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A deformation measurement method based on surface texture information of rocks and its application
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作者 Yanbo Zhang Xin Han +4 位作者 Peng Liang Xulong Yao Qun Li Guangyuan Yu Qi Wang 《International Journal of Mining Science and Technology》 SCIE EI CAS CSCD 2023年第9期1117-1130,共14页
Users of the digital image correlation method are faced with the problem of poor operability,low repeatability,and lack of standardized specifications for spraying speckles.To solve the problem,the research proposed a... Users of the digital image correlation method are faced with the problem of poor operability,low repeatability,and lack of standardized specifications for spraying speckles.To solve the problem,the research proposed a rock deformation measurement method that obviates the need to spray speckles.A local binary model was established by using the local binary pattern(LBP)operator based on deep texture features on rock surfaces.The resulting LBP digital speckle pattern can substitute artificial speckle patterns and demonstrates high quality and strong applicability.Based on the LBP digital speckle pattern,the target tracking algorithm was employed to achieve non-contact measurement of the dynamic displacements of rocks.The feasibility and effectiveness of the algorithm in practical application were verified by conducting shear tests on granite and siltstone.Test results show that the deformation characteristics in the displacement nephograms are in line with the measured data pertaining to rock fracturing and conform to the basic characteristics of the shear failure of rocks.The deformation measurement method based on surface texture information can realize non-contact displacement measurement of rocks under conditions without speckles:this obviates the influence of the quality of sprayed speckles on the accuracy of the measurement of deformation. 展开更多
关键词 deformation measurement Texture information Digital speckle Local binary model Target tracking algorithm
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Videometric research on deformation measurement of large-scale wind turbine blades 被引量:5
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作者 Xiangyi Sun,Yun Yuan,~(a))Zhaokun Zhu,Xiaohu Zhang,and Qifeng Yu College of Aerospace and Materials Engineering,National University of Defense Technology,Changsha 410073, Hunan,China 《Theoretical & Applied Mechanics Letters》 CAS 2011年第1期22-24,共3页
Utilization of wind energy is a promising way to generate power,and wind turbine blades play a key role in collecting the wind energy effectively.This paper attempts to measure the deformation parameter of wind turbin... Utilization of wind energy is a promising way to generate power,and wind turbine blades play a key role in collecting the wind energy effectively.This paper attempts to measure the deformation parameter of wind turbine blades in mechanics experiments using a videometric method. In view that the blades experience small buckling deformation and large integral deformation simultaneously, we proposed a parallel network measurement(PNM) method including the key techniques such as camera network construction,camera calibration,distortion correction,the semi-automatic high-precision extraction of targets,coordinate systems unification,and bundle adjustment,etc. The relatively convenient construction method of the measuring system can provide an abundant measuring content,a wide measuring range and post processing.The experimental results show that the accuracy of the integral deformation measurement is higher than 0.5 mm and that of the buckling deformation measurement higher than 0.1mm. 展开更多
关键词 VIDEOMETRICS deformation measurement wind turbine blades LARGE-SCALE integral deformation buckling deformation
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Bam earthquake: Surface deformation measurement using radar interferometry
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作者 夏耶 《Acta Seismologica Sinica(English Edition)》 CSCD 2005年第4期451-459,500,共10页
On the 26th December 2003 an earthquake with MW=6.5 shook a large area of the Kerman Province in Iran. The epicenter of the devastating earthquake was located near the city of Bam. This paper described the application... On the 26th December 2003 an earthquake with MW=6.5 shook a large area of the Kerman Province in Iran. The epicenter of the devastating earthquake was located near the city of Bam. This paper described the application of differential synthetic aperture radar interferometry (D-INSAR) and ENVISAT ASAR data to map the coseismic surface deformation caused by the Bam earthquake including the interferometric data processing and results in detail. Based on the difference in the coherence images before and after the event and edge search of the deforma- tion field, a new fault ruptured on the surface was detected and used as a data source for parameter extraction of a theoretical seismic modeling. The simulated deformation field from the model perfectly coincides with the result derived from the SAR interferometric measurement. 展开更多
关键词 microwave remote sensing SAR interferometry EARTHQUAKE deformation measurement
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Application of 3D Projection Profilometry in the High Speed Impaction Surface Deformation Measurement Research
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作者 Eryi Hu 《Journal of Signal and Information Processing》 2020年第4期103-115,共13页
