The Effect of Discharge Power on the Atmospheric Pressure Non-equilibrium Ar/O_2/TiCl_4 Plasma Deposition of TiO_2 Film

Deposition of TiO2 film from atmospheric pressure non- equilibrium Ar/O2/TiCl4 plasma was done to study the effect of discharge power during the film deposition process in this paper. TiO2 films with kinds of morphologies and controlled crystallization were deposited from mixtures of TiCl4 and O2 on quartz substrate by one step process. Scanning electron microscope （SEM） and transmission electron microscope （TEM） were used to analyze the morphology and crystallization of the deposited TiO2 films. It was found that the discharge power played a key role in the morphology and crystallization of the deposited TiO2 film whether the flow of TiCl4was large or small. When the flow of TiCl4 was large, the deposited TiO2 film was amorphous particles at low discharge power and was multi-crystalline at high discharge power. When the flow of TiCl4 was small, the deposited TiO2 film became more compact and the crystallization was enhanced as the discharge power increased. The dependence of the discharge current and the applied voltage with the discharge power indicated that it was a glow discharge. The gas temperature which increases with the discharge power is one of the main causes that affect the morphology and crystallization of the deposited film.

Origin of Initial Current Peak in High Power Impulse Magnetron Sputtering and Verification by Non-Sputtering Discharge

A non-sputtering discharge is utilized to verify the effect of replacement of gas ions by metallic ions and consequent decrease in the secondary electron emission coefficient in the discharge current curves in high-power impulse magnetron sputtering （HiPIMS）. In the non-sputtering discharge involving hydrogen, replacement of ions is avoided while the rarefaction still contributes. The initial peak and ensuing decay disappear and all the discharge current curves show a similar feature as the HiPIMS discharge of materials with low sputtering yields such as carbon. The results demonstrate the key effect of ion replacement during sputtering.

A comparison of power measurement techniques and electrical characterization of an atmospheric pressure plasma jet

In the last two decades a growing interest has been shown in the investigation of atmospheric pressure plasma jets(APPJs)that operate in contact with liquid samples.In order to form a complete picture about such experimental systems,it is necessary to perform detailed diagnostics of plasma jets,as one step that will enable the adjustment of system properties for applications in different areas.In this work,we conducted a detailed electrical characterisation of a plasma system configuration used for water treatment.A helium plasma jet,with a pin electrode powered by a continuous sine wave at a frequency of 330 k Hz,formed a streamer that was in contact with a distilled water sample.An electrical circuit allowed the monitoring of electrical signals supplied to the jet and also to the plasma itself.An electrical characterisation together with power consumption measurements was obtained by using two different methods.The first method was based on the direct measurements of voltage and current signals,while in the second method we used'Lissajous figures'.We compared these two methods when used for discharge power estimation and addressed their advantages and limitations.The results showed that both of these methods could be used to successfully determine power consumed by a discharge in contact with water,but only when taking into account power dissipation without plasma.

Feedback model of secondary electron emission in DC gas discharge plasmas

Feedback is said to exist in any amplifier when the fraction of output power in fed back as an input.Similarly,in gaseous discharge ions that incident on the cathode act as a natural feedback element to stabilize and self sustain the discharge.The present investigation is intended to emphasize the feedback nature of ions that emits secondary electrons（SEs）from the cathode surface in DC gas discharges.The average number of SEs emitted per incident ion and non ionic species（energetic neutrals,metastables and photons）which results from ion is defined as effective secondary electronemission coefficient（ESEEC,Eg）.In this study,we derive an analytic expression that corroborates the relation betweenEg and power influx by ion to the cathode based on the feedback theory of an amplifier.In addition,experimentally,we confirmed the typical positive feedback nature of SEEfrom the cathode in argon DC glow discharges.The experiment is done for three different cathode material of same dimension（tungsten（W）,copper（Cu）and brass）under identical discharge conditions（pressure：0.45 mbar,cathode bias：-600 V,discharge gab：15 cm and operating gas：argon）.Further,we found that theEg value of these cathode material controls the amount of feedback power given by ions.The difference in feedback leads different final output i.e the power carried by ion at cathode（Pi C￠∣）.The experimentally obtained value of Pi C￠∣is 4.28 W,6.87 W and9.26 W respectively for W,Cu and brass.In addition,the present investigation reveals that the amount of feedback power in a DC gas discharges not only affect the fraction of power fed back to the cathode but also the entire characteristics of the discharge.

Comparison of dry reforming of methane in low temperature hybrid plasma-catalytic corona with thermal catalytic reactor over Ni/γ-Al_2O_3

In the current study, the hybrid effect of a corona discharge and γ-alumina supported Ni catalysts in CO2 reforming of methane is investigated. The study includes both purely catalytic operation in the temperature range of 923-1023 K, and hybrid catalytic-plasma operation of DC corona discharge reactor at room temperature and ambient pressure. The effect of feed flow rate, discharge power and Ni/γ-Al2O3 catalysts are studied. When CH4/CO2 ratio in the feed is 1/2, the syngas of low Ha/CO ratio at about 0.56 is obtained, which is a potential feedstock for synthesis of liquid hydrocarbons. Although Ni catalyst is only active above 573 K, presence of Ni catalysts in the cold corona plasma reactor （T≤523 K） shows promising increase in the conversions of methane and carbon dioxide. When Ni catalysts are used in the plasma reaction, H2/CO ratios in the products are slightly modified, selectivity to CO increases whereas fewer by-products such as hydrocarbons and oxygenates are formed.

Experimental investigation of effects of airflows on plasma-assisted combustion actuator characteristics

The effects of the airflow on plasma-assisted combustion actuator （PACA） characteristics are studied in detail. The plasma is characterized electrically, as well as optically with a spectrometer. Our results show that the airflow has an obvious influence on the PACA characteristics. The breakdown voltage and vibrational temperature decrease, while the discharge power increases compared with the stationary airflow. The memory effect of metastable state species and the transportation characteristics of charged particles in microdischarge channel are the dominant causes for the variations of the breakdown voltage and discharge power, respectively, and the vibrational temperature calculated in this work can describe the electron energy of the dielectric barrier discharge plasma in PACA. These results offer new perspectives for the use of PACA in plasma-assisted combustion.

Soft switching circuit to improve efficiency of all solid-state Marx modulator for DBDs

For an all solid-state Marx modulator applied in dielectric barrier discharges（DBDs）,hard switching results in a very low efficiency.In this paper,a series resonant soft switching circuit,which series an inductance with DBD capacitor,is proposed to reduce the power loss.The power loss of the all circuit status with hard switching was analyzed,and the maximum power loss occurred during discharging at the rising and falling edges.The power loss of the series resonant soft switching circuit was also presented.A comparative analysis of the two circuits determined that the soft switching circuit greatly reduced power loss.The experimental results also demonstrated that the soft switching circuit improved the power transmission efficiency of an all solid-state Marx modulator for DBDs by up to 3 times.