This paper introduces the design and manu- facturing technology of aerospace microelectromechanical systems （MEMS） characterized by high performance, multi-variety, and small batch. Moreover, several kinds of specia...This paper introduces the design and manu- facturing technology of aerospace microelectromechanical systems （MEMS） characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.展开更多
文摘This paper introduces the design and manu- facturing technology of aerospace microelectromechanical systems （MEMS） characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.