In order to study the strength of the composite material plate problems, need to adopt a nondestructive testing method to obtain the specimen surface under the effect of high-speed impact regularity of shape. The proj... In order to study the strength of the composite material plate problems, need to adopt a nondestructive testing method to obtain the specimen surface under the effect of high-speed impact regularity of shape. The projection profilometry was used to measure the surface profile or the full field deformation. Furtherly, by using the Fourier transform algorithm, there is only one frame of captured image</span><span style="font-family:Verdana;"> which</span><span style="font-family:Verdana;"> is needed in the measurement, so that it can be introduced into the high speed impaction procedure measurement. An experimental system, which was contained with an impact setup and the projection profilometry measurement part, was constructed for the impaction action characteristic research. The metallic impact object can be launched by a gas gun or a spin fan, respectively. The detected object </span><span style="font-family:Verdana;">is</span><span style="font-family:Verdana;"> manufactured by composite materials. In order to increase the surface deformation measurement accuracy, the calibration method and the error was discussed with different calibration specimen. And then, the proposed profilometry measurement method is proved by the gas gun and spin fan projectile test. The surface deformation of the manufactured composite plates and fan case are measured in the impaction procedure. So that the impact action details can be described much more clearly than the traditional video monitoring method. 展开更多
关键词 Projection Profilometry Fourier Transform Algorithm deformation measurement Impaction Monitoring
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Macro-Analysis on Across-Fault Crustal Deformation Measurement Data Along the Northern Edge of the Qinghai-Xizang Block
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作者 Zhao Zhencai and Chen BingThe Second Crustal Deformation Monitoring Center,SSB,Xi’an 710054,China 《Earthquake Research in China》 1997年第2期35-43,共9页
Based on the arrangement of the across-fault measurement data along the northern edge of the Qinghai-Xizang block,we divide the deformation into different types and probe the nature of various fault movements based on... Based on the arrangement of the across-fault measurement data along the northern edge of the Qinghai-Xizang block,we divide the deformation into different types and probe the nature of various fault movements based on these types.The recent situation of tectonic movement of main structural belts and seismicity in this area are expounded.From the above,it is concluded that across-fault measurement can reflect not only the conditions of fault movement nearby but also the change of regional stress fields; not only is this a method to obtain regional seismogenic information and to conduct short-term prediction but it is also involved with large scale space-time prediction of moderate and strong earthquakes on the basis of the macro characteristics of fractures. 展开更多
关键词 Macro-Analysis on Across-Fault Crustal deformation measurement Data Along the Northern Edge of the Qinghai-Xizang Block EDGE
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New speckle pattern interferometry for precise in situ deformation measurements
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作者 章如月 Yu Fu 缪泓 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第1期34-40,共7页
A new electronic speckle pattern interferometry method is proposed to realize in situ deformation measurements.The feature of the method is the combination of a high-speed camera and multiple laser Doppler vibrometers... A new electronic speckle pattern interferometry method is proposed to realize in situ deformation measurements.The feature of the method is the combination of a high-speed camera and multiple laser Doppler vibrometers(LDVs)for synchronous measurements.The high-speed camera is used to record and select effective interferograms,while the LDVs are used to measure the rigid body displacement caused by vibrations.A series of effective interferograms with known shifted phase values are obtained to calculate the deformation phase.The experimental results show that the method performs well in measuring static and dynamic deformations with high accuracy in vibrating environments. 展开更多
关键词 speckle pattern interferometry laser Doppler vibrometers in situ deformation measurements
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Mirror-assisted multi-view high-speed digital image correlation for dual-surface dynamic deformation measurement 被引量:1
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作者 XIE RuiLi CHEN Bin PAN Bing 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2023年第3期807-820,共14页
Based on the recently proposed mirror-assisted multi-view digital image correlation(MV-DIC),we establish a cost-effective and easy-to-implement mirror-assisted multi-view high-speed digital image correlation(MVHS-DIC)... Based on the recently proposed mirror-assisted multi-view digital image correlation(MV-DIC),we establish a cost-effective and easy-to-implement mirror-assisted multi-view high-speed digital image correlation(MVHS-DIC)method and explore its applications for dual-surface full-field dynamic deformation measurement.In contrast to the general requirement of four expensive high-speed cameras for dual-surface dynamic deformation field measurement,the established mirror-assisted MVHS-DIC halves the cost by involving only two synchronized high-speed cameras and two planar mirrors.The two synchronized high-speed cameras can dynamically measure the front and rear surfaces of a sheet sample simultaneously through the reflection of the two mirrors.The results on the two surfaces are then transformed into the same coordinate system,leading to the required dual-surface 3D dynamical deformation fields.The effectiveness and accuracy of the established system are validated through modal tests of a cantilever aluminum sheet.The vibration measurement of a drum and dual-surface transient deformation measurement of a smartphone in the drop-collision process further prove its practicability.Benefiting from the attractive advantages of multi-view dynamic deformation measurement in a cost-efficient way,the established mirror-assisted MVHS-DIC is expected to encourage more comprehensive dynamic mechanical behavior characterization of regular-sized materials and structures in vibration and impact engineering fields. 展开更多
