utilizing the second bending mode of fixed-guided compliant beams is adopted and elaborated for the passive end-effector.An end-effector providing a constant contact force of 40 N is designed and prototyped.The polishing experiment shows that the passive constant-force end-effector provides stable contact force between the robot and the mirror with fluctuation within 3.43 N,and achieves RMS(Root Mean Square)lower thanλ/10(λ=632.8 nm)of the polished surface of the largeaperture optical reflective mirror.It is concluded that the constant-force compliant mechanism provides a low-cost and reliable solution for force control in robotic polishing.
基金The authors would like to acknowledge support from the National Natural Science Foundation of China(51875313 and 51705013)the Open Foundation of the State Key Laboratory of Tribology&Institute of Manufacturing Engineering(SKLT2019C09).
文摘This paper proposes a scanner–stage synchronized approach emphasizing a novel control structure for the laser polishing of Inconel 718 components manufactured by selective laser melting in order to address increasing demands for high surface quality in metal additive manufacturing.The proposed synchronized control system is composed of a motion decomposition module and an error synthesis module.The experimental results show that stitching errors can be avoided thanks to continuous motion during laser processing.Moreover,in comparison with the existing step-scan method,the processing efficiency of the proposed method is improved by 38.22%and the surface quality of the laser-polished area is significantly enhanced due to a more homogeneous distribution of the laser energy during the material phase change.The proposed synchronized system paves the way for high-speed,high-precision,and large-area laser material processing without stitching errors.
文摘磁流变抛光是一种去除效率稳定、无亚表面损伤的超精密加工工艺,然而,在抛光过程中,磁流变液的水分损失会改变抛光工具的特性,从而影响去除函数的稳定性。现有的水分控制策略受到磁流变液循环系统大时延、时变扰动的影响,导致水分含量存在周期性波动,使去除函数发生周期时变,进而影响加工质量与精度。本研究建立了磁流变液循环系统的传递函数模型,开展了系统特性分析,并据此设计了基于全格式动态线性化的无模型自适应控制算法,该算法能够实现非线性系统的参数自适应控制,有效抑制因时变扰动和时延引起的水分波动,为抛光过程中水分含量的稳定控制提供了一种简单有效、适用性强的控制策略。实验结果显示,采用FFDL-MFAC控制算法时,磁流变液水分波动的峰谷值(Peak-valley Value,PV)仅为0.06%,相较于使用PID减少了40%,误差绝对值的积分(Integral value of Absolute Er‐ror,IAE)减少了58.1%。有效提升了抛光过程中磁流变液水分含量的稳定性。