Nano-scale gap filling and mechanism of deposit-etch-deposit process for phase-change material

Ge2Sb2Te5 gap filling is one of the key processes for phase-change random access memory manufacture. Physical vapor deposition is the mainstream method of Ge2Sb2Te5 film deposition due to its advantages of film quality, purity, and accurate composition control. However,the conventional physical vapor deposition process cannot meet the gap- filling requirement with the critical device dimension scaling down to 90 nm or below. In this study, we find that the deposit-etch-deposit process shows better gap-filling capability and scalability than the single-step deposition process, especially at the nano-scale critical dimension. The gap-filling mechanism of the deposit-etch-deposit process was briefly discussed. We also find that re-deposition of phase-change material from via the sidewall to via the bottom by argon ion bombardment during the etch step was a key ingredient for the final good gap filling. We achieve void-free gap filling of phase-change material on the 45-nm via the two-cycle deposit-etch-deposit process. We gain a rather comprehensive insight into the mechanism of deposit-etch-deposit process and propose a potential gap-filling solution for over 45-nm technology nodes for phase-change random access memory.

Depositional process of hyperpycnal flow deposits:A case study on Lower Cretaceous Sangyuan outcrop in the Luanping Basin,Northeast China

Sedimentary process research is of great significance for understanding the distribution and characteristics of sediments.Through the detailed observation and measurement of the Sangyuan outcrop in Luanping Basin,this paper studies the depositional process of the hyperpycnal flow deposits,and divides their depositional process into three phases,namely,acceleration,erosion and deceleration.In the acceleration phase,hyperpycnal flow begins to enter the basin nearby,and then speeds up gradually.Deposits developed in the acceleration phase are reverse.In addition,the original deposits become unstable and are taken away by hyperpycnal flows under the eroding force.As a result,there are a lot of mixture of red mud pebbles outside the basin and gray mud pebbles within the basin.In the erosion phase,the reverse deposits are eroded and become thinner or even disappear.Therefore,no reverse grading characteristic is found in the proximal major channel that is closer to the source,but it is still preserved in the middle branch channel that is far from the source.After entering the deceleration phase,normally grading deposits appear and cover previous deposits.The final deposits in the basin are special.Some are reverse,and others are normal.They are superimposed with each other under the action of hyperpycnal flow.The analysis of the Sangyuan outcrop demonstrates the sedimentary process and distribution of hyperpycnites,and reasonably explain the sedimentary characteristics of hyperpycnites.It is helpful to the prediction of oil and gas exploration targets in gravity flow deposits.

RESEARCH ON LASER DIRECT DEPOSITION PROCESS OF Ti-6Al-4V ALLOY

Laser direct deposition （LDD） of metallic components is an advanced technology of combining CAD/CAM （computer aided design/computer aided manufacturing）, high power laser, and rapid prototyping. This technology uses laser beam to melt the powders fed coaxiaUy into the molten pool by the laser beam to fabricate fuUy dense metallic components. The present article mainly studies the LDD of Ti-6Al-4V alloy, which can be used to fabricate aircraft components. The mechanical properties of the Ti-6Al-4V alloy, fabricated by LDD, are obtained using the tension test, and the oxygen content of used powders and deposited specimens are measured. In the present article, it can be seen that the mechanical properties obtained using this method are higher than the ones obtained by casting, and equal to those got by wrought anneal. One aircraft part has been made using the LDD process. Because of this aircraft part, with sophisticated shape, the effect of the laser scanning track on the internal soundness of the deposited part was discussed.

EXPERT OPTIMIZED CONTROL TECHNIQUE FOR ELECTROLYTIC DEPOSITION PROCESS OF HYDROMETALLURGY OF ZINC

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Characteristics of the subglacially-formed debris-rich chemical deposits and related subglacial processes of Qiangyong Glacier,Tibet

Subglacially-formed debris-rich chemical deposits were found both on bedrock surface and in bedrock crevice on the edge of Qiangyong Glacier, one of the continental glaciers in Tibet. Grain size distribution, internal structures and chemical components of the chemical deposits were analyzed. It can be inferred that the temperature of some part of the ice-bedrock interface is close to the melting point and there exists pressure melting water under Qiangyong Glacier. Debris, especially those from continental aerosols, can release Ca++ in the water. At the lee-side of obstacles on glacier bed the CO2 in the melting water might escape from the water and the melting water might refreeze due to the dramatically reduced pressure, making the enrichment and precipitation of CaCO3. The existence of subglacial melting water and the process of regelation under Qiangyong Glacier indicate that sliding could contribute some proportion to the entire movement of Qiangyong Glacier and it belongs to multiplex cold-temperate glaciers.