关键词 multi-view high-speed digital image correlation dual-surface dynamic deformation measurement
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A multi-sensor-based distributed real-time measurement system for glacier deformation
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作者 DONG Han-chuan LIU Shuang +4 位作者 PANG Li-li TAO Zhi-gang FANG Li-de ZHANG Zhong-hua LI Xiao-ting 《Journal of Mountain Science》 SCIE CSCD 2023年第10期2913-2927,共15页
Glacier disasters occur frequently in alpine regions around the world,but the current conventional geological disaster measurement technology cannot be directly used for glacier disaster measurement.Hence,in this stud... Glacier disasters occur frequently in alpine regions around the world,but the current conventional geological disaster measurement technology cannot be directly used for glacier disaster measurement.Hence,in this study,a distributed multi-sensor measurement system for glacier deformation was established by integrating piezoelectric sensing,coded sensing,attitude sensing technology and wireless communication technology.The traditional Modbus protocol was optimized to solve the problem of data identification confusion of different acquisition nodes.Through indoor wireless transmission,adaptive performance analysis,error measurement experiment and landslide simulation experiment,the performance of the measurement system was analyzed and evaluated.Using unmanned aerial vehicle technology,the reliability and effectiveness of the measurement system were verified on the site of Galongla glacier in southeastern Tibet,China.The results show that the mean absolute percentage errors were only 1.13%and 2.09%for the displacement and temperature,respectively.The distributed glacier deformation real-time measurement system provides a new means for the assessment of the development process of glacier disasters and disaster prevention and mitigation. 展开更多
关键词 Glacier disasters Distributed deformation measurement MULTI-SENSOR REAL-TIME LoRa Data adaptive.
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High-accuracy 3-D deformation measurement method with an improved structured-light principle
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作者 GUO QinFeng WANG JinJun 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2023年第12期3450-3461,共12页
In this paper,a high-accuracy 3-D deformation measurement(HADM)method with structured light is proposed and applied to wing deformation measurement in wind tunnel experiments.The present method employs an arbitrarily ... In this paper,a high-accuracy 3-D deformation measurement(HADM)method with structured light is proposed and applied to wing deformation measurement in wind tunnel experiments.The present method employs an arbitrarily arranged fringe projector and a perpendicularly placed camera.The exact phase-height mapping using the phase differences of the projected sinusoidal fringe patterns,as well as the spatial distribution of the fringe,is accurately derived.It not only presents high feasibility but also reduces systemic uncertainties arising from deviations between the ideal model and the real-world conditions.Meanwhile,a dynamic boundary process algorithm is proposed to reduce the measurement uncertainty caused by fringe fracture near the object boundary.It is calibrated that a high accuracy with the average measurement uncertainty of 0.0237 mm is achieved,which is less than 0.01%of the side length of 25 cm of the field of view.In the wind tunnel experiments,the 3-D deformations of the elastic wing,particularly the key geometric parameters such as wing tip position,angle of attack,and dihedral angle,are well reconstructed to provide an in-depth explanation for the aerodynamic characteristics. 展开更多
关键词 3-D deformation measurement wing deformation high accuracy structured light wind tunnel tests
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Deformation Measurement of Glass Structure Using FBG Sensor 被引量:5
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作者 Bin LIU Shihai ZHANG Jianping HE 《Photonic Sensors》 SCIE EI CSCD 2019年第4期367-375,共9页
