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Influence of annealing temperature on passivation performance of thermal atomic layer deposition Al_2O_3 films 被引量:2
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作者 张祥 刘邦武 +2 位作者 赵彦 李超波 夏洋 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第12期426-430,共5页
Chemical and field-effect passivation of atomic layer deposition (ALD) Al2O3 films are investigated, mainly by corona charging measurement. The interface structure and material properties are characterized by transm... Chemical and field-effect passivation of atomic layer deposition (ALD) Al2O3 films are investigated, mainly by corona charging measurement. The interface structure and material properties are characterized by transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS), respectively. Passivation performance is improved remarkably by annealing at temperatures of 450 ℃ and 500 ℃, while the improvement is quite weak at 600 ℃, which can be attributed to the poor quality of chemical passivation. An increase of fixed negative charge density in the films during annealing can be explained by the Al2O3/Si interface structural change. The Al–OH groups play an important role in chemical passivation, and the Al–OH concentration in an as-deposited film subsequently determines the passivation quality of that film when it is annealed, to a certain degree. 展开更多
关键词 annealing atomic layer deposition Al2O3 passivation performance
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Effects of Carbon Nanotubes by Electrophoretic Deposition on Interlaminar Properties of Two Dimensional Carbon/carbon Composites
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作者 黎云玉 GUO Lingjun +2 位作者 LI Hejun MA Haili 宋强 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第5期994-1000,共7页
Carbon nanotubes(CNTs) were deposited uniformly on carbon cloth by electrophoretic deposition(EPD). Thereafter, CNT-doped clothes were stacked and densified by pyrocarbon via chemical vapor infiltration to fabrica... Carbon nanotubes(CNTs) were deposited uniformly on carbon cloth by electrophoretic deposition(EPD). Thereafter, CNT-doped clothes were stacked and densified by pyrocarbon via chemical vapor infiltration to fabricate two-dimensional(2 D) carbon/carbon(C/C) composites. Effects of EPD CNTs on interlaminar shear performance and mode Ⅱ interlaminar fracture toughness(GⅡc) of 2 D C/C composites were investigated. Results showed that EPD CNTs were uniformly covered on carbon fibers, acting as a porous coating. Such a CNT coating can obviously enhance the interlaminar shear strength and GⅡc of 2 D C/C composites. With increaing EPD CNTs, the interlaminar shear strength and GⅡc of 2 D C/C composites increase greatly and then decrease, both of which run up to their maximum values, i e, 13.6 MPa and 436.0 J·m-2, when the content of EPD CNTs is 0.54 wt%, 2.27 and 1.45 times of the baseline. Such improvements in interlaminar performance of 2 D C/C composites are mainly beneficial from their increased cohesion of interlaminar matrix, which is caused not only by the direct reinforcing effect of EPD CNT network but also by the capacity of EPD CNTs to refine pyrocarbon matrix and induce multilayered microstructures that greatly increase the crack propagation resistance through "crack-blocking and-deflecting mechanisms". 展开更多
关键词 electrophoretic deposition carbon nanotube C/C composite interlaminar performance reinforcing mechanism
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Analysis of angular-selective performances of obliquely deposited birefringent thin film
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作者 侯永强 齐红基 +1 位作者 易葵 邵建达 《Chinese Optics Letters》 SCIE EI CAS CSCD 2013年第10期93-97,共5页
A slanted columnar TiO2 sculptured anisotropic thin film is prepared using the glancing angle deposition(GLAD) technique. We extend the inference regarding the optical properties of a uniaxial birefringent film based ... A slanted columnar TiO2 sculptured anisotropic thin film is prepared using the glancing angle deposition(GLAD) technique. We extend the inference regarding the optical properties of a uniaxial birefringent film based on theoretical analysis to include the more general case of a multilayer biaxial birefringent thin film, the optic axis of which is in the incident plane. We also investigate in detail the symmetrical angularselective transmittance performances of TiO2 biaxial anisotropic thin films for light incident at the same angle but coming from opposite sides of the surface normal. The tilted nanocolumn microstructures of the birefringent thin films induce optical anisotropy. The transmisson spectra for the p-polarized wave of TiO2 biaxial anisotropic thin film measured in the experiment almost overlap at the symmetrical oblique incidence at the ±θ 0 angles, which validates our theoretical derivation. 展开更多
关键词 Analysis of angular-selective performances of obliquely deposited birefringent thin film
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Penetration performance of W/Cu double-layer shaped charge liners 被引量:2
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作者 Wen-Jian Dong Jin-Xu Liu +3 位作者 Xing-Wang Cheng Shu-Kui Li Qing-He Zou Wen-Qi Guo 《Rare Metals》 SCIE EI CAS CSCD 2016年第2期184-191,共8页
Two kinds of W/Cu double-layer shaped charge liner(SCL) were prepared by chemical vapor deposition(CVD) combined with electroforming technique: A SCL with W inner layer and Cu outer layer, B SCL with Cu inner lay... Two kinds of W/Cu double-layer shaped charge liner(SCL) were prepared by chemical vapor deposition(CVD) combined with electroforming technique: A SCL with W inner layer and Cu outer layer, B SCL with Cu inner layer and W outer layer. The penetration properties of A and B SCLs were researched. The results show that the two SCLs can form continuous jet and the tip velocities of A and B jets are 7.4 and 6.3 km s^(-1), respectively. The kinetic energy density(5.3 9 1011 J m-3) of A jet tip increases by 194.4 %compared with that(1.8 9 1011 J m-3) of B jet tip. B jet,however, exhibits deeper penetration depth at the same experimental conditions. The chemical component and microstructure of the area nearby the ballistic perforation were researched. Component analysis shows that both the jets are formed only from inner layer metal. Microstructure analysis shows that martensite and intermetallic form around ballistic perforation penetrated by A SCL due to the intensive interaction between W jet and steel target. The two kinds of newly formed ultrahard phases also hinder the jet from penetrating target further. As a result of relatively alleviative interaction between Cu jet and target, only solid solution rather than ultrahard phases forms around ballistic perforation penetrated by B SCL. 展开更多
关键词 Shaped charge liner Jet Penetration performance Chemical vapor deposition Electroforming technique
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Growth of SiC as Binder to Adhere Diamond Particle and Tribological Properties of Diamond Particles Coated SiC 被引量:1
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作者 Shengjie Yu Zhaofeng Chen +3 位作者 Yang Wang Shuwei Hu Ruiying Luo Sheng Cui 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2015年第11期1133-1138,共6页
The purpose of this work was to grow SiC as binder to adhere diamond particles to graphite substrate by low pressure chemical vapor deposition (LPCVD) at 1100 ℃ and 100 Pa using methyltrichlorosilane (MTS: CH3Si... The purpose of this work was to grow SiC as binder to adhere diamond particles to graphite substrate by low pressure chemical vapor deposition (LPCVD) at 1100 ℃ and 100 Pa using methyltrichlorosilane (MTS: CH3SiCl3) as precursor. The composite coatings on graphite substrates were analyzed by various techniques. Results show that a dense SiC coating with a cloud-cluster shape was formed both on the diamond particles and the substrate after deposition, The thermal stress (290.6 MPa) strengthened the interfacial bonding between the diamond particle and the SiC coating, which is advantageous for the purpose of adhering diamond particles to graphite substrate. The applied load of sliding wear test was found to affect not only the friction coefficient, but also the wear surface morphology. With increasing loads, the asperity penetration was high and the friction coefficient decreased. 展开更多
关键词 Diamond particle LPCVD (low pressure chemical vapor deposition) SiC Tribological performance
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