A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is propos...A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in: a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm(RMS) error of tracking a circular trajectory.展开更多
基金supported by Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry(Grant No.20121028120)the National Natural Science Foundation of China(Grant No.61327003)+4 种基金the Open Foundation of the State Key Laboratory of Fluid Power andMechatronic Systems(Grant No.GZKF-201413)the Fundamental Research Funds of Shandong University(Grant No.2015JC034)the National Key Basic Research Program of China(Grant No.2015CB059900)Beijing Natural Science Foundation(Grant No.3162019)the Fundamental Research Funds of Beihang University(Grant No.74003401)
文摘A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in: a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm(RMS) error of tracking a circular trajectory.