Glass has been widely used as an important component in structures such as reflection glass curtainwalls,high speed trains,and landscape glass bridges with advantages of transparent and easy to clean,which are exposed... Glass has been widely used as an important component in structures such as reflection glass curtainwalls,high speed trains,and landscape glass bridges with advantages of transparent and easy to clean,which are exposed to extreme weather conditions and external loads.Over time,these factors can lead to a damage of glass.So the health status of glass structure is critical,which should be routinely monitored to improve safety and provide reliable maintenance strategy.In this paper,fiber Bragg grating(FBG)sensors are used to monitor glass damage based on the fact that the main components of both the optical fiber and the glass are silica,which hints that both optical fiber and glass have the similar mechanical properties.Furthermore,the diameter of FBG installed on the glass structure is small,which has little effect on the beauty of glass.In order to validate the feasibility of the damage monitoring method,one common glass panel model with two-side fixations is loaded impact and static loads respectively,on the upper and lower surfaces of which four FBG sensors and two resistance strain gages are installed.A comparison study among the measured strains from the FBG sensors,those from the resistance strain gages,and those calculated from finite element model(FEM)analysis is conducted and the result obtained with experiments agrees with the element result.Test results show that the FBG sensors can effectively measure the glass deformation or damage under the impact and static load. 展开更多
关键词 FBG sensor deformation measurement glass structure safety monitoring
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Bridge Continuous Deformation Measurement Technology Based on Fiber Optic Gyro 被引量:4
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作者 Weibing GAN Wenbin HU +3 位作者 Fang LIU Jianguang TANG Sheng LI Yan YANG 《Photonic Sensors》 SCIE EI CAS CSCD 2016年第1期71-77,共7页
Bridge is an important part of modem transportation systems and deformation is a key index for bridge's safety evaluation. To achieve the long span bridge curve measurement rapidly and timely and accurately locate th... Bridge is an important part of modem transportation systems and deformation is a key index for bridge's safety evaluation. To achieve the long span bridge curve measurement rapidly and timely and accurately locate the bridge maximum deformation, the continuous deformation measurement system (CDMS) based on inertial platform is presented and validated in this paper. Firstly, based on various bridge deformation measurement methods, the method of deformation measurement based on the fiber optic gyro (FOG) is introduced. Secondly, the basic measurement principle based on FOG is presented and the continuous curve trajectory is derived by the formula. Then the measurement accuracy is analyzed in theory and the relevant factors are presented to ensure the measurement accuracy. Finally, the deformation measurement experiments are conducted on a bridge across the Yangtze River. Experimental results show that the presented deformation measurement method is feasible, practical, and reliable; the system can accurately and quickly locate the maximum deformation and has extensive and broad application prospects. 展开更多
关键词 Long span bridge continuous deformation measurement FOG structural safety
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Simultaneous 2D in-plane deformation measurement using electronic speckle pattern interferometry with double phase modulations 被引量:1
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作者 朱云龙 Julien Vaillant +3 位作者 Guillaume Montay Manuel Fran?ois Yassine Hadjar Aurélien Bruyant 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第7期40-44,共5页
Electronic speckle pattern interferometry(ESPI) and digital speckle pattern interferometry are wellestablished non-contact measurement methods. They have been widely used to carry out precise deformation mapping. Ho... Electronic speckle pattern interferometry(ESPI) and digital speckle pattern interferometry are wellestablished non-contact measurement methods. They have been widely used to carry out precise deformation mapping. However, the simultaneous two-dimensional(2D) or three-dimensional(3D) deformation measurements using ESPI with phase shifting usually involve complicated and slow equipment. In this Letter, we solve these issues by proposing a modified ESPI system based on double phase modulations with only one laser and one camera. In-plane normal and shear strains are obtained with good quality. This system can also be developed to measure 3D deformation, and it has the potential to carry out faster measurements with a highspeed camera. 展开更多
关键词 Simultaneous 2D in-plane deformation measurement using electronic speckle pattern interferometry with double phase modulations
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Dynamic mechanism for horizontal deformation in part of North China area——Three-dimensional finite-element calculation and analysis of results from GPS remeasurement 被引量:1
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作者 黄立人 马青 +2 位作者 郭良迁 宋惠珍 刘洁 《Acta Seismologica Sinica(English Edition)》 CSCD 1999年第1期55-62,共8页
A deformation monitoring network that covers part of North China area and takes the Beijing region as the center was measured for two times with high precision GPS in 1995 and 1996 respectively. The results from reme... A deformation monitoring network that covers part of North China area and takes the Beijing region as the center was measured for two times with high precision GPS in 1995 and 1996 respectively. The results from remeasurement indicate that present horizontal movement in the monitored area is characterized by relative motion among several main tectonic blocks. Considering the spatial distribution features obtained from geological survey and results on seismic wave and activity in the area, and stratified features of crustal medium in depth, a three dimensional finite element medium model is designed. And under the conditions of taking and not taking the action manner of the background stress field in the studied area into account, the relative motion between tectonic blocks is calculated and modeled. Based on the results from the analysis and calculations the dynamic mechanism for the present horizontal deformation in the area is discussed. 展开更多
