Boron-doped hydrogenated microcrystalline Germanium （lac-Ge：H） films were deposited by hot-wire CVD. H2 diluted G-ell4 and B2H6 were used as precursors and the substrate temperature was kept at 300 ℃. The properti...Boron-doped hydrogenated microcrystalline Germanium （lac-Ge：H） films were deposited by hot-wire CVD. H2 diluted G-ell4 and B2H6 were used as precursors and the substrate temperature was kept at 300 ℃. The properties of the samples were analyzed by XRD, Raman spectroscopy, Fourier transform infrared spectrometer and Hall Effect measurement with Van der Pauw method. It is found that the films are partially crystallized, with crystalline fractions larger than 45% and grain sizes smaller than 50 nm. The B-doping can enhance the crystallization but reduce the grain sizes, and also enhance the preferential growth of Ge （220）. The conductivity of the films increases and tends to be saturated with increasing diborane-to-germane ratio RB2H6. All the Hall mobilities of the samples are larger than 3.8 cmZV-1·s-1. A high conductivity of展开更多
基金Funded by the National High-tech Research and Development Program of China(863 Program)(No.2006AA03Z219)Graduate Innovation Plan of Nanjing University of Aeronautics and Astronautics(No.BCXJ08-10)the National Natural Science Foundation of China(No.61306084)
文摘Boron-doped hydrogenated microcrystalline Germanium （lac-Ge：H） films were deposited by hot-wire CVD. H2 diluted G-ell4 and B2H6 were used as precursors and the substrate temperature was kept at 300 ℃. The properties of the samples were analyzed by XRD, Raman spectroscopy, Fourier transform infrared spectrometer and Hall Effect measurement with Van der Pauw method. It is found that the films are partially crystallized, with crystalline fractions larger than 45% and grain sizes smaller than 50 nm. The B-doping can enhance the crystallization but reduce the grain sizes, and also enhance the preferential growth of Ge （220）. The conductivity of the films increases and tends to be saturated with increasing diborane-to-germane ratio RB2H6. All the Hall mobilities of the samples are larger than 3.8 cmZV-1·s-1. A high conductivity of