PROTOTYPE SURFACE MICRO- PRECISION IN FUSED DEPOSITION MODELING PROCESS

To aim at prototype parts fabricated with fused deposition modeling （FDM） process, the problems how to improve and enhance their surface micro-precision are studied. The producing mechanism of surface roughness is explained with three aspects concretely including the principle error of rapid prototyping （RP） process, the inherent characteristics of FDM process, and some mi- cro-scratches on the surface of the extruded fiber. Based on the micro-characters of section shape of the FDM prototype, a physical model reflecting the outer shape characters is abstracted. With the physical simplified and deduced, the evaluating equations of surface roughness are acquired. According to the FDM sample parts with special design for experimental measurement, the real surface roughness values of different inclined planes are obtained. And the measuring values of surface roughness are compared with the calculation values. Furthermore, the causes of surface roughness deviation between measuring values and calculation values are respectively analyzed and studied. With the references of analytic conclusions, the measuring values of the experimental part surface are revised, and the revised values nearly accord with the calculation values. Based on the influencing principles of FDM process parameters and special post processing of FDM prototype parts, some concrete measures are proposed to reduce the surface roughness of FDM parts, and the applying effects are better.

Effects of loose deposits on debris flow processes in the Aizi Valley, southwest China

Loose deposits, rainfall and topography are three key factors that triggering debris flows.However, few studies have investigated the effects of loose deposits on the whole debris flow process.On June 28, 2012, a catastrophic debris flow occurred in the Aizi Valley, resulting in 40 deaths.The Aizi Valley is located in the Lower Jinsha River,southwestern Sichuan Province, China. The Aizi Valley debris flow has been selected as a case for addressing loose deposits effects on the whole debris flow process through remote sensing, field investigation and field experiments. Remote sensing interpretation and laboratory experiments were used to obtain the distribution and characteristics of the loose deposits, respectively. A field experiment was conducted to explore the mechanics of slope debris flows, and another field investigation was conducted to obtain the processes of debris flow formation, movement and amplification. The results showed that loose deposits preparation, slope debris flow initiation,gully debris flow confluence and valley debris flow amplification were dominated by the loose deposits.Antecedent droughts and earthquake activities may have increased the potential for loose soil sources in the Aizi Valley, which laid the foundation for debris flow formation. Slope debris flow initiated under rainfall, and the increase in the water content as well as the pore water pressure of the loose deposits were the key factors affecting slope failure. The nine gully debris flows converged in the valley, and the peak discharge was amplified 3.3 times due to a blockage and outburst caused by a large boulder. The results may help in predicting and assessing regional debris flows in dry-hot and seismic-prone areas based on loose deposits, especially considering large boulders.

Lincang Superlarge Germanium Deposit in Yunnan Province,China: Sedimentation,Diagenesis,Hydrothermal Process and Mineralization

The mineralization is related closely to sedimentation, diagenesis and hydrothermal processes. In this paper, investigations are carried out on coal occurrence, maceral composition, inorganic minerals, trace elements and huminite reflectance. It is concluded that the source of Lincang superlarge deposit is mainly the muscovite granite in the west edge of the basin. During sedimentation, Ge (germanium) was leached out and entered the basin. Ge was adsorbed by lower organism and humic substances in water. Lincang lignite underwent three thermal processes: peatification, early diagenesis and hydrothermal transformation. During peatification, Ge was adsorbed or complexed by humic colloids. During early diagenesis, the Ge associated with humic acids was hard to mobilize or transport. Most of Ge entered the structure of huminite while a small amount of Ge was associated with residual humic acids as complex or humate. During hydrothermal transformation, the heated natural water or deep fluid from basement encountered the coal layer within tectonic weak zone. SO 2- 4 was reduced by coal organic matter. Pyrite and calcite formed. Hydrothermal process did not contribute significantly to mineralization.