关键词 GPS measurement horizontal deformation three dimensional finite element
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Measuring 3D face deformations from RGB images of expression rehabilitation exercises
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作者 Claudio FERRARI Stefano BERRETTI +1 位作者 Pietro PALA Alberto Del BIMBO 《Virtual Reality & Intelligent Hardware》 2022年第4期306-323,共18页
Background The accurate(quantitative)analysis of 3D face deformation is a problem of increasing interest in many applications.In particular,defining a 3D model of the face deformation into a 2D target image to capture... Background The accurate(quantitative)analysis of 3D face deformation is a problem of increasing interest in many applications.In particular,defining a 3D model of the face deformation into a 2D target image to capture local and asymmetric deformations remains a challenge in existing literature.A measure of such local deformations may be a relevant index for monitoring the rehabilitation exercises of patients suffering from Par-kinson’s or Alzheimer’s disease or those recovering from a stroke.Methods In this paper,a complete framework that allows the construction of a 3D morphable shape model(3DMM)of the face is presented for fitting to a target RGB image.The model has the specific characteristic of being based on localized components of deformation.The fitting transformation is performed from 3D to 2D and guided by the correspondence between landmarks detected in the target image and those manually annotated on the average 3DMM.The fitting also has the distinction of being performed in two steps to disentangle face deformations related to the identity of the target subject from those induced by facial actions.Results The method was experimentally validated using the MICC-3D dataset,which includes 11 subjects.Each subject was imaged in one neutral pose and while performing 18 facial actions that deform the face in localized and asymmetric ways.For each acquisition,3DMM was fit to an RGB frame whereby,from the apex facial action and the neutral frame,the extent of the deformation was computed.The results indicate that the proposed approach can accurately capture face deformation,even localized and asymmetric deformations.Conclusion The proposed framework demonstrated that it is possible to measure deformations of a reconstructed 3D face model to monitor facial actions performed in response to a set of targets.Interestingly,these results were obtained using only RGB targets,without the need for 3D scans captured with costly devices.This paves the way for the use of the proposed tool in remote medical rehabilitation monitoring. 展开更多
关键词 3D morphable face model Sparse and locally coherent 3DMM components Local and asymmetric Face deformations Face rehabilitation Face deformation measure
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DIGITAL SPECKLE CORRELATION METHOD IMPROVED BY GENETIC ALGORITHM 被引量:27
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作者 MaShaopeng JillGuanchang 《Acta Mechanica Solida Sinica》 SCIE EI 2003年第4期366-373,共8页
The digital speckle correlation method is an important optical metrology for sur- face displacement and strain measurement.With this technique,the whole field deformation in- formation can be obtained by tracking the ... The digital speckle correlation method is an important optical metrology for sur- face displacement and strain measurement.With this technique,the whole field deformation in- formation can be obtained by tracking the geometric points on the speckle images based on a correlation-matching search technique.However,general search techniques suffer from great com- putational complexity in the processing of speckle images with large deformation and the large random errors in the processing of images of bad quality.In this paper,an advanced approach based on genetic algorithms (GA) for correlation-matching search is developed.Benefiting from the abilities of global optimum and parallelism searching of GA,this new approach can complete the correlation-matching search with less computational consumption and at high accuracy.Two experimental results from the simulated speckle images have proved the efficiency of the new approach. 展开更多
关键词 digital speckle correlation method genetic algorithm deformation measurement
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Variability on Raman Shift to Stress Coefficient of Porous Silicon 被引量:3
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作者 雷振坤 亢一澜 +1 位作者 岑皓 胡明 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第6期1623-1626,共4页
Porous silicon film is a capillary-like medium, which is able to reveal different meso-elastic modulus with porosity. During the preparation of porous silicon samples, the capillary force is a non-classic force relate... Porous silicon film is a capillary-like medium, which is able to reveal different meso-elastic modulus with porosity. During the preparation of porous silicon samples, the capillary force is a non-classic force related to the liquid evaporation which directly influences the evolution of residual stress. In this study, a non-linear relation of Raman shift to stress coefficient and the porosity is obtained from the elastic modulus measured with nano-indentation by Bellet et al. [J. Appl. Phys. 60 (1996) 3772] Dynamic capillarity during the drying process of porous silicon is investigated using micro-Raman spectroscopy, and the results reveal that the residual stress resulted from the capillarity increased rapidly. Indeed, the dynamic capillarity has a close relationship with a great deal of micro-pore structures of the porous silicon. 展开更多
