A can0nical problem is investigated for high frequency electromagnetic radiation from amonopo1e on a conducting cylinder with c0ating-At first, the exact solution of this problem is given interms of Dyadic Green's...A can0nical problem is investigated for high frequency electromagnetic radiation from amonopo1e on a conducting cylinder with c0ating-At first, the exact solution of this problem is given interms of Dyadic Green's function method. Then, using Watson transformation and high frequency asymptotic approximate technique to the exact soluton, a UTD soultion is obtained. The radiation field excitedby a monopole is expressed in terms of the compound Fock' S functions (CFF), which reduce to the geomertrical optics result in the deep lit region and the creeping waves in the shadow region.展开更多
Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon ox...Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon oxide etch and strip,are contained.To acquire good performance,such as low leakage current and high capacitance,for further fabricating capacitors,we should firstly optimize DARC etch back.We developed some experiments,focusing on etch time and chemistry,to evalu-ate the profile of a silicon oxide mask,DARC remain and critical dimension.The result shows that etch back time should be con-trolled in the range from 50 to 60 s,based on the current equipment and condition.It will make B/T ratio higher than 70%mean-while resolve the DARC remain issue.We also found that CH_(2)F_(2) flow should be~15 sccm to avoid reversed CD trend and keep in-line CD.展开更多
An ultra-wideband pattern reconfigurable antenna is proposed.The antenna is a dielectric coaxial hollow monopole with a cylindrical graphene-based impedance surface coating.It consists of a graphene sheet coated onto ...An ultra-wideband pattern reconfigurable antenna is proposed.The antenna is a dielectric coaxial hollow monopole with a cylindrical graphene-based impedance surface coating.It consists of a graphene sheet coated onto the inner surface of a cylindrical substrate and a set of independent polysilicon DC gating pads mounted on the outside of the cylindrical substrate.By changing the DC bias voltages to the different gating pads,the surface impedance of the graphene coating can be freely controlled.Due to the tunability of graphene＇s surface impedance,the radiation pattern of the proposed antenna can be reconfigured.A transmission line method is used to illustrate the physical mechanism of the proposed antenna.The results show that the proposed antenna can reconfigure its radiation pattern in the omnidirectional mode with the relative bandwidth of 58.5% and the directional mode over the entire azimuth plane with the relative bandwidth of 67%.展开更多
文摘A can0nical problem is investigated for high frequency electromagnetic radiation from amonopo1e on a conducting cylinder with c0ating-At first, the exact solution of this problem is given interms of Dyadic Green's function method. Then, using Watson transformation and high frequency asymptotic approximate technique to the exact soluton, a UTD soultion is obtained. The radiation field excitedby a monopole is expressed in terms of the compound Fock' S functions (CFF), which reduce to the geomertrical optics result in the deep lit region and the creeping waves in the shadow region.
文摘Opening the silicon oxide mask of a capacitor in dynamic random access memory is a critical process on a capacitive coupled plasma(CCP)etch tool.Three steps,dielectric anti-reflective coating(DARC)etch back,silicon oxide etch and strip,are contained.To acquire good performance,such as low leakage current and high capacitance,for further fabricating capacitors,we should firstly optimize DARC etch back.We developed some experiments,focusing on etch time and chemistry,to evalu-ate the profile of a silicon oxide mask,DARC remain and critical dimension.The result shows that etch back time should be con-trolled in the range from 50 to 60 s,based on the current equipment and condition.It will make B/T ratio higher than 70%mean-while resolve the DARC remain issue.We also found that CH_(2)F_(2) flow should be~15 sccm to avoid reversed CD trend and keep in-line CD.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61661012,61461016,and 61361005)the Natural Science Foundation of Guangxi,China(Grant Nos.2015GXNSFBB139003 and 2014GXNSFAA118283)+1 种基金Program for Innovation Research Team of Guilin University of Electromagnetic Technology,Chinathe Dean Project of Guangxi Key Laboratory of Wireless Wideband Communication and Signal Processing,China
文摘An ultra-wideband pattern reconfigurable antenna is proposed.The antenna is a dielectric coaxial hollow monopole with a cylindrical graphene-based impedance surface coating.It consists of a graphene sheet coated onto the inner surface of a cylindrical substrate and a set of independent polysilicon DC gating pads mounted on the outside of the cylindrical substrate.By changing the DC bias voltages to the different gating pads,the surface impedance of the graphene coating can be freely controlled.Due to the tunability of graphene＇s surface impedance,the radiation pattern of the proposed antenna can be reconfigured.A transmission line method is used to illustrate the physical mechanism of the proposed antenna.The results show that the proposed antenna can reconfigure its radiation pattern in the omnidirectional mode with the relative bandwidth of 58.5% and the directional mode over the entire azimuth plane with the relative bandwidth of 67%.