Fluid Evolution and Ore-forming Processes of the Jiama Cu Deposit, Tibet： Evidence from Fluid Inclusions

The Jiama deposit is a large copper deposit in Tibet. Mineralization occurs in three different host rocks： skarn, hornfels and porphyry. A detailed fluid inclusion study was conducted for veins in the different host rocks to investigate the relationship between fluid evolution and ore-forming processes. Based on examination of cores from 36 drill holes, three types of veins （A, B and D） were identified in the porphyries, four types （I, II, III and IV） in the skarn, and three （a, b and c） in the hornfels. The crosscutting relationships of the veins and that of the host rocks suggest two hydrothermal stages, one early and one late stage. Fluid inclusions indicate that the Jiama hydrothermal fluid system underwent at least two episodes of fluid boiling. The first boiling event occurred during the early hydrothermal stage, as recorded by fluid inclusions hosted in type A veins in the porphyries, type a veins in the hornfels, and wollastonite in the skarns. This fluid boiling event was associated with relatively weak mineralization. The second boiling event occurred in the late hydrothermal stage, as determined from fluid inclusions hosted in type B and D veins in the porphyries, type I to IV veins in the skarns, and type b and c veins in the hornfels. This late boiling event, together with mixing with meteoric water, was responsible for more than 90% of the metal accumulation in the deposit. The first boiling only occurred in the central part of the deposit and the second boiling event took place across an entire interlayered structural zone between hornfels and marble. A spatial zoning of ore-elements is evident, and appears to be related to different migration pathways and precipitation temperatures of Cu, Mo, Pb, Zn, Au and Ag.

Preparation of tube blanks by atomization deposition process

By using the method of mathematical calculation combined with experiment, the technological conditions of atomization deposition process for making tube blanks with even thickness were studied. The results show that in the case of the substrate rotating and translating simultaneously, when the ratio of the rotation frequency to the translational velocity is very large, and the other deposition conditions are suitable, tube blanks with even thickness and high density can be produced, and the actual deposition efficiency will be highest.

Modeling of Deposition Process of Particulate Organic Matter (POM) with Sand on Vegetated Area in a River

The transport and deposition of particulate organic matter (POM) in river streams has recently received much attention as one of important ecological processes in rivers. We focused on interacted behaviors of sand particles in bed load and POM in vegetated area on sand bars. The purpose of this study is to clarify the characteristics of deposition of POM with bed load on sandbars with the riparian vegetation. A basic experiment on POM transport and deposition with vegetation is conducted in a laboratory flume. It demonstrates that several issues still remain to be future investigated. In particular, the shear due to the bed roughness in the vegetated area and the transport and deposition process of sand particles and POM are required to be described by the proper modeling which will be introduced into a simulation model of various fluvial processes. The main results of this study are that ripples are formed by bed load in riparian vegetation and POM deposition is promoted by ripple behavior. Based on these results, the POM deposition with ripples in vegetated area is described by a conceptual model which will affect various aspects in ecosystem management based on fluvial processes.

Numerical Study on Dry Deposition Processes in Canopy Layer

A coupling model between the canopy layer(CL) and atmospheric boundary layer (ABL) for the study of dry deposition velocity is developed. The model consists of six parts: chemical species conservation equation including absorptive factor; the species uptake action including detailed vertical variation of absorptive element in CL; momentum exchange in CL which is represented by a first-order closure momentum equation with an additional larger-scale diffusive term; momentum exchange in ABL which is described by a complete set of the ABL turbulent statistic parameters; absorptivity (or solubility or reflection) at the surface including effects of the physical and chemical characters of the species, land type, seasonal and diurnal variations of the meteorological variables; and deposition velocity derived by distributions of the species with height in CL. Variational rules of the concentration and deposition velocity with both height and time are simulated with the model for both corn and forest canopies. Results predicted with the bulk deposition velocity derived in the paper consist well with experimental data.

