Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device

Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and?photon-induced curing behavior of resin. This technology provides an accurate micro-fabrication of microstructures used for micro-systems. As a virtual mask generator and a binary-amplitude spatial light modulator, DMD is equivalent to the masks in the conventional exposure system. As the virtual masks and shaped laser beam can be achieved flexibly, it is a good method of precision soft lithography for 2D/3D microstructures.

Dynamic full-color digital holographic 3D display on single DMD

Digital holography has high potentials for future 3D imaging and display technology.We present a method for a dynamic full-color digital holographic 3D display on single digital micro-mirror device(DMD)with full-color,high-speed and high-fidelity characteristics.We combine the square regions of adjacent micro-mirrors into super-pixels that can modulate amplitude and phase independently.Gray images are achieved by amplitude modulation and precise positioning of each color is achieved by phase modulation.The proposed method realizes a full-color imaging based on the three primary colors and achieves measured structural similarity of more than 88%and color similarity of more than 98%,while retaining the high switch speed of 9 kHz,thus achieving dynamic full-color 3D display on charge-coupled device(CCD).

Dynamic infrared scene simulation using grayscale modulation of digital micro-mirror device

Dynamic infrared scene simulation is for discovering and solving the problems encountered in designing, developing and manufacturing infrared imaging guidance weapons. The infrared scene simulation is explored by using the digital grayscale modulation method. The infrared image modulation model of a digital micro-mirror device （DMD） is established and then the infrared scene simulator prototype which is based on DMD grayscale modulation is developed. To evaluate its main parameters such as resolution, contrast, minimum temperature difference, gray scale, various DMD subsystems such as signal decoding, image normalization, synchronization drive, pulse width modulation （PWM） and DMD chips are designed. The infrared scene simulator is tested on a certain infrared missile seeker. The test results show preliminarily that the infrared scene simulator has high gray scale, small geometrical distortion and highly resolvable imaging resolution and contrast and yields high-fidelity images, thus being able to meet the requirements for the infrared scene simulation inside a laboratory.

Compressed sensing reconstruction of sparse spectrum based on digital micro-mirror device platform

A new method which employs compressive sensing(CS) to reconstruct the sparse spectrum is designed and experimentally demonstrated. On the basis of CS theory, the simulation results indicate that the probability of reconstruction is high when the step of the sparsity adaptive matching pursuit algorithm is confirmed as 1. Contrastive analysis for four kinds of commonly used measurement matrices: part Hadamard, Bernoulli, Toeplitz and Circular matrix, has been conducted. The results illustrate that the part Hadamard matrix has better performance of reconstruction than the other matrices. The experimental system of the spectral compression reconstruction is mainly based on the digital micro-mirror device(DMD). The experimental results prove that CS can reconstruct sparse spectrum well under the condition of 50% sampling rate. The system error 0.0781 is obtained, which is defined by the average value of the 2-norm. Furthermore, the proposed method shows a dominant ability to discard redundancy.

数字微镜哈达玛光谱仪谱线弯曲的分析与修正

由于数字微镜（digital micro-mirror device,DMD）哈达玛变换光谱仪其成本低,光能利用率高及无运动部件等优势,逐渐成为光谱仪领域的研究重点。研制了一款基于DMD的哈达玛变换光谱仪。为了解决光谱仪谱线弯曲造成的光谱分辨率下降的问题,对基于DMD的哈达玛变换光谱仪中的谱线弯曲所引起的谱带混叠进行了分析。首先,导出了谱带混叠与谱线弯曲的关系式。然后,提出了两个过程来解决谱带混叠,一是通过调整DMD编码条纹,使DMD所编码的谱带最大限度地与标准谱带重合;二是通过数据处理对谱带混叠进行修正。最后,通过对谱线曲率半径为5.8×10~4,7.8×10~4和9.7×10~4μm等六种情况下谱带混叠进行了分析与修正,拟合出光谱混叠和修正效果与谱线曲率半径的关系。结果表明：对于不同程度的谱线弯曲经过这两个过程修正后,分辨率都会改善到接近光学系统的分辨率,说明这两个过程对修正谱线弯曲具有普适性、并且方法简单、有效。

Proof-of-principle experimental demonstration of quantum secure imaging based on quantum key distribution

We present a quantum secure imaging(QSI) scheme based on the phase encoding and weak+vacuum decoy-state BB84 protocol of quantum key distribution(QKD). It allows us to implement a computational ghost imaging(CGI) system with more simplified equipment and reconstructed algorithm by using a digital micro-mirror device(DMD) to preset the specific spatial distribution of the light intensity. What is more, the quantum bit error rate(QBER) and the secure key rate analytical functions of QKD are used to see through the intercept-resend jamming attacks and ensure the authenticity of the imaging information. In the experiment, we obtained the image of the object quickly and efficiently by measuring the signal photon counts with a single-photon detector(SPD), and achieved a secure key rate of 571.0 bps and a secure QBER of 3.99%, which is well below the lower bound of QBER of 14.51%. Besides, our imaging system uses a laser with invisible wavelength of 1550 nm, whose intensity is as low as single-photon, that can realize weak-light imaging and is immune to the stray light or air turbulence, thus it will become a better choice for quantum security radar against intercept-resend jamming attacks.

Generation and Display System of Measurement Matrix Based on DMD

A measurement matrix is the key to sampling and signal reconstruction during the process of compressed sensing.On the basis of digital light processing(DLP)technology,ageneration and display system of measurement matrix based on digital micro-mirror device(DMD)is proposed and well designed.In this system,the generation and controlling of measurement matrix are implemented on a PC,which reduces the hardware requirement to generate a random matrix and overcomes the difficulty of the hardware implementation for the random matrix.It can set up the display number of the measurement matrix,the mode of display and display time according to the requirements from users.The display information can be designed to complete the display of measurement matrix with a better adaptability.The system can be easily embedded into a variety of compressed sensing applications,which can be used to generate and display the corresponding measurement matrice with strong portability.In addition,the DMD of this system will be used as a spatial optical modulator to manipulate near-infrared light in a fast,accurate and efficient way in several applications such as in 3D scanning devices and spectrometers.

Improving seeking precision by utilizing ghost imaging in a semi-active quadrant detection seeker

Conventional semi-active laser guidance takes advantage of the laser designator to illuminate the stable and uniform laser spot on target precisely.The seeker collects the reflected light by a quadrant detector and outputs the relative position information to guide the missile to the illuminating laser spot.However,the designation and guidance accuracy could be jeopardized by the randomly drifting of laser spot caused by the instability of designation platform and air turbulence.In this work,ghost imaging technique is adapted to a quadrant detector semi-active seeker by utilizing structured illumination on the target.With a series of structured illumination masks,the signals from the quadrant detector are multiplexed to perform calculation of the target relative position as well as image reconstruction of the illuminated area simultaneously.Automatic target recognition methods could be further applied to the reconstructed image to calculate the designating error and correct the guidance.The results of simulation and experiment demonstrate that the proposed method could improve the guidance accuracy in many circumstances which would lead to attacking deviation if conventional semi-active laser guidance is used.