关键词 SPECKLE PATTERN INTERFEROMETRY X-RAY-DIFFRACTION RESIDUAL-STRESS deformation measureMENT SPECTROSCOPY MODULUS
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Optimization of the forearm angle for arm wrestling using multi-camera stereo digital image correlation: A preliminary study 被引量:1
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作者 Zixiang Tong Xinxing Shao +1 位作者 Zhenning Chen Xiaoyuan He 《Theoretical & Applied Mechanics Letters》 CSCD 2021年第6期336-342,共7页
This study analyzes the function of different muscles during arm wrestling and proposes a method to analyze the optimal forearm angle for professional arm wrestlers.We built a professional arm-wrestling platform to me... This study analyzes the function of different muscles during arm wrestling and proposes a method to analyze the optimal forearm angle for professional arm wrestlers.We built a professional arm-wrestling platform to measure the shape and deformation of the skin at the biceps brachii of a volunteer in vivo during arm wrestling.We observed the banding phenomenon of arm skin strain during muscle contraction and developed a model to evaluate the moment provided by the biceps brachii.According to this model,the strain field of the area of interest on the skin was measured,and the forearm angles most favorable and unfavorable to the work of the biceps brachii were analyzed.This study demonstrates the considerable potential of applying DIC and its extension method to the in vivo measurement of human skin and facilitates the use of the in vivo measurement of skin deformation in various sports in the future. 展开更多
关键词 Arm wrestling Skin deformation measurement Multi-camera stereo digital image correlation Close-range photogrammetry Forearm angle
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Electron Moirémethod
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作者 Satoshi Kishimoto 《Theoretical & Applied Mechanics Letters》 CAS 2012年第1期1-7,共7页
It is very important to measure local deformations for an in-depth understanding of mechanical properties and fracture mechanism of structural and functional materials. In this paper, different types of model grid fab... It is very important to measure local deformations for an in-depth understanding of mechanical properties and fracture mechanism of structural and functional materials. In this paper, different types of model grid fabrication methods and many types of electron Moire methods using an electron beam drawing system, a scanning electron microscope or a focus ion beam are reported, together with their applications in the measurement of deformations occurring in various engineerings and materials science research. 展开更多
关键词 electron Moire method micro and nano lithography electron beam scan secondary electron micro deformation measurement
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Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry(Invited Paper) 被引量:1
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作者 G. Pedrini J. Gaspar +1 位作者 O. Paul W. Osten 《Chinese Optics Letters》 SCIE EI CAS CSCD 2009年第12期1109-1112,共4页
The reliability of microsystems is an important issue and for their quality inspection, it is necessary to know the displacements or deformations due to the applied mechanical, thermal, or electrostatic loads. We show... The reliability of microsystems is an important issue and for their quality inspection, it is necessary to know the displacements or deformations due to the applied mechanical, thermal, or electrostatic loads. We show how interferometrical techniques like digital holography and speckle interferometry can be used for the measurement of in plane deformations of microsystems with nanometric accuracy and we give a description of the measurement uncertainties. 展开更多
关键词 Invited Paper measurement of in-plane deformations of microsystems by digital holography and speckle interferometry
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Measurement of out-of-plane deformation of curved objects with digital speckle pattern interferometry 被引量:1
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作者 李鹏飞 蔡萍 +2 位作者 隆军 刘持越 闫浩 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第11期40-46,共7页
Digital speckle pattern interferometry (DSPI) is a high-precision deformation t technique for planar objects. However, for curved objects, the three-dimensional (3D) shape information is needed in order to obtain ... Digital speckle pattern interferometry (DSPI) is a high-precision deformation t technique for planar objects. However, for curved objects, the three-dimensional (3D) shape information is needed in order to obtain correct deformation measurement in DSPI. Thus, combined shape and deformation measurement techniques of DSPI have been proposed. However, the current techniques are either complex in setup or complicated in operation. Furthermore, the operations of some techniques are too slow for real-time measurement. In this work, we propose a DSPI technique for both 3D shape and out-of-plane deformation measurement. Compared with current techniques, the proposed technique is simple in both setup and operation and is capable of fast deformation measurement. Theoretical analysis and experiments are performed. For a cylinder surface with an arch height of 9 mm, the error of out-of-plane deformation measurement is less than 0.15 μm. The effectiveness of the proposed scheme is verified. 展开更多
关键词 measurement of out-of-plane deformation of curved objects with digital speckle pattern interferometry
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