Fabrication of superhydrophilic surface on copper substrate by electrochemical deposition and sintering process

Superhydrophilic surfaces were fabricated on copper substrates by an electrochemical deposition and sintering process. Superhydrophobic surfaces were prepared by constructing micro/nano-structure on copper substrates through an electrochemical deposition method. Conversion from superhydrophobic to superhydrophilic was obtained via a suitable sintering process. After reduction sintering, the contact angle of the superhydrophilic surfaces changed from 155° to 0°. The scanning electron microscope （SEM） images show that the morphology of superhydrophobic and superhydrophilic surfaces looks like corals and cells respectively. The chemical composition and crystal structure of these surfaces were examined using energy dispersive spectrometry （EDS） and X-ray diffraction （XRD）. The results show that the main components on superhydrophobic surfaces are Cu, Cu2O and CuO, while the superhydrophilic surfaces are composed of Cu merely. The crystal structure is more inerratic and the grain size becomes bigger after the sintering. The interracial strength of the superhydrophilic surfaces was investigated, showing that the interfacial strength between superhydrophilic layer and copper substrate is considerably high.

Production of HfO_2 thin films using different methods: chemical bath deposition, SILAR and sol–gel process

Hafnium oxide thin films （HOTFs） were successfully deposited onto amorphous glasses using chemical bath deposition, successive ionic layer absorption and reaction （SILAR）, and sol-gel methods. The same reactive precursors were used for all of the methods, and all of the films were annealed at 300℃ in an oven （ambient conditions）. After this step, the optical and structural properties of the films produced by using the three different methods were compared. The structures of the films were analyzed by X-ray diffTaction （XRD）. The optical properties are investigated using the ultraviolet-visible （UV-VIS） spectroscopic technique. The film thickness was measured via atomic force microscopy （AFM） in the tapping mode. The surface properties and elemental ratios of the films were investigated and measured by scanning electron microscopy and energy-dispersive X-ray spectroscopy （EDX）. The lowest transmittance and the highest reflectance values were observed for the films produced using the SILAR method. In addition, the most intense characteristic XRD peak was observed in the diffraction pattern of the film produced using the SILAR method, and the greatest thickness and average grain size were calculated for the film produced using the SILAR method. The films produced using SILAR method contained fewer cracks than those produced using the other methods. In conclusion, the SILAR method was observed to be the best method for the production of HOTFs.

Microstructural evolution and its effects on mechanical properties of spray deposited SiC_p/8009Al composites during secondary processing

15%(volume fraction)SiCp/8009Al metal matrix composites(MMCs)prepared by spray co-deposition were hot-extruded and rolled to investigate the effects of porosity and local SiCp clusters on mechanical properties.The microstructures were examined by using optical microscopy(OM),scanning electron microscopy(SEM),X-ray diffractometry(XRD)and transmission electron microscopy(TEM).The mechanical properties were measured by tensile testing.The experimental results show that lamellar structure is composed of pores and SiCp clusters and can be improved by secondary processing,enhancing mechanical properties. The main strengthening mechanism and fracture behavior of MMCs were discussed too.

Magmatism, Deep Processes and Gold Deposits in Eastern Hebei, China

The eastern Hebei Province of China is one of the major concentrating areas of gold mineralization in eastern China, which is an important part of the circum Pacific magmatic tectonic metallogenic belt. There are three types of gold deposits in terms of the characteristics of host rocks. Jinchangyu type gold deposit is situated in the Archean metamorphic basement. Yuerya type gold deposit occurs within the Yanshanian granite. Lengkou (or Wanzhuang ) type gold deposit is located within the covering strata of the Mesoproterozoic dolomitite. These 3 types of gold deposits are very similar in many respects. These deposits formed at Mesozoic and their spatial distribution is closely related to Yanshanian granite. The mineralization characteristics of these gold deposits are very similar. The characteristics of sulfur isotopic and lead isotopic compositions show that the gold deposits in this area are derived from the mantle and deep crust, and are related to Mesozoic magmatism. The gold deposits in this area are believed to be the products of crust mantle exchange and resulted from multistage gold mineralization. Finally a mineralization model of gold deposit in eastern Hebei of China is proposed.

