Simulation research on surface growth process of positive and negative frequency detuning chromium atom lithographic gratings

Chromium atom photolithography gratings are a promising technology for the development of nanoscale length standard substances due to their high accuracy,uniformity,and consistency.However,the inherent difference between the interaction of positive and negative frequency detuning standing wave field and the atoms can cause a difference in the adjacent peak-to-valley heights of the grating in positive and negative frequency detuning chromium atom lithography,which greatly reduces its accuracy.In this study,we performed a controlled variable growth simulation using the semi-classical theoretical model and Monte Carlo method with trajectory tracking and ballistic deposition methods to investigate the influence of key experimental parameters on the surface growth process of positive and negative frequency detuning atomic lithography gratings.We established a theoretical model based on simulation results and summarized empirical equations to guide the selection of experimental parameters.Our simulations achieved uniform positive and negative frequency detuning atomic lithography gratings with a period of 1/4 of the wavelength corresponding to the atomic transition frequency,and adjacent peak-to-valley heights differing by no more than 2 nm,providing an important theoretical reference for the controllable fabrication of these gratings.

Frequency sensitivity of the passive third harmonic superconducting cavity for SSRF

A 1.5 GHz passive third harmonic superconducting cavity was proposed to improve the beam quality and lifetime in the Shanghai Synchrotron Radiation Facility Phase-II beamline project.Lifetime improvement highly depends on the resonant frequency of the passive third harmonic superconducting cavity.It is important that the operating frequency of the cavity is within the design range and the cavity has reasonable mechanical stability.A simulation method for the multiphysics coupled analysis has been developed based on the ANSYS code.Multiphysics coupled simulations have been performed under different conditions,such as etching,evacuation,cooling,and preloading.Analyses of mechanical modes and structural stress have been executed.A possible stiffening ring method for the two-cell superconducting niobium cavity has been investigated.In this paper,we present a multiphysics coupled analysis of the third harmonic cavity using a finite element analysis code.The results of the analysis show that a reliable frequency for the cavity after electron beam welding is 1498.033 MHz,and the corresponding frequency of the pre-tuning goal is 1496.163 MHz.A naked cavity is a reasonable option based on structural stress and mechanical modal analyses.A frequency range of±500 kHz and limiting tolerable displacement of±0.35 mm are proposed for the design of the frequency tuner.