We report a non-destructive characterization of planar two-dimensional （2D） photonic crystals （PhCs） made in silicon on insulator （SOI） wafers using ellipsometric or Fourier transformed infrared （FTIR） spectro...We report a non-destructive characterization of planar two-dimensional （2D） photonic crystals （PhCs） made in silicon on insulator （SOI） wafers using ellipsometric or Fourier transformed infrared （FTIR） spectroscope. At large wavelengths, devices behave as homogeneous isotropic materials defined by an effective filling factor. The experimental results related to the PhC limited dimensions confirm this characterization.展开更多
文摘We report a non-destructive characterization of planar two-dimensional （2D） photonic crystals （PhCs） made in silicon on insulator （SOI） wafers using ellipsometric or Fourier transformed infrared （FTIR） spectroscope. At large wavelengths, devices behave as homogeneous isotropic materials defined by an effective filling factor. The experimental results related to the PhC limited dimensions confirm this characterization.