Dynamics of Ore-Forming Processesof the Stratabound Skarn Copper Depositsof Tongling, Anhui Province

The skarn and ore bodies of the stratabound skarn copper deposits of Tongling, Anhui Province, are both controlled by definite stratigraphic horizons, and they are concordant with the strata. They occur as layers and layer-like bodies in permeable carbonate rocks of the Middle-Upper Carboniferous Huanglong and Chuanshan Formations which are underlain by impermeable shale or siliceous rocks of the Upper Devonian Wutong Formation. The authors study the dynamics of ore-forming processes of the ore deposits with the dynamic model of coupled transport and reaction, and the following results are obtained: The salinity gradient and flow rate of the ore-forming fluids can both promote the mixing and reaction of juvenile water and formation water, and the permeable strata are favourable sites for the intense transport-reaction of mixing and the formation of deposits. (2) As isothermal transport-reaction took place along the bedding of strata, the moving transport-reaction front formed at the contact between the ore-forming fluids and the rocks advanced slowly along the permeable strata, and then stratiform skarn and ore bodies concordant with the strata were formed. (3) The gradient transport-reaction taking place across the isotherms in the cross-bedding direction caused the mineralogical composition to alter gradually from magnesian skarn to sulphide ore bodies.

The Genesis Mechanism of the Mantle Fluid Action and Evolution in the Ore-Forming Process: A Case Study of the Laowangzhai Gold Deposit in Yunnan, China

Based on petrological studies of the wall rocks, mineralizing rocks, ores and veins from the Laowangzhai gold deposit, it is discovered that along with the development of silication, carbonation and sulfidation, a kind of black opaque ultra-microlite material runs through the spaces between grains, fissures and cleavages. Under observations of the electron microprobe, scanning electronic microscopy and energy spectrum, this kind of ultra-microlite material is confirmed to consist of ultra microcrystalline quartz, silicate, sulfides and carbonates, as well as rutile, scheelite and specularite （magnetite）, showing characters of liquation by the analyses of SEM and energy spectrum. The coexistence of immiscibility and precipitating co-crystallization strongly suggests that the mineralizing fluid changed from the melt to the hydrothermal fluid. Combined with the element geochemical researches, it is realized that the ultra-microlite aggregate is the direct relics of the mantle fluid behaving like a melt and supercritical fluid, which goes along with the mantle-derived magma and will escape from the magma body at a proper time. During the alteration process, the nature of the mantle fluid changed and it is mixed with the crustal fluid, which are favorable for mineralization in the Loawangzhai gold deposit.

四川盆地北部砂岩型铀矿岩石学特征及矿床成因研究

【研究目的】铀资源是中国重要的战略资源和能源矿产,为更好地勘探和开发四川盆地北部砂岩型铀矿,有必要深入了解其地质特征和成矿模式。【研究方法】本文通过野外调查、岩矿鉴定和地球化学分析研究了砂岩型铀矿的岩石学特征,分析了其成矿过程。【研究结果】含矿主岩主要为下白垩统苍溪组钙质胶结中—细粒砂岩和砾岩。铀以自生铀矿物的形式存在,铀矿物主要为铀石,呈他形、半自形和自形柱状。【结论】米仓山铁船山组变质酸性火山岩和花岗岩为盆地砂岩型铀矿的形成提供了初始铀源。铀在水溶液中以碳酸铀酰离子的形式迁移,富含有机质和黄铁矿的沼泽和停滞水还原环境破坏了碳酸铀酰离子,使铀元素以沉积成岩为主局部叠加后生富集作用成矿。

The Metallogenetic Processes and Environment of a Large Ag-V Deposit in Black Rock Series

Located in Western Hubei Province,this deposit is a large-scale Ag-V ore deposit,listed among the fifth type of silver deposit in China.1 Geological Characteristics It lies in the NE sector of the Yangtze flat of the Yangtze paraplatform.There are sporadically magmatic rocks and fold basement made up of upper Archaeozoicmiddle and lower Proterozoic strata.The sedimentary cover consists of Sinian-lower Paleozoic marine sediments,Mesozoic-Cenozoic intercalated marine and nonmarine sediments or nonmarine sediments.