采用自主研发的5 k W不锈钢谐振腔式MPCVD设备,在Ar/H2/CH4气氛下,保持总气压与CH4气流量不变,研究了不同Ar/H2比例对单晶金刚石生长速度和晶体质量的影响。通过拉曼光谱与高分辨率XRD摇摆曲线,从生长速度与生长质量两点对所得样品进行...采用自主研发的5 k W不锈钢谐振腔式MPCVD设备,在Ar/H2/CH4气氛下,保持总气压与CH4气流量不变,研究了不同Ar/H2比例对单晶金刚石生长速度和晶体质量的影响。通过拉曼光谱与高分辨率XRD摇摆曲线,从生长速度与生长质量两点对所得样品进行分析。结果表明,适量Ar的存在能够显著提高单晶金刚石的生长速度,并且不损害金刚石的晶体质量。当Ar/H2=30%时,生长速度最高,为35μm/h。随着Ar/H2比例的进一步增加,单晶金刚石的结晶质量会有所下降,Ar/H2比例过高则会严重破坏单晶金刚石的生长。展开更多
SINCE the discovery and subsequent macroscopic synthesis of fullerenes,due to their unusualstructure and widely potential applications,many theoretical and experimental scientists havedone a lot of work on fullerenes....SINCE the discovery and subsequent macroscopic synthesis of fullerenes,due to their unusualstructure and widely potential applications,many theoretical and experimental scientists havedone a lot of work on fullerenes.Fullerenes are the hollow cage molecules,the large,closedspheroidal shapes suggest that they could hold a variety of small guest atoms and/or展开更多
文摘采用自主研发的5 k W不锈钢谐振腔式MPCVD设备,在Ar/H2/CH4气氛下,保持总气压与CH4气流量不变,研究了不同Ar/H2比例对单晶金刚石生长速度和晶体质量的影响。通过拉曼光谱与高分辨率XRD摇摆曲线,从生长速度与生长质量两点对所得样品进行分析。结果表明,适量Ar的存在能够显著提高单晶金刚石的生长速度,并且不损害金刚石的晶体质量。当Ar/H2=30%时,生长速度最高,为35μm/h。随着Ar/H2比例的进一步增加,单晶金刚石的结晶质量会有所下降,Ar/H2比例过高则会严重破坏单晶金刚石的生长。
基金This work was supported by the National Natural Science Foundation of China (29473103) the Natural Sciences Foundation of Shandong Province (94B0715)
文摘SINCE the discovery and subsequent macroscopic synthesis of fullerenes,due to their unusualstructure and widely potential applications,many theoretical and experimental scientists havedone a lot of work on fullerenes.Fullerenes are the hollow cage molecules,the large,closedspheroidal shapes suggest that they could hold a variety of small guest atoms and/